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    • 10. 发明公开
    • PRESSURE SENSOR PACKAGE AND ELECTRONIC PART
    • DRUCKSENSORPAKET UND ELEKTRONISCHES TEIL
    • EP1975587A1
    • 2008-10-01
    • EP07707089.4
    • 2007-01-19
    • FUJIKURA LTD.
    • YAMAMOTO, SatoshiHASHIMOTO, MikioSUZUKI, Takanao
    • G01L9/00
    • G01L9/0042G01L9/0054G01L19/0069H01L2224/48091H01L2924/00014
    • A pressure sensor package (10) of the present invention includes: a pressure sensor (11) including at least a first conductive portion (17) having a space (13) inside a central region (α) on a surface of a semiconductor substrate, a thin-plate region above the space serving as a diaphragm section (14), and pressure sensitive elements (15) arranged in the diaphragm section, the first conductive portion being arranged on a peripheral region (β) excluding the diaphragm section on the surface and electrically connected to each of the pressure sensitive elements (15); and a first bump (18) arranged on the first conductive portion and electrically connected to it, wherein the thickness D1 of the semiconductor substrate at the peripheral region, the thickness D2 of the diaphragm section, the height D3 of the space, and the remaining thickness D4 of the semiconductor substrate excluding D2 and D3 at the central region satisfy the relationships: (D2+D3)
    • 本发明的压力传感器封装(10)包括:压力传感器(11),其至少包括在半导体衬底的表面上的中心区域(±)内具有空间(13)的第一导电部分(17) 在作为隔膜部分的空间上方的薄板区域和布置在隔膜部分中的压敏元件(15),第一导电部分布置在不包括表面上的隔膜部分的周边区域(2)上 并且电连接到每个压敏元件(15); 以及布置在第一导电部分上并与其电连接的第一凸块(18),其中半导体衬底在周边区域处的厚度D1,隔膜部分的厚度D2,空间的高度D3以及剩余部分 除了中心区域D2和D3之外的半导体衬底的厚度D4满足以下关系:(D2 + D3)<< D4和D1几乎等于D4。