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    • 1. 发明公开
    • ELECTRON BEAM PHYSICAL VAPOR DEPOSITION APPARATUS WITH INGOT MAGAZINE
    • 带有INGOT杂志的电子束物理气相沉积设备
    • EP1131474A1
    • 2001-09-12
    • EP00950976.1
    • 2000-08-03
    • GENERAL ELECTRIC COMPANY
    • BRUCE, Robert, WilliamEVANS, John, Douglas, Sr.MARICOCCHI, Antonio, FrankVIGUIE, RudolfoWORTMAN, David, JohnRIGNEY, David, VincentWILLEN, William, Seth
    • C23C14/30C23C14/56
    • An electron beam physical vapor deposition (EBPVD) apparatus (10) and a method for using the apparatus (10) to produce a coating (e.g., a ceramic thermal barrier coating) on an article (20). The EBPVD apparatus (10) generally includes a coating chamber (12) that is operable at elevated temperatures and subatmospheric pressures. An electron beam gun (30) projects an electron beam (28) into the coating chamber (12) and onto a coating material (26) within the chamber (12), causing the coating material (26) to melt and evaporate. An article (20) is supported within the coating chamber (12) so that vapors of the coating material (26) deposit on the article (20). The operation of the EBPVD apparatus (10) is enhanced by the inclusion of a rotatable magazine (102) that supports multiple ingots (26) of the coating material (26) beneath the coating chamber (12). The magazine (102) is indexed to individually align multiple stacks of one or more ingots (26) with an aperture (56) to the coating chamber (12) for sequentially feeding the ingots (26) into the coating chamber (12) without interrupting deposition of the coating material (26).
    • 电子束物理气相沉积(EBPVD)装置(10)和使用该装置(10)在物品(20)上产生涂层(例如陶瓷热障涂层)的方法。 EBPVD设备(10)通常包括可在高温和低于大气压下操作的涂覆室(12)。 电子束枪(30)将电子束(28)投射到涂覆室(12)中并且投射到室(12)内的涂层材料(26)上,使涂层材料(26)熔化并蒸发。 物品(20)被支撑在涂布室(12)内,使得涂料(26)的蒸气沉积在物品(20)上。 EBPVD设备(10)的操作通过包括支撑涂覆室(12)下面的涂覆材料(26)的多个锭(26)的可旋转仓库(102)而得到增强。 将料盒(102)转位以单独地将具有孔(56)的一个或多个锭块(26)的多个堆叠排列到涂覆室(12),以顺序地将锭块(26)供给到涂覆室(12)中而不中断 沉积涂层材料(26)。