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2. 发明公开

EP4446460A1 VACUUM COATING SYSTEM 审中-公开
公开(公告)号：EP4446460A1
公开(公告)日：2024-10-16
申请号：EP23167253.6
申请日：2023-04-11
申请人： NEOVAC GmbH
发明人： SCHNEIDER, Stefan , HERZOG, André
IPC分类号： C23C14/56 , C23C16/54 , H01J37/32
CPC分类号： C23C14/568 , C23C14/562 , C23C16/545 , H01J37/32889 , H01J37/32761
摘要： The present disclosure relates to a vacuum coating system for coating a band-type substrate (5), the vacuum coating system (10) comprising:
- a first module (20) comprising a first module housing (21), the first module housing (21) comprising at least one of a first substrate inlet (22) and a first substrate outlet (23),
a second module (40) comprising a second module housing (41), the second module housing (41) comprising at least one of a second substrate inlet (42) and a second substrate outlet (43),
- a substrate transportation unit (50) provided in one of the first module housing (21) and the second module housing (41) and
- a substrate treatment unit (60) provided in the other one of the first module housing (21) and the second module housing (41),
- wherein at least one of the substrate transportation unit (50) and the substrate treatment unit (70) is interchangeably arranged in one of the first module housing (21) and the second module housing (41), or
- wherein the first module (20) and the second module (40) are interchangeably connectable via at least one of the first and second substrate inlets (22, 42) and at least one of the first and second substrate outlets (23, 43), respectively.

3. 发明授权

EP3008224B1 GLASS PALLET FOR SPUTTERING SYSTEMS 有权
公开(公告)号：EP3008224B1
公开(公告)日：2024-09-04
申请号：EP14811203.0
申请日：2014-06-09
IPC分类号： C23C14/34 , B65G49/06 , H01L21/673 , H01L21/677 , C23C14/50 , C23C14/56
CPC分类号： C23C14/34 , C23C14/50 , C23C14/562 , C23C14/568 , H01L21/6734 , H01L21/67712 , H01L21/6776

4. 发明授权

EP3931366B1 PROCESSING LINE FOR DEPOSITING THIN-FILM COATINGS 有权
公开(公告)号：EP3931366B1
公开(公告)日：2024-07-31
申请号：EP20706535.0
申请日：2020-03-02
IPC分类号： C23C14/50 , C23C14/56 , C23C16/458
CPC分类号： C23C14/505 , C23C14/566 , C23C16/458

5. 发明公开

EP4389928A1 DEPOSITION APPARATUS 审中-公开
公开(公告)号：EP4389928A1
公开(公告)日：2024-06-26
申请号：EP23217579.4
申请日：2023-12-18
申请人： Samsung Display Co., Ltd.
发明人： KIM, Hyunjae , KANG, Hyungyu , CHAE, Jongwook , HAN, Jongbun , KIM, Daeyong , PARK, Gan Young
IPC分类号： C23C14/04 , C23C14/24 , C23C14/26 , C23C14/56 , H10K71/16 , C23C14/12
CPC分类号： C23C14/243 , C23C14/562 , C23C14/26 , C23C14/042 , H10K71/166 , C23C14/12
摘要： An embodiment provides a deposition apparatus including a chamber; and a deposition source disposed in the chamber and including a plurality of nozzles arranged in a first direction. Each of the plurality of nozzles includes at least one first nozzle including a first nozzle hole configured to spray a first deposition material and a second nozzle hole configured to spray a second deposition material, and the deposition source further includes at least one angle controlling structure surrounding the at least one first nozzle.

6. 发明授权

EP3791420B1 DEPOSITION SYSTEM TO REDUCE CRAZING 有权转让
公开(公告)号：EP3791420B1
公开(公告)日：2024-06-12
申请号：EP19723614.4
申请日：2019-04-30
IPC分类号： H01J37/32 , C23C14/35 , C23C14/56 , H01J37/34
CPC分类号： H01J37/32568 , H01J37/32577 , H01J37/32761 , H01J37/32899 , H01J37/34 , H01J37/3464 , C23C14/35 , C23C14/56

7. 发明授权

EP4185730B1 VERFAHREN ZUM ABSCHEIDEN VON METALLISCHEN WERKSTOFFEN 有权
公开(公告)号：EP4185730B1
公开(公告)日：2024-05-01
申请号：EP21754720.7
申请日：2021-07-21
IPC分类号： C23C14/24 , C23C14/56 , C23C14/54
CPC分类号： C23C14/246 , C23C14/56 , C23C14/542

8. 发明公开

EP4334489A1 ROLLER FOR TRANSPORTING A FLEXIBLE SUBSTRATE, VACUUM PROCESSING APPARATUS, AND METHODS THEREFOR 审中-实审
公开(公告)号：EP4334489A1
公开(公告)日：2024-03-13
申请号：EP22799281.5
申请日：2022-04-18
申请人： Applied Materials, Inc.
发明人： SAUER, Andreas , HLADIK, Annemarie , KÖHLER, Bernhard , DEPPISCH, Thomas , ARMSTRONG, Claire , BUSCHBECK, Wolfgang
IPC分类号： C23C14/56 , C23C14/54 , C23C14/22 , C23C16/54 , C23C16/46 , C23C16/455

9. 发明公开

EP4317523A1 METHOD, DEVICE AND SYSTEM FOR PREPARING COMPOSITE METAL FOIL 审中-实审
公开(公告)号：EP4317523A1
公开(公告)日：2024-02-07
申请号：EP23736964.0
申请日：2023-01-01
申请人： Chongqing Jimat New Material Technology Co., Ltd.
发明人： ZANG, Shiwei
IPC分类号： C23C14/24 , C23C14/02 , C23C14/26 , C23C14/56 , B05C9/06 , B65H18/10
摘要： The present disclosure provides a method, device, and system for manufacturing a composite metal foil. The device includes: a first-time double-sided coating module and a second-time double-sided coating module that are arranged at an interval, where the first-time double-sided coating module includes: a first vapor deposition column and a second vapor deposition column that are arranged oppositely, and an unwinding roller, a first evaporation source, a first set of over rollers, a second evaporation source, and a second set of over rollers that are arranged sequentially from bottom to top on opposite surfaces of the first vapor deposition column and the second vapor deposition column; and the second-time double-sided coating module includes: a third vapor deposition column, and a first set of cooling rollers, a third evaporation source, a second set of cooling rollers, a fourth evaporation source, and a winding roller that are arranged sequentially from top to bottom on the third vapor deposition column. The sequential arrangement of the two evaporation sources and corresponding rollers from bottom to top on the opposite surfaces of the first vapor deposition column and the second vapor deposition column allows first-time double-sided coating, and the sequential arrangement of the two evaporation sources and corresponding rollers from top to bottom on the third vapor deposition column allows second-time double-sided coating, which can improve the site utilization and the film production efficiency.

10. 发明授权

EP3760758B1 METHOD FOR PRODUCING GRAIN-ORIENTED ELECTRICAL STEEL SHEET AND CONTINUOUS FILM-FORMING DEVICE 有权
公开(公告)号：EP3760758B1
公开(公告)日：2024-02-07
申请号：EP19775554.9
申请日：2019-03-25
发明人： SHINGAKI, Yukihiro , UMADA, Takumi
IPC分类号： C23C14/54 , C23C16/52 , C23C14/56 , C23C16/54 , C23C14/06 , C23C14/02 , C23C16/02 , C23C16/34 , H01F1/18

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