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    • 4. 发明公开
    • METHOD FOR MANUFACTURING ORGANIC ELECTROLUMINESCENT ELEMENT
    • VERFAHREN ZUR HERSTELLOW EINES ORGANISCHEN ELEKTROLUMINESZENZELEMENTS
    • EP2768285A1
    • 2014-08-20
    • EP12840616.2
    • 2012-08-24
    • Nitto Denko Corporation
    • KAKIUCHI, RyoheiHIDA, KanakoMORITA, Shigenori
    • H05B33/10H01L51/50
    • H01L51/0008C23C14/12C23C14/24H01L51/001H01L51/0081H01L51/5008H01L51/5012
    • A method for producing an organic EL element having excellent electric properties in a relatively low cost is provided. The present invention is a method of producing the organic EL element including at least two organic layers of a first organic layer and a second organic layer, and a mixed layer in which forming materials of both of the layers are mixed between the first organic layer and the second organic layer. The method including the steps of using a vapor deposition apparatus 7 including a first vapor deposition source 721 including the first organic layer forming material and a second vapor deposition source 722 including the second organic layer forming material; forming the first organic layer on a surface to be processed of a substrate 73 by colliding the first organic layer forming material vaporized from the first vapor deposition source 721 with the surface to be processed of the substrate 73; and thereafter, forming the mixed layer by colliding the vaporized second organic layer forming material from the second vapor deposition source 722 with the first organic layer in a migration state of the first organic layer forming material.
    • 提供了以相对低的成本制造具有优异的电特性的有机EL元件的方法。 本发明是一种制造有机EL元件的方法,该有机EL元件包括至少两个第一有机层和第二有机层的有机层,以及混合层,其中两层的成形材料混合在第一有机层和 第二有机层。 该方法包括以下步骤:使用包括第一有机层形成材料的第一气相沉积源721和包括第二有机层形成材料的第二气相沉积源722的蒸镀装置7; 通过将从第一气相沉积源721蒸发的第一有机层形成材料与基板73的待处理表面碰撞,在基板73的待加工表面上形成第一有机层; 然后通过在第一有机层形成材料的迁移状态下将来自第二气相沉积源722的蒸发的第二有机层形成材料与第一有机层碰撞来形成混合层。
    • 7. 发明公开
    • Organic EL device manufacturing method and apparatus
    • Verfahren und Vorrichtung zur Herstellung einer organischen EL-Vorrichtung
    • EP2469619A1
    • 2012-06-27
    • EP11194375.9
    • 2011-12-19
    • Nitto Denko Corporation
    • Nakai, TakahiroMORITA, Shigenori
    • H01L51/56H01L51/00C23C14/56C23C14/04
    • H01L51/0011C23C14/042C23C14/12C23C14/562H01L51/0012H01L51/56
    • Provided is an organic EL device manufacturing method including a vapor deposition step of supplying a substrate, and while moving the substrate with a non-electrode-layer side thereof in contact with a surface of a can roller, the non-electrode-layer side being provided with no electrode layer, discharging an evaporated organic layer forming material from a nozzle of a vapor deposition source to form an organic layer on an electrode-layer side of the substrate, the electrode-layer side being provided with an electrode layer, wherein the vapor deposition step includes: supplying a shadow mask including an opening portion so as to interpose the shadow mask between the substrate held in contact with the can roller, and the nozzle; and forming the organic layer corresponding to the opening portion on the electrode-layer side of the substrate, while moving the substrate and the shadow mask with through holes included at each of the substrate and the shadow mask engaged with projections included in the can roller.
    • 本发明提供一种有机EL元件的制造方法,其特征在于,包括:供给基板的蒸镀工序,在使非电极层侧的基板与罐辊的表面接触的同时使所述基板移动,所述非电极层侧为 没有电极层,从气相沉积源的喷嘴排出蒸发的有机层形成材料,以在基板的电极层侧形成有机层,电极层侧设置有电极层,其中, 气相沉积步骤包括:提供包括开口部分的荫罩,以将荫罩插入到与罐辊接触的基板和喷嘴之间; 在基板和荫罩上移动基板和荫罩时,与基​​板的电极层侧的开口部相对应地形成有机层,并且将包含在基板和荫罩中的每个基板和荫罩上的通孔与包含在筒辊中的突起接合。