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    • 47. 发明专利
    • Inspection device
    • 检查装置
    • JP2008224436A
    • 2008-09-25
    • JP2007063613
    • 2007-03-13
    • Canon Incキヤノン株式会社
    • KASAI SHINTAROITSUJI TAKEAKIONOUCHI TOSHIHIKO
    • G01N21/35G01N21/3577G01N21/3586
    • G01N21/3581G01N21/17G01N21/1717G01N21/3563
    • PROBLEM TO BE SOLVED: To provide an inspection device capable of inspecting, even a trace amount of a specimen with high sensitivity, by making a specimen and an electromagnetic waves interact with each other a plurality number of times. SOLUTION: The inspection device is constituted so as to detect the data of the specimen 112 from the change in the propagation state of the electromagnetic wave, produced by a plurality of number of times of the interactions of the specimen 112 by electromagnetic waves and has a transmission passage 16; an electromagnetic wave supply detection part 111 for supplying the electromagnetic wave to the transmission passage 16 and detecting the electromagnetic waves, a reflecting part 110 for reflecting the electromagnetic waves propagated through the transmission passage 16 and an inspection part 113, wherein the specimen 112 is installed between the electromagnetic wave supply detection part and the reflection part 110. The transmission passage 16, the reflecting part 110 and the inspection part 113 are formed on the same substrate 11. COPYRIGHT: (C)2008,JPO&INPIT
    • 要解决的问题:提供一种能够通过使试样和电磁波多次相互作用而能够检测甚至微量的高灵敏度的试样的检查装置。 解决方案:检查装置构成为从电磁波的传播状态的变化中检测出样本112的数据,由电磁波的多个样本112的相互作用产生 并具有传递通道16; 用于将电磁波提供给传输通道16并检测电磁波的电磁波供应检测部分111,用于反射通过传输通道16传播的电磁波的反射部分110和检查部分113,其中样本112被安装 电磁波供给检测部和反射部110之间。传输通道16,反射部110和检查部113形成在同一基板11上。版权所有(C)2008,JPO&INPIT
    • 50. 发明专利
    • High-speed pulse high-speed time response measuring method and apparatus
    • 高速脉冲高速时间响应测量方法和装置
    • JP2003322628A
    • 2003-11-14
    • JP2002128426
    • 2002-04-30
    • National Institute Of Advanced Industrial & Technology独立行政法人産業技術総合研究所
    • TAKETOSHI NAOYUKIBABA TETSUYA
    • G01K11/12G01J11/00G01N21/17G01N25/18G01N25/72
    • G01N21/1717G01N25/18G01N25/72
    • PROBLEM TO BE SOLVED: To expand a measurement target in a thermoreflectance method using a pulse laser by eliminating the limitation of an observation time region due to the control of a light path length.
      SOLUTION: While the measurement target is irradiated with ultra-short pulse light as excitation pulse light for exciting the measurement target, the measurement target is irradiated with probe pulse light, and the reflection light is detected, thus observing a temperature change in the measurement target. A pulse laser for exciting the measurement target that can be individually and electrically controlled and that for probes are prepared, and a difference in the measurement target irradiation time of the pulse light for probes to the irradiation of the measurement target in the excitation pulse light is electrically controlled, thus signals that vary depending on the time difference between the excitation pulse light and the probe pulse light.
      COPYRIGHT: (C)2004,JPO
    • 要解决的问题:通过消除由于光路长度的控制导致的观察时间区域的限制,通过使用脉冲激光器的热反射方法来扩大测量对象。 解决方案:当用超短脉冲光照射测量目标作为用于激发测量目标的激发脉冲光时,用探针脉冲光照射测量目标,并且检测反射光,从而观察温度变化 测量目标。 用于激发可以单独和电气控制的测​​量目标的脉冲激光器和用于探针的测量目标的脉冲激光,并且探针的脉冲光对激发脉冲光中的测量对象的照射的测量目标照射时间的差异是 电控制,因此根据激发脉冲光和探针脉冲光之间的时间差而变化的信号。 版权所有(C)2004,JPO