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1. 发明公开

EP2701466A1 METHOD AND DEVICE FOR PRODUCING ORGANIC EL ELEMENT 审中-公开
标题翻译：生产有机EL元件的方法和装置
公开(公告)号：EP2701466A1
公开(公告)日：2014-02-26
申请号：EP12863567.9
申请日：2012-12-10
申请人： Nitto Denko Corporation
发明人： KAKIUCHI, Ryohei , YAMAMOTO, Satoru , HIDA, Kanako
IPC分类号： H05B33/10 , C23C14/24 , H01L51/50
CPC分类号： H01L33/005 , C23C14/042 , C23C14/562 , H01L51/001 , H01L51/56
摘要： Provided are a method and an apparatus for manufacturing an organic EL device which enable deposition of a vaporized material onto a substrate in a desired pattern, while eliminating the need for a conventional strip-shaped shadow mask. A shielding portion is configured to be switchable between a shield position where the shielding portion is arranged between an evaporation source and a substrate so as to shield the substrate and a shield release position where the shielding portion is withdrawn from between the evaporation source and the substrate so as to release the shielding of the substrate. The shielding portion is moved in a transportation direction at the same speed as the substrate when the shielding portion is located at the shield position, whereas the shielding portion is moved in a direction opposite to the transportation direction when the shielding portion is located at the shield release position.
摘要翻译：本发明提供一种有机EL元件的制造方法及装置，其不需要现有的带状荫罩，能够将蒸镀材料以期望的图案沉积于基板上。遮蔽部被构成为能够在将遮蔽部配置在蒸发源与基板之间以遮蔽基板的遮蔽位置和遮蔽部从蒸发源与基板之间退避的遮蔽释放位置以释放衬底的屏蔽。当屏蔽部分位于屏蔽位置时，屏蔽部分以与基板相同的速度沿输送方向移动，而当屏蔽部分位于屏蔽位置时，屏蔽部分沿与输送方向相反的方向移动释放位置。

2. 发明授权

EP2704533B1 METHOD AND DEVICE FOR PRODUCING ORGANIC EL ELEMENT 有权
标题翻译：生产有机EL元件的方法和装置
公开(公告)号：EP2704533B1
公开(公告)日：2017-12-13
申请号：EP12776185.6
申请日：2012-04-06
申请人： Nitto Denko Corporation
发明人： KAKIUCHI, Ryohei , MORITA, Shigenori , HIDA, Kanako
IPC分类号： H01L51/56 , H01L51/50 , H05B33/10 , C23C14/24 , C23C14/12 , C23C14/56
CPC分类号： H01L51/5012 , C23C14/12 , C23C14/24 , C23C14/562 , H01L51/0002 , H01L51/0004 , H01L51/56 , H01L2251/55 , H05B33/10
摘要： Provided is a method for manufacturing an organic EL device, including: a vapor deposition step of forming an organic layer over a substrate moving relative to a nozzle by discharging a vaporized organic layer-forming material through the nozzle. The vapor deposition step is performed so that a light emitting region formed of the organic layer and having a width A (mm) in a direction perpendicular to a direction in which the substrate is moving is formed, and so that W ‰¥ A + 2 × h (where h ‰¤ 5 mm) is satisfied, where a length of an opening of the nozzle in the direction perpendicular to the direction in which the substrate is moving is denoted by W (mm), and a distance between the opening and the substrate is denoted by h (mm).

3. 发明公开

EP2770803A1 METHOD AND APPARATUS FOR MANUFACTURING ORGANIC EL DEVICE 审中-公开
标题翻译： VERFAHREN UND VORRICHTUNG ZUR HERSTELLUNG EINES ORGANISCHEN ELEKTROLUMINISZENZBAUEMENTS
公开(公告)号：EP2770803A1
公开(公告)日：2014-08-27
申请号：EP12840911.7
申请日：2012-10-17
申请人： Nitto Denko Corporation
发明人： KAKIUCHI, Ryohei , YAMAMOTO, Satoru , HIDA, Kanako
IPC分类号： H05B33/10 , C23C14/56 , H01L51/50
CPC分类号： H01L51/001 , B65H23/32 , B65H2301/5114 , B65H2301/51145 , C23C14/12 , C23C14/562 , H01L51/56 , H05B33/10
摘要： Provided are a method and an apparatus for manufacturing an organic EL device, which makes it possible to manufacture organic EL devices capable of suppressing quality degradation. The method for manufacturing an organic EL device, in which constituent layers of an organic EL element are formed by deposition over a substrate in the form of a strip, while the substrate is being moved in the longitudinal direction, includes a constituent layer-forming step of performing deposition over one surface of the substrate, while the substrate is being moved in the longitudinal direction, sequentially in first and second deposition units arranged along the moving direction of the substrate by discharging a vaporized material from an evaporation source. The constituent layer-forming step includes a plurality of upward deposition steps and a direction changing step.
摘要翻译：提供一种制造有机EL器件的方法和设备，其可以制造能够抑制质量劣化的有机EL器件。包含构成层形成工序的制造有机EL元件的制造方法，其中有机EL元件的构成层通过在条形状的基板上沉积而形成，在基板沿着纵向方向移动的同时，在沿着基板的移动方向布置的第一和第二沉积单元中顺序地在基板的一个表面上进行沉积，从蒸发源排出蒸发的材料。构成层形成步骤包括多个向上沉积步骤和方向改变步骤。

4. 发明公开

EP2744305A1 METHOD AND DEVICE FOR MANUFACTURING ORGANIC EL ELEMENT 审中-公开
标题翻译： VERFAHREN UND VORRICHTUNG ZUR HERSTELLUNG EINES ORGANISCHEN ELEKTROLUMINESZENZELEMENTS
公开(公告)号：EP2744305A1
公开(公告)日：2014-06-18
申请号：EP12823700.5
申请日：2012-08-02
申请人： Nitto Denko Corporation
发明人： NEGISHI, Nobukazu , MORITA, Shigenori , NAGASE, Junichi , NAKAI, Takahiro , KAKIUCHI, Ryohei , HOSOKAWA, Kazuhito
IPC分类号： H05B33/10 , C23C14/00 , C23C14/04 , H01L51/50
CPC分类号： H01L51/0011 , C23C14/042 , C23C14/562 , C23C14/564 , H01L51/56 , H05B33/10
摘要： To provide a manufacturing method of an organic EL device, including: arranging a shadow mask, which has a rotating body having a plate shape rotationally driven around a rotary shaft and has an opening formed in the rotating body, in the vicinity of a substrate in contact with a conveyance section, and between the substrate and a nozzle of an evaporation source arranged opposite to the conveyance section and at a close position to the substrate; and while the shadow mask is being rotated so as to follow the movement of the substrate, discharging a vaporized constituent layer forming material of an organic EL film from the nozzle to form a constituent layer of the organic EL film on the other surface side of the substrate to the conveyance section.
摘要翻译：为了提供一种有机EL器件的制造方法，包括：将具有旋转体旋转驱动的旋转体的旋转体配置在旋转体的周围的基板附近，与输送部接触，并且在基板和与输送部相对设置的蒸发源的喷嘴之间并且与基板接近的位置; 并且当荫罩被旋转以跟随基板的移动时，从喷嘴排出有机EL膜的汽化构成层形成材料，以在该另一表面侧上形成有机EL膜的构成层基板到输送部。

5. 发明授权

EP2773165B1 ORGANIC ELECTROLUMINESCENCE DEVICE MANUFACTURING METHOD AND MANUFACTURING APPARATUS 有权
标题翻译：有机电致发光装置制造方法和制造装置
公开(公告)号：EP2773165B1
公开(公告)日：2017-07-12
申请号：EP12844447.8
申请日：2012-10-17
申请人： Nitto Denko Corporation
发明人： KAKIUCHI, Ryohei , YAMAMOTO, Satoru , HIDA, Kanako
IPC分类号： H05B33/10 , C23C14/56 , H01L51/50 , B65H23/32
CPC分类号： H01L51/56 , B65H23/32 , B65H2301/5114 , C23C14/12 , C23C14/562 , H01L51/0008

6. 发明公开

EP2813597A1 CRUCIBLE FOR VAPOR DEPOSITION, VAPOR DEPOSITION DEVICE, AND VAPOR DEPOSITION METHOD 审中-公开
标题翻译：坩埚气相分离装置：用于气相分离气相分离和方法
公开(公告)号：EP2813597A1
公开(公告)日：2014-12-17
申请号：EP12868093.1
申请日：2012-09-11
申请人： Nitto Denko Corporation
发明人： KAKIUCHI, Ryohei , YAMAMOTO, Satoru
IPC分类号： C23C14/24 , H01L51/50 , H05B33/10
CPC分类号： C23C14/543 , C23C14/243 , C23C14/50 , C23C14/545 , H01L51/001 , H01L51/56
摘要： Provided are a crucible for vapor deposition, a vapor deposition apparatus and a vapor deposition method capable of detecting a film formation rate using a sensor in vapor deposition by proximity vapor deposition. The crucible according to the present invention includes a storage section that stores a vapor deposition source, a first guide passage that guides a vaporized material emitted from the vapor deposition source toward a substrate to be treated, a wall section for defining the first guide passage and a second guide passage that diverges from a middle part of the first guide passage, penetrates the wall section and communicates with the outside.
摘要翻译：提供了用于气相沉积，气相沉积的装置和能够检测用传感器在气相沉积由邻近汽相沉积膜形成速率的气相沉积方法的坩埚。坩埚雅丁到本发明包括存储部分没有存储的蒸镀源，第一引导通路确实引导从朝向基板的蒸镀源发出的汽化待处理材料，壁部分，用于限定所述第一引导通道和第二引导通道从所述第一引导通道的中间部分没有发散，穿过壁部，并与外部连通。

7. 发明公开

EP2701465A1 METHOD AND DEVICE FOR PRODUCING ORGANIC EL ELEMENT 审中-公开
标题翻译：生产有机EL元件的方法和装置
公开(公告)号：EP2701465A1
公开(公告)日：2014-02-26
申请号：EP12862802.1
申请日：2012-12-10
申请人： Nitto Denko Corporation
发明人： KAKIUCHI, Ryohei , YAMAMOTO, Satoru , HIDA, Kanako
IPC分类号： H05B33/10 , C23C14/24 , H01L51/50
CPC分类号： H01L51/5012 , C23C14/042 , C23C14/562 , H01L51/001 , H01L51/56
摘要： Provided are a method and an apparatus for manufacturing an organic EL device which enable deposition of a vaporized material from an evaporation source onto a substrate in a desired pattern, while eliminating the need for a conventional strip-shaped shadow mask. A shielding portion 51 is configured to be switchable between a shield position where the shielding portion 51 is arranged between an evaporation source 4 and a substrate 81 so as to shield the substrate 81 and a shield release position where the shielding portion 51 is withdrawn from between the evaporation source 4 and the substrate 81 so as to release the shielding of the substrate 81. The shielding portion 51 is switched between the shield position and the shield release position while rotating together with a roller 3.
摘要翻译：本发明提供一种有机EL元件的制造方法和制造装置，其不需要以往的带状荫罩，并且能够将来自蒸发源的气化物以期望的图案沉积到基板上。遮蔽部51构成为能够在遮蔽部51配置在蒸镀源4与基板81之间以遮蔽基板81的遮蔽位置和遮蔽部51从两者之间退避的遮蔽解除位置蒸发源4和基板81，以释放基板81的屏蔽。屏蔽部分51在与辊3一起旋转的同时在屏蔽位置和屏蔽释放位置之间切换。

8. 发明公开

EP2827682A1 MANUFACTURING METHOD AND MANUFACTURING DEVICE FOR ORGANIC EL ELEMENTS 审中-公开
标题翻译：制造方法和用于有机EL元件的制造装置
公开(公告)号：EP2827682A1
公开(公告)日：2015-01-21
申请号：EP13760732.1
申请日：2013-03-07
申请人： Nitto Denko Corporation
发明人： KAKIUCHI, Ryohei , YAMAMOTO, Satoru
IPC分类号： H05B33/10 , C23C14/24 , H01L51/50
CPC分类号： H05B33/10 , C23C14/042 , C23C14/06 , C23C14/22 , C23C14/50 , C23C14/562 , H01L51/0011 , H01L51/56
摘要： The invention allows evaporation materials discharged from evaporation sources to deposit on a substrate with a desired pattern, while eliminating the need for the conventional strip-shaped shadow mask, and enables correction of the effects due to the substrate being displaced during conveyance. In the apparatus for manufacturing an organic EL device, a first drive section rotates a roller at a specific rotational speed, thereby conveying the substrate that is in contact with the roller. This apparatus performs deposition of evaporation materials discharged from evaporation sources on the substrate with such conveyance. In this apparatus, a shielding section is driven by a second drive section so as to pivot around an axis of the roller at a specific pivot speed, thereby shielding and unshielding the substrate. The second drive section changes the pivot speed of the shielding section so that it is different from the rotational speed of the roller.
摘要翻译：本发明允许从蒸发源排出的蒸发材料以期望的图案沉积在基板上，同时消除对常规条形荫罩的需求，并且能够校正由于在传送期间基板被移位而导致的效果。在用于制造有机EL装置的设备中，第一驱动部分以特定旋转速度旋转辊，由此输送与辊接触的基板。通过这种输送，该装置将从蒸发源排出的蒸发材料沉积在基板上。在该设备中，屏蔽部分由第二驱动部分驱动，以便以特定的枢转速度围绕辊的轴线枢转，由此屏蔽和不屏蔽基板。第二驱动部分改变遮蔽部分的转动速度，使其不同于辊子的转动速度。

9. 发明公开

EP2773165A1 ORGANIC ELECTROLUMINESCENCE DEVICE MANUFACTURING METHOD AND MANUFACTURING APPARATUS 有权
标题翻译： HERSTELLUNGSVERFAHRENFÜRORGANISCHE ELEKTROLUMINESZENZVORRICHTUNG UND HERSTELLUNGSVORRICHTUNG
公开(公告)号：EP2773165A1
公开(公告)日：2014-09-03
申请号：EP12844447.8
申请日：2012-10-17
申请人： Nitto Denko Corporation
发明人： KAKIUCHI, Ryohei , YAMAMOTO, Satoru , HIDA, Kanako
IPC分类号： H05B33/10 , C23C14/56 , H01L51/50
CPC分类号： H01L51/56 , B65H23/32 , B65H2301/5114 , C23C14/12 , C23C14/562 , H01L51/0008
摘要： Provided is a method and an apparatus for manufacturing an organic EL device which make it possible to manufacture organic EL devices capable of suppressing quality degradation. The method for manufacturing an organic EL device, in which constituent layers of an organic EL element are formed over a substrate in the form of a strip by deposition, while the substrate is being moved in the longitudinal direction, includes: a constituent layer-forming step of performing deposition over one surface of the substrate, while the substrate is being moved in the longitudinal direction, sequentially in an upward deposition unit and a lateral deposition unit provided along the moving direction of the substrate by discharging a vaporized material from an evaporation source. The constituent layer-forming step includes an upward deposition step, a laterally deposition step, and a direction changing step.
摘要翻译：提供一种制造有机EL器件的方法和装置，其可以制造能够抑制质量劣化的有机EL器件。一种有机EL元件的制造方法，其特征在于，有机EL元件的构成层在基板沿长度方向移动的同时通过沉积形成在带状的基板上，包括：构成层形成在基板沿纵向方向移动的同时，在沿着基板的移动方向设置的向上沉积单元和横向沉积单元中顺序地在基板的一个表面上进行沉积的步骤，从蒸发源排出蒸发的材料。构成层形成步骤包括向上沉积步骤，横向沉积步骤和方向改变步骤。

10. 发明公开

EP2768285A1 METHOD FOR MANUFACTURING ORGANIC ELECTROLUMINESCENT ELEMENT 审中-公开
标题翻译： VERFAHREN ZUR HERSTELLOW EINES ORGANISCHEN ELEKTROLUMINESZENZELEMENTS
公开(公告)号：EP2768285A1
公开(公告)日：2014-08-20
申请号：EP12840616.2
申请日：2012-08-24
申请人： Nitto Denko Corporation
发明人： KAKIUCHI, Ryohei , HIDA, Kanako , MORITA, Shigenori
IPC分类号： H05B33/10 , H01L51/50
CPC分类号： H01L51/0008 , C23C14/12 , C23C14/24 , H01L51/001 , H01L51/0081 , H01L51/5008 , H01L51/5012
摘要： A method for producing an organic EL element having excellent electric properties in a relatively low cost is provided. The present invention is a method of producing the organic EL element including at least two organic layers of a first organic layer and a second organic layer, and a mixed layer in which forming materials of both of the layers are mixed between the first organic layer and the second organic layer. The method including the steps of using a vapor deposition apparatus 7 including a first vapor deposition source 721 including the first organic layer forming material and a second vapor deposition source 722 including the second organic layer forming material; forming the first organic layer on a surface to be processed of a substrate 73 by colliding the first organic layer forming material vaporized from the first vapor deposition source 721 with the surface to be processed of the substrate 73; and thereafter, forming the mixed layer by colliding the vaporized second organic layer forming material from the second vapor deposition source 722 with the first organic layer in a migration state of the first organic layer forming material.
摘要翻译：提供了以相对低的成本制造具有优异的电特性的有机EL元件的方法。本发明是一种制造有机EL元件的方法，该有机EL元件包括至少两个第一有机层和第二有机层的有机层，以及混合层，其中两层的成形材料混合在第一有机层和第二有机层。该方法包括以下步骤：使用包括第一有机层形成材料的第一气相沉积源721和包括第二有机层形成材料的第二气相沉积源722的蒸镀装置7; 通过将从第一气相沉积源721蒸发的第一有机层形成材料与基板73的待处理表面碰撞，在基板73的待加工表面上形成第一有机层; 然后通过在第一有机层形成材料的迁移状态下将来自第二气相沉积源722的蒸发的第二有机层形成材料与第一有机层碰撞来形成混合层。

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