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    • 6. 发明公开
    • HIGH-MOLECULAR-WEIGHT POLYSILANE AND METHOD FOR PRODUCING SAME
    • 多伦多多伦多维多利亚州ZER HERSTELLUNG DAVON
    • EP3170793A1
    • 2017-05-24
    • EP15821835.4
    • 2015-06-30
    • Thin Film Electronics ASA
    • ENDO, MasahisaSON, GunGOTO, YuichiNAGAI, Kentaro
    • C01B33/04C01B33/02C03C17/22C08G77/60
    • C08G77/60B05D3/0254C01B33/02C01B33/021C01B33/04C03C17/22C09D5/24C09D183/16H01L21/02532
    • There is provided a highly conductive and good silicon thin film which is obtained by applying a coating-type polysilane composition prepared by use of a polysilane having a large weight average molecular weight to a substrate, followed by baking. A polysilane having a weight average molecular weight of 5,000 to 8,000. The polysilane may be a polymer of cyclopentasilane. A silicon film obtained by applying a polysilane composition in which the polysilane is dissolved in a solvent to a substrate, and baking the substrate at 100°C to 425°C. The cyclopentasilane may be polymerized in the presence of a palladium catalyst supported on a polymer. The palladium catalyst supported on a polymer may be a catalyst in which palladium as a catalyst component is immobilized on a functional polystyrene. The palladium may be a palladium compound or a palladium complex. The palladium-immobilized catalyst may be formed by microencapsulating a zero-valent palladium complex or a divalent palladium compound with a functional polystyrene. The zero-valent palladium complex may be a tetrakis(triphenylphosphine)palladium (0) complex.
    • 提供了一种高导电性和良好的硅薄膜,其通过将通过使用具有大重均分子量的聚硅烷制备的涂料型聚硅烷组合物施用到基材上,随后进行烘焙而获得。 重均分子量为5,000〜8000的聚硅烷。 聚硅烷可以是环戊硅烷的聚合物。 将通过将聚硅烷溶解于溶剂中的聚硅烷组合物涂布在基材上而在100℃〜425℃下进行烧成而得到的硅膜。 环戊硅烷可以在负载在聚合物上的钯催化剂存在下聚合。 负载在聚合物上的钯催化剂可以是其中作为催化剂组分的钯固定在官能聚苯乙烯上的催化剂。 钯可以是钯化合物或钯络合物。 钯固定化催化剂可以通过用功能聚苯乙烯微囊化零价钯络合物或二价钯化合物来形成。 零价钯络合物可以是四(三苯基膦)钯(0)​​络合物。