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21. 发明专利

JP5024812B2 Dielectric structure and a method of manufacturing the same 有权
公开(公告)号：JP5024812B2
公开(公告)日：2012-09-12
申请号：JP2006169506
申请日：2006-06-20
申请人：独立行政法人産業技術総合研究所
发明人：正聡一木 , 龍太郎前田
IPC分类号： H01L21/316 , H01L41/09 , H01L41/18 , H01L41/187 , H01L41/22 , H01L41/29 , H01L41/312
CPC分类号： H01L21/31691 , B81C1/0038 , B81C2201/0191 , H01L28/55 , H01L41/317
摘要： Provided is a low cost dielectric structure, which has a high dielectric constant and is formed on a necessary area without waste. A method for manufacturing such dielectric structure is also provided. The dielectric structure is formed by, prior to transfer, introducing a laminated structure having a high peeling characteristic into a base electrode on a heat resistant substrate which forms a dielectric film. The method for manufacturing the dielectric structure is composed of a step of forming a metal (8) for a second electrode and a dielectric film (9) in this order on an insulating film (7) formed on a heat resistant substrate (6); a step of forming a second electrode (4) and a dielectric body (3) on the insulating film (7) by patterning; a step of forming a first electrode (2) on a non heat resistant substrate (1); a step of pressure-bonding the dielectric body (3), which is formed on the heat resistant substrate (6), on a first electrode (2) formed on the non heat resistant substrate (1); and a step of peeling the oxide film (7) formed on the heat resistant substrate (6) from the second electrode (4), and obtaining a dielectric structure wherein the first electrode, the dielectric body and the second electrode are formed in this order on the non heat resistant substrate.

22. 发明专利

JP2012169490A Method of manufacturing electromechanical conversion film, electromechanical conversion film manufactured by said method, method of manufacturing electromechanical conversion element, electromechanical conversion element manufactured by said method, ink jet head, and ink jet recording device 有权
标题翻译：制造电化学转换膜的方法，通过方法制造的电化学转换膜，制造机电转换元件的方法，通过方法制造的机电转换元件，喷墨头和喷墨记录装置
公开(公告)号：JP2012169490A
公开(公告)日：2012-09-06
申请号：JP2011029975
申请日：2011-02-15
申请人： Ricoh Co Ltd , 株式会社リコー
发明人： MACHIDA OSAMU , TAKEUCHI JUN , ZANG DONG-SIK , TASHIRO RYO
IPC分类号： H01L41/24 , B05D1/26 , B05D3/02 , B41J2/045 , B41J2/055 , B41J2/16 , H01L41/09 , H01L41/18 , H01L41/22
CPC分类号： B41J2/161 , B41J2/1628 , B41J2/1631 , B41J2/1642 , B41J2/1646 , H01L41/0805 , H01L41/0973 , H01L41/1876 , H01L41/317
摘要： PROBLEM TO BE SOLVED: To provide a method of manufacturing an electromechanical conversion film, capable of precisely forming an electromechanical conversion film with no sticking of accompanying droplet to a substrate when a PZT precursor solution is discharged from a liquid discharging head, to be applied on the substrate.SOLUTION: The method of manufacturing the electromechanical conversion film includes a painting step in which a PZT precursor solution 49 is applied on a platinum group electrode 46 by discharging the PZT precursor solution 49 through a nozzle hole 54, and a heat treatment step in which the PZT precursor solution 49 that has been applied is thermally treated for crystallizing. The painting step contains an application step for applying a voltage, with a nozzle plate 51 as, for example, a negative electrode while the platinum group electrode 46 as a positive electrode, a discharging step for discharging the PZT precursor solution 49 being electrified through the nozzle hole 54, a main droplet application step for applying a discharged main droplet 49d to the platinum group electrode 46, and a recovery step for recovering an accompanying droplet 49e by causing a nozzle plate 51 to suck it by a sucking force of opposite polarity.
摘要翻译：要解决的问题：提供一种制造机电转换膜的方法，当PZT前驱体溶液从液体排出头排出时，能够精确地形成机电转换膜，而不会伴随液滴附着到基板上，到施加在基底上。解决方案：制造机电转换膜的方法包括涂布步骤，其中PZT前体溶液49通过喷嘴孔54排出PZT前体溶液49而施加在铂族电极46上，并且热处理步骤其中已经施加的PZT前体溶液49被热处理以进行结晶。该涂装步骤包括施加电压的施加步骤，其中喷嘴板51为例如负极，而铂族电极46为正极，排出步骤用于将PZT前体溶液49排出通过喷嘴孔54，用于将排出的主液滴49d施加到铂族电极46的主液滴施加步骤，以及通过使喷嘴板51通过相反极性的吸引力来吸收伴随液滴49e的回收步骤。版权所有（C）2012，JPO＆INPIT

23. 发明专利

JP2011189657A Liquid ejecting head, piezoelectric element and piezoelectric actuator 有权
标题翻译：液体喷射头，压电元件和压电致动器
公开(公告)号：JP2011189657A
公开(公告)日：2011-09-29
申请号：JP2010058830
申请日：2010-03-16
申请人： Seiko Epson Corp , セイコーエプソン株式会社
发明人： TAKAHASHI TOSHIAKI
IPC分类号： B41J2/045 , B41J2/055 , B41J2/16
CPC分类号： B41J2/14233 , H01L41/0973 , H01L41/1878 , H01L41/317
摘要： PROBLEM TO BE SOLVED: To provide a liquid ejecting head and an actuator including a piezoelectric element containing bismuth titanate and including piezoelectrics which hardly generate cracks.
SOLUTION: The liquid ejecting head 600 includes the piezoelectrics 30 and the piezoelectric actuator containing an electrode applying voltage to the piezoelectrics 30. The piezoelectrics 30 include a structure laminating a layer mainly containing bismuth titanate and a layer mainly containing bismuth lanthanum iron-manganese.
COPYRIGHT: (C)2011,JPO&INPIT
摘要翻译：要解决的问题：提供一种液体喷射头和包括含有钛酸铋的压电元件的致动器，包括几乎不产生裂纹的压电体。解决方案：液体喷射头600包括压电体30和压电致动器，其包含向压电体30施加电压的电极。压电体30包括层叠主要包含钛酸铋层和主要含有铋铋铁 - 锰。版权所有（C）2011，JPO＆INPIT

24. 发明专利

JPWO2009110543A1 圧電／電歪膜型素子の製造方法有权
公开(公告)号：JPWO2009110543A1
公开(公告)日：2011-07-14
申请号：JP2009529447
申请日：2009-03-05
申请人：日本碍子株式会社
发明人：清水　秀樹 , 清水　　秀樹 , 睦北川 , 睦北川
IPC分类号： B41J2/16 , H01L41/09 , H01L41/187 , H01L41/317 , H01L41/39 , H02N2/00
CPC分类号： H01L41/317 , B41J2/161 , B41J2/1631 , B41J2/1645 , B41J2/1646 , H01L27/20 , H01L41/0973 , Y10T29/42
摘要：空洞の平面位置と電極膜及び圧電/電歪体膜を積層した振動積層体を構成する膜の平面位置とのずれを防ぐことができる圧電/電歪膜型素子の製造方法を提供する。基板と、基板の表面にキャビティと平面位置を合わせて設けられた下部電極膜、圧電/電歪体膜及び上部電極膜を積層した振動積層体とを備える圧電/電歪膜型素子の製造にあたって、キャビティに遮光剤を充填した基板をマスクとしてフォトリソグラフィ法により下部電極膜を形成する。その後に、下部電極膜に向かって圧電/電歪材料の粉末を電気泳動させることにより圧電/電歪体膜を形成するとともに、圧電/電歪体膜をマスクとしてフォトリソグラフィ法により上部電極膜を形成する。下部電極膜をマスクとしてフォトリソグラフィ法により圧電/電歪体膜を形成してもよい。

25. 发明专利

JP4652406B2 Composite oxide film and a method of manufacturing the same, dielectric material comprising a composite oxide film, a piezoelectric material, capacitors, piezoelectric element and electronic equipment 有权
公开(公告)号：JP4652406B2
公开(公告)日：2011-03-16
申请号：JP2007526912
申请日：2006-07-28
申请人：昭和電工株式会社
发明人：春福兪 , 彰彦白川 , 宏史福永
IPC分类号： C01G23/00 , C23C22/64 , C23C28/00 , C25D11/26 , H01G4/33 , H01L41/187 , H01L41/317 , H01L41/39
CPC分类号： H01B3/10 , C04B35/4682 , C04B2235/72 , C23C18/1216 , C23C18/1241 , H01G7/06 , H01L41/1871 , H01L41/317 , Y10T428/256 , Y10T428/266
摘要： The invention relates to a method for a complex oxide film having a high relative dielectric constant formed on a substrate surface by wet-treatment method and a production process of the complex oxide film comprising a step of washing the complex oxide film with an acid solution of pH 5 or less to thereby reduce salts in the film. Further, the invention relates to a dielectric material and a piezoelectric material containing the complex oxide film, a capacitor and a piezoelectric element including the material, and a electronic device comprising the element.

26. 发明专利

JP2010199265A Method for manufacturing liquid ejecting head and method for manufacturing actuator device 有权
标题翻译：制造液体喷射头的方法和制造执行器装置的方法
公开(公告)号：JP2010199265A
公开(公告)日：2010-09-09
申请号：JP2009041912
申请日：2009-02-25
申请人： Seiko Epson Corp , セイコーエプソン株式会社
发明人： HARA HISAKI
IPC分类号： H01L41/09 , B41J2/145 , B41J2/16 , H01L41/047 , H01L41/18 , H01L41/22 , H01L41/257 , H01L41/39 , H01L41/43
CPC分类号： B41J2/055 , B41J2/14233 , B41J2/161 , B41J2/1623 , B41J2/1628 , B41J2/1629 , B41J2/1632 , B41J2/1642 , B41J2/1646 , B41J2002/14241 , B41J2002/14258 , B41J2002/14419 , H01L41/0973 , H01L41/1876 , H01L41/317 , Y10T29/42
摘要： PROBLEM TO BE SOLVED: To provide a method for manufacturing a liquid ejecting head capable of obtaining excellent displacement characteristics, and to provide a method of manufacturing an actuator device. SOLUTION: The method for manufacturing a liquid ejecting head includes: a step of forming a first electrode; a step of forming a piezoelectric precursor film on the first electrode; a first heating step of forming a piezoelectric film by crystallizing the piezoelectric precursor film by heat treatment; a step of forming a second electrode; and a second heating step of heating the piezoelectric layer composed of the piezoelectric film at a temperature of 150°C or more while applying a voltage between the first electrode and the second electrode. COPYRIGHT: (C)2010,JPO&INPIT
摘要翻译：要解决的问题：提供一种能够获得优异的位移特性的液体喷射头的制造方法，并提供一种制造致动器装置的方法。解决方案：液体喷射头的制造方法包括：形成第一电极的步骤; 在第一电极上形成压电前体膜的步骤; 第一加热步骤，通过热处理使压电前体膜结晶而形成压电膜; 形成第二电极的步骤; 以及第二加热步骤，在150℃或更高的温度下加热由压电膜构成的压电层，同时在第一电极和第二电极之间施加电压。版权所有（C）2010，JPO＆INPIT

27. 发明专利

JP2009177171A Dielectric film, its manufacturing method and use 有权
标题翻译：电介质膜及其制造方法和用途
公开(公告)号：JP2009177171A
公开(公告)日：2009-08-06
申请号：JP2008335513
申请日：2008-12-27
申请人： Mitsubishi Materials Corp , 三菱マテリアル株式会社
发明人： FUJII JUN , SAKURAI HIDEAKI , SOYAMA NOBUYUKI
IPC分类号： H01L21/316 , H01G4/12 , H01G4/33 , H01L21/336 , H01L21/8242 , H01L27/108 , H01L29/78 , H01L41/18 , H01L41/23 , H01L41/39 , H01L41/43
CPC分类号： H01L21/02197 , C04B35/4682 , C04B2235/3213 , C04B2235/6562 , C04B2235/785 , C04B2235/79 , C23C18/1216 , H01G4/1227 , H01G4/33 , H01L21/02282 , H01L21/31691 , H01L28/55 , H01L41/1871 , H01L41/317 , Y10T428/268
摘要： PROBLEM TO BE SOLVED: To provide a dielectric film in which a long crack extending on its film surface does not exist and which is high in dielectric strength and its manufacturing method. SOLUTION: In manufacturing a dielectric film whose composition is composed of Ba 1-x Sr x Ti y O 3 (0≤x≤1, 0.9≤y≤1.1), the precursor of the film is coated on a substrate and is dried, and the dried film is mainly sintered at a temperature rising rate of 30°C/min or less, whereby, a dielectric film is formed in a manner such that the mean primary particle diameter is 70 nm or more, a continually straight crack of 1.5 μm or more in length does not exist on the film surface, and a leakage current density at voltage 5V is less than 10 -5 A/cm 2 or a leakage current density at voltage 20V is less than 10 -1 A/cm 2 . COPYRIGHT: (C)2009,JPO&INPIT
摘要翻译：要解决的问题：提供其中不存在其膜表面延伸的长裂纹并且介电强度高的电介质膜及其制造方法。解决方案：在制造其组成由Ba 1-x Sr X Y O 3 < / SB>（0≤x≤1,0.9≤y≤1.1），将膜的前体涂布在基板上并干燥，干燥膜主要以30℃/ min的升温速度烧结，或由此，以平均一次粒径为70nm以上的方式形成电介质膜，膜表面上不存在长度为1.5μm以上的连续直线裂纹，漏电流密度电压5V小于10 -5 A / cm 2 或电压20V时的漏电流密度小于10 -1 A / cm 2 。版权所有（C）2009，JPO＆INPIT

28. 发明专利

JP4192794B2 Piezoelectric elements, piezoelectric actuators, ink jet recording head, ink jet printer, a surface acoustic wave device, a frequency filter, an oscillator, an electronic circuit, thin film piezoelectric resonators, and electronic apparatus 有权
标题翻译：空值
公开(公告)号：JP4192794B2
公开(公告)日：2008-12-10
申请号：JP2004017108
申请日：2004-01-26
申请人：セイコーエプソン株式会社
发明人：栄樹平井 , 元久野口
IPC分类号： B41J2/045 , H01L41/18 , B41J2/055 , B41J2/135 , B41J2/14 , B41J2/145 , B41J2/16 , H01L41/08 , H01L41/09 , H01L41/187 , H01L41/22 , H01L41/311 , H01L41/319 , H01L41/39 , H02N2/00 , H03B5/30 , H03H3/02 , H03H3/08 , H03H9/02 , H03H9/05 , H03H9/17 , H03H9/25 , H03H9/64
CPC分类号： B41J2/161 , B41J2/1628 , B41J2/1629 , B41J2/1642 , B41J2/1645 , B41J2/1646 , B41J2202/03 , C04B35/499 , C04B2235/3206 , C04B2235/3224 , C04B2235/3251 , C04B2235/3258 , C04B2235/3272 , C04B2235/3275 , C04B2235/3279 , C04B2235/3284 , C04B2235/3286 , C04B2235/768 , H01L41/1875 , H01L41/317 , H03H3/02 , H03H3/08 , H03H9/02015 , H03H9/02031 , H03H9/02574 , H03H9/0542 , H03H9/173 , H03H9/174 , H03H2003/021 , H03H2003/023
摘要： A piezoelectric element is provided that is equipped with a seed layer formed on a base substrate and a piezoelectric film formed on the seed layer. The seed layer is formed of a perovskite type piezoelectric material preferentially oriented to pseudo cubic (100). The piezoelectric film is formed of a relaxor material that has a perovskite type rhombohedral structure, and is preferentially oriented to pseudo cubic (100).
摘要翻译：提供一种压电元件，其配备有形成在基底基板上的种子层和形成在种子层上的压电膜。种子层由优先取向为假立方（100）的钙钛矿型压电材料形成。压电膜由具有钙钛矿型菱方晶结构的弛豫材料形成，并优先取向为假立方（100）。

29. 发明专利

JPS58186981A Input/output conversion element 失效
标题翻译：输入/输出转换元件
公开(公告)号：JPS58186981A
公开(公告)日：1983-11-01
申请号：JP6879582
申请日：1982-04-26
申请人： Toray Ind Inc
发明人： KIMURA KUNIKO , MIYA TAKAO , DAITOU KOUJI
IPC分类号： H01L41/08 , H01G7/00 , H01L41/107
CPC分类号： H01L37/02 , H01L41/317
摘要： PURPOSE:To provide an electric input/output conversion element which is machined to utilize merits of flexibility, light weight and high sensitivity of a thinned piezoelectric film to the maximum limit by obtaining the thinned piezoelectric film by coating a high molecular film having excellent piezoelectric property, for example, from a VDF-TrFE copolymer solution. CONSTITUTION:P(VDF-TrFE) of 74-26mol% of composition ratio of VDF-TrFE is dissolved in a solvent DMF as a solution of high molecular copolymer. This solution is deposited in advance on the upper surface of a base film which is made of polyethylene terephthalate, thereby coating it on an aluminum electrode to obtain a thin film of high molecular copolymer. Al electrode is formed by depositing on the thin film, heat treated as both electrodes, and then polarized several times, thereby obtaining pyroelectric element. This element generates pyroelectricity for the variation in the temperature and is used as a fire alarm heat detector. A high molecular piezoelectric film can be coated in a thin film, and piezoelectric property is thereafter imparted by polling, and there are copolymer of cyanovinylidene and a high molecular polymer which contains vinylacetate or cyano group such as polyacrylonitryle.
摘要翻译：目的：提供一种电动输入/输出转换元件，通过涂覆具有优异的压电性能的高分子膜，通过获得薄的压电膜，通过机加工来利用薄膜压电薄膜的柔性，重量轻和高灵敏度的最大极限，例如，从VDF-TrFE共聚物溶液。构成：将作为VDF-TrFE的组成比的74-26mol％的P（VDF-TrFE）作为高分子量共聚物的溶液溶解在溶剂DMF中。将该溶液预先沉积在由聚对苯二甲酸乙二醇酯制成的基膜的上表面上，由此将其涂覆在铝电极上，得到高分子量共聚物的薄膜。 Al电极通过沉积在薄膜上，作为两个电极进行热处理，然后偏振几次，从而获得热电元件。该元件为温度变化产生热电，并用作火灾报警热检测器。可以将高分子压电膜涂布在薄膜中，然后通过轮廓赋予压电性，并且存在含有乙酸乙烯酯或氰基如聚丙烯薄膜的氰基亚乙烯基和高分子量聚合物的共聚物。

30. 发明专利

JP2018082052A 圧電素子及び圧電素子応用デバイス审中-公开
公开(公告)号：JP2018082052A
公开(公告)日：2018-05-24
申请号：JP2016223532
申请日：2016-11-16
申请人：セイコーエプソン株式会社
发明人：角浩二 , 酒井朋裕 , 一色鉄也 , 高橋敏明 , 北田和也
IPC分类号： H01L41/09 , H01L41/187 , H01L41/047 , B41J2/14 , H01L41/319
CPC分类号： H01L41/0815 , B41J2/14201 , B41J2/14233 , B41J2/161 , B41J2/1628 , B41J2/1629 , B41J2/1635 , B41J2/1642 , B41J2/1646 , B41J2002/14241 , B41J2002/14419 , B41J2202/03 , H01L41/0477 , H01L41/1873 , H01L41/29 , H01L41/317 , H01L41/318 , H01L41/319 , H01L41/332
摘要：【課題】大面積を有する基板上に面内方向に均一に圧電体層を形成することができると共に、(100)面に優先配向させることが可能であって、下地層の状態によらず結晶の配向を維持して圧電特性の低下を抑制することが可能な圧電素子及び圧電素子応用デバイスを提供する。【解決手段】圧電素子300は、第1電極60と、第2電極80と、第1電極60と第2電極80との間に配置された圧電体層70と、第1電極60と圧電体層70との間に配置された配向制御層73とを備え、配向制御層73は、カリウムとナトリウムとカルシウムとニオブとを含み、(100)面に優先配向するペロブスカイト型複合酸化物の結晶を含む。【選択図】図8

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