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1. 发明授权

EP3931366B1 PROCESSING LINE FOR DEPOSITING THIN-FILM COATINGS 有权
公开(公告)号：EP3931366B1
公开(公告)日：2024-07-31
申请号：EP20706535.0
申请日：2020-03-02
IPC分类号： C23C14/50 , C23C14/56 , C23C16/458
CPC分类号： C23C14/505 , C23C14/566 , C23C16/458

2. 发明公开

EP4389928A1 DEPOSITION APPARATUS 审中-公开
公开(公告)号：EP4389928A1
公开(公告)日：2024-06-26
申请号：EP23217579.4
申请日：2023-12-18
申请人： Samsung Display Co., Ltd.
发明人： KIM, Hyunjae , KANG, Hyungyu , CHAE, Jongwook , HAN, Jongbun , KIM, Daeyong , PARK, Gan Young
IPC分类号： C23C14/04 , C23C14/24 , C23C14/26 , C23C14/56 , H10K71/16 , C23C14/12
CPC分类号： C23C14/243 , C23C14/562 , C23C14/26 , C23C14/042 , H10K71/166 , C23C14/12
摘要： An embodiment provides a deposition apparatus including a chamber; and a deposition source disposed in the chamber and including a plurality of nozzles arranged in a first direction. Each of the plurality of nozzles includes at least one first nozzle including a first nozzle hole configured to spray a first deposition material and a second nozzle hole configured to spray a second deposition material, and the deposition source further includes at least one angle controlling structure surrounding the at least one first nozzle.

3. 发明授权

EP3791420B1 DEPOSITION SYSTEM TO REDUCE CRAZING 有权转让
公开(公告)号：EP3791420B1
公开(公告)日：2024-06-12
申请号：EP19723614.4
申请日：2019-04-30
IPC分类号： H01J37/32 , C23C14/35 , C23C14/56 , H01J37/34
CPC分类号： H01J37/32568 , H01J37/32577 , H01J37/32761 , H01J37/32899 , H01J37/34 , H01J37/3464 , C23C14/35 , C23C14/56

4. 发明授权

EP4185730B1 VERFAHREN ZUM ABSCHEIDEN VON METALLISCHEN WERKSTOFFEN 有权
公开(公告)号：EP4185730B1
公开(公告)日：2024-05-01
申请号：EP21754720.7
申请日：2021-07-21
IPC分类号： C23C14/24 , C23C14/56 , C23C14/54
CPC分类号： C23C14/246 , C23C14/56 , C23C14/542

5. 发明公开

EP4334489A1 ROLLER FOR TRANSPORTING A FLEXIBLE SUBSTRATE, VACUUM PROCESSING APPARATUS, AND METHODS THEREFOR 审中-实审
公开(公告)号：EP4334489A1
公开(公告)日：2024-03-13
申请号：EP22799281.5
申请日：2022-04-18
申请人： Applied Materials, Inc.
发明人： SAUER, Andreas , HLADIK, Annemarie , KÖHLER, Bernhard , DEPPISCH, Thomas , ARMSTRONG, Claire , BUSCHBECK, Wolfgang
IPC分类号： C23C14/56 , C23C14/54 , C23C14/22 , C23C16/54 , C23C16/46 , C23C16/455

6. 发明公开

EP4317523A1 METHOD, DEVICE AND SYSTEM FOR PREPARING COMPOSITE METAL FOIL 审中-实审
公开(公告)号：EP4317523A1
公开(公告)日：2024-02-07
申请号：EP23736964.0
申请日：2023-01-01
申请人： Chongqing Jimat New Material Technology Co., Ltd.
发明人： ZANG, Shiwei
IPC分类号： C23C14/24 , C23C14/02 , C23C14/26 , C23C14/56 , B05C9/06 , B65H18/10
摘要： The present disclosure provides a method, device, and system for manufacturing a composite metal foil. The device includes: a first-time double-sided coating module and a second-time double-sided coating module that are arranged at an interval, where the first-time double-sided coating module includes: a first vapor deposition column and a second vapor deposition column that are arranged oppositely, and an unwinding roller, a first evaporation source, a first set of over rollers, a second evaporation source, and a second set of over rollers that are arranged sequentially from bottom to top on opposite surfaces of the first vapor deposition column and the second vapor deposition column; and the second-time double-sided coating module includes: a third vapor deposition column, and a first set of cooling rollers, a third evaporation source, a second set of cooling rollers, a fourth evaporation source, and a winding roller that are arranged sequentially from top to bottom on the third vapor deposition column. The sequential arrangement of the two evaporation sources and corresponding rollers from bottom to top on the opposite surfaces of the first vapor deposition column and the second vapor deposition column allows first-time double-sided coating, and the sequential arrangement of the two evaporation sources and corresponding rollers from top to bottom on the third vapor deposition column allows second-time double-sided coating, which can improve the site utilization and the film production efficiency.

7. 发明授权

EP3760758B1 METHOD FOR PRODUCING GRAIN-ORIENTED ELECTRICAL STEEL SHEET AND CONTINUOUS FILM-FORMING DEVICE 有权
公开(公告)号：EP3760758B1
公开(公告)日：2024-02-07
申请号：EP19775554.9
申请日：2019-03-25
发明人： SHINGAKI, Yukihiro , UMADA, Takumi
IPC分类号： C23C14/54 , C23C16/52 , C23C14/56 , C23C16/54 , C23C14/06 , C23C14/02 , C23C16/02 , C23C16/34 , H01F1/18

8. 发明公开

EP4310220A1 VERFAHREN UND DAMPFVERTEILUNGSVORRICHTUNG 审中-实审
公开(公告)号：EP4310220A1
公开(公告)日：2024-01-24
申请号：EP23184147.9
申请日：2023-07-07
申请人： VON ARDENNE Asset GmbH & Co. KG
发明人： HEIMKE, Bruno , RANK, Rolf , KARN, Christian
IPC分类号： C23C14/24 , C23C14/26 , C23C14/54 , C23C14/56
摘要： Gemäß verschiedenen Ausführungsformen kann ein Verfahren (400) aufweisen: Ermitteln (401) einer Angabe, die eine räumliche Verteilung eines Materialdampfstroms, welcher von einer Vielzahl von Emissionsdüsen (106a) emittiert wird, repräsentiert; Ansteuern (403) eines Stellglieds (404), welches eingerichtet ist, einen Gasstrom, der dem Materialdampfstrom überlagert wird, zu beeinflussen, basierend auf

9. 发明授权

EP4179126B1 VORRICHTUNG ZUM AUFNEHMEN EINES GEGENSTANDS IN EINER VAKUUMBESCHICHTUNGSANLAGE 有权
公开(公告)号：EP4179126B1
公开(公告)日：2024-01-24
申请号：EP21746336.3
申请日：2021-07-01
发明人： MACIONCZYK, Frank , GREEN, Erwin
IPC分类号： C23C14/26 , C23C14/50 , C23C14/56 , B29D11/00

10. 发明授权

EP4023788B1 VACUUM COATING DEVICE 有权
公开(公告)号：EP4023788B1
公开(公告)日：2024-01-17
申请号：EP20867816.9
申请日：2020-09-25
发明人： REN, Sanbing , FAN, Junfei , LI, Shanqing , ZHANG, Chunwei , JIN, Xiaoli
IPC分类号： C23C14/24 , C23C14/16 , C23C14/56

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