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71. 发明公开

EP2124245A1 Ultra high precision measurement tool 审中-公开
标题翻译： HochpräzisesMessinstrument
公开(公告)号：EP2124245A1
公开(公告)日：2009-11-25
申请号：EP08156665.5
申请日：2008-05-21
申请人： ICT, Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik Mbh
发明人： Frosien, Jürgen , Winkler, Dieter , Weigel, Udo , Grimm, Stefan
IPC分类号： H01J37/08 , H01J37/26 , H01J37/304 , H01J27/02 , H01J27/26
CPC分类号： H01J37/08 , H01J27/26 , H01J37/28 , H01J2237/004 , H01J2237/061 , H01J2237/0807 , H01J2237/244 , H01J2237/24514 , H01J2237/24535 , H01J2237/24564 , H01J2237/24578 , H01J2237/2594 , H01J2237/2623 , H01J2237/2816 , H01J2237/2817
摘要： A focused ion beam device (100) is described comprising a gas field ion source (10) with an analyzer (175) for analyzing and classifying the structure of a specimen (120), a controller for controlling and/or modifying the structure of the specimen according to the analysis of the analyzer, an emitter tip (20), the emitter tip has a base tip (22) comprising a first material and a supertip (25) comprising a material different from the first material, wherein the supertip is a single atom tip and the base tip is a single crystal base tip. Furthermore, the focused ion beam device has a probe current control and a sample charge control. A method of operating a focused ion beam device is provided comprising applying a voltage between a single emission centre of the supertip and an electrode, supplying gas to the emitter tip, analyzing and classifying the structure of a specimen, and controlling the structure of the specimen.
摘要翻译：描述了一种聚焦离子束装置（100），其包括具有用于分析和分类样本（120）的结构的分析器（175）的气体离子源（10），用于控制和/或修改样品的结构的控制器样品根据分析仪的分析，发射极尖端（20），发射极尖端具有包括第一材料的基底尖端（22）和包括不同于第一材料的材料的超高压（25），其中超尖是单个原子尖端和底部尖端是单晶基座尖端。此外，聚焦离子束装置具有探针电流控制和样品充电控制。提供一种操作聚焦离子束装置的方法，包括在超高压的单个发射中心和电极之间施加电压，向发射极尖端提供气体，分析和分类样品的结构，以及控制样品的结构。

72. 发明公开

EP2088613A1 Dual mode gas field ion source 有权
标题翻译： Verwendung einer Doppelmodus-Gasfeldionenquelle
公开(公告)号：EP2088613A1
公开(公告)日：2009-08-12
申请号：EP08101447.4
申请日：2008-02-08
申请人： ICT, Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik Mbh
发明人： Frosien, Jürgen
IPC分类号： H01J37/08 , H01J27/26 , H01J49/16
CPC分类号： H01J37/08 , H01J27/26 , H01J37/241 , H01J37/243 , H01J2237/002 , H01J2237/006 , H01J2237/061 , H01J2237/0807 , H01J2237/0827 , H01J2237/28 , H01J2237/317
摘要： A focused ion beam device is described. The focused ion beam device includes an ion beam column including an enclosure (14,17) for housing a gas field ion source emitter (12,13) with an emitter area for generating ions, an electrode (18) for extracting ions from the gas field ion source emitter, one or more gas inlets (110,112) adapted to introduce a first gas and a second gas to the emitter area, an objective lens (20) for focusing the ion beam generated from the first gas or the second gas, a voltage supply (72) for providing a voltage between the electrode and the gas field ion source emitter, and a controller (172,472) for switching between a first voltage and a second voltage of the voltage supply for generating an ion beam of ions of the first gas or an ion beam of ions of the second gas.
摘要翻译：描述了聚焦离子束装置。聚焦离子束装置包括离子束柱，其包括用于容纳具有用于产生离子的发射极区域的气体场离子源发射器（12,13）的外壳（14,17），用于从气体中提取离子的电极（18）场离子源发射器，适于将第一气体和第二气体引入发射极区域的一个或多个气体入口（110,112），用于聚焦从第一气体或第二气体产生的离子束的物镜，用于在电极和气体离子源发射器之间提供电压的电压源（72）和用于在电压源的第一电压和第二电压之间切换的控制器（172,472），用于产生第一气体或第二气体的离子离子束。

73. 发明公开

EP2068343A1 Charged particle source with automated tip formation 有权
标题翻译： Quellefürgeladene Teilchen mit automatischer Spitzenformierung
公开(公告)号：EP2068343A1
公开(公告)日：2009-06-10
申请号：EP07022031.4
申请日：2007-11-13
申请人： ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
发明人： Winkler, Dieter , Weigel, Udo , Grimm, Stefan
IPC分类号： H01J37/073 , H01J37/08 , H01J37/26 , H01J37/304 , H01J9/00 , H01J27/26
CPC分类号： H01J37/073 , H01J27/26 , H01J37/08 , H01J37/265 , H01J37/304 , H01J2237/06341 , H01J2237/0805 , H01J2237/0807 , H01J2237/30466 , H01J2237/30477 , H01J2237/31749
摘要： A charged particle beam device is described. The device includes an emitter unit including an emitter tip (13); a voltage supply unit (222) adapted for providing a stable voltage to generate a stable extraction field at the emitter tip; a pulsed voltage supply member (224, 228) adapted for providing a pulsed voltage to generate a pulsed extraction field on top of the stable extraction field; a measuring unit (142; 142', 142") for measuring an emitter characteristic; and a control unit (130) adapted for receiving a signal from the measuring unit and for control of the pulsed voltage supply member.
摘要翻译：描述带电粒子束装置。该装置包括发射器单元，其包括发射极尖端（13）; 电压供应单元（222），适于提供稳定的电压以在发射极尖端处产生稳定的提取场; 脉冲电压供应构件（224,228），其适于提供脉冲电压以在所述稳定提取场的顶部产生脉冲提取场; 用于测量发射极特性的测量单元（142; 142'，142“）;以及适于接收来自测量单元的信号并用于控制脉冲电压供应构件的控制单元（130）。

74. 发明公开

EP2031633A1 Gas ion source with high mechanical stability 有权
标题翻译： Teilchenstrahlgerätmit einer Gas-Ionen-Quelle mit hoher mechanischerStabilität
公开(公告)号：EP2031633A1
公开(公告)日：2009-03-04
申请号：EP07016766.3
申请日：2007-08-27
申请人： ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
发明人： Winkler, Dieter , Jasinski, Thomas
IPC分类号： H01J37/08
CPC分类号： F25D19/006 , F25B2500/13 , H01J27/26 , H01J37/08 , H01J37/28 , H01J2237/002 , H01J2237/0216 , H01J2237/061 , H01J2237/0807 , Y10T29/49826
摘要： A gas field ion source is described for a charged particle beam device having a charged particle beam column. The gas field ion source includes an emitter unit (155), a cooling unit (146), and a thermal conductivity unit for thermal conductivity from the cooling unit to the emitter unit, wherein the thermal conductivity unit is adapted for reduction of vibration transfer from the cooling unit to the emitter unit.
摘要翻译：对具有带电粒子束柱的带电粒子束装置描述了气体场离子源。气体离子源包括发射器单元（155），冷却单元（146）和用于从冷却单元到发射器单元的导热性的导热单元，其中热导率单元适于减少从冷却单元到发射器单元。

75. 发明公开

EP1955354A2 ION SOURCES, SYSTEMS AND METHODS 审中-公开
公开(公告)号：EP1955354A2
公开(公告)日：2008-08-13
申请号：EP06837733.2
申请日：2006-11-15
申请人： Alis Corporation
发明人： WARD, Billy W. , NOTTE IV, John A. , FARKAS III, Louis S. , PERCIVAL, Randall G. , HILL, Raymond , MARKWORT, Lars , ADERHOLD, Dirk
IPC分类号： H01J37/28 , H01J9/02 , H01J37/08 , H01J37/252 , H01J37/305 , H01J37/317 , B81B1/00 , G01N23/225 , G12B21/02 , H01J27/26
CPC分类号： H01J9/02 , H01J37/08 , H01J37/20 , H01J37/252 , H01J37/28 , H01J37/3056 , H01J37/3174 , H01J2237/024 , H01J2237/0807 , H01J2237/202 , H01J2237/20228 , H01J2237/20264 , H01J2237/2566 , H01J2237/2623 , H01J2237/2812 , H01J2237/30438 , H01J2237/30477 , H01J2237/31737 , H01J2237/3174 , H01J2237/31755
摘要： The present invention refers to a method that comprises the following steps: Providing an electrically conductive tip with a terminal shelf which has between three and twenty atoms, generating a first ion beam by interacting a gas with the electrically conductive tip, providing an ion optical system, eliminating by the ion optical system some of the ions in the first ion beam to generate a second ion beam comprising ions 70% or more of which are generated via interaction of the gas with one atom of the terminal shelf of the electrically conductive tip, and interacting the second ion beam with an activating gas to promote a chemical reaction at a surface of a sample. The figure shows a gas field ion microscope system (100).

76. 发明公开

EP1955353A2 ION SOURCES, SYSTEMS AND METHODS 审中-公开
公开(公告)号：EP1955353A2
公开(公告)日：2008-08-13
申请号：EP06837664.9
申请日：2006-11-15
申请人： Alis Corporation
发明人： WARD, Billy W. , NOTTE, John A., IV , FARKAS III, Louis, S. , PERCIVAL, Randall G. , HILL, Raymond , EDINGER, Klaus , MARKWORT, Lars , ADERHOLD, Dirk , MANTZ, Ulrich
IPC分类号： H01J37/28
CPC分类号： H01J9/02 , H01J37/08 , H01J37/20 , H01J37/252 , H01J37/28 , H01J37/3056 , H01J37/3174 , H01J2237/024 , H01J2237/0807 , H01J2237/202 , H01J2237/20228 , H01J2237/20264 , H01J2237/2566 , H01J2237/2623 , H01J2237/2812 , H01J2237/30438 , H01J2237/30477 , H01J2237/31737 , H01J2237/3174 , H01J2237/31755
摘要： The present invention refers to a method that comprises the following steps: Providing an electrically conductive tip with a terminal shelf which has between three and twenty atoms, generating a first ion beam by interacting a gas with the electrically conductive tip, providing an ion optical system, eliminating by the ion optical system some of the ions in the first ion beam to generate a second ion beam comprising ions 70% or more of which are generated via interaction of the gas with one atom of the terminal shelf of the electrically conductive tip, and interacting the second ion beam with an activating gas to promote a chemical reaction at a surface of a sample. The figure shows a gas field ion microscope system (100).

77. 发明公开

EP1955350A2 ION SOURCES, SYSTEMS AND METHODS 有权转让
公开(公告)号：EP1955350A2
公开(公告)日：2008-08-13
申请号：EP06837699.5
申请日：2006-11-15
申请人： Alis Corporation
发明人： WARD, Billy, W. , NOTTE IV, John, A. , FARKAS III, Louis, S. , PERCIVAL, Randall, G. , HILL, Raymond
IPC分类号： H01J9/02 , H01J37/08 , H01J37/252 , H01J37/305 , H01J37/317 , B81B1/00 , G01N23/225 , G12B21/02 , H01J27/26
CPC分类号： H01J9/02 , H01J37/08 , H01J37/20 , H01J37/252 , H01J37/28 , H01J37/3056 , H01J37/3174 , H01J2237/024 , H01J2237/0807 , H01J2237/202 , H01J2237/20228 , H01J2237/20264 , H01J2237/2566 , H01J2237/2623 , H01J2237/2812 , H01J2237/30438 , H01J2237/30477 , H01J2237/31737 , H01J2237/3174 , H01J2237/31755
摘要： The present invention refers to a method that comprises the following steps: Providing an electrically conductive tip with a terminal shelf which has between three and twenty atoms, generating a first ion beam by interacting a gas with the electrically conductive tip, providing an ion optical system, eliminating by the ion optical system some of the ions in the first ion beam to generate a second ion beam comprising ions 70% or more of which are generated via interaction of the gas with one atom of the terminal shelf of the electrically conductive tip, and interacting the second ion beam with an activating gas to promote a chemical reaction at a surface of a sample. The figure shows a gas field ion microscope system (100).

78. 发明公开

EP1955349A2 ION SOURCES, SYSTEMS AND METHODS 审中-公开
标题翻译：离子源，系统和方法
公开(公告)号：EP1955349A2
公开(公告)日：2008-08-13
申请号：EP06837698.7
申请日：2006-11-15
申请人： Alis Corporation
发明人： WARD, Billy, W. , NOTTE IV, John A. , FARKAS III, Louis, S. , PERCIVAL, Randall G. , HILL, Raymond , MANTZ, Ulrich , STEIGERWALD, Michael
IPC分类号： H01J9/02 , H01J37/08 , H01J37/28 , H01J37/252 , H01J37/305 , H01J37/317 , B81B1/00 , G01N23/225 , G12B21/02 , H01J27/26
CPC分类号： H01J9/02 , H01J37/08 , H01J37/20 , H01J37/252 , H01J37/28 , H01J37/3056 , H01J37/3174 , H01J2237/024 , H01J2237/0807 , H01J2237/202 , H01J2237/20228 , H01J2237/20264 , H01J2237/2566 , H01J2237/2623 , H01J2237/2812 , H01J2237/30438 , H01J2237/30477 , H01J2237/31737 , H01J2237/3174 , H01J2237/31755
摘要： The present invention refers to a method that comprises the following steps: Providing an electrically conductive tip with a terminal shelf which has between three and twenty atoms, generating a first ion beam by interacting a gas with the electrically conductive tip, providing an ion optical system, eliminating by the ion optical system some of the ions in the first ion beam to generate a second ion beam comprising ions 70% or more of which are generated via interaction of the gas with one atom of the terminal shelf of the electrically conductive tip, and interacting the second ion beam with an activating gas to promote a chemical reaction at a surface of a sample. The figure shows a gas field ion microscope system (100).
摘要翻译：本发明涉及一种方法，其包括以下步骤：提供具有三至二十个原子的端子架的导电尖端，通过使气体与导电尖端相互作用而产生第一离子束，提供离子光学系统通过离子光学系统消除第一离子束中的一些离子以产生第二离子束，所述第二离子束包括70％或更多的离子，其经由气体与导电尖端的端子架的一个原子的相互作用而产生，以及使第二离子束与活化气体相互作用以促进样品表面的化学反应。该图显示了气体场离子显微镜系统（100）。

79. 发明公开

EP1955348A2 ION SOURCES, SYSTEMS AND METHODS 有权
标题翻译： IONENQUELLEN SOWIE SYSTEME UND VERFAHREN ZU DEREN VERWENDUNG
公开(公告)号：EP1955348A2
公开(公告)日：2008-08-13
申请号：EP06837663.1
申请日：2006-11-15
申请人： Alis Corporation
发明人： WARD, Billy, W. , NOTTE, John, A., IV , FARKAS III, Louis, S. , PERCIVAL, Randall, G. , HILL, Raymond , GROHOLSKI, Alexander , COMUNALE, Richard
IPC分类号： H01J9/02 , H01J37/08 , H01J37/252 , H01J37/305 , H01J37/317 , B81B1/00 , G01N23/225 , G12B21/02 , H01J27/26
CPC分类号： H01J9/02 , H01J37/08 , H01J37/20 , H01J37/252 , H01J37/28 , H01J37/3056 , H01J37/3174 , H01J2237/024 , H01J2237/0807 , H01J2237/202 , H01J2237/20228 , H01J2237/20264 , H01J2237/2566 , H01J2237/2623 , H01J2237/2812 , H01J2237/30438 , H01J2237/30477 , H01J2237/31737 , H01J2237/3174 , H01J2237/31755
摘要： The present invention refers to a method that comprises the following steps: Providing an electrically conductive tip with a terminal shelf which has between three and twenty atoms, generating a first ion beam by interacting a gas with the electrically conductive tip, providing an ion optical system, eliminating by the ion optical system some of the ions in the first ion beam to generate a second ion beam comprising ions 70% or more of which are generated via interaction of the gas with one atom of the terminal shelf of the electrically conductive tip, and interacting the second ion beam with an activating gas to promote a chemical reaction at a surface of a sample. The figure shows a gas field ion microscope system (100).
摘要翻译：本发明涉及一种包括以下步骤的方法：提供具有三至二十个原子之间的端子架的导电尖端，通过使气体与导电尖端相互作用产生第一离子束，从而提供离子光学系统通过离子光学系统消除第一离子束中的一些离子以产生包含通过气体与导电尖端的终端架的一个原子相互作用而产生的其中70％或更多的离子的第二离子束，并且使第二离子束与活化气体相互作用以促进样品表面的化学反应。该图示出了气体离子显微镜系统（100）。

80. 发明公开

EP1830383A3 Particle-optical apparatus equipped with a gas ion source 审中-公开
标题翻译：装有气体离子源的粒子光学装置
公开(公告)号：EP1830383A3
公开(公告)日：2007-12-19
申请号：EP07102518.3
申请日：2007-02-16
申请人： FEI COMPANY
发明人： Kruit, Pieter , Tondare, Vipin
IPC分类号： H01J37/08 , H01J27/20
CPC分类号： H01J27/205 , H01J37/08 , H01J2237/0807 , H01J2237/082
摘要： The invention relates to an electron impact gas ion with high brightness and low energy spread. This high brightness is achieved by injecting electrons in a small ionization volume (from less than 1 µm to several tens of micrometers in size) from one side and extracting ions from the other. The electrons injected are produced by a high brightness electron source, such as a field emitter or a Schottky emitter.
In one embodiment of the invention the required high electron density in the ionization volume is realized by placing a field emitter close to the ionization volume (e.g. 30 µm), without optics between source and ionization volume.
In another embodiment of the invention the source is imaged onto a MEMS structure. Two small diaphragms of e.g. 50 nm are spaced e.g. 1 µm apart. The electrons enter through one of these diaphragms, while the ions leave the ionization volume through the other one. The two diaphragms are manufactured by e.g. drilling with an ion beam, resulting in two small and well aligned diaphragms.
摘要翻译：本发明涉及具有高亮度和低能量扩展的电子碰撞气体离子。这种高亮度是通过从一侧以小离子化体积（从小于1微米到几十微米大小）注入电子并从另一侧提取离子来实现的。注入的电子由高亮度电子源产生，如场发射器或肖特基发射器。在本发明的一个实施例中，离子化体积中所需的高电子密度通过将场发射体放置成接近离子化体积（例如30μm）而实现，而在光源和离子化体积之间没有光学器件。在本发明的另一个实施例中，源被成像到MEMS结构上。两个小隔膜例如 50nm间隔例如相隔1微米。电子通过这些膜片之一进入，而离子通过另一个离子离开电离体积。这两个隔膜由例如用离子束钻孔，产生两个小且对齐的隔膜。

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