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21. 发明公开

EP0034280A2 A non-contact type radial air bearing for a rotary type electrostatic spray painting device 失效
标题翻译：非接触式径向轴承的油漆静电喷涂装置具有旋转洒水。
公开(公告)号：EP0034280A2
公开(公告)日：1981-08-26
申请号：EP81100629.5
申请日：1981-01-28
申请人： TOYOTA JIDOSHA KABUSHIKI KAISHA
发明人： Morishita, Teru , Sugiyama, Matsuyoshi , Suzuki, Toshikazu
IPC分类号： B05B5/04
CPC分类号： B05B5/0415 , F16C32/0603 , F16C32/0662
摘要： A rotary type electrostatic spray painting device comprising a rotary shaft and a spray head fixed onto the front end of the rotary shaft. Paint is fed onto the cup shaped inner wall of the spray head. The rotary shaft is supported by a singlethrust air bearing and a pair of radial air bearings. An electrode, continuously contacting the rear end of the rotary shaft, is provided. A negative high voltage is applied to the housing of the paint device. In addition, the negative high voltage is also applied to the spray head via the electrode and the rotary shaft. Each of the radial air bearings comprises a plurality of pads cooperating with the rotary shaft, and a bearing support frame supporting the pads via support pins. The bearing support frame is mounted on the outer wall of the housing via 0 rings. The bearing support frame and the housing are interconnected to each other by a bolt for preventing relative rotation therebetween.

22. 发明授权

EP2835543B1 RADIAL FOIL BEARING 有权
标题翻译：径向薄膜轴承
公开(公告)号：EP2835543B1
公开(公告)日：2017-06-28
申请号：EP13772099.1
申请日：2013-03-28
申请人： IHI Corporation
发明人： OMORI Naomichi
IPC分类号： F16C17/02 , F16C43/02
CPC分类号： F16C17/024 , F16C32/0603 , F16C43/02 , F16C2226/50 , F16C2226/76

23. 发明授权

EP3036447B1 AEROSTATISCHES LAGER FÜR EINEN ROTOR, INSBESONDERE IN EINER AUSWUCHTMASCHINE 有权
标题翻译： AEROSTATISCHES LAGERFÜREINEN ROTOR，INSBESONDERE IN EINER AUSWUCHTMASCHINE
公开(公告)号：EP3036447B1
公开(公告)日：2017-02-08
申请号：EP14755347.3
申请日：2014-08-18
申请人： Schenck RoTec GmbH
发明人： THELEN, Dieter
IPC分类号： F16C32/06 , F01D25/04 , F01D25/16
CPC分类号： F16C32/0614 , F01D25/164 , F01D25/168 , F16C32/0603

24. 发明授权

EP2051141B1 Driving apparatus, exposure apparatus, and device fabrication method 有权
标题翻译：驱动装置，曝光装置以及元件制造方法
公开(公告)号：EP2051141B1
公开(公告)日：2015-04-22
申请号：EP08166583.8
申请日：2008-10-14
申请人： Canon Kabushiki Kaisha
发明人： Yasunobe, Osamu
IPC分类号： G03F7/20
CPC分类号： G03F7/70758 , F16C29/025 , F16C32/0603 , G03F7/70816 , G03F7/7095 , Y10T74/20354

25. 发明公开

EP2835543A1 RADIAL FOIL BEARING 有权
标题翻译： RADIALFOLIENLAGER
公开(公告)号：EP2835543A1
公开(公告)日：2015-02-11
申请号：EP13772099.1
申请日：2013-03-28
申请人： IHI Corporation
发明人： OMORI Naomichi
IPC分类号： F16C27/02
CPC分类号： F16C17/024 , F16C32/0603 , F16C43/02 , F16C2226/50 , F16C2226/76
摘要： A radial foil bearing (3) that supports a rotating shaft (1). This radial foil bearing (3) is provided with a top foil (10), a back foil (11), and a bearing housing (12) that houses them. A through-slot (13) is formed in the inner circumferential surface of the bearing housing (12), and engagement slots (20) are formed in the through-slot (13) by a fixing tool (16).
摘要翻译：支撑旋转轴（1）的径向箔片轴承（3）。该径向箔片轴承（3）设置有顶部箔片（10），背部箔片（11）和容纳它们的轴承壳体（12）。在轴承壳体（12）的内周面形成贯通槽（13），通过固定工具（16）在贯通槽（13）上形成卡合槽（20）。

26. 发明公开

EP2670882A1 APPARATUS FOR ATOMIC LAYER DEPOSITION 有权
标题翻译：用于原子层沉积的装置
公开(公告)号：EP2670882A1
公开(公告)日：2013-12-11
申请号：EP12704560.7
申请日：2012-01-30
申请人： Nederlandse Organisatie voor toegepast- natuurwetenschappelijk onderzoek TNO
发明人： VERMEER, Adrianus Johannes Petrus Maria , DE SWART, Jozef Johannes , WIT, Robert Coenraad
IPC分类号： C23C16/458 , C23C16/54 , C23C16/455 , F16C32/06 , B65G51/03
CPC分类号： C23C16/44 , C23C16/45551 , C23C16/458 , C23C16/4582 , C23C16/4583 , C23C16/54 , F16C32/0603 , F16C32/0685
摘要： Apparatus for atomic layer deposition on a surface of a sheeted substrate, comprising: an injector head comprising a deposition space provided with a precursor supply and a precursor drain; said supply and drain arranged for providing a precursor gas flow from the precursor supply via the deposition space to the precursor drain; the deposition space in use being bounded by the injector head and the substrate surface; a gas bearing comprising a bearing gas injector, arranged for injecting a bearing gas between the injector head and the substrate surface, the bearing gas thus forming a gas-bearing; a conveying system providing relative movement of the substrate and the injector head along a plane of the substrate to form a conveying plane along which the substrate is conveyed. A support part arranged opposite the injector head, the support part constructed to provide a gas bearing pressure arrangement that balances the injector head gas-bearing in the conveying plane, so that the substrate is held supportless by said gas bearing pressure arrangement in between the injector head and the support part.
摘要翻译： 1。一种用于在片状基底的表面上进行原子层沉积的设备，包括：注入头，所述注入头包括设置有前体供应和前驱排放的沉积空间; 所述供应和排出装置设置用于提供从前体供应源经由沉积空间到达前体排出口的前体气体流; 使用中的沉积空间由注射器头部和基板表面界定; 包括轴承气体喷射器的气体轴承，所述轴承气体喷射器布置成用于在所述喷射器头和所述衬底表面之间注入轴承气体，所述轴承气体因此形成气体轴承; 输送系统，所述输送系统提供所述衬底和所述注射器头沿着所述衬底的平面的相对移动以形成所述衬底沿着其传送的传送平面。支撑部分与喷射器头相对设置，支撑部分构造成提供气体轴承压力布置，该布置使喷射器头部气体轴承在输送平面中平衡，使得基板通过所述气体轴承压力布置保持在喷射器之间头部和支撑部分。

27. 发明公开

EP1887190A3 Lagerung einer Turbomaschine 有权
标题翻译：一个涡轮增压发动机的存储
公开(公告)号：EP1887190A3
公开(公告)日：2010-09-01
申请号：EP07014729.3
申请日：2007-07-26
申请人： ATLAS COPCO ENERGAS GMBH
发明人： SANDSTEDE, Heiko , BOSEN, Werner
IPC分类号： F01D25/22
CPC分类号： F16C32/0603 , F01D25/22 , F05D2220/40 , F05D2240/53 , F16C32/0696
摘要： Es wird eine Turbomaschine (1) mit einer in einem Wellengehäuse (2) gelagerten Welle (3) und zumindest einem in einem Laufradgehäuse (4, 4') an einem Ende der Welle (3) fliegend angeordneten Laufrad (5, 5') zur Kompression, Expansion oder Förderung eines Arbeitsgases vorgestellt, wobei die Welle (3) durch Lager (8) in dem Wellengehäuse (2) gelagert ist, wobei die Lager (8) einen Anschluss (9) an eine Druckgasleitung (10) aufweisen, die mit einem Druckbereich der Turbomaschine (1) verbunden ist, wobei die Lager (8) mit einem von dem Druckbereich durch die Druckgasleitung (10) geführten Anteil des Arbeitsgases beaufschlagt sind und wobei das Wellengehäuse (2) einen Entlüftungsanschluss (14) aufweist. Die Welle (3) ist durch hydrostatische, gasgeschmierte Lager (8) derart gelagert, dass die Lagerwirkung unabhängig oder zumindest weitgehend unabhängig von der Rotationsgeschwindigkeit der Welle (3) ist, wodurch auch während des Anlaufens der Turbomaschine (1) eine ausreichende Abstützung der Welle (3) und drehzahlunabhängig eine große Steifigkeit und geringe Anfälligkeit gegen Druckstoßbelastungen gewährleistet ist und dass der Druck in dem Anschluss (9) an die Druckgasleitung (10) um mindestens 5 bar größer ist als der Druck in dem Bereich des Entlüftungsanschlusses (14).

28. 发明授权

EP2076818B1 APPARATUS COMPRISING A ROTATING CONTAMINANT TRAP 有权
标题翻译：包含旋转污染物陷阱的装置
公开(公告)号：EP2076818B1
公开(公告)日：2009-12-23
申请号：EP07808582.6
申请日：2007-09-17
申请人： ASML Netherlands B.V.
发明人： FRANKEN, Johannes, Christiaan, Leonardus , BANINE, Vadim, Yevgenyevich , WASSINK, Arnoud, Cornelis
IPC分类号： G03F7/20 , F16C32/06
CPC分类号： G03F7/70916 , B82Y10/00 , F16C32/0603 , F16C32/0685 , F16C33/02 , F16C33/72 , F16C2300/62 , G03F7/70033 , G03F7/70941
摘要： A contaminant trap apparatus (10) arranged in a path (R) of a radiation beam to trap contaminants emanating from a radiation source (50) configured to produce the radiation beam is disclosed. The contaminant trap (10) apparatus includes a rotor (10) having a plurality of channel forming elements (11) defining channels (ch) which are arranged substantially parallel to the direction of propagation of the radiation beam, the rotor (10) including electrically chargeable material and arranged to be electrically charged as a result of the operation of the radiation source (50); and a bearing (20) configured to rotatably hold the rotor (10) with respect to a rotor carrying structure (30), wherein the apparatus is configured to (i) control or redirect an electrical discharge (10) of the rotor (ED), or (ii) suppress an electrical discharge (ED) of the rotor (10), or (iii) both,(i) and (ii).
摘要翻译：公开了一种布置在辐射束的路径（R）中的污染物收集装置（10），以捕获从配置成产生辐射束的辐射源（50）发出的污染物。污染物捕集器（10）装置包括具有多个通道形成元件（11）的转子（10），该通道形成元件限定基本平行于辐射束传播方向布置的通道（ch），转子（10）包括电气由于所述辐射源（50）的操作，所述可充电材料被布置为被充电; 和配置成相对于转子承载结构（30）可旋转地保持转子（10）的轴承（20），其中所述设备构造成（i）控制或重定向转子（ED）的放电（10），或者（ii）抑制转子（10）的放电（ED），或者（iii）（i）和（ii）两者。

29. 发明公开

EP1052553A3 Isolation mounts for use with vacuum chambers and their application in lithographic projection apparatus 审中-公开
标题翻译：绝缘支撑装置用于与真空室和它们在光刻投影装置中使用的使用
公开(公告)号：EP1052553A3
公开(公告)日：2003-08-27
申请号：EP00303229.9
申请日：2000-04-17
申请人： ASML Netherlands B.V.
发明人： Driessen, Johannes Cornelis , Bisschops, Theodorus Hubertus Josephus , Vijfvinkel, Jakob , Dona, Marinus Josephus Jakobus , Meuwese, Mark Theo , Schneider, Ronald Maarten , Mors, Michel Alexander , Visser, Hugo Matthieu
IPC分类号： G03F7/20
CPC分类号： G03F7/709 , F16C32/0603 , F16C33/748 , F16C2300/62 , G03F7/70691 , G03F7/70808 , G03F7/70825 , G03F7/70841
摘要： A reference frame (50) provided in a vacuum chamber is supported by support pillars (41) extending through and isolated from the vacuum chamber walls (11) to isolate the reference frame from vibrations in the vacuum chamber. The gap between the support pillar and the vacuum chamber wall may be sealed by a low-stiffness seal. The low stiffness seal may be a three part seal allowing relative motion in six-degrees of freedom.

30. 发明公开

EP1089001A4 STATIC PRESSURE GAS BEARING, STAGE DEVICE USING IT, AND OPTICAL DEVICE USING IT 有权
标题翻译：静压这种轴承使用的设备和与该设备提供的光学设备
公开(公告)号：EP1089001A4
公开(公告)日：2003-02-05
申请号：EP99923978
申请日：1999-06-09
申请人： NIPPON KOGAKU KK
发明人： TOKUSHIMA SHINOBU , OKUBO YUKIHARU , SHIMODA TOSHIMASA
IPC分类号： F16C29/02 , F16C32/06 , H01J37/20 , H01L21/68 , H01L21/683
CPC分类号： H01L21/6838 , F16C29/025 , F16C32/06 , F16C32/0603 , F16C33/748 , F16C2300/62 , H01J37/20 , H01L21/68
摘要： A static pressure gas bearing, stage device, and optical device, in which a gas layer is provided between relatively movable two members (fixed part and movable part) and maintained at a specified distance; specifically, a static pressure gas bearing, a stage device, and an optical device capable of reducing the size of devices and easily laying out piping, wherein the static pressure gas bearing comprises a fixed part (4) and a movable part (3) installed movably along the fixed part (4) and a space between the fixed part (4) and the movable part (3) is maintained at a specified distance by the gas layer between the fixed part (4) and the movable part (3), the movable part (3) comprises bearing pads (3a) to feed gas into the gas layer between the movable part (3) and the fixed part (4) and discharge grooves (3c) to discharge gas fed by the bearing pads (3a), and the fixed part (4) comprises discharge ports (4a) provided at positions opposite to the discharge grooves (3c).

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