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    • 10. 发明公开
    • VORRICHTUNG UND VERFAHREN ZUR BESTIMMUNG DER KONZENTRATION EINES DAMPFES MITTELS EINES SCHWINGKÖRPERSENSORS
    • 装置和一种用于确定蒸汽的浓度使用摇摆身体传感器
    • EP3111205A1
    • 2017-01-04
    • EP15707077.2
    • 2015-02-23
    • Aixtron SE
    • BECCARD, Birgit IrmgardCREMER, ClaudiaTRIMBORN, Karl-HeinzLONG, MichaelEICHLER, AndyAL AHMAD, Nael
    • G01N29/02G01N29/036G01N29/32G01N30/76
    • G01N29/022B05B12/004B05B12/008B05D1/60G01N29/036G01N29/326G01N2291/0212G01N2291/0215G01N2291/0256G01N2291/02809
    • The invention relates to a device and to a method for determining the concentration of a vapor in a volume (2), in particular for determining or controlling the mass flow of the vapor being conveyed through the volume (2) by a carrier gas, wherein the volume (2) can be heated by means of a heating unit (8) to a temperature above the condensation temperature of the vapor, comprising a sensor (1), which supplies a sensor signal that is dependent on the concentration or partial pressure of the vapor. In order to provide a sensor for determining the vapor concentration using such a device or such a method, in particular a method for separating OLED layers, the sensor signal of which is not influenced, or at most slightly influenced, by the carrier gas, the sensor (1) according to the invention has an oscillatory body that can be brought to oscillation, the oscillation frequency of which is influenced by a mass accumulation formed on a surface of the oscillating body by the condensed vapor. The oscillating body has a temperature control unit, by means of which the oscillating body can be brought to a temperature below the condensation temperature of the vapor, wherein an evaluation unit determines the concentration or the partial pressure from the temporal change of the oscillator frequency.
    • 的装置和用于确定性采矿或控制蒸气的质量流量的方法确定的地雷的体积的蒸汽的浓度,特别是正在通过由载气的体积输送。 该装置包括一个传感器,该传感器提供的传感器信号所做的是依赖于浓度或蒸气的分压。 该传感器具有到振荡体上也可以被带到振荡,这是通过由冷凝的蒸汽形成的振动体的表面上的质量累积影响的所有振荡频率。 振荡体有一个温度控制单元,借助于该振动体可以被带到低于蒸气的冷凝温度的温度。 评估单元确定性地雷浓度或蒸汽从振荡器频率的时间变化的分压。