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1. 发明专利

JP2013135165A Thin film manufacturing device, thin-film manufacturing method, droplet discharge head, and ink jet recording device 有权
标题翻译：薄膜制造装置，薄膜制造方法，喷墨头和喷墨记录装置
公开(公告)号：JP2013135165A
公开(公告)日：2013-07-08
申请号：JP2011286157
申请日：2011-12-27
申请人： Ricoh Co Ltd , 株式会社リコー
发明人： YAGI MASAHIRO , MACHIDA OSAMU , TASHIRO RYO , MELANIE MEIXNER , JOCHEN STOLLENWERK
IPC分类号： H01L41/22 , B05C9/14 , B23K26/00 , B23K26/067 , B23K26/073 , B41J2/16
摘要： PROBLEM TO BE SOLVED: To provide a thin film manufacturing device and a thin-film manufacturing method, capable of manufacturing a thin film such as an electromechanical conversion film in a simple process.SOLUTION: The thin film manufacturing device comprises: liquid discharge means which discharges a liquid and forms a coated film on an object to be deposited; first laser irradiation means which continuously irradiates the coated film with a laser beam and evaporates a solvent of the coated film; and second laser irradiation means which irradiates the coated film whose solvent has been evaporated with a pulsed laser beam and crystallizes the coated film whose solvent has been evaporated.
摘要翻译：要解决的问题：提供一种能够以简单的方法制造机电转换膜等薄膜的薄膜制造装置和薄膜制造方法。解决方案：薄膜制造装置包括：液体排出装置，排出液体并在待沉积的物体上形成涂膜; 第一激光照射装置，其用激光束连续照射涂膜，并蒸发涂膜的溶剂; 以及第二激光照射装置，其用脉冲激光束照射其溶剂蒸发的涂膜，并使溶剂蒸发的涂膜结晶。

2. 发明专利

JP2013063390A Thin film manufacturing apparatus, electromechanical conversion film element, droplet discharge head, and droplet discharge device 有权
标题翻译：薄膜制造设备，电动转换膜元件，喷墨头和排墨装置
公开(公告)号：JP2013063390A
公开(公告)日：2013-04-11
申请号：JP2011203531
申请日：2011-09-16
申请人： Ricoh Co Ltd , 株式会社リコー
发明人： BANDO YOSHINORI , TAKEUCHI JUN , YAGI MASAHIRO , ZANG DONG-SIK , MACHIDA OSAMU , TASHIRO RYO , OTA HIDEKAZU
IPC分类号： B05C5/00 , B41J2/16 , H01L41/09 , H01L41/18 , H01L41/187 , H01L41/39
摘要： PROBLEM TO BE SOLVED: To provide a thin film manufacturing apparatus capable of suppressing the phenomenon that a coating liquid cannot be applied to a target position on a coating object due to adhesion of accompanying droplets to the edge of a nozzle hole, and an electromechanical conversion thin film provided with an electromechanical thin film manufactured by the thin film manufacturing apparatus, a droplet discharge head, and a droplet discharge device.SOLUTION: The thin film manufacturing apparatus includes the droplet discharge head provided with a nozzle plate that has the nozzle hole and a nozzle plate electrode, the coating object opposed to the droplet discharge head, a counter electrode opposed to the droplet discharge head across the coating object, a counter electrode voltage applying means for applying a voltage to the counter electrode, and a nozzle plate electrode voltage application means for applying a voltage to the nozzle plate electrode. Two nozzle plate electrodes or more are lined in a predetermined direction with the nozzle hole as a starting point; accompanying droplets are moved in the predetermined direction by an electrostatic force from each nozzle plate electrode, and a voltage is applied to each nozzle plate electrode so that the accompanying droplets are drawn to the given nozzle plate electrode among the second or later from a nozzle hole side by the electrostatic force and are recovered.
摘要翻译：要解决的问题：提供一种能够抑制由于伴随的液滴附着在喷嘴孔的边缘而使涂布液不能施加到被涂物上的目标位置的现象的薄膜制造装置，以及设置有由薄膜制造装置制造的机电薄膜，液滴喷射头和液滴喷射装置的机电转换薄膜。解决方案：薄膜制造装置包括具有喷嘴孔和喷嘴板电极的喷嘴板的液滴喷射头，与液滴喷射头相对的涂覆物体，与液滴喷射头相对的对置电极穿过涂覆物体，对向电极施加装置，用于向对电极施加电压;以及喷嘴板电极施加装置，用于向喷嘴板电极施加电压。两个喷嘴板电极或更多的喷嘴板电极以喷嘴孔为起点沿预定方向排列; 伴随的液滴通过来自每个喷嘴板电极的静电力在预定方向上移动，并且将电压施加到每个喷嘴板电极，使得伴随的液滴在第二次或稍后从喷嘴孔中被吸引到给定的喷嘴板电极通过静电力进行回收。版权所有（C）2013，JPO＆INPIT

3. 发明专利

JP2013063371A Method for adjusting alignment of thin film forming device, thin film forming device, and electromechanical conversion film, electromechanical conversion element, liquid droplet discharge head and liquid droplet discharge device produced with the method 审中-公开
标题翻译：用于调整薄膜形成装置，薄膜成形装置和机电转换膜的对准方法，电化学转换元件，液体喷射头和液体喷射装置的制造方法
公开(公告)号：JP2013063371A
公开(公告)日：2013-04-11
申请号：JP2011202338
申请日：2011-09-15
申请人： Ricoh Co Ltd , 株式会社リコー
发明人： BANDO YOSHINORI , MACHIDA OSAMU , TASHIRO RYO , YAGI MASAHIRO
IPC分类号： B01J19/12 , G01B11/00 , G01B11/26
摘要： PROBLEM TO BE SOLVED: To provide a thin film forming device which can reduce the production cost, a produced electromechanical conversion element and a liquid droplet discharge device.SOLUTION: In the first alignment adjustment process, a landing position 251 is captured by using a camera 205, and a substrate or a liquid drop head 201 is moved relatively so that the landing position 251 matches with an imaging standard position 252 of the camera 205. In the second alignment adjustment process, an irradiated spot is formed by irradiating a laser beam with laser red, the irradiated spot is captured by using the camera 205, and the substrate or the laser head is relatively moved so that the irradiated spot matches the standard imaging position of the camera 205. In the third alignment adjustment process, the direction of the substrate is adjusted after detecting the direction of the substrate based on the image of the shape of the alignment mark formed previously on the substrate, the image captured by the imaging means 205, and the mounting position of the substrate is adjusted by moving the substrate so that the alignment mark comes to the standard imaging position of the imaging means 205.
摘要翻译：解决的问题：提供可以降低生产成本的薄膜形成装置，生产的机电转换元件和液滴排出装置。解决方案：在第一对准调整过程中，通过使用相机205捕获着陆位置251，并且相对地移动基板或液滴头201，使得着陆位置251与成像标准位置252匹配照相机205.在第二对准调整处理中，通过用激光红光照射激光束来形成照射光点，通过使用照相机205捕获照射光点，并且使基板或激光头相对移动，使得照射点匹配照相机205的标准成像位置。在第三对准调整处理中，基于先前在基板上形成的对准标记的形状的图像检测基板的方向之后，调整基板的方向，由成像装置205拍摄的图像，并且通过移动基板来调整基板的安装位置，使得对准标记达到标准成像位置 n。成像装置205.（C）2013，JPO＆INPIT

4. 发明专利

JP2012195445A Piezoelectric actuator, manufacturing method of the same, liquid emission head and ink jet printer 有权
标题翻译：压电致动器，其制造方法，液体发射头和喷墨打印机
公开(公告)号：JP2012195445A
公开(公告)日：2012-10-11
申请号：JP2011058254
申请日：2011-03-16
申请人： Ricoh Co Ltd , 株式会社リコー
发明人： WATANABE YASUHIRO , MACHIDA OSAMU , SHIMOFUKU HIKARI , TASHIRO RYO
IPC分类号： H01L41/22 , B41J2/045 , B41J2/055 , B41J2/16 , H01L41/09 , H01L41/18 , H01L41/187
CPC分类号： B41J2/14233 , H01L41/0973 , H01L41/317 , H01L41/33
摘要： PROBLEM TO BE SOLVED: To provide a piezoelectric actuator manufacturing method capable of easily manufacturing a good piezoelectric actuator on a substrate at low costs.SOLUTION: The piezoelectric actuator manufacturing method includes the steps of: forming a first conductive film 1A to be a first electrode on a substrate 1 forming an actuator; forming a self-organization monomolecular film 2 in a desired area on the first electrode film 1A; exposing the first electrode film 1A into a strip shape by patterning the monomolecular film 2 into a strip shaped of a piezoelectric film; applying a precursor liquid 6 of a conductive film material on an exposed first electrode film portion 1A1 in an ink jet system; transforming the applied precursor liquid 6 into a piezoelectric film; forming a second electrode film on the piezoelectric film; and preparing the three materials so that the first electrode film 1A is lyophilic and the monomolecular film 2 is lyophobic to the precursor liquid 6. A piezoelectric film making step includes a dry/thermal decomposition step for drying and thermally decomposing the applied precursor liquid, and a crystallization step for crystallizing the thermally decomposed piezoelectric film material.
摘要翻译：解决的问题：提供能够以低成本容易地在基板上制造良好的压电致动器的压电致动器制造方法。解决方案：压电致动器制造方法包括以下步骤：在形成致动器的基板1上形成作为第一电极的第一导电膜1A; 在第一电极膜1A上的期望区域中形成自组织单分子膜2; 通过将单分子膜2图案化成压电膜形状的条形，将第一电极膜1A暴露于条形状; 在喷墨系统中将暴露的第一电极膜部分1A1上的导电膜材料的前体液体6施加; 将所施加的前体液体6转化成压电膜; 在压电膜上形成第二电极膜; 并制备三种材料，使得第一电极膜1A是亲液性的，并且单分子膜2对前体液体6具有疏液性。压电膜制备步骤包括用于干燥和热分解所施加的前体液体的干/热分解步骤，以及用于使热分解的压电膜材料结晶的结晶步骤。版权所有（C）2013，JPO＆INPIT

5. 发明专利

JP2012174859A Manufacturing method for electromechanical conversion element, electromechanical conversion element manufactured thereby, and ink jet head and ink jet recording device using the same 有权
标题翻译：电动转换元件的制造方法，制造的机电转换元件，以及使用其的喷墨头和喷墨记录装置
公开(公告)号：JP2012174859A
公开(公告)日：2012-09-10
申请号：JP2011034732
申请日：2011-02-21
申请人： Ricoh Co Ltd , 株式会社リコー
发明人： WATANABE YASUHIRO , MACHIDA OSAMU , SHIMOFUKU HIKARI , TASHIRO RYO
IPC分类号： H01L41/22 , B41J2/045 , B41J2/055 , B41J2/16 , H01L41/09 , H01L41/18 , H01L41/24
摘要： PROBLEM TO BE SOLVED: To provide a manufacturing method for electromechanical conversion element such that when an orientation control film is formed, the orientation control film is formed not over the entire surface, but by patterning only a necessary part, and can be made thin.SOLUTION: There is provided the manufacturing method for electromechanical conversion element in which an electromechanical conversion element 40 formed by stacking a first electrode 41, an orientation control layer 42, an electromechanical conversion element 43, and a second electrode 44 is manufactured. In an orientation control layer forming process of forming the orientation control layer 42 on a surface side of the first electrode 41, the orientation control layer 42 is formed on the first electrode 41 by a sol-gel method in which a nozzle of a liquid discharge head is opposed to the surface side of the first electrode 41 and an orientation control layer precursor solution consisting of sol is discharged to coat the first electrode 41 with the orientation control layer precursor solution, and the orientation control layer precursor solution is heat-treated to be crystallized on the first electrode 41.
摘要翻译：要解决的问题：提供一种机电转换元件的制造方法，使得当形成取向控制膜时，取向控制膜不是在整个表面上形成，而是通过仅图案化所需的部分，并且可以是变薄。提供了一种机电转换元件的制造方法，其中制造通过层叠第一电极41，取向控制层42，机电转换元件43和第二电极44而形成的机电转换元件40。在第一电极41的表面侧形成取向控制层42的取向控制层形成工序中，通过溶胶 - 凝胶法在第一电极41上形成取向控制层42，其中液体排出口头部与第一电极41的表面侧相对，并且由溶胶组成的取向控制层前体溶液被排出以用取向控制层前体溶液涂覆第一电极41，并且将取向控制层前体溶液热处理为在第一电极41上结晶。版权所有（C）2012，JPO＆INPIT

6. 发明专利

JP2012124385A Manufacturing method for forming electromechanical conversion film, liquid ejecting head and inkjet printer 有权
标题翻译：形成电化学转换膜，液体喷射头和喷墨打印机的制造方法
公开(公告)号：JP2012124385A
公开(公告)日：2012-06-28
申请号：JP2010275028
申请日：2010-12-09
申请人： Ricoh Co Ltd , 株式会社リコー
发明人： SHIMOFUKU HIKARI , MACHIDA OSAMU , WATANABE YASUHIRO , TASHIRO RYO
IPC分类号： H01L41/09 , H01L41/18 , H01L41/187 , H01L41/22 , H01L41/318 , H01L41/331 , H01L41/39 , H01L41/43
摘要： PROBLEM TO BE SOLVED: To provide a manufacturing method for forming an electromechanical conversion film in which restricting of uneven film thickness is made possible.SOLUTION: A manufacturing method for forming an electromechanical conversion film by a sol-gel method, which has: a first step of partially performing surface modification on a first electrode; a second step of partially applying sol gel liquid on the first electrode by an ink jet system; a third step of drying, thermally decomposing and crystallizing the partially applied sol gel liquid; and a fourth step of repeatedly performing the first to third steps to obtain a desired film thickness. In a patterned electromechanical conversion film region obtained by the fourth step, another applying pattern having no relation with drive is arranged between the patterned electromechanical conversion films.
摘要翻译：要解决的问题：提供一种用于形成限制不均匀膜厚度的机电转换膜的制造方法。解决方案：一种通过溶胶 - 凝胶法形成机电转换膜的制造方法，其具有：在第一电极上部分进行表面改性的第一步骤; 通过喷墨系统将溶胶凝胶液部分地施加在第一电极上的第二步骤; 干燥，热分解和结晶部分施加的溶胶凝胶液体的第三步骤; 以及重复执行第一至第三步骤以获得期望的膜厚度的第四步骤。在通过第四步骤获得的图案化机电转换膜区域中，在图案化机电转换膜之间布置另一个与驱动无关的施加图案。版权所有（C）2012，JPO＆INPIT

7. 发明专利

JP2012059982A Method of manufacturing piezoelectric element 有权
标题翻译：制造压电元件的方法
公开(公告)号：JP2012059982A
公开(公告)日：2012-03-22
申请号：JP2010202731
申请日：2010-09-10
申请人： Ricoh Co Ltd , 株式会社リコー
发明人： WATANABE YASUHIRO , MACHIDA OSAMU , SHIMOFUKU HIKARI , TASHIRO RYO
IPC分类号： H01L41/18 , H01L41/09 , H01L41/187 , H01L41/22 , H01L41/29 , H01L41/318 , H01L41/331 , H01L41/39 , H01L41/43
摘要： PROBLEM TO BE SOLVED: To provide a method of manufacturing a piezoelectric element that can be easily patterned, a recording head having the piezoelectric element, and an ink jet recording apparatus having the recording head.SOLUTION: This method of manufacturing the piezoelectric element has a process for applying a liquid containing thiol on a lower electrode 11 to form a SAM 21, a process for forming a patterned resist 22 on the lower electrode 11 on which the SAM 21 is formed, a process for removing the SAM 21 formed in a region where the resist 22 is not formed to form a patterned SAM 21, a process for removing the resist 22, a process for applying a precursor sol 23 of PZT on the lower electrode 11 on which the patterned SAM 21 is not formed using a sol-gel method and baking it after that to remove the patterned SAM 21 and form a PZT membrane 12a, and a process for repeating the process to form a laminate of the PZT membrane and form an upper electrode thereon. When the precursor sol 23 is applied, an ink jet method is used.
摘要翻译：要解决的问题：提供一种可以容易地构图的压电元件的制造方法，具有压电元件的记录头和具有记录头的喷墨记录装置。解决方案：制造压电元件的这种方法具有在下电极11上施加含硫醇的液体以形成SAM21的工艺，在下电极11上形成图案化抗蚀剂22的工艺，SAM 21 形成除去未形成抗蚀剂22的区域中形成的SAM21以形成图案化SAM21的工序，除去抗蚀剂22的工序，在下电极上涂敷PZT的前体溶胶23的工序 11，其上未使用溶胶 - 凝胶法形成图案化的SAM21，然后烘烤以除去图案化的SAM21并形成PZT膜12a;以及重复该方法以形成PZT膜和在其上形成上电极。当使用前体溶胶23时，使用喷墨法。版权所有（C）2012，JPO＆INPIT

8. 发明专利

JP2013065631A Method for manufacturing electromechanical conversion film, method for manufacturing electromechanical conversion element, electromechanical conversion element manufactured by the manufacturing method, droplet discharge head, and droplet discharge device 有权
标题翻译：制造电化学转换膜的方法，制造机电转换元件的方法，由制造方法制造的机电转换元件，喷射头卸料头和卸料装置
公开(公告)号：JP2013065631A
公开(公告)日：2013-04-11
申请号：JP2011202321
申请日：2011-09-15
申请人： Ricoh Co Ltd , 株式会社リコー
发明人： SHIMOFUKU HIKARI , MACHIDA OSAMU , TASHIRO RYO , WATANABE YASUHIRO
IPC分类号： H01L41/22 , B41J2/045 , B41J2/055 , H01L41/09 , H01L41/18 , H01L41/187 , H01L41/39
摘要： PROBLEM TO BE SOLVED: To form an electromechanical conversion film having a desired pattern at low cost.SOLUTION: An irradiation of a laser beam 18 is performed on an electromechanical conversion film formed on a lower electrode on a substrate 11 through a transmission region 14-1 of a glass mask 14 formed in accordance with a predetermined pattern in a coating region, while performing one-way scanning. The laser beam 18 is blocked by a light-shielding region 14-2 of the glass mask 14, so that an SAM film 12 left after etching is not irradiated with the laser beam. Accordingly, the pattern shape of the SAM film 12 left after etching is not altered.
摘要翻译：要解决的问题：以低成本形成具有期望图案的机电转换膜。解决方案：通过在涂层中根据预定图案形成的玻璃掩模14的透射区域14-1对形成在基板11上的下电极上的机电转换膜进行激光束18的照射区域，同时执行单向扫描。激光束18被玻璃掩模14的遮光区域14-2阻挡，使得蚀刻后剩下的SAM膜12不被激光束照射。因此，蚀刻后留下的SAM膜12的图案形状没有变化。版权所有（C）2013，JPO＆INPIT

9. 发明专利

JP2012186278A Manufacturing method of electromechanical conversion film and electromechanical conversion film 审中-公开
标题翻译：电化学转换膜和电化学转换膜的制造方法
公开(公告)号：JP2012186278A
公开(公告)日：2012-09-27
申请号：JP2011047675
申请日：2011-03-04
申请人： Ricoh Co Ltd , 株式会社リコー
发明人： TASHIRO RYO , MACHIDA OSAMU , YAGI MASAHIRO , KIHIRA TAKAKAZU
IPC分类号： H01L41/22 , B41J2/045 , B41J2/055 , B41J2/16 , H01L41/09 , H01L41/18 , H01L41/187 , H01L41/24
摘要： PROBLEM TO BE SOLVED: To provide a manufacturing method of an electromechanical conversion film which shortens work processes and improves the quality of the pattern shape of the electromechanical conversion film and the electromechanical conversion film obtained by the manufacturing method, and to provide an electromechanical conversion element including the electromechanical conversion film and a droplet discharge head and an ink jet recording device which include the electromechanical conversion element.SOLUTION: A liquid-repellent film is formed on a region of a substrate which excludes at least a desired position. Next, a sol gel liquid is applied to the desired position and the sol gel liquid is crystallized by irradiating it with a laser beam from a laser source to form an electromechanical conversion film.
摘要翻译：解决的问题：提供一种机电转换膜的制造方法，其缩短加工工序，提高通过该制造方法得到的机电转换膜和机电转换膜的图案形状的质量，并且提供包括机电转换膜和液滴喷射头的机电转换元件和包括机电转换元件的喷墨记录装置。解决方案：在至少排除期望位置的基板的区域上形成防液膜。接下来，将溶胶凝胶液施加到所需位置，并通过用激光源的激光束照射溶胶凝胶液而结晶，形成机电转换膜。版权所有（C）2012，JPO＆INPIT

10. 发明专利

JP2012183697A Method for manufacturing electromechanical transducer, and liquid ejection head and image forming apparatus 审中-公开
标题翻译：制造电化学传感器的方法和液体喷射头和图像形成装置
公开(公告)号：JP2012183697A
公开(公告)日：2012-09-27
申请号：JP2011047611
申请日：2011-03-04
申请人： Ricoh Co Ltd , 株式会社リコー
发明人： WATANABE YASUHIRO , MACHIDA OSAMU , SHIMOFUKU HIKARI , TASHIRO RYO
IPC分类号： B41J2/045 , B41J2/015 , B41J2/055 , H01L41/09 , H01L41/18 , H01L41/187 , H01L41/22
摘要： PROBLEM TO BE SOLVED: To eliminate a problem that etching step is needed and a wasteful material consumption is generated so as to form an orientation control layer by sputtering.SOLUTION: The method performs: a step of modifying a surface of an element forming region for forming electromechanical transducer on a first electrode; a step of ejecting a sol-gel liquid which is the orientation control layer from a first liquid ejection head and applying the liquid to the element forming region and forming the orientation control layer; a step of ejecting the sol-gel liquid which is the electromechanical transducing film onto the formed orientation control layer from a second liquid ejection head to be applied and forming an electromechanical transducing film; and a step of forming a second electrode on the formed electromechanical transducing film.
摘要翻译：要解决的问题：为了消除需要蚀刻步骤和产生浪费的材料消耗以便通过溅射形成取向控制层的问题。解决方案：该方法执行：修改用于在第一电极上形成机电换能器的元件形成区域的表面的步骤; 从第一液体喷射头喷射作为取向控制层的溶胶凝胶液体并将液体施加到元件形成区域并形成取向控制层的步骤; 从被施加的第二液体喷射头喷射作为机电转导膜的溶胶凝胶液体到形成的取向控制层上并形成机电换能膜的步骤; 以及在所形成的机电转换膜上形成第二电极的步骤。版权所有（C）2012，JPO＆INPIT

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