专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

1. 发明公开

EP3245313A1 EVAPORATION SOURCE. 有权
标题翻译：蒸发源。
公开(公告)号：EP3245313A1
公开(公告)日：2017-11-22
申请号：EP15735976.1
申请日：2015-07-13
申请人： Applied Materials, Inc.
发明人： BANGERT, Stefan , DIEGUEZ-CAMPO, Jose Manuel , KELLER, Stefan , SPATZ, Norbert
IPC分类号： C23C14/24 , C23C16/44
CPC分类号： C23C14/243 , C23C14/246 , C23C16/4401 , H01L2251/56
摘要： An evaporation source for a metal or a metal alloy is described. The evaporation source includes an evaporation crucible, wherein the evaporation crucible is configured to evaporate the metal or metal alloy, a distribution pipe with one or more outlets provided along the length of the distribution pipe, wherein the distribution pipe is in fluid communication with the evaporation crucible, wherein the distribution pipe further comprises a first outer tube and a first inner tube, and wherein the distribution pipe and the evaporation crucible are provided as one single piece.

2. 发明公开

EP3080327A1 EVAPORATION SOURCE FOR ORGANIC MATERIAL, APPARATUS HAVING AN EVAPORATION SOURCE FOR ORGANIC MATERIAL, SYSTEM HAVING AN EVAPORATION DEPOSITION APPARATUS WITH AN EVAPORATION SOURCE FOR ORGANIC MATERIALS, AND METHOD FOR OPERATING AN EVAPORATION SOURCE FOR ORGANIC MATERIAL 审中-公开
标题翻译：有机材料的蒸发源，用一个膨胀源用于操作有机材料的蒸发源有机材料和方法通过扩展分离装置有机材料系统的扩展源设备
公开(公告)号：EP3080327A1
公开(公告)日：2016-10-19
申请号：EP13802641.4
申请日：2013-12-10
申请人： Applied Materials, Inc.
发明人： BANGERT, Stefan , SCHÜßLER, Uwe , DIEGUEZ-CAMPO, Jose Manuel , HAAS, Dieter
IPC分类号： C23C14/04 , C23C14/12 , C23C14/56 , C23C14/24 , B05D3/04 , B05D1/02 , B05D1/00 , H01L51/00 , H01L51/56 , C23C16/44
CPC分类号： C23C14/243 , C23C14/042 , C23C14/12 , C23C14/246 , C23C14/50 , C23C14/56 , C23C14/562 , C23C14/564 , C23C14/566 , H01L51/001 , H01L51/0011 , H01L51/56
摘要： An evaporation source for organic material is described. The evaporation source includes an evaporation crucible, wherein the evaporation crucible is configured to evaporate the organic material; a distribution pipe with one or more outlets, wherein the distribution pipe is in fluid communication with the evaporation crucible and wherein the distribution pipe is rotatable around an axis during evaporation; and a support for the distribution pipe, wherein the support is connectable to a first drive or includes the first drive, wherein the first drive is configured for a translational movement of the support and the distribution pipe.
摘要翻译：对于有机材料的蒸发源进行说明。蒸发源包括在蒸发坩锅，worin所述蒸发坩锅是被配置为蒸发有机材料; 与一个或多个出口的分配管，worin分配管与所述蒸发坩锅流体连通，并且worin分配管是蒸发期间围绕可旋转的基座上轴; 和用于分配管的支撑件，worin支承可连接到第一驱动器或包括所述第一驱动器，worin第一驱动器被配置为支撑的平移运动和分配管。

3. 发明授权

EP3245313B1 EVAPORATION SOURCE. 有权
公开(公告)号：EP3245313B1
公开(公告)日：2018-12-05
申请号：EP15735976.1
申请日：2015-07-13
申请人： Applied Materials, Inc.
发明人： BANGERT, Stefan , DIEGUEZ-CAMPO, Jose Manuel , KELLER, Stefan , SPATZ, Norbert
IPC分类号： C23C14/24 , C23C16/44
CPC分类号： C23C14/243 , C23C14/246 , C23C16/4401 , H01L2251/56
摘要： An evaporation source for a metal or a metal alloy is described. The evaporation source includes an evaporation crucible, wherein the evaporation crucible is configured to evaporate the metal or metal alloy, a distribution pipe with one or more outlets provided along the length of the distribution pipe, wherein the distribution pipe is in fluid communication with the evaporation crucible, wherein the distribution pipe further comprises a first outer tube and a first inner tube, and wherein the distribution pipe and the evaporation crucible are provided as one single piece.

4. 发明公开

EP3234213A1 MATERIAL DEPOSITION ARRANGEMENT, A VACUUM DEPOSITION SYSTEM AND METHOD FOR DEPOSITING MATERIAL 审中-公开
标题翻译：材料沉积装置，真空沉积系统和用于沉积材料的方法
公开(公告)号：EP3234213A1
公开(公告)日：2017-10-25
申请号：EP14815340.6
申请日：2014-12-17
申请人： Applied Materials, Inc.
发明人： GEBELE, Thomas , SCHÜSSLER, Uwe , DIEGUEZ-CAMPO, Jose Manuel , LOPP, Andreas
IPC分类号： C23C14/12 , C23C14/24
CPC分类号： C23C14/243 , C23C14/042 , C23C14/12 , C23C14/24 , H01L51/001 , H01L51/0011
摘要： A material deposition arrangement for depositing evaporated material on a substrate in a vacuum chamber is described. The material deposition arrangement includes a crucible for providing material to be evaporated; a linear distribution pipe in fluid communication with the crucible; and a plurality of nozzles in the distribution pipe for guiding the evaporated material into the vacuum chamber. Each nozzle may have a nozzle inlet for receiving the evaporated material, a nozzle outlet for releasing the evaporated material to the vacuum chamber, and a nozzle passage between the nozzle inlet and the nozzle outlet. The nozzle passage of at least one of the plurality of nozzles includes a first section having a first length and a first size, and a second having a second length and a second size. The ratio of the second size to the first size is between 2 and 10.
摘要翻译：描述了用于将蒸发的材料沉积在真空室（110）中的基板（121）上的材料沉积装置（100）。材料沉积装置包括用于提供待蒸发材料的坩埚（102; 102a; 102b）与所述坩埚（102; 102a; 102b）流体连通的线性分配管（106; 106a; 106b）; 和在分配管（106; 106a; 106b）中的多个喷嘴，用于引导蒸发的材料进入真空室（110）。每个喷嘴（400）可以具有用于接收蒸发材料的喷嘴入口（401），用于将蒸发材料释放到真空室的喷嘴出口（403）以及喷嘴入口（401）和喷嘴入口喷嘴出口（403）。多个喷嘴中的至少一个的喷嘴通道（402）包括具有第一部分长度（412）和第一部分尺寸（411）的第一部分（410），以及具有第二部分（410）的第二部分长度（421）和第二部分尺寸（421）。第二部分尺寸（421）与第一部分尺寸（411）的比率在2和10之间。

5. 发明公开

EP3187618A1 EVAPORATION SOURCE FOR ORGANIC MATERIAL, DEPOSITION APPARATUS FOR DEPOSITING ORGANIC MATERIALS IN A VACUUM CHAMBER HAVING AN EVAPORATION SOURCE FOR ORGANIC MATERIAL, AND METHOD FOR EVAPORATING ORGANIC MATERIAL 审中-公开
标题翻译：用于有机材料蒸发源，用于在具有有机材料蒸发源的真空室中沉积有机材料的沉积设备以及用于蒸发有机材料的方法
公开(公告)号：EP3187618A1
公开(公告)日：2017-07-05
申请号：EP17150278.4
申请日：2013-12-10
申请人： Applied Materials, Inc.
发明人： BANGERT, Stefan , SCHÜßLER, Uwe , DIEGUEZ-CAMPO, Jose Manuel , HAAS, Dieter
IPC分类号： C23C14/04 , C23C14/12 , C23C14/56 , C23C14/24 , B05D3/04 , B05D1/02 , B05D1/00 , H01L51/00 , H01L51/56 , C23C16/44
CPC分类号： C23C14/243 , C23C14/042 , C23C14/12 , C23C14/246 , C23C14/50 , C23C14/56 , C23C14/562 , C23C14/564 , C23C14/566 , H01L51/001 , H01L51/0011 , H01L51/56
摘要： An evaporation source for organic material is described. The evaporation source includes an evaporation crucible, wherein the evaporation crucible is configured to evaporate the organic material; a distribution pipe with one or more outlets, wherein the distribution pipe is in fluid communication with the evaporation crucible and wherein the distribution pipe is rotatable around an axis during evaporation; and at least one side shield for shielding the organic material.
摘要翻译：描述了有机材料的蒸发源。蒸发源包括蒸发坩埚，其中蒸发坩埚配置为蒸发有机材料; 具有一个或多个出口的分配管，其中分配管与蒸发坩埚流体连通，并且其中分配管在蒸发期间可围绕轴旋转; 以及用于屏蔽有机材料的至少一个侧屏蔽。

7. 发明公开

EP3417085A1 METHODS OF OPERATING A DEPOSITION APPARATUS, AND DEPOSITION APPARATUS 审中-公开
公开(公告)号：EP3417085A1
公开(公告)日：2018-12-26
申请号：EP16721809.8
申请日：2016-05-10
申请人： Applied Materials, Inc.
发明人： DIEGUEZ-CAMPO, Jose Manuel , BANGERT, Stefan , LOPP, Andreas , WURSTER, Harald , HAAS, Dieter
IPC分类号： C23C14/12 , C23C14/24 , C23C14/04 , C23C16/44 , C23C16/455 , C23C14/56 , H01L51/56
CPC分类号： C23C14/12 , C23C14/042 , C23C14/24 , C23C14/243 , C23C14/564 , H01L51/0011
摘要： A method of operating a deposition apparatus is provided. The method comprises: Deposition of an evaporated source material on a substrate (10) by guiding the evaporated source material from one or more outlets (22) of an evaporation source (20) toward the substrate (10), wherein part of the evaporated source material is blocked by and attaches to a shielding device (30) arranged between the one or more outlets (22) and the substrate (10), followed by a cleaning of the shielding device (30) by at least locally heating the shielding device (30) for releasing at least part of the attached source material from the shielding device (30). According to a further aspect, a deposition apparatus is provided that can be operated according to the described methods.

8. 发明公开

EP3274701A1 MEASUREMENT ASSEMBLY FOR MEASURING A DEPOSITION RATE AND METHOD THEREFORE 审中-公开
标题翻译：用于测量沉积速率的测量组件及其方法
公开(公告)号：EP3274701A1
公开(公告)日：2018-01-31
申请号：EP15767462.3
申请日：2015-09-21
申请人： Applied Materials, Inc.
发明人： DIEGUEZ-CAMPO, Jose Manuel , LOPP, Andreas , SCHÜSSLER, Uwe , BANGERT, Stefan
IPC分类号： G01N29/02 , C23C14/54 , G01N29/24 , H01L41/113
CPC分类号： C23C14/546 , C23C14/24 , G01N29/022 , G01N29/2443 , G01N2291/0256
摘要： A measurement assembly for measuring a deposition rate of an evaporated material is described. The measurement assembly includes an oscillation crystal for measuring the deposition rate, a measurement outlet for providing evaporated material to the oscillation crystal, and a magnetic closing mechanism configured for opening and closing the measurement outlet by magnetic force.

9. 发明公开

EP3102715A1 EVAPORATION SOURCE FOR ORGANIC MATERIAL, APPARATUS HAVING AN EVAPORATION SOURCE FOR ORGANIC MATERIAL, SYSTEM HAVING AN EVAPORATION DEPOSITION APPARATUS WITH AN EVAPORATION SOURCE FOR ORGANIC MATERIALS, AND METHOD FOR OPERATING AN EVAPORATION SOURCE FOR ORGANIC MATERIAL 审中-公开
标题翻译：有机材料的蒸发源，用一个膨胀源用于操作有机材料的蒸发源有机材料和方法通过扩展分离装置有机材料系统的扩展源设备
公开(公告)号：EP3102715A1
公开(公告)日：2016-12-14
申请号：EP14702599.3
申请日：2014-02-04
申请人： Applied Materials, Inc.
发明人： BANGERT, Stefan , SCHÜSSLER, Uwe , DIEGUEZ-CAMPO, Jose Manuel , HAAS, Dieter
IPC分类号： C23C14/24 , C23C14/56 , C23C14/04 , C23C14/12 , B05D3/04 , B05D1/02 , B05D1/00 , H01L51/00 , H01L51/56 , B65G49/05 , C23C14/50 , H01L21/67 , H01L21/677
CPC分类号： H01L51/56 , B05D1/60 , C23C14/042 , C23C14/12 , C23C14/243 , C23C14/246 , C23C14/505 , C23C14/56 , C23C14/562 , C23C14/564 , C23C14/566 , C23C14/568 , H01L21/67173 , H01L21/67196 , H01L21/67271 , H01L21/67712 , H01L21/67718 , H01L21/67727 , H01L21/67742 , H01L21/67748 , H01L21/6776 , H01L51/001 , H01L51/0011
摘要： A system for depositing one or more layers, particularly layers including organic materials therein, is described. The system includes a load lock chamber for loading a substrate to be processed, a transfer chamber for transporting the substrate, a vacuum swing module provided between the load lock chamber and the transfer chamber, at least one deposition apparatus for depositing material in a vacuum chamber of the at least one deposition chamber, wherein the at least one deposition apparatus is connected to the transfer chamber; a further load lock chamber for unloading the substrate that has been processed, a further transfer chamber for transporting the substrate, a further vacuum swing module provided between the further load lock chamber and the further transfer chamber, and a carrier return track from the further vacuum swing module to the vacuum swing module, wherein the carrier return track is configured to transport the carrier under vacuum conditions and/or under a controlled inert atmosphere.
摘要翻译：一种用于沉积一个或多个层，特别是层在其中包括有机材料，系统被描述。该系统包括将被处理用于装载基板的负载锁定室，传送室，用于搬运基板，负载锁定腔室和传送腔室之间提供了一种真空变压模块，至少一个沉积设备用于在真空室中淀积材料所述至少一个沉积室中，worin所述至少一个沉积设备被连接到传输室; 用于卸载衬底的再负载锁定腔室也已被处理，A进一步传送室用于输送基板，另外的负载锁定腔室和进一步传送室之间提供另外的真空变压模块，并从另外的真空的载波返回轨道摆动模块到真空变压模块，worin载体返回轨道被配置为传送和/或受控的惰性气氛下在真空条件下的载体。

10. 发明公开

EP3080328A1 A PROCESSING APPARATUS FOR PROCESSING DEVICES, PARTICULARLY DEVICES INCLUDING ORGANIC MATERIALS THEREIN, AND METHOD FOR TRANSFERRING AN EVAPORATION SOURCE FROM A PROCESSING VACUUM CHAMBER TO A MAINTENANCE VACUUM CHAMBER OR FROM THE MAINTENANCE VACUUM CHAMBER TO THE PROCESSING VACUUM CHAMBER 审中-公开
标题翻译：加工机加工设备，其中包括与有机材料设备和方法用于传递扩展SOURCE从处理真空室真空室维护或维护真空室内真空处理室
公开(公告)号：EP3080328A1
公开(公告)日：2016-10-19
申请号：EP14752870.7
申请日：2014-08-19
申请人： Applied Materials, Inc.
发明人： DIEGUEZ-CAMPO, Jose Manuel , BANGERT, Stefan , SCHÜSSLER, Uwe , HAAS, Dieter
IPC分类号： C23C14/04 , C23C14/12 , C23C14/56 , C23C14/24 , B05D3/04 , B05D1/02 , B05D1/00 , H01L51/00 , H01L51/56 , C23C16/44
CPC分类号： C23C14/042 , C23C14/12 , C23C14/243 , C23C14/246 , C23C14/56 , C23C14/562 , C23C14/564 , C23C14/566 , H01L51/001 , H01L51/56
摘要： A processing apparatus for processing devices, particularly devices including organic materials therein, is described. The processing apparatus includes a processing vacuum chamber; at least one evaporation source for organic material, wherein the at least one evaporation source includes at least one evaporation crucible, wherein the at least one evaporation crucible is configured to evaporate the organic material, and at least one distribution pipe with one or more outlets, wherein the at least one distribution pipe is in fluid communication with the at least one evaporation crucible; and a maintenance vacuum chamber connected with the processing vacuum chamber, wherein the at least one evaporation source can be transferred from the processing vacuum chamber to the maintenance vacuum chamber and from the maintenance vacuum chamber to the processing vacuum chamber.

你已经成功收藏专利！

检索式保存成功!

IPRDB

热门服务

关于我们

友情链接

联系方式