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1. 发明授权

EP3922859B1 CENTRIFUGAL COMPRESSOR 有权转让
公开(公告)号：EP3922859B1
公开(公告)日：2024-04-24
申请号：EP20778156.8
申请日：2020-01-29
IPC分类号： F04D29/056 , F04D17/10 , F04D29/28 , F16C32/06
CPC分类号： F04D29/284 , F16C2360/4420130101 , F16C32/0603 , F04D29/056 , F04D17/10

2. 发明公开

EP2803876A1 Rotation transmitter 有权
标题翻译： Rotationsüberträger
公开(公告)号：EP2803876A1
公开(公告)日：2014-11-19
申请号：EP14167663.5
申请日：2014-05-09
申请人： Mitutoyo Corporation
发明人： Sakai, Hisayoshi
IPC分类号： F16D3/02 , F16D3/80 , F16C32/06
CPC分类号： F16D3/82 , F16C32/0603 , F16D3/02 , F16D3/80
摘要： A rotation transmitter includes: a first member (10), an intermediate member (30) and a second member (20) that are arranged coaxially with a rotation axis (A). The first member (10) is formed with a first bearing surface (13) along the rotation axis (A) and a first direction (D1). The second member (20) is formed with a second bearing surface (23) along the rotation axis (A) and a second direction (D2). The intermediate member (30) is formed with a first middle bearing surface (33) facing the first bearing surface (13) and formed with a second middle bearing surface (34) facing the second bearing surface (23). A static-pressure air bearing (41,42) is formed between the bearing surface (13,23) and the middle bearing surface (33,34). The rotation transmitter further includes: a preload device (51,52) that biases the bearing surface (13,23) and the middle bearing surface (33,34) in a direction approaching each other.
摘要翻译：旋转变送器包括：与旋转轴线（A）同轴设置的第一构件（10），中间构件（30）和第二构件（20）。第一构件（10）沿旋转轴线（A）和第一方向（D1）形成有第一支承面（13）。第二构件（20）沿旋转轴线（A）和第二方向（D2）形成有第二支承面（23）。中间构件（30）形成有面对第一支承面（13）的第一中间承载面（33），并形成有面向第二支承面（23）的第二中间承载面（34）。静压空气轴承（41,42）形成在支承表面（13,23）和中间支承表面（33,34）之间。旋转变送器还包括：预紧装置（51,52），其沿着彼此接近的方向偏压支承面（13,23）和中间支承面（33,34）。

3. 发明公开

EP2786030A1 GAS BEARING SPINDLES AND GAS BEARING ASSEMBLIES FOR GAS BEARING SPINDLES 有权转让
标题翻译： GASLAGERSPINDELN UND GASLAGERBAUGRUPPENFÜRGASLAGERSPINDELN
公开(公告)号：EP2786030A1
公开(公告)日：2014-10-08
申请号：EP12795020.2
申请日：2012-11-20
申请人： GSI Group Limited
发明人： SPICER, Neil , BEESLEY, Chris
IPC分类号： F16C27/06 , F16C37/00 , F16C32/06
CPC分类号： F16C32/0603 , F16C27/063 , F16C32/0677 , F16C37/00 , F16C37/002
摘要： A gas bearing assembly for a gas bearing spindle. The assembly comprises a housing portion (11) and an inner radial bearing portion (10) disposed within and resiliently mounted relative to the housing portion. The inner radial bearing portion comprises an inner shell bearing portion (12) having a bearing face, and an intermediate sleeve portion (14) which is disposed between the inner shell bearing portion and the housing portion. A liquid coolant channel (7) is provided between the inner bearing shell portion (12) and the intermediate sleeve portion (14). The assembly further comprises an anti-rotation plug (601, 901) which is received in both the housing portion (11) and the inner bearing portion (10) to couple the housing portion and the inner bearing portion against relative rotation.
摘要翻译：一种用于气体轴承主轴的气体轴承组件。组件包括壳体部分（11）和内部径向支承部分（10），其设置在壳体部分内部并且相对于壳体部分弹性地安装。内径向轴承部分包括具有轴承面的内壳轴承部分（12）和设置在内壳轴承部分和壳体部分之间的中间套筒部分（14）。液体冷却剂通道（7）设置在内部轴承壳体部分（12）和中间套筒部分（14）之间。该组件还包括容纳在壳体部分（11）和内部轴承部分（10）中的防旋转插头（601,901），以将壳体部分和内侧支承部分相互旋转。

4. 发明公开

EP2618021A2 Vibration control apparatuses, vibration control methods, and computed tomography scanners 审中-公开
标题翻译： Schwingungssteuerungsvorrichtungen，Schwingungssteuerungsverfahren und Computertomographie-Scanner
公开(公告)号：EP2618021A2
公开(公告)日：2013-07-24
申请号：EP13151969.6
申请日：2013-01-18
申请人： Samsung Electronics Co., Ltd
发明人： Lee, Ja Woo
IPC分类号： F16F15/027 , A61B6/03 , F16C32/06
CPC分类号： F16F15/16 , A61B6/032 , A61B6/035 , F16C32/06 , F16C32/0603 , F16C32/0614 , F16C32/0666 , F16C2300/14 , F16C2316/10 , F16F15/027
摘要： A vibration control apparatus may include a fluid bearing (402) provided around a rotating body (102) to form a fluid bearing gap (504) between the fluid bearing (402) and the rotating body (102); and a pressure regulator (604) configured to variably control a pressure of the fluid bearing (402), based on imbalance information of the rotating body (102), to compensate for imbalance of the rotating body (102). A computed tomography scanner may include a gantry (102) configured to generate a computed tomography image while rotating around a test subject; a fluid bearing (402) provided around the gantry (102) to form a fluid bearing gap (504) between the fluid bearing (402) and the gantry (102); and/or a pressure regulator (604) configured to variably control a pressure of the fluid bearing (402), based on imbalance information of the gantry (102), to compensate for imbalance of the gantry (102).
摘要翻译：振动控制装置可以包括设置在旋转体（102）周围以在流体轴承（402）和旋转体（102）之间形成流体轴承间隙（504）的流体轴承（402）以及压力调节器（604），其构造成基于所述旋转体（102）的不平衡信息来可变地控制所述流体轴承（402）的压力，以补偿所述旋转体（102）的不平衡。计算机断层摄影扫描器可以包括配置成在围绕测试对象旋转的同时产生计算机断层摄影图像的台架（102）设置在所述台架（102）周围以在所述流体轴承（402）和所述台架（102）之间形成流体轴承间隙（504）的流体轴承（402）和/或压力调节器（604），其被配置为基于所述台架（102）的不平衡信息来可变地控制所述流体轴承（402）的压力，以补偿所述台架（102）的不平衡。

5. 发明公开

EP1970572A4 GAS PRESSURE CONTROL ACTUATOR, GAS BEARING MECHANISM FOR THE GAS PRESSURE CONTROL ACTUATOR, AND MINUTE DISPLACEMENT OUTPUT DEVICE USING THE GAS PRESSURE CONTROL ACTUATOR 有权
标题翻译：气体压力控制致动器，煤气贮存机构，气体压力控制致动器和汽油税执行元件所使用微位移输出设备
公开(公告)号：EP1970572A4
公开(公告)日：2011-09-28
申请号：EP06843463
申请日：2006-12-27
申请人： PNEUMATIC SERVO CONTROLS LTD
发明人： SASAKI KATSUMI , HIRAYAMA TOMOKO
IPC分类号： F15B15/14 , F16C32/06 , G12B5/00 , H01L21/68
CPC分类号： F15B15/08 , F16C32/0603 , F16C32/0692 , H01L21/682

6. 发明公开

EP1959149A2 Luftlager mit Berücksichtigung hochfrequenter Resonanzen 有权
标题翻译： Luftlager mitBerücksichtigunghochfrequenter Resonanzen
公开(公告)号：EP1959149A2
公开(公告)日：2008-08-20
申请号：EP08002728.7
申请日：2008-02-14
申请人： Integrated Dynamics Engineering GmbH
发明人： Heiland, Peter
IPC分类号： F16C32/06 , G03F7/20
CPC分类号： G03F7/709 , F16C32/0603 , F16C32/0688
摘要： Die Erfindung betrifft ein Luftlager mit verringerter Strukturresonanz. Ein Kopplungselement, welches der Kolben mit der Last verbindet, ist von der Last um mindestens ein Viertel der Kolbenlänge beabstandet.
摘要翻译：轴承（1）具有可移动地布置在基板上的接口部分（2）。活塞（3）可移动地布置在接口部分内部并且支撑负载（4），该负载（4）将与振动隔离并且在水平和垂直方向上被支撑。联接元件将活塞与负载相连。联接元件具有一个销和一个距离负载的距离为活塞长度的四分之一。该销由钢，钛或相应的合金制成，并且朝向底板的延伸部分附接到负载。

7. 发明授权

EP1279070B1 Apparatus for providing a purged optical path in a projection photolithography system and a corresponding method 有权
标题翻译：装置，用于产生在投影光刻系统中的吹扫光路和对应的方法
公开(公告)号：EP1279070B1
公开(公告)日：2007-10-03
申请号：EP01932838.4
申请日：2001-05-02
申请人： ASML Holding N.V.
发明人： HANSELL, Eric, C. , HERRERA, Jose, V. , HUSE, Richard, L. , IVALDI, Jorge, S. , KREHLEY, Stephen, G. , SHAMALY, Thomas, P.
IPC分类号： G03F7/20
CPC分类号： G03F7/70933 , F16C29/025 , F16C32/0603 , G03F7/70808 , G03F7/70816 , G03F7/70841 , G03F7/70866 , G03F7/70916
摘要： A method and apparatus for providing a purged optical path between an optical source surface (304) and an optical target surface (306) and for permitting relative movement between the optical source surface and the optical target surface is described. The apparatus (302) includes a body (338), a central cavity (316), at least one gas supply bore (328), and at least one gas removal bore (330). The body defines first and second opposing surfaces. The first opposing surface (314) is configured for positioning closely adjacent to the optical target surface (306). The second opposing surface (336) is configured to mate with the optical source surface (304). The central cavity (316) is formed in the body for passing light through the body, the central cavity being open at the first and second opposing surfaces. The at least one gas supply bore (328) is formed in the body for supplying a flow of a purge gas to the central cavity. The at least one gas removal bore (330) is formed in the body at the first opposing surface to remove gas from a gap formed between the first opposing surface and the optical target surface.

8. 发明授权

EP1398521B1 Shock absorbing apparatus and use thereof in a positioning apparatus 有权
标题翻译：减振装置和它的使用在定位装置
公开(公告)号：EP1398521B1
公开(公告)日：2007-06-13
申请号：EP03020096.8
申请日：2003-09-04
申请人： CANON KABUSHIKI KAISHA
发明人： Kubo, Tadayuki c/o Canon Kabushiki Kaisha , Sasaki, Takeshi c/o Canon Kabushiki Kaisha
IPC分类号： F16F15/02 , H01L21/68 , F16F7/00
CPC分类号： F16F15/02 , F16C32/0603 , F16F7/00 , F16F2230/0047 , Y10T74/20354

9. 发明公开

EP1621783A3 Air bearing structure and linear driving device using said air bearing structure 审中-公开
标题翻译：空气轴承组件和线性驱动器具有这样的空气轴承装置
公开(公告)号：EP1621783A3
公开(公告)日：2007-04-18
申请号：EP05254485.5
申请日：2005-07-19
申请人： FANUC LTD
发明人： Kawai, Tomohiko , Ebihara, Kenzo
IPC分类号： F16C29/02 , F16C32/06
CPC分类号： F16C32/0603 , F16C29/025 , F16C32/06 , F16C32/0666
摘要： The length of the bearing surface in the movable portion (2) which moves linearly is larger than the length of the bearing surface in the fixed portion (1) by the stroke of the movement. With this configuration, the bearing surface on the side of the fixed portion always opposes the bearing surface on the side of the movable portion. An air supply source is connected to the fixed portion (1), and a plurality of air discharge openings (4) through which air is injected are disposed in the bearing surface of the fixed portion to constitute an air bearing. Only the side of the movable portion where the fixed portion is inserted is open. A coil (5) is disposed on the fixed portion and a magnet (6) is disposed on the movable portion so that a linear motor is constituted, thus providing a linear driving device. Cables (9) and the like for supplying compressed air or power are connected to the fixed portion (1), not to the movable portion (2), thus no external pressure is applied from the cable and the like, and highly accurate operation is achieved.

10. 发明公开

EP1637753A2 Fluid dynamic bearing structure and method of adjusting bearing gap 审中-公开
标题翻译： Fluiddynamische Lageranordnung und Verfahren um den Lagerspalt einzustellen
公开(公告)号：EP1637753A2
公开(公告)日：2006-03-22
申请号：EP05255521.6
申请日：2005-09-08
申请人： FANUC LTD
发明人： Kawai, Tomohiko, 1770-1, Kawaguchi , Ebihara, Kenzo, Fanuc, Dai3virakaramatsu , Nakamura, Fuminobu, Fanuc, Dai3virakaramatsu
IPC分类号： F16C29/02 , F16C32/06
CPC分类号： F16C32/06 , F16C29/02 , F16C29/025 , F16C29/12 , F16C32/0603
摘要： A bolt insertion hole (2) is provided along an edge end portion on a flat surface (6) of a plate-like member (1), and a tap hole (3) is provided on an end surface (7) of the other edge end correspondingly to the bolt insertion hole. A bolt (5) is inserted into the bolt insertion hole and screwed with the tap hole, and a box bearing (10) is formed by means of four plate-like members joined together. The diameter of the bolt insertion hole is made larger than the diameter of the bolt. By changing the insertion position of the bolt with respect to the bolt insertion hole, the distance of a bearing gap (d) inside the bearing, which is formed into the shape of a box, can be adjusted.
摘要翻译：沿着板状构件（1）的平坦面（6）上的边缘端部设置有螺栓插入孔（2），并且在另一个的端面（7）上设置有抽头孔（3）边缘端对应于螺栓插入孔。将螺栓（5）插入到螺栓插入孔中并与分接孔螺纹连接，并且通过连接在一起的四个板状构件形成盒式轴承（10）。螺栓插入孔的直径大于螺栓的直径。通过改变螺栓相对于螺栓插入孔的插入位置，可以调节形成为箱形的轴承内的轴承间隙（d）的距离。

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