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    • 55. 发明公开
    • DESIGN AND FABRICATION OF ELECTRONIC DEVICES WITH InA1AsSb/A1Sb BARRIER
    • ENTWURF UND HERSTELLUNG VON ELEKTRONISCHEN ANORDNUNGEN MIT INA1ASSB / A1SB BARRIERE
    • EP0979529A4
    • 2000-09-20
    • EP98913176
    • 1998-03-26
    • US NAVY
    • BOOS JOHN BRADLEYKRUPPA WALTERPARK DAEWONBENNETT BRIAN R
    • H01L21/308H01L21/338H01L29/201H01L29/205H01L29/778H01L29/812H01L29/00H01L21/306
    • H01L29/205H01L29/201H01L29/7783
    • An electronic device characterized by a GaAs substrate (8) and a base disposed on the substrate, the base comprising InAs channel layer (16), AlSb (18) layer above the channel layer, InxAll-xAslySbl-y layer (20) containing at least In, Al, and As disposed above the AlSb channel layer, InAs cap layer (22) disposed above and in contact with the InxAll-xAsySbl-y layer, AlSb layer (14) disposed below the InAs channel layer and in contact with the substrate, p GaSb layer (12) disposed within the AlSb layer, Schottky gate (28) with a pad disposed on and in contact with the InxAll-xAsySbl-y layer, at least one ohmic contact (24, 26) disposed on the InAs cap layer, and a trench (30) extending through the base to the substrate isolating the gate bonding pad from the device and providing a gate air bridge which prevents contact between the gate and the InAs layer. The gate air bridge fabrication is accomplished by a liquid etchant containing more than half, on volume basis, of concentrated lactic acid or acetic acid with remainder hydrogen peroxide and concentrated hydrofluoric acid. The etchant attacks InAs, InxAll-xAsySbl-y, AlSb, and GaSb but does not attack GaAs and Au-based alloys.
    • 一种电子器件,其特征在于GaAs衬底和设置在衬底上的基底,该基底包括InAs沟道层,在沟道层上方的AlSb层,InxAl1-xAsySb1-y层至少包含In,Al和As置于AlSb沟道上方 层InAs覆盖层设置在设置在InAs沟道层下方并与衬底接触的In x Al 1-x As y Sb 1-y层的上方并与之接触,设置在AlSb层内的p + GaSb层,具有布置在和接触的焊盘的肖特基栅极 具有In x Al 1-x As y Sb 1-y层,设置在InAs覆盖层上的至少一个欧姆接触,以及延伸穿过基底到衬底的沟槽,将栅极接合焊盘与器件隔离,并提供栅极空气桥, 门和InAs层。 门空气桥的制造是通过液体蚀刻剂完成的,液体腐蚀剂含有一半以上的体积基础上的浓缩乳酸或乙酸,剩余的是过氧化氢和浓缩的氢氟酸。 蚀刻剂攻击InAs,InxAl1-xAsySb1-y,AlSb和GaSb,但不会侵蚀GaAs和Au基合金。