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    • 8. 发明公开
    • ARRAY SUBSTRATE AND PREPARATION METHOD THEREFOR, AND DISPLAY DEVICE
    • ARRAYSUBSTRAT UND HERSTELLUNGSVERFAHRENDAFÜRUND ANZEIGEVORRICHTUNG
    • EP3073522A4
    • 2017-06-28
    • EP14859300
    • 2014-07-25
    • BOE TECHNOLOGY GROUP CO LTD
    • LIU XIANG
    • H01L27/12H01L21/027H01L21/28H01L21/311H01L21/3213H01L29/49H01L29/66H01L29/786
    • H01L27/1288H01L21/02565H01L21/0274H01L21/28008H01L21/31144H01L21/32139H01L21/441H01L21/469H01L21/47573H01L21/47635H01L21/56H01L21/76831H01L23/3171H01L23/5226H01L23/528H01L27/1225H01L27/124H01L27/1259H01L27/127H01L29/24H01L29/4908H01L29/66969H01L29/7869H01L2924/0002H01L2924/00
    • An array substrate, a manufacturing method thereof, and a display device are provided, which are related to a display technology filed. The method includes: forming a pattern layer (201a) including a pixel electrode (20), and a pattern layer including a gate electrode (30) and a gate line on a base substrate (10) through one patterning process; on the substrate (10) with the pattern layer including the gate electrode (30) and the gate line formed thereon, forming a gate insulating layer (401), a pattern layer at least including a metal oxide semiconductor active layer (50) and a pattern layer at least including an etch stop layer (601) through one patterning process or two patterning processes; wherein, a first via hole (71) for exposing the pixel electrode (20) is formed over the pixel electrode (20); on the substrate (10) with the etch stop layer (601) formed thereon, forming a pattern layer including a source electrode (80a), a drain electrode (80b) and a data line through one patterning process; wherein, the source electrode (80a) and the drain electrode (80b) each contact a metal oxide semiconductor active layer (50), and the drain electrode (80a) is electrically connected to the pixel electrode (20) through the first via hole (71).
    • 提供了一种阵列基板及其制造方法和显示装置,与显示技术领域相关。 该方法包括:通过一次构图工艺在衬底基板(10)上形成包括像素电极(20)的图形层(201a)以及包括栅电极(30)和栅线的图形层; 在具有包括栅极电极30和形成在其上的栅极线的图案层的衬底10上形成栅极绝缘层401,至少包括金属氧化物半导体活性层50和图案化层50的图案层, 通过一个构图工艺或两个构图工艺至少包括蚀刻停止层(601)的图案层; 其中,在像素电极(20)上形成用于暴露像素电极(20)的第一通孔(71); 在其上形成有蚀刻停止层(601)的衬底(10)上,通过一次构图工艺形成包括源电极(80a),漏电极(80b)和数据线的图形层; 其中,所述源电极80a和所述漏电极80b分别与金属氧化物半导体有源层50接触,所述漏电极80a通过所述第一过孔电连接所述像素电极20, 71)。