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1. 发明公开

EP3098833A1 ADAPTIVE SCANNING FOR PARTICLE SIZE USING DIRECTED BEAM SIGNAL ANALYSIS 审中-公开
标题翻译：自适应扫描用于测量粒度使用面向波束信号分析
公开(公告)号：EP3098833A1
公开(公告)日：2016-11-30
申请号：EP15169668.9
申请日：2015-05-28
申请人： FEI Company
发明人： Kooijman, Cornelis , Faber, Pybe
IPC分类号： H01J61/28 , H01J37/26
CPC分类号： H01J37/28 , H01J2237/2811 , H01J2237/2817
摘要： Methods and systems are provided for a scanning microscope to rapidly form a partial digital image of an area. The method includes performing an initial scan for the area and using initial scan to identify regions representing features of interest in the area. Then, the method performs additional adaptive scans of the regions representing structures of interest. Such scans adapt the path of the scanning beam to follow the edges of a feature of interest by performing localized scan patterns that intersect the feature edge, and directing the localized scan patterns to follow the feature edge.
摘要翻译：提供了用于扫描显微镜迅速形成的区域的部分的数字图像的方法和系统。该方法包括在用于区域初始扫描执行，并使用初始扫描，以识别表示在该地区的感兴趣的特征的区域。然后，该方法执行代表感兴趣结构的区域的附加自适应扫描。搜索扫描适应扫描光束的路径中通过进行局部扫描图案确实相交的特征边缘，以及将所述局部扫描图案跟随特征边缘遵循的感兴趣的特征的边缘。

2. 发明公开

EP2653892A2 Method for analyzing an EDS signal 有权
标题翻译： Verfahren zur分析EDS信号
公开(公告)号：EP2653892A2
公开(公告)日：2013-10-23
申请号：EP13164043.5
申请日：2013-04-17
申请人： FEI COMPANY
发明人： Kooijman, Cornelis , De Vos, Gert-Jan
IPC分类号： G01T1/17 , G01T1/36
CPC分类号： G06F17/18 , G01T1/16 , G01T1/17 , G01T1/36
摘要： The invention relates to a method for analyzing the output signal of a Silicon Drift Detector (SDD). A SDD is used for detecting X-rays in e.g. Scanning Electron Microscopes and X-ray analysis instruments, where X-rays are emitted by a sample as a result of impinging radiation.
The signal of a SDD comprises a number of randomly spaced steps, in which the step height is a function of the energy of the detected X-ray photon.
The variance in step height is a function of the averaging time that can be used to determine the plateau between steps: averaging over a short interval (405) results in more uncertainty of the plateau value than a long interval (403). As the step height relies on determination of the preceding plateau and the following plateau value, step heights (401, 402) have different reliabilities/variances. By according a weight factor, the weight factor a function of the variance such that a step with a low variance (high reliability) is associated with a larger weight factor than a step with a high variance (low reliability), measurement values with a low variance, corresponding to a high reliance, are emphasized. This results in better resolved spectra.
摘要翻译：本发明涉及一种用于分析硅漂移检测器（SDD）的输出信号的方法。 SDD用于检测例如X射线。扫描电子显微镜和X射线分析仪器，其中X射线由于受到辐射的影响而被样品发射。 SDD的信号包括多个随机间隔的步骤，其中台阶高度是所检测的X射线光子的能量的函数。台阶高度的方差是平均时间的函数，可用于确定平台之间的平台：间隔平均（405）导致平台值比长间隔更多的不确定性（403）。由于台阶高度依赖于确定先前的平台和随后的平台值，步高（401,402）具有不同的可靠性/方差。根据权重因子，权重因子是方差的函数，使得具有低方差（高可靠性）的步长与具有高方差（低可靠性）的步长相比具有更大的权重因子，具有低的测量值强调对应于高度依赖的差异。这导致更好的解析光谱。

3. 发明公开

EP2461348A1 Detector system for use with transmission electron microscope spectroscopy 审中-公开
标题翻译： Detektorsystem zur Verwendung mit Transmissionselektronenmikroskop-Spektroskopie
公开(公告)号：EP2461348A1
公开(公告)日：2012-06-06
申请号：EP10193806.6
申请日：2010-12-06
申请人： FEI Company
发明人： Luecken, Uwe , Kooijman, Cornelis , Schuurmans, Frank
IPC分类号： H01J37/244 , H01J37/05 , H01J37/26
CPC分类号： H01J37/244 , H01J37/05 , H01J37/26 , H01J2237/05 , H01J2237/24455 , H01J2237/2446 , H01J2237/24485 , H01J2237/2802 , H01J2237/2817
摘要： A detector system for a transmission electron microscope includes a first detector for recording a pattern and a second detector for recording a position of a feature of the pattern. The second detector is preferably a position sensitive detector that provides accurate, rapid position information that can be used as feedback to stabilize the position of the pattern on the first detector. In one embodiment, the first detector detects an electron energy loss electron spectrum, and the second detector, positioned behind the first detector and detecting electrons that pass through the first detector, detects the position of the zero-loss peak and adjusts the electron path to stabilize the position of the spectrum on the first detector.
摘要翻译：用于透射电子显微镜的检测器系统包括用于记录图案的第一检测器和用于记录图案的特征位置的第二检测器。第二检测器优选地是位置敏感检测器，其提供精确，快速的位置信息，其可以用作反馈以稳定图案在第一检测器上的位置。在一个实施例中，第一检测器检测电子能量损失电子光谱，并且位于第一检测器后面的第二检测器检测通过第一检测器的电子，检测零损耗峰值的位置并调整电子通道稳定第一个检测器上的光谱位置。

4. 发明公开

EP2958130A1 Mathematical image assembly in a scanning-type microscope 审中-公开
标题翻译：在einem Abtastmikroskop的Mathematische Bildrekonstruktion
公开(公告)号：EP2958130A1
公开(公告)日：2015-12-23
申请号：EP14172871.7
申请日：2014-06-18
申请人： FEI COMPANY
发明人： Potocek, Pavel , Kooijman, Cornelis , Slingerland, Hendrik , Veen, van, Gerard , Boughorbel, Faysal , Faber, Jacob Simon
IPC分类号： H01J37/22 , H01J37/28 , G02B21/00
CPC分类号： H01J37/222 , G02B21/0024 , G02B21/0048 , G02B21/008 , H01J37/226 , H01J37/28 , H01J2237/226 , H01J2237/28 , H01J2237/2811
摘要： A method of accumulating an image of a specimen using a scanning-type microscope, comprising the following steps:
- Providing a beam of radiation that is directed from a source through an illuminator so as to irradiate the specimen;
- Providing a detector for detecting a flux of radiation emanating from the specimen in response to said irradiation;
- Causing said beam to undergo scanning motion relative to a surface of the specimen, and recording an output of the detector as a function of scan position,

which method additionally comprises the following steps:
- In a first sampling session S 1 , gathering detector data from a first collection P 1 of sampling points distributed sparsely across the specimen;
- Repeating this procedure so as to accumulate a set {P n } of such collections, gathered during an associated set {S n } of sampling sessions, each set with a cardinality N > 1;
- Assembling an image of the specimen by using the set {P n } as input to an integrative mathematical reconstruction procedure,

wherein, as part of said assembly process, a mathematical registration correction is made to compensate for drift mismatches between different members of the set {P n }.
摘要翻译：使用扫描型显微镜对样本的图像进行累积的方法，包括以下步骤： - 提供从源通过照射器引导以照射样本的辐射束; - 提供检测器，用于响应于所述照射检测从样本发出的辐射通量; - 使所述光束相对于所述检体的表面进行扫描运动，并将所述检测器的输出记录为扫描位置的函数，所述方法还包括以下步骤： - 在第一采样会话S 1中，采集检测器数据从第一集合P 1抽样点稀疏地分布在样本上; - 重复此过程，以便累积在相关集合{S n}采样会话期间收集的集合{P n}，每个集合具有基数N> 1; - 通过使用集合{P n}作为整合数学重建过程的输入来组装样本的图像，其中，作为所述组装过程的一部分，进行数学登记校正以补偿组的不同成员之间的漂移不匹配 {P n}。

5. 发明公开

EP2924709A1 Imaging a sample with multiple beams and multiple detectors 审中-公开
标题翻译： ABBILDUNG EINER探针麻醉师MEHREREN STRAHLEN UND MEHREREN DETEKTOREN
公开(公告)号：EP2924709A1
公开(公告)日：2015-09-30
申请号：EP15160701.7
申请日：2015-03-25
申请人： FEI COMPANY
发明人： Potocek, Pavel , Kooijman, Cornelis , Slingerland, Hendrik , Veen, van, Gerard , Boughorbel, Faysal , Faber, Pybe , Sluijterman, Albertus
IPC分类号： H01J37/244
CPC分类号： H01J37/261 , G01N21/6458 , G01N23/225 , G01N2223/418 , G01N2223/427 , G02B21/0016 , H01J37/06 , H01J37/1472 , H01J37/222 , H01J37/244 , H01J37/265 , H01J37/28 , H01J2237/063 , H01J2237/10 , H01J2237/226 , H01J2237/2446 , H01J2237/2447 , H01J2237/2448 , H01J2237/24507 , H01J2237/2602
摘要： A multi-beam apparatus for inspecting or processing a sample (232) with a multitude of focused beams, the apparatus equipped to scan a multitude of N beams (240-n) over the sample, the apparatus equipped with a multitude of M detectors (234-m) for detecting secondary radiation emitted by the sample when said sample is irradiated by the multitude of beams, each of the detectors capable of outputting a detector signal representing the intensity of the secondary radiation detected by the detector, , in working, each detector signal comprising information caused by multiple beams, the information caused by one beam thus spread over multiple detectors, the apparatus equipped with a programmable controller (236) for processing the multitude of detector signals to a multitude of output signals, using weight factors so that each output signal represents information caused by a single beam, characterized in that the weight factors are dynamic weight factors depending on the scan position of the beams with respect to the detectors and the distance between sample and detectors.
The weight factors describe the contribution of each beam to each detector. The invention is based on the insight that when scanning the beams over the sample, the position of the position where the secondary radiation is formed (the impact position) changes. Therefore the weight factors should be a function of the scan position.
Also the distance between sample and detector (the working distance) has a similar effect on the weight factors
It is noted that, as the position of the impact is known at all times the weight factors can be a known function of the scan position, working distance and, if applicable, the beam energies.
摘要翻译：一种用于用多个聚焦光束检测或处理样品（232）的多光束装置，所述装置配备用于扫描样品上的多个N个光束（240-n），所述装置配备有多个M个检测器每个检测器能够输出表示由检测器检测到的二次辐射的强度的检测器信号，每个检测器信号在工作时，每个检测器检测器信号包括由多个波束引起的信息，由一个波束引起的信息由此分布在多个检测器上，该装置配备有可编程控制器（236），用于使用加权因子将多个检测器信号处理到多个输出信号，使得每个输出信号表示由单个波束引起的信息，其特征在于，所述权重因子是取决于所述扫描位置的动态加权因子相对于检测器的光束和样品和检测器之间的距离。权重因子描述了每个光束对每个探测器的贡献。本发明基于以下认识：当扫描样品上的光束时，形成次级辐射的位置的位置（冲击位置）发生变化。因此，重量因子应该是扫描位置的函数。样品和检测器之间的距离（工作距离）对重量因子也有类似的影响。应注意的是，由于冲击位置始终是已知的，重量因子可以是扫描位置的已知功能，工作距离和（如果适用）射束能量。

6. 发明公开

EP2584363A1 Scanning method for scanning a sample with a probe 审中-公开
标题翻译：用探针扫描样品的扫描方法
公开(公告)号：EP2584363A1
公开(公告)日：2013-04-24
申请号：EP12188958.8
申请日：2012-10-18
申请人： FEI COMPANY
发明人： Kooijman, Cornelis , Hartong, Arthur
IPC分类号： G01Q30/06 , G06T5/50 , G06T7/00 , H01J37/26 , B82Y35/00
CPC分类号： H01J37/26 , G01Q10/00 , G01Q30/06 , H01J37/265 , H01J37/28 , H01J2237/221 , H01J2237/28
摘要： The method relates to a method of scanning a sample. Scanning a sample is typically done by scanning the sample with a probe along a multitude of parallel lines. In prior art scan methods a sample is scanned multiple times with a nominally identical scan pattern. The invention is based on the insight that the coherence between adjacent points in a direction along the scan direction is much better than the coherence of adjacent points perpendicular to the scan direction. By combining two images that are scanned perpendicular to each other, it should thus be possible to form an image making use of the improved coherence (due to shorter temporal distance) in both directions. The method thus involves scanning the sample with two scan patterns, the lines of one scan pattern preferably perpendicular to the lines of the other scan pattern. Hereby it is possible to use the temporal coherence of scan points on a line of one scan pattern to align the lines of the other scan pattern, and vice versa.
摘要翻译：该方法涉及扫描样本的方法。通常通过沿着多条平行线用探针扫描样品来扫描样品。在现有技术的扫描方法中，用标称相同的扫描图案多次扫描样品。本发明基于以下认识：沿着扫描方向的方向上的相邻点之间的相干性比垂直于扫描方向的相邻点的相干性好得多。通过组合彼此垂直扫描的两个图像，因此应该能够在两个方向上利用改善的相干性（由于更短的时间距离）而形成图像。因此该方法涉及用两种扫描图案扫描样品，一种扫描图案的线优选垂直于另一种扫描图案的线。由此可以使用一个扫描图案的线上的扫描点的时间相干性来对齐另一个扫描图案的线，反之亦然。

7. 发明授权

EP3091558B1 ADAPTIVE SCANNING FOR PARTICLE SIZE USING DIRECTED BEAM SIGNAL ANALYSIS 有权
标题翻译：利用有向束信号分析对粒子尺寸进行自适应扫描
公开(公告)号：EP3091558B1
公开(公告)日：2017-11-22
申请号：EP16167122.7
申请日：2016-04-26
申请人： FEI Company
发明人： Kooijman, Cornelis , Faber, Pybe
IPC分类号： H01J37/26 , H01J37/28
CPC分类号： H01J37/28 , H01J2237/2811 , H01J2237/2817
摘要： Methods and systems are provided for a scanning microscope to rapidly form a partial digital image of an area. The method includes performing an initial scan for the area and using initial scan to identify regions representing features of interest in the area. Then, the method performs additional adaptive scans of the regions representing structures of interest. Such scans adapt the path of the scanning beam to follow the edges of a feature of interest by performing localized scan patterns that intersect the feature edge, and directing the localized scan patterns to follow the feature edge.

8. 发明授权

EP2958131B1 MATHEMATICAL IMAGE ASSEMBLY IN A SCANNING-TYPE MICROSCOPE 有权
标题翻译：扫描型显微镜中的数学图像组装
公开(公告)号：EP2958131B1
公开(公告)日：2017-08-09
申请号：EP15172227.9
申请日：2015-06-16
申请人： FEI Company
发明人： Potocek, Pavel , Kooijman, Cornelis , Slingerland, Hendrik , Veen, van, Gerard , Boughorbel, Faysal
IPC分类号： H01J37/22 , H01J37/28 , G02B21/00
CPC分类号： H01J37/222 , G02B21/0024 , G02B21/0048 , G02B21/008 , H01J37/226 , H01J37/28 , H01J2237/226 , H01J2237/28 , H01J2237/2811
摘要： A method of accumulating an image of a specimen using a scanning-type microscope, comprising the following steps: - Providing a beam of radiation that is directed from a source through an illuminator so as to irradiate the specimen; - Providing a detector for detecting a flux of radiation emanating from the specimen in response to said irradiation; - Causing said beam to undergo scanning motion relative to a surface of the specimen, and recording an output of the detector as a function of scan position, which method additionally comprises the following steps: - In a first sampling session S 1 , gathering detector data from a first collection P 1 of sampling points distributed sparsely across the specimen; - Repeating this procedure so as to accumulate a set {P n } of such collections, gathered during an associated set {S n } of sampling sessions, each set with a cardinality N > 1; - Assembling an image of the specimen by using the set {P n } as input to an integrative mathematical reconstruction procedure, wherein, as part of said assembly process, a mathematical registration correction is made to compensate for drift mismatches between different members of the set {P n }.
摘要翻译：一种使用扫描型显微镜累积样本图像的方法，包括以下步骤： - 提供从源通过照射器引导的辐射束以照射样本; - 提供用于检测响应于所述照射从样本发出的辐射通量的检测器; - 使所述光束相对于样本表面进行扫描运动，并根据扫描位置记录检测器的输出，该方法还包括以下步骤： - 在第一采样会话S1中，收集检测器数据从稀疏地分布在样本上的采样点的第一集合P 1开始; - 重复这个过程，以便累积在采样会话的相关集合{S n}期间收集的这样的集合的集合{P n}，每集合具有基数N> 1; - 通过使用集合{P n}作为集成数学重构过程的输入来组装样本的图像，其中，作为所述组装过程的一部分，进行数学配准校正以补偿组中不同构件之间的漂移失配 {P n}。

9. 发明公开

EP2991112A1 Improved radiation sensor, and its application in a charged-particle microscope 审中-公开
标题翻译：电子邮件Ladensteilchenmikroskop的Verbesserter Strahlungssensor und dessen Anwendung
公开(公告)号：EP2991112A1
公开(公告)日：2016-03-02
申请号：EP14182128.0
申请日：2014-08-25
申请人： FEI COMPANY
发明人： Veen, van, Gerard , Kooijman, Cornelis , Haspeslagh, Luc
IPC分类号： H01L27/146 , H01J37/244 , H01L31/105
CPC分类号： H01J37/244 , H01J2237/2441 , H01J2237/2447 , H01J2237/2802 , H01L27/1461 , H01L27/14643 , H01L31/105
摘要： A pixelated CMOS radiation sensor (3) (e.g. in a 4T pinned photodiode device) that comprises a layered structure including:
- A p-type Si substrate (5);
- An n-doped region within said substrate (7);
- A p + -doped layer (9) that overlies said n-doped region;
- An SiO x layer (11) that overlies said p + -doped layer,

in which a Boron film (13) is deposited between said p + -doped layer and said SiO x layer. Application of such a (pure) Boron film serves to reduce leakage current by one or more orders of magnitude. Even a relatively thin Boron film (e.g. thickness 1-2 nm) can produce this effect.
摘要翻译：包括层状结构的像素化CMOS辐射传感器（3）（例如在4T钉扎光电二极管器件中）包括：--P型Si衬底（5）; - 所述衬底（7）内的n掺杂区域; - 覆盖所述n掺杂区域的p +掺杂层（9） - 覆盖所述p +掺杂层的SiO x层（11），其中硼膜（13）沉积在所述p +掺杂层和所述SiO x层之间。这种（纯）硼膜的应用用于将泄漏电流减小一个或多个数量级。即使是相对薄的硼膜（例如厚度1-2nm）也可以产生这种效果。

10. 发明公开

EP2958131A1 MATHEMATICAL IMAGE ASSEMBLY IN A SCANNING-TYPE MICROSCOPE 有权
标题翻译： EINEM ABTASTMIKROSKOP中的MATHEMATISCHE BILDANORDNUNG
公开(公告)号：EP2958131A1
公开(公告)日：2015-12-23
申请号：EP15172227.9
申请日：2015-06-16
申请人： FEI Company
发明人： Potocek, Pavel , Kooijman, Cornelis , Slingerland, Hendrik , Veen, van, Gerard , Boughorbel, Faysal
IPC分类号： H01J37/22 , H01J37/28 , G02B21/00
CPC分类号： H01J37/222 , G02B21/0024 , G02B21/0048 , G02B21/008 , H01J37/226 , H01J37/28 , H01J2237/226 , H01J2237/28 , H01J2237/2811
摘要： A method of accumulating an image of a specimen using a scanning-type microscope, comprising the following steps:
- Providing a beam of radiation that is directed from a source through an illuminator so as to irradiate the specimen;
- Providing a detector for detecting a flux of radiation emanating from the specimen in response to said irradiation;
- Causing said beam to undergo scanning motion relative to a surface of the specimen, and recording an output of the detector as a function of scan position,

which method additionally comprises the following steps:
- In a first sampling session S 1 , gathering detector data from a first collection P 1 of sampling points distributed sparsely across the specimen;
- Repeating this procedure so as to accumulate a set {P n } of such collections, gathered during an associated set {S n } of sampling sessions, each set with a cardinality N > 1;
- Assembling an image of the specimen by using the set {P n } as input to an integrative mathematical reconstruction procedure,
wherein, as part of said assembly process, a mathematical registration correction is made to compensate for drift mismatches between different members of the set {P n }.
摘要翻译：使用扫描型显微镜对样本的图像进行累积的方法，包括以下步骤： - 提供从源通过照射器引导以照射样本的辐射束; - 提供检测器，用于响应于所述照射检测从样本发出的辐射通量; - 使所述光束相对于所述检体的表面进行扫描运动，并将所述检测器的输出记录为扫描位置的函数，所述方法还包括以下步骤： - 在第一采样会话S 1中，采集检测器数据从第一集合P 1抽样点稀疏地分布在样本上; - 重复此过程，以便累积在相关集合{S n}采样会话期间收集的集合{P n}，每个集合具有基数N> 1; - 通过使用集合{P n}作为整合数学重建过程的输入来组装样本的图像，其中，作为所述组装过程的一部分，进行数学登记校正以补偿组的不同成员之间的漂移不匹配 {P n}。

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