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1. 发明专利

JPH0954101A SCANNING NEAR FIELD OPTICAL MICROSCOPE 失效
公开(公告)号：JPH0954101A
公开(公告)日：1997-02-25
申请号：JP22854095
申请日：1995-08-14
申请人： NIKON CORP
发明人： OKIGUCHI KEIKO , OSAWA HISAO
IPC分类号： G01N37/00 , G01Q60/18 , G02B21/00
摘要： PROBLEM TO BE SOLVED: To obtain only the shape information on sample and the optical information on the separated sample and to prevent the drop of SN ratio and such a situation that the sample cannot be measured with a light with a desired wavelength. SOLUTION: A cantilever 1 is bent according to the atomic force working between a probe 2 and the surface of a sample 20. The bending quantity is converted into a resistance value through a PZT film 12 formed on the cantilever 1, and a signal corresponding thereto is outputted from a detection part 22. The cantilever 1 is moved in Z direction so that the bending quantity may become constant, and it is further moved so that the probe 2 may scan the surface of the sample in X and Y directions. An optical detection part 30 detects an evanescent wave reflecting on the surface of the sample 20. A processing part 23 takes in each control signal from a control part 23 and detection signal from the detection part 30, so as to obtain both optical information and shape information of the sample 20.

2. 发明专利

JPH1026628A CAPILLARY AND MANUFACTURE THEREOF AND SCANNING NEAR-FIELD MICROSCOPE 失效
公开(公告)号：JPH1026628A
公开(公告)日：1998-01-27
申请号：JP18083596
申请日：1996-07-10
申请人： NIKON CORP
发明人： OKIGUCHI KEIKO , SUGIMURA HIROYUKI
IPC分类号： G01B11/30 , G01N37/00 , G01Q60/22
摘要： PROBLEM TO BE SOLVED: To achieve the perfect flare stop with the intended aperture being provided excellently by forming a metal film on the inner surface of the pit part at least in a capillary, which is formed in the taper shape, whose end part is in the tapered shape, and wherein the main part is formed in a tubular shape. SOLUTION: A probe 50 of a scanning near-field microscope is formed by heating a hollow glass tube and pulling the tube in the axial direction. At this time, the aperture of an opening 50A of a tip part 50B is formed as the intended aperture R0. On an inner wall 50E of the probe 50, a metal film 51 having a film thickness (d) more than the specified value is formed. Furthermore, the metal film 51 is formed of silver, aluminum and the like having the high reflectivity in the wavelength region when the light illuminated from a light source is in the visible light region. When the light irradiated from the light source is out of the infrared region, the film 51 is formed of gold, copper and the like having the high reflecticity in the wavelength region.

3. 发明专利

JPH0954097A SCANNING PROBE MICROSCOPE 失效
公开(公告)号：JPH0954097A
公开(公告)日：1997-02-25
申请号：JP22853995
申请日：1995-08-14
申请人： NIKON CORP
发明人： OKIGUCHI KEIKO , OSAWA HISAO
IPC分类号： G01N37/00 , G01Q10/02 , G01Q60/18 , G01Q90/00 , G02B21/00
摘要： PROBLEM TO BE SOLVED: To enable a probe to approach the surface of a sample at a high speed and to eliminate the possibility of the probe colliding with the sample. SOLUTION: A sample stage 1 is formed by a quartz oscillator. A circuit 6, together with the sample stage 1, constitutes a quartz oscillator circuit and causes the sample stage 1 to oscillate at a resonance frequency represented by the formula F0 =f0 +Δf0 . Using a reference frequency oscillator 7, a mixer 8, a low-pass filter 9, and an F/V converter 10, a voltage signal at a level proportional to an amount of change Δf from the resonance frequency f0 when a probe 2 has moved away can be obtained from the output of the F/V converter 10. A control part 11 controls a probe drive 3 so that the probe 2 approaches the sample in response to a command from an operating part 12. The control part 11 stops the operation of the probe drive 3 when the level of a signal output from the F/V converter 10 has reached a predetermined level.

4. 发明专利

JPH07167933A MAGNETIC POLARIZATION MICROSCOPE 失效
公开(公告)号：JPH07167933A
公开(公告)日：1995-07-04
申请号：JP31510093
申请日：1993-12-15
申请人： NIKON CORP
发明人： OKIGUCHI KEIKO , OKANE TOSHIMITSU
IPC分类号： G01R33/032 , G01N21/21 , G01N37/00 , G01Q60/00 , G01Q60/02 , G01R33/12 , G02B21/00
摘要： PURPOSE:To provide a magnetic polarization microscope which can sense the magnetized condition on the surface of a specimen with a high resolution and high sensitivity. CONSTITUTION:A magnetic polarization microscope comprises a probe 1 whose surface is partially made of a magnetic substance, a magneto-optical effect measuring means 100 to measure the Kerr effect in the magnetic substance to which the magnetized condition of the specimen surface is transcribed, an assisting means for measuring 200 for sensing a weak signal indicating the measured Ke effect with a high S/N, a scanning means 300 to displace the measuring position by displacing the relative position of the probe 1 and specimen 2, and a drawing processing device 400 which calculates the magnetized condition of the probe 1 on the basis of the mentioned signal given by the means 200 and which computes the magnetized condition of the specimen 2 surface, followed by displaying, from the result from calculating and the measuring position displaced by the scanning means 300.

5. 发明专利

JPH10104245A MINUTE DISPLACEMENT MEASURING DEVICE 失效
公开(公告)号：JPH10104245A
公开(公告)日：1998-04-24
申请号：JP25567996
申请日：1996-09-27
申请人： NIKON CORP
发明人： OKIGUCHI KEIKO , OSAWA HISAO
IPC分类号： G01B11/00 , G01B21/30 , G01C3/06 , G01N37/00 , G01Q20/02 , G01Q60/24
摘要： PROBLEM TO BE SOLVED: To provide a minute displacement measuring device which can automatically adjust laser alignment of a cantilever displacement detection means of optical lever type. SOLUTION: This device 1 (atomic force microscope) has a cantilever 7 having a probe 9 which probes a surface of a sample 11 and a displacement detection means of optical lever type which detects displacement of the cantilever 7. This optical lever type displacement detection means is provided with a laser beam scanning means (acoustic to optical modulator 24) which scans a laser beam 23. A position where incident laser beam 31 hits on the cantilever 7 is adjusted so that the intensity of reflected light detected by a photodetector 35 becomes the maximum intensity.

6. 发明专利

JPH0954103A PROBE AND ITS MANUFACTURE, AND SCANNING PROBE MICROSCOPE USING THE PROBE 失效
公开(公告)号：JPH0954103A
公开(公告)日：1997-02-25
申请号：JP14747596
申请日：1996-06-10
申请人： NIKON CORP
发明人： OKIGUCHI KEIKO , OSAWA HISAO
IPC分类号： G01B21/30 , G01N37/00 , G01Q60/00 , G01Q60/20 , G01Q60/22 , G01Q60/24 , H01J37/28
摘要： PROBLEM TO BE SOLVED: To obtain a probe and a scanning probe microscope using it by which both informations on the shape and optical properties of sample surface are detected at the same time and the informations can be obtained separately. SOLUTION: The microscope is provided with a fluorescent material sealing member 3, a probe connected with the member 3 through the reaction of an organic substance adhering to the member 3 and an organic substance adhering to the tip end thereof, a cantilever 2 provided with a probe on one end thereof, and a light source 5 for emitting a light with a wavelength for exciting a fluorescent material. Further, it is provided with an optical detector 7 for detecting radiated lights from a sample 4 while the sample 4 is irradiated by evanescent waves emitted from the member 3, detection means 1 and 8 which detect the state of the cantilever 2 and a force generating between the probe and sample 4, moving means 10 and 11 for changing the positions of the probe and sample 4 relatively, and a signal processing means 13 for processing information.

7. 发明专利

JPH0954098A SCANNING PROBE MICROSCOPE 失效
公开(公告)号：JPH0954098A
公开(公告)日：1997-02-25
申请号：JP22854195
申请日：1995-08-14
申请人： NIKON CORP
发明人： OKIGUCHI KEIKO , ISHIKAWA MIYUKI , SUGIMURA HIROYUKI , NAKAGIRI NOBUYUKI
IPC分类号： G01N37/00 , G01Q30/10 , G01Q30/14 , G01Q60/24 , G01Q90/00 , G02B21/00
摘要： PROBLEM TO BE SOLVED: To enable a sample to be observed in liquid using a submerged cell that is open on its upper side and to prevent the accuracy of detecting deflection of a cantilever equipped with a probe from decreasing even if a deflection detecting optical system is used in detecting it. SOLUTION: A submerged cell 32 is made from a transparent material. A sample holder 34 is placed so that a sample 33 is immersed in a liquid 31 while the surface to be observed of the sample 33 faces down. A cantilever 35 has a probe 35a and is placed so that the probe 35a faces upward to be opposed to the surface to be observed of the sample 33. A light source 38 and a photodetector 39 are placed on the side of the submerged cell 32 to constitute a deflection detecting optical system for detecting deflection of the cantilever 35. Illuminating light applied to the cantilever 35 from the light source 38 and the light reflected from the cantilever 35 are not allowed to pass through the surface 31a of the liquid.

8. 发明专利

JPH06337261A SCANNING PROBE MICROSCOPE 失效
公开(公告)号：JPH06337261A
公开(公告)日：1994-12-06
申请号：JP31515193
申请日：1993-12-15
申请人： NIKON CORP
发明人： OKIGUCHI KEIKO
IPC分类号： G01N27/87 , G01N37/00 , G01Q20/02 , G01Q60/00 , G01Q60/50 , G01R33/032 , G01R33/10 , G01R33/12
摘要： PURPOSE:To measure the magnetic field distribution of a sample accurately with high resolution. CONSTITUTION:A probe 2 comprising a magnetic body is brought into contact with the surface of a sample 1 for the purpose of scanning and the state of magnetization is transferred from the sample to the magnetic body at the contact point. The magnetic body is then irradiated with linear polarized laser beam 3 emitted from a light source 10 and the reflection light is received by a light receiving means 5 through a linear polarizing plate. The state of magnetization thus transferred is detected according to magnetooptic effect, i.e., Kerr effect. A control means 6 drives a driving means 7 to scan the surface of sample with the probe and intensity information is detected from Kerr rotation. A processing means 8 renders the contact position between the sample and the probe to correspond with the detection result thereat thus determining the field distribution.

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