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1. 发明专利

JPH07174514A APPARATUS FOR DETECTING OPTICAL DISPLACEMENT 失效
公开(公告)号：JPH07174514A
公开(公告)日：1995-07-14
申请号：JP26290194
申请日：1994-10-26
申请人： NIKON CORP
发明人： MIYASHITA MASAYUKI , ISHIKAWA MIYUKI
IPC分类号： G01B11/00 , G01B21/30 , G01N37/00 , G01Q30/04 , G01Q60/24 , G01Q90/00
摘要： PURPOSE:To provide an apparatus for detecting optical displacement, which performs the position setting and adjusting work of a detector readily and quickly, by performing electrical correction so that the position of an optical spot becomes the central position of the light receiving surface, which is divided into four parts. CONSTITUTION:The laser light emitted from a laser light source 5 is arranged so that the light is received by a detector, wherein the light receiving region is divided into four parts through a mirror 4. The received light is connected to a correcting means 21 through a signal processing means 17. The correcting means 21 is one for electrically correcting the deviation of the position of the optical spot from the central position on the detector for receiving the optical beam, and consists of an operating part 18, a memory means 19 and a measurement control means 20. A material to be measured is scanned with a driving control means 13 when the material to be measured is measured. The up-and- down displacement and the distortion displacement of a cantilever provided in a probe can be detected. The measurement of the displacement of the cantilever in correspondence with the material to be measured is performed by this arrangement.

2. 发明专利

JPH08327634A CANTILEVER, HEATER EMPLOYING IT, AND HEATING/SHAPE MEASURING APPARATUS EMPLOYING IT 失效
公开(公告)号：JPH08327634A
公开(公告)日：1996-12-13
申请号：JP2207896
申请日：1996-01-12
申请人： NIKON CORP
发明人： ISHIKAWA MIYUKI , KONUKI TETSUJI , SUZUKI YOSHIHIKO
IPC分类号： G01B21/30 , G01N37/00 , G01Q30/10 , G01Q90/00
摘要： PURPOSE: To heat a micro area on the surface of a sample locally by providing a heating element for heating the forward end part of a probe disposed at the tip of a cantilever. CONSTITUTION: The cantilever comprises a support 1, a flexible plate 2 being supported by the support 1 at one end thereof, a probe 3 disposed at the tip thereof, and a heating element 4 for heating the forward end part thereof. The heating element 4 is formed of Alumel, Chromel or Nichrome, in hair pin shape at the circumferential part of the probe 3 on the plate 2. A wiring pattern 10 to be connected with the heating element 4 is formed on the plate 2 and connected with an electrode pattern 11 on the support 1. The probe 3 is pointed and brought into contact with the surface of sample or brought extremely close thereto in order to locally heat a micro area on the order of atomic of molecular dimensions on the surface. Consequently, the active state of organism can be observed in detail.

3. 发明专利

JPH0954098A SCANNING PROBE MICROSCOPE 失效
公开(公告)号：JPH0954098A
公开(公告)日：1997-02-25
申请号：JP22854195
申请日：1995-08-14
申请人： NIKON CORP
发明人： OKIGUCHI KEIKO , ISHIKAWA MIYUKI , SUGIMURA HIROYUKI , NAKAGIRI NOBUYUKI
IPC分类号： G01N37/00 , G01Q30/10 , G01Q30/14 , G01Q60/24 , G01Q90/00 , G02B21/00
摘要： PROBLEM TO BE SOLVED: To enable a sample to be observed in liquid using a submerged cell that is open on its upper side and to prevent the accuracy of detecting deflection of a cantilever equipped with a probe from decreasing even if a deflection detecting optical system is used in detecting it. SOLUTION: A submerged cell 32 is made from a transparent material. A sample holder 34 is placed so that a sample 33 is immersed in a liquid 31 while the surface to be observed of the sample 33 faces down. A cantilever 35 has a probe 35a and is placed so that the probe 35a faces upward to be opposed to the surface to be observed of the sample 33. A light source 38 and a photodetector 39 are placed on the side of the submerged cell 32 to constitute a deflection detecting optical system for detecting deflection of the cantilever 35. Illuminating light applied to the cantilever 35 from the light source 38 and the light reflected from the cantilever 35 are not allowed to pass through the surface 31a of the liquid.

4. 发明专利

JPH08327635A CANTILEVER, HEATER EMPLOYING IT, AND HEATING/SHAPE MEASURING APPARATUS EMPLOYING IT 失效
公开(公告)号：JPH08327635A
公开(公告)日：1996-12-13
申请号：JP2207996
申请日：1996-01-12
申请人： NIKON CORP
发明人： ISHIKAWA MIYUKI , KONUKI TETSUJI , SUZUKI YOSHIHIKO
IPC分类号： G01B21/30 , G01N37/00 , G01Q30/10 , G01Q60/58 , G01Q90/00
摘要： PURPOSE: To heat a micro area of a sample locally at a desired temperature by providing a heating element for heating the forward end part of a probe and a thermocouple. CONSTITUTION: The cantilever comprises a support 1, a flexible plate 2 being supported by the support 1 at one end thereof, a probe 3 disposed at the tip thereof, and a heating element 4 for heating the forward end part thereof. A thermocouple constituting part 8 extends to the peripheral part of the probe 3 and a thermocouple constituting part 10 extends to the lower surfaces of the plate 2 and the support 1. The heating element 4 is formed in hair pin shape on an electric insulation layer 11 formed on the constituting part 8 in order to heat the forward end part of probe 3. Since the probe 3 is pointed sharply, when the forward end part thereof is brought into contact with the surface of sample or brought extremely close thereto, a micro area on the order of atomic of molecular dimensions on the surface can be heated locally through the forward end part. When the temperature is detected and controlled by means of the thermocouple, temperature of the probe can be set at a desired level and the active state of organism can be observed in detail.

5. 发明专利

JPH06265344A SCANNING PROBE MICROSCOPE 失效
公开(公告)号：JPH06265344A
公开(公告)日：1994-09-20
申请号：JP7878093
申请日：1993-03-12
申请人： NIKON CORP
发明人： ISHII NOBUHITO , TSURUMUNE TOKUJI , OKUDA KOJI , ISHIKAWA MIYUKI
IPC分类号： G01B7/34 , G01B21/30 , G01N37/00 , G01Q10/02 , G01Q30/02 , G01Q60/10 , H01J37/28
摘要： PURPOSE:To avoid the collision of a probe with a protrusion part, to quickly move the probe and to shorten the measuring time of the microscope by a method wherein a shortest movement route which can bypass the protrusion part on the surface of a sample is selected on the basis of the three-dimensional shape on the surface of the sample. CONSTITUTION:A shape recognition part 10b draws a contour-line image from an image stored in an image memory 10a by connecting parts which are focused and bright because they are situated on the same height as the tip of a probe 6 on a sample 1. It judges that the parts are protrusion parts and that parts other than them are recessed parts. Then, a probe-movement control part 10c selects a shortest movement route which can bypass the protrusion parts on the surface of the sample 1 on the basis of the contour-line image. A probe control device 11 controls a fine movement mechanism 7 and an X-Y stage 2 on the basis of the signal of the control means 10c, it relatively moves the probe 6 along the shortest movement route, it scans the surface of the sample 1 and it forms a microimage in a measuring region. Thereby, an operation to raise the probe 6 is omitted, its movement time is shortened, and the collision of the probe 6 with the protrusion parts can be avoided.

6. 发明专利

JPH09203739A PROBE POSITION CONTROLLER AND NEAR-FIELD SCANNING MICROSCOPE 失效
公开(公告)号：JPH09203739A
公开(公告)日：1997-08-05
申请号：JP1079996
申请日：1996-01-25
申请人： NIKON CORP
发明人： ISHIKAWA MIYUKI
IPC分类号： G01B11/30 , G01N37/00 , G01Q10/04 , G01Q30/06 , G01Q60/18
摘要： PROBLEM TO BE SOLVED: To provide precise images by correcting a scanning means through the comparison of probe information derived from detected position information with another probe position information for input to the scanning means. SOLUTION: A piezoelectric drive 14 supplies driving voltages for piezoelectric drive members 4, 5, provided at the column 3 of a stage 1, for X, Y, and Z directions. The optical probe 6 of the member 5 has an aperture smaller than the wavelength of light of a light source 16, and emits evanescent waves to the sample 2. Light or fluorescence from the sample 2 is focused 7 into a spot beam, which is transmitted through a half mirror 8 to illuminate a photosensor 9 and reflected by the mirror 8 to illuminate a position sensor 10. Light information detected 9 is fed to a display means 16, the sensor 10 generates a current corresponding to the amount of the received light, and a feedback means 12 inputs the position of a beam spot by computing 11. The feedback means 12 compares the amount of movement of the probe 6 detected by the position sensor 10 with a drive signal from a piezoelectric drive 13 and, if they differ in the amount of movement, outputs a compensating signal to the driver 14.

7. 发明专利

JPH06265345A SCANNING PROBE MICROSCOPE 失效
公开(公告)号：JPH06265345A
公开(公告)日：1994-09-20
申请号：JP7878193
申请日：1993-03-12
申请人： NIKON CORP
发明人： ISHIKAWA MIYUKI
IPC分类号： G01B7/34 , G01B21/30 , G01Q10/02 , G01Q30/02 , G01Q60/10 , H01J37/28
摘要： PURPOSE:To shorten the measuring time of the microscope by a method wherein microscopic uneven parts or the like on the surface of a sample can be observed and a measuring region can be designated easily. CONSTITUTION:When a sample 1 exceeds the resolution of an optical microscope device 7, an image processing means 14 image-processes a signal from the optical microscope device 7, it makes the shape on the surface of the sample 1 visible, and it displays a visible image on a display device 10. When a measuring part by a scanning tunneling-current microscope is designated by an image displayed on the display device 10 by an input device 11b, a probe control means 13 relatively moves a probe 5 to the designated measuring part so that the scanning tunneling-current microscope can perform a measurement in the measuring part.

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