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1. 发明授权

EP2343726B1 Method for producing a representation of an object by means of a particle beam, as well as a particle beam device for carrying out the method 有权转让
标题翻译：一种用于通过粒子束和用于执行该方法的粒子射线的装置产生对象的表示方法
公开(公告)号：EP2343726B1
公开(公告)日：2014-04-16
申请号：EP10196658.8
申请日：2010-12-22
申请人： Carl Zeiss Microscopy GmbH
发明人： Biberger, Josef , Pulwey, Ralph , Draszba, Ernst , Hegele, Klaus , Niebel, Harald , Adolf, Andreas , Arnold, Rainer
IPC分类号： H01J37/153 , H01J37/28 , H01J37/22
CPC分类号： H01J37/28 , H01J37/222 , H01J2237/1536 , H01J2237/223

2. 发明公开

EP2615620A3 Methods and systems for raster scanning a surface of an object using a particle beam 有权
标题翻译：方法和系统使用粒子束扫描物体的表面
公开(公告)号：EP2615620A3
公开(公告)日：2013-10-02
申请号：EP13000219.9
申请日：2013-01-16
申请人： Carl Zeiss Microscopy GmbH
发明人： Biberger, Josef , Pulwey, Ralph
IPC分类号： H01J37/304 , H01J37/305 , B23K15/08 , C23C14/30
CPC分类号： B23K15/00 , B23K15/08 , H01J37/304 , H01J37/3053 , H01J2237/30488
摘要： A method of raster scanning a surface of an object using a particle beam comprises determining a basic set of raster points within a surface; determining a surface portion of the surface of the object, wherein the surface portion is to be raster scanned; ordering a set of raster points of the basic set located within the surface portion; and scanning of the surface portion by directing the particle beam onto the raster points of the ordered set in an order corresponding to an order of the raster points in the ordered set from the outside to the inside, i.e. starting from the boundary of the surface portion towards its center, or in the reverse order, i.e. from the inside to the outside.

3. 发明授权

EP2840588B1 Method for processing and/or for observing an object, and particle beam device for carrying out the method 有权
公开(公告)号：EP2840588B1
公开(公告)日：2018-10-31
申请号：EP14181219.8
申请日：2014-08-18
申请人： Carl Zeiss Microscopy GmbH
发明人： Biberger, Josef , Pulwey, Ralph , Tsyrulin, Katja , Salzer, Roland
IPC分类号： H01J37/304 , H01J37/305
CPC分类号： H01J37/302 , H01J37/28 , H01J37/304 , H01J37/3056 , H01J2237/30488 , H01J2237/31745 , H01J2237/31749
摘要： The invention relates to a method for processing and/or observing an object (16) by means of at least one particle beam, in which the particle beam is scanned over the object (16). The method comprises: determining a scan region (RB1) on the object (16), the scan region (RB1) having a multiplicity of scan lines (RZ1 to RZ4), moving the particle beam in a first scanning direction (A) along one of the multiplicity of scan lines (RZ1 to RZ4), and changing from the first scanning direction (A) to a second scanning direction (A') at a change-of-direction time, wherein changing from the first scanning direction (A) to the second scanning direction (A') comprises a setting of a point of rotation (P1) in that scan line (RZ4) of the scan region (RB1) in which the particle beam is situated at the change-of-direction time, with an axis of rotation (A1) extending through the point of rotation (P1), and wherein the first scanning direction (A) is changed into the second scanning direction (A') by rotating the scan region (RB1) about the axis of rotation (A1), with the point of rotation (P1) being selected dependent on the direction of rotation.

4. 发明授权

EP2437279B1 Method of operating an ion beam system 有权转让
公开(公告)号：EP2437279B1
公开(公告)日：2018-05-30
申请号：EP11007981.1
申请日：2011-09-30
申请人： Carl Zeiss Microscopy GmbH
发明人： Biberger, Josef , Pulwey, Ralph , Adolf, Andreas
IPC分类号： H01J37/147 , H01J37/28
CPC分类号： H01J3/26 , H01J3/14 , H01J37/1477 , H01J37/28 , H01J37/317 , H01J2237/303 , H01J2237/31749
摘要： An ion beam system comprises a voltage supply system (7) and at least one beam deflector (39) having at least one first deflection electrode (51a,51b,51c) and plural second deflection electrodes (52a,52b,52c), wherein the voltage supply system is configured to supply different adjustable deflection voltages to the plural second deflection electrodes such that electric deflection fields between the plural second deflection electrodes and the opposite at least one first deflection electrode have a common orientation. The system has a high kinetic energy mode in which a distribution of the electric deflection field has a greater width, a low kinetic energy mode in which a distribution of the electric deflection field has a smaller width.

5. 发明公开

EP2988315A3 METHOD FOR ANALYZING AND/OR PROCESSING AN OBJECT AS WELL AS A PARTICLE BEAM DEVICE FOR CARRYING OUT THE METHOD 审中-公开
标题翻译：程序用于分析和/或处理一个对象，并粒子束用于执行该方法
公开(公告)号：EP2988315A3
公开(公告)日：2016-06-15
申请号：EP15177429.6
申请日：2015-07-20
申请人： Carl Zeiss Microscopy GmbH
发明人： Biberger, Josef , Lechner, Lorenz , Postolski, Michal , Pulwey, Ralph , Janaszewsk, Marcin
IPC分类号： H01J37/304 , H01J37/26
CPC分类号： H01J37/20 , H01J37/147 , H01J37/265 , H01J37/304 , H01J2237/30433
摘要： The application relates to a method for analyzing, in particular for imaging, and/or processing of an object as well as a particle beam device for carrying out this method. In particular, the particle beam device of this application is an electron beam device and/or an ion beam device. The method in particular comprises the control unit providing a first control parameter, wherein a beam guiding unit is controlled using the first control parameter for guiding the particle beam and/or wherein a moving unit is controlled using the first control parameter for moving an object holder, correlating a position of the object holder in a second coordinate system to the object position on the surface of the object, identifying a first coordinate transformation between the first coordinate system and the second coordinate system, identifying an orientation position of a distinctive feature on the surface of the object and identifying first coordinates of the orientation position in the first coordinate system, the control unit providing a second control parameter, wherein the second control parameter is used for at least one of: controlling the beam guiding unit for guiding the particle beam, controlling the moving unit for moving the object holder or controlling a detector, identifying again the orientation position of the distinctive feature and identifying second coordinates of the orientation position in the first coordinate system, comparing the first coordinates with the second coordinates, identifying a local displacement of the first coordinates to the second coordinates, identifying a second coordinate transformation using the first coordinate transformation and the local displacement and identifying a position of an area to be analyzed and/or processed on the surface of the object.

6. 发明公开

EP2840588A1 Method for processing and/or for observing an object, and particle beam device for carrying out the method 有权
标题翻译：用于执行该方法用于处理和/或观察对象的方法，以及粒子束装置
公开(公告)号：EP2840588A1
公开(公告)日：2015-02-25
申请号：EP14181219.8
申请日：2014-08-18
申请人： Carl Zeiss Microscopy GmbH
发明人： Biberger, Josef , Pulwey, Ralph , Tsyrulin, Katja , Salzer, Roland
IPC分类号： H01J37/304 , H01J37/305
CPC分类号： H01J37/302 , H01J37/28 , H01J37/304 , H01J37/3056 , H01J2237/30488 , H01J2237/31745 , H01J2237/31749
摘要： The invention relates to a method for processing and/or observing an object (16) by means of at least one particle beam, in which the particle beam is scanned over the object (16). The method comprises: determining a scan region (RB1) on the object (16), the scan region (RB1) having a multiplicity of scan lines (RZ1 to RZ4), moving the particle beam in a first scanning direction (A) along one of the multiplicity of scan lines (RZ1 to RZ4), and changing from the first scanning direction (A) to a second scanning direction (A') at a change-of-direction time, wherein changing from the first scanning direction (A) to the second scanning direction (A') comprises a setting of a point of rotation (P1) in that scan line (RZ4) of the scan region (RB1) in which the particle beam is situated at the change-of-direction time, with an axis of rotation (A1) extending through the point of rotation (P1), and wherein the first scanning direction (A) is changed into the second scanning direction (A') by rotating the scan region (RB1) about the axis of rotation (A1), with the point of rotation (P1) being selected dependent on the direction of rotation.
摘要翻译：本发明涉及由至少一个粒子束，其中所述粒子束在物体（16）扫描的装置，用于处理和/或在物体（16）观察的方法。该方法包括：确定性采矿的扫描区域（RB1），其具有的扫描线的多重性（RZ1到RZ4），在第一扫描方向（A）沿着一个移动所述粒子束的物体（16），扫描区域（RB1）上的扫描线（RZ1到RZ4）中，在方向转换对的一时间从所述第一扫描方向（A）移动到第二扫描方向（A“）改变，worin从第一扫描方向改变重（A）的于第二扫描方向（A“）包括旋转的点的设置（P1）确实在其中粒子束位于方向变化的最时间扫描区域（RB1）的扫描线（RZ4），与旋转轴线（A1）延伸穿过旋转的（P1）的点，worin第一扫描方向（A）由大约的轴线旋转所述扫描区域（RB1）改变成所述第二扫描方向（A“）旋转（A1）中，用旋转（P1）的点被选择依赖于旋转方向。

7. 发明授权

EP2750161B1 Method for producing a representation of an object by means of a particle beam, as well as a particle beam device for carrying out the method 有权
公开(公告)号：EP2750161B1
公开(公告)日：2018-08-01
申请号：EP14156899.8
申请日：2010-12-22
申请人： Carl Zeiss Microscopy GmbH
发明人： Biberger, Josef , Pulwey, Ralph , Draszba, Ernst , Hegele, Klaus , Niebel, Harald , Adolf, Andreas , Arnold, Rainer
IPC分类号： H01J37/153 , H01J37/28 , H01J37/22
CPC分类号： H01J37/28 , H01J37/222 , H01J2237/1536 , H01J2237/223
摘要： The invention relates to a method for producing a representation of an object by means of a particle beam. The invention also relates to a particle beam device for carrying out the method. The invention is based on the object of specifying the method and the particle beam device for producing a representation of an object such that images which are produced, in particular including FFT images, are as free as possible of artifacts which are not caused by the object to be examined. This is achieved in particular in that pixel lives, line flyback times and pixel pause times are varied in raster patterns.

8. 发明公开

EP2988315A2 METHOD FOR ANALYZING AND/OR PROCESSING AN OBJECT AS WELL AS A PARTICLE BEAM DEVICE FOR CARRYING OUT THE METHOD 审中-公开
标题翻译：程序用于分析和/或处理一个对象，并粒子束用于执行该方法
公开(公告)号：EP2988315A2
公开(公告)日：2016-02-24
申请号：EP15177429.6
申请日：2015-07-20
申请人： Carl Zeiss Microscopy GmbH
发明人： Biberger, Josef , Lechner, Lorenz , Postolski, Michal , Pulwey, Ralph , Janaszewsk, Marcin
IPC分类号： H01J37/304 , H01J37/26
CPC分类号： H01J37/20 , H01J37/147 , H01J37/265 , H01J37/304 , H01J2237/30433
摘要： The application relates to a method for analyzing, in particular for imaging, and/or processing of an object as well as a particle beam device for carrying out this method. In particular, the particle beam device of this application is an electron beam device and/or an ion beam device. The method in particular comprises the control unit providing a first control parameter, wherein a beam guiding unit is controlled using the first control parameter for guiding the particle beam and/or wherein a moving unit is controlled using the first control parameter for moving an object holder, correlating a position of the object holder in a second coordinate system to the object position on the surface of the object, identifying a first coordinate transformation between the first coordinate system and the second coordinate system, identifying an orientation position of a distinctive feature on the surface of the object and identifying first coordinates of the orientation position in the first coordinate system, the control unit providing a second control parameter, wherein the second control parameter is used for at least one of: controlling the beam guiding unit for guiding the particle beam, controlling the moving unit for moving the object holder or controlling a detector, identifying again the orientation position of the distinctive feature and identifying second coordinates of the orientation position in the first coordinate system, comparing the first coordinates with the second coordinates, identifying a local displacement of the first coordinates to the second coordinates, identifying a second coordinate transformation using the first coordinate transformation and the local displacement and identifying a position of an area to be analyzed and/or processed on the surface of the object.
摘要翻译：本申请涉及一种用于分析，特别是用于成像和/或对象的处理，以及用于执行该方法的粒子射线装置。特别地，本申请的粒子射线装置是电子束装置和/或离子束装置上。特别地，该方法包括控制单元，其提供第一控制参数，worin光束引导单元使用所述第一控制参数控制用于引导颗粒束和/或worin移动单元使用所述第一控制参数用于移动到对象持有者控制，关联于第二对象保持器的位置坐标系统到物体的表面上的对象位置，识别所述第一坐标系和第二坐标系之间的第一坐标变换，确定对一个显着特点的取向位置所述物体的表面和识别定向位置的第一坐标的第一坐标系中，提供第二控制参数，worin第二控制参数，所述控制单元用于至少一个：控制所述光束引导单元用于引导所述粒子束，控制所述移动单元，用于在对象保持器或控制的检测器，ID 再次entifying显着特征的方位位置和第一坐标系中确定方位位置的第二坐标与第二坐标比较第一坐标，确定第一坐标，第二坐标的局部位移，确定第二坐标变换使用第一坐标变换和局部位移和识别的区域的位置进行分析和/或所述对象的表面上的处理。

9. 发明公开

EP2750161A1 Method for producing a representation of an object by means of a particle beam, as well as a particle beam device for carrying out the method 有权
标题翻译：一种用于使用粒子产生的物体的表示，以及粒子束装置用于执行该方法的方法
公开(公告)号：EP2750161A1
公开(公告)日：2014-07-02
申请号：EP14156899.8
申请日：2010-12-22
申请人： Carl Zeiss Microscopy GmbH
发明人： Biberger, Josef , Pulwey, Ralph , Draszba, Ernst , Hegele, Klaus , Niebel, Harald , Adolf, Andreas , Arnold, Rainer
IPC分类号： H01J37/153 , H01J37/28 , H01J37/22
CPC分类号： H01J37/28 , H01J37/222 , H01J2237/1536 , H01J2237/223
摘要： The invention relates to a method for producing a representation of an object by means of a particle beam. The invention also relates to a particle beam device for carrying out the method. The invention is based on the object of specifying the method and the particle beam device for producing a representation of an object such that images which are produced, in particular including FFT images, are as free as possible of artifacts which are not caused by the object to be examined. This is achieved in particular in that pixel lives, line flyback times and pixel pause times are varied in raster patterns.
摘要翻译：本发明涉及一种用于通过粒子束来生产的物体的表示的方法。因此本发明涉及一种用于实施该方法的粒子射线装置。本发明是基于指定的方法和用于生产目标搜索的表示并包括FFT图像产生的影像，尤其是粒子射线装置的物体上，尽可能伪像的作为游离未由对象引起的要检查。这在像素particulare取得并现场表演，回扫时间和像素休息时间在网格图案的变化。

10. 发明授权

EP2575159B1 Particle beam system and method for operating the same 有权转让
标题翻译：该粒子束系统和操作该系统的方法
公开(公告)号：EP2575159B1
公开(公告)日：2016-04-20
申请号：EP11007980.3
申请日：2011-09-30
申请人： Carl Zeiss Microscopy GmbH
发明人： Biberger, Josef , Pulwey, Ralph , Wieczorek, Volker
IPC分类号： H01J37/28 , H01J37/04 , H01J37/147 , H01J37/26
CPC分类号： H01J37/265 , H01J37/045 , H01J37/1472 , H01J37/1474 , H01J37/28 , H01J2237/043 , H01J2237/063 , H01J2237/15 , H01J2237/2487 , H01J2237/2602

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