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    • 3. 发明公开
    • THIN FILM TRANSISTOR SUBSTRATE AND METHOD FOR MANUFACTURING THE SAME
    • 薄膜晶体管衬底及其制造方法
    • EP3086370A1
    • 2016-10-26
    • EP16166197.0
    • 2016-04-20
    • LG Display Co., Ltd.
    • SHIN, HyunsooCHUNG, Ujin
    • H01L27/12
    • A thin film transistor substrate includes a substrate; a first thin film transistor on the substrate and including a polycrystalline semiconductor layer, a first gate electrode on the polycrystalline semiconductor layer, a first source electrode, and a first drain electrode; a second thin film transistor on the substrate and including a second gate electrode, an oxide semiconductor layer on the second gate electrode, a second source electrode, and a second drain electrode; an intermediate insulating layer on the first gate electrode and the second gate electrode and under the oxide semiconductor layer; and a dummy layer between the first source electrode and the intermediate insulating layer and between the first drain electrode and the intermediate insulating layer, wherein the dummy layer is formed of a same material as the oxide semiconductor layer.
    • 薄膜晶体管基板包括基板; 第一薄膜晶体管,所述第一薄膜晶体管位于所述衬底上并且包括多晶半导体层,所述多晶半导体层上的第一栅电极,第一源电极和第一漏电极; 第二薄膜晶体管,所述第二薄膜晶体管在所述衬底上并且包括第二栅电极,在所述第二栅电极上的氧化物半导体层,第二源电极和第二漏电极; 在所述第一栅电极和所述第二栅电极上以及所述氧化物半导体层下方的中间绝缘层; 以及在第一源电极和中间绝缘层之间以及在第一漏电极和中间绝缘层之间的虚设层,其中虚设层由与氧化物半导体层相同的材料形成。