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11. 发明专利

JPS643950A ION IMPLANTATION DEVICE 失效
公开(公告)号：JPS643950A
公开(公告)日：1989-01-09
申请号：JP15862987
申请日：1987-06-25
申请人： HITACHI LTD
发明人： OSE YOICHI , TAKAGI TOSHIYUKI , SANO HIROKI , MIKI KAZUYOSHI
IPC分类号： H01J37/147 , H01J37/317 , H01L21/265
摘要： PURPOSE:To improve the mass separation performance by constituting a rear- stage accelerating/decelerating electrode system with the first electrode on the upstream side, the grounded second electrode on the downstream side facing a mass separating slit, and an intermediate electrode provided between the first and second electrodes and having an ion beam passing hole larger than the holes of the first and second electrodes. CONSTITUTION:A rear-stage accelerating/decelerating electrode system 4 is constituted of the first electrode 41 facing a mass separating magnet 3, the grounded second electrode 42 facing a mass separating slit 9, and an intermediate electrode 43 having an ion passing hole larger than the ion beam passing holes of the first electrode 41 and the second electrode 42 and provided between them. Virtual convex lens and concave lens formed by the potential difference between electrodes of the rear-stage accelerating/decelerating electrode system 4 can be made equal in thickness, and an ion beam can be focused most thinly at the position of the mass separating slit. The mass separation performance can be thereby improved.

12. 发明专利

JP2012015113A Electron beam adjusting method, charged particle optical system control device and scanning electron microscope 有权
标题翻译：电子束调整方法，充电粒子光学系统控制装置和扫描电子显微镜
公开(公告)号：JP2012015113A
公开(公告)日：2012-01-19
申请号：JP2011154407
申请日：2011-07-13
申请人： Hitachi Ltd , 株式会社日立製作所
发明人： ESUMI MAKOTO , OSE YOICHI , IKEGAMI AKIRA , TODOKORO HIDEO , ISHIJIMA TATSUAKI , SATO TAKAHIRO , FUKAYA RITSUO , ASAO KAZUNARI
IPC分类号： H01J37/20 , G01B15/00 , G01B15/04 , G01N23/00 , G01Q30/06 , G01Q30/18 , G01Q30/20 , G21K7/00 , H01J37/21 , H01J37/22 , H01J37/28 , H01L21/66
CPC分类号： H01J37/265 , G01N23/2251 , H01J37/21 , H01J37/244 , H01J37/28 , H01J2237/0041 , H01J2237/216 , H01J2237/244 , H01J2237/24564 , H01J2237/24592 , H01J2237/2594 , H01J2237/2817
摘要： PROBLEM TO BE SOLVED: To provide a method and a device enabling highly precise inspection and measurement even if different electrification phenomena are included by considering the possibility that accurate inspection and measurement become difficult due to the different electrifications.SOLUTION: A device and a method are configured to subtract the potential obtained from a potential measurement result of the surface potential of a charged particle beam scanning point on the basis of potential distribution having wider range than the scanning point. With this configuration, accurate inspection and measurement can be performed by a scanning charged particle beam device even if there are electrification phenomena different in properties.
摘要翻译：要解决的问题：为了提供一种能够通过考虑由于不同的通电导致精确的检查和测量变得困难的可能性而包括不同的通电现象，从而能够进行高度精确的检查和测量的装置。解决方案：一种装置和方法被配置为基于具有比扫描点宽的范围的电位分布从电荷粒子束扫描点的表面电位的潜在测量结果中减去获得的电位。利用该配置，即使具有不同性质的通电现象，也可以通过扫描带电粒子束装置进行精确的检查和测量。版权所有（C）2012，JPO＆INPIT

13. 发明专利

JP2000243347A ION TRAP TYPE MASS SPECTROMETER AND ION TRAP MASS SPECTROMETRY 失效
公开(公告)号：JP2000243347A
公开(公告)日：2000-09-08
申请号：JP3974799
申请日：1999-02-18
申请人： HITACHI LTD
发明人： YOSHINARI KIYOMI , OSE YOICHI , NAKAJIMA FUMIHIKO , KATO YOSHIAKI
IPC分类号： H01J49/42 , G01N27/62 , G01N30/72 , H01J49/06
摘要： PROBLEM TO BE SOLVED: To increase ion concentration of a sample and to make mass spectrometry with high resolution and a high S/N ratio by deflecting an ion beam containing the ionized sample, and feeding the ion beam containing ions with the selected mass to an ion trap type mass spectrometric section. SOLUTION: A mixed sample subject to mass spectrometry is component-separated by a preprocessing system 2, the mixed sample and a solvent are ionized by an ionization section 3, unnecessary ions and neutral molecules are removed by a deflection mass selection section 10, and the mixed sample is fed to an ion trap type mass spectrometric section 5 through a focusing lens system 4. The mass spectrometric section 5 is composed of a ring electrode 51 and end cap electrodes 52, 53 facing each other across the ring electrode 51, and a DC voltage and a high-frequency voltage are applied between the electrodes from a high-frequency voltage power supply 8 to form the quadrupole electric field between the electrodes. An ion beam from the focusing lens system 4 is fed between the ring electrode 51 and the end cap electrodes 52, 53 through a center port 13, is captured by the quadrupole electric field, and is detected by a detector 6 through a center port 55, then a mass spectrum is obtained as the final analysis result.

14. 发明专利

JP2000100375A MASS SPECTROMETER AND ELECTROSTATIC LENS THEREFOR 失效
公开(公告)号：JP2000100375A
公开(公告)日：2000-04-07
申请号：JP30124899
申请日：1999-10-22
申请人： HITACHI LTD
发明人： TAKADA YASUAKI , SAKAIRI MINORU , HIRABAYASHI TSUDOI , OSE YOICHI
IPC分类号： H01J49/06 , G01N27/62 , G01N30/72 , H01J49/22 , H01J49/24
摘要： PROBLEM TO BE SOLVED: To provide a liquid chromatograph-mass spectrometer for analyzing a biological sample or the like, generating little noise, having high sensitivity and capable of stable operation over a long time. SOLUTION: In this means spectrometer, an ion capture port 19 for capturing ions into a mass analyzer part is positioned so as to be deviated from the center axis of an ion introduction fine aperture 15, and only ions are taken into a mass analyzer part 6 after being deflected with an electrostatic lens 21, thereby preventing a charged liquid drop from flowing into the mass analysis part 6. According to this construction, a charged liquid drop which becomes a noise source causes the sensitivity to drop in a mass spectrometer can be eliminated.

15. 发明专利

JPH10208683A SCANNING ELECTRON MICROSCOPE 失效
公开(公告)号：JPH10208683A
公开(公告)日：1998-08-07
申请号：JP6189798
申请日：1998-02-27
申请人： HITACHI LTD
发明人： SATO MITSUGI , OSE YOICHI , FUKUHARA SATORU , TODOKORO HIDEO , ESUMI MAKOTO
IPC分类号： H01J37/244 , H01J37/28 , H01J37/29
摘要： PROBLEM TO BE SOLVED: To enhance the detection efficiency by detecting both secondary electrons and reflected electrons together, by arranging a detector to cover the trajectories of reflected electrons and the secondary electrons for depicting the deflected trajectories orbit, and providing the detector on the electron source side from an objective lens. SOLUTION: A signal from a reflected electron detector 121 is inputted to a variable amplifier 160, and a signal from the secondary electron detector 120 is inputted to a variable amplifier 162 and after amplification they are converted to digital signals by means of A/D converters 178, 180 to be input to a data bus 158. Those signals are subjected to signal processing by means of CPU 150 for storing the data signals in a storage device 152. Signals of reflected electrons and the secondary electrons stored in the storage device 152 or processed signals are used, so that CPU 150 display on a display device 125 such as CRT, via an interface 156, a reflected electron image of the sample, secondary electron image and an expanded sample image due to the processed signals.

16. 发明专利

JPH08287866A MASS ANALYSIS METHOD AND DEVICE THEREOF 失效
公开(公告)号：JPH08287866A
公开(公告)日：1996-11-01
申请号：JP8707195
申请日：1995-04-12
申请人： HITACHI LTD
发明人： YOSHINARI KIYOMI , OSE YOICHI , KATO YOSHIAKI
IPC分类号： G01N27/62 , H01J49/42
摘要： PURPOSE: To provide a high-speed and high-resolution ion trap mass analyzer by controlling an auxiliary voltage, an amplitude factor of a high frequency voltage, and a scan speed of a high frequency voltage amplitude. CONSTITUTION: An ion trap is composed of a ring electrode 6, and two end cap electrodes 7, 8 disposed to face each other having the ring electrode 6 between them. A sample as subject to mass analysis which passes from a sample source 1 through a sample introducing part 2 to be injected to space between the electrodes collides with an electron getting through a center port 12 of the end cap electrode 7 into the space between the electrodes to be ionized. By a main power supply 4 for operation, a quadrupole electric field is generated in the space 15 between the electrodes by a DC voltage U and a high frequency voltage Vcos Ωt supplied into between the end cap electrodes 7, 8 and the ring electrodes 6. For causing resonance of ions as subject to detection to be radiated, a separate voltage from the quadrupole electric field to generate a micro-electric field is applied to between the end cap electrodes 7, 8 by an auxiliary voltage source 11, and a control part 3 adjusts an amplitude ratio between the resonance voltage and the high frequency voltage, and determines mass scan speed to radiate the ions from a detection port 13 in accordance with necessary resolution for each ion as subject to detection.

17. 发明专利

JPH08255576A ION SOURCE AND MASS SPECTROMETER USING THE SOURCE 失效
公开(公告)号：JPH08255576A
公开(公告)日：1996-10-01
申请号：JP6096895
申请日：1995-03-20
申请人： HITACHI LTD
发明人： OSE YOICHI , YOSHINARI KIYOMI , YANO MASAYOSHI , MIMURA TADAO
IPC分类号： G01N27/62 , H01J27/26 , H01J37/08 , H01J49/16 , H01J49/26
摘要： PURPOSE: To provide an ion source having the capability of meeting the restrictions of an ion beam divergent angle and beam breadth concurrently, and a mass spectrometer equipped with the ion source for high resolution and sensitivity in a high mass zone. CONSTITUTION: Ions generated with an ion source 1 are taken out and turn into an ion beam. The beam is, then, mass separated in sector magnetic field 3, and ion current finally passing mass separation slits is measured with a detector. Also, an emitter 11 is laid on an emitter support 16 behind a counter electrode 12, so as to become parallel thereto and have the lengthwise direction approximately orthogonal with an ion beam turning axis. In addition, a beam taken out from the slit of the counter electrode 12 is approximately a parallel beam on a Z-X plane. Thus, only beam breadth adjustment with an X-direction focusing electrode 14 is required. On the other hand, an ion beam on a Z-Y plane is emitted in an isotropic way, and adjusted to a parallel beam with a Y-direction focusing electrode 13 for transmission through an S-slit 15.

18. 发明专利

JPH08222180A MASS SPECTROGRAPH AND MASS SPECTROMETRY 失效
公开(公告)号：JPH08222180A
公开(公告)日：1996-08-30
申请号：JP2495095
申请日：1995-02-14
申请人： HITACHI LTD
发明人： YOSHINARI KIYOMI , OSE YOICHI , KATO YOSHIAKI
IPC分类号： G01N27/62 , H01J49/06 , H01J49/26
摘要： PURPOSE: To provide a mass spectrograph and a mass spectrometry having high detection efficiency. CONSTITUTION: This mass spectrograph is constituted of an ion trap, a sample guiding means 2, an electron gun 5, a detector 9, a power source applying a voltage to the ion trap, a control means 3 controlling the power source and the electron gun 5, and a mass spectrographic means 10 conducting mass spectrometry based on the detection signal of the detector 9. The auxiliary electric field is generated between end cap electrodes by an auxiliary power source 11 only in the direction of the detector 9. The frequency of the auxiliary voltage is approximated to the vibration frequency in the axial direction of the detected ions, and the detected ions can be surely made unstable on the detector 9 side synchronously with the auxiliary electric field.

19. 发明专利

JPH06181041A SCANNING ELECTRON MICROSCOPE 失效
公开(公告)号：JPH06181041A
公开(公告)日：1994-06-28
申请号：JP33408892
申请日：1992-12-15
申请人： HITACHI LTD
发明人： OSE YOICHI , HIGUCHI YOSHIYA , YOSHINARI KIYOMI
IPC分类号： H01J37/141 , H01J37/28
摘要： PURPOSE:To provide a scanning electron microscope in which the yield of a secondary electron can be increased up to 100% and also aberration can be reduced, thereby making it feasible to perform observation with high resolution. CONSTITUTION:A primary electron beam 1 passes through a deflection coil 7 and then is throw on a sample 3. At that time, a magnetic field made by an objective lens is spread over the sample 3 and the upper space and the primary electron beam 1 is focused to a degree of being several nm in diameter. With the primary electron beam thrown on the sample 3, a secondary electron 2 is emitted from the sample 3 with angular distribution. Since the energy of secondary electron 2 is as low as several eV, the secondary electron 2 is twisted about the magnetic flux of the objective lens 5 to go up as it is making spiral motion. The magnetic flux density abruptly goes down apart from the direction of the sample, and the secondary electron is shaked off from the spiral motion to evaporate and then is deflected with the attracting electric field from a secondary electron detector 4 and is caught by the secondary electron detector 4.

20. 发明专利

JPH0623991B2 失效
公开(公告)号：JPH0623991B2
公开(公告)日：1994-03-30
申请号：JP21298585
申请日：1985-09-26
申请人： HITACHI LTD
发明人： TAKAGI TOSHUKI , MIKI KAZUYOSHI , OSE YOICHI , UENISHI HIROBUMI
IPC分类号： G06F17/50 , G06F15/60

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