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1. 发明授权

US5254439A Light-sensitive polymer, method for preparing the same and method for forming patterns 失效
标题翻译：光敏聚合物，其制备方法和形成图案的方法
公开(公告)号：US5254439A
公开(公告)日：1993-10-19
申请号：US854696
申请日：1992-03-20
申请人： Yoshiyuki Tani , Masayuki Endou , Kazufumi Ogawa , Yasuhisa Tanaka , Toshinobu Ishihara , Tohru Kubota
发明人： Yoshiyuki Tani , Masayuki Endou , Kazufumi Ogawa , Yasuhisa Tanaka , Toshinobu Ishihara , Tohru Kubota
IPC分类号： C08G77/48 , C08G77/60 , G03F7/075 , G03F7/30
CPC分类号： C08G77/48 , C08G77/60 , G03F7/0754 , G03F7/0757 , Y10S430/146
摘要： There is disclosed a polymer having linear --Si--O--Si-- bonds and --Si--Si--Si-- bonds, or polysilane bonds that are greater than trisilane bonds, sensitive to far ultraviolet rays. The polymer is prepared by polymerizing a dichlorosiloxane alone or with at least one dichlorosilane in an inert solvent in the presence of sodium. The polymer undergoes oxidation with oxygen plasma to form SiO.sub.2 resistant to oxygen dry etching, exhibits absorption peaks only in far ultraviolet, and is suitable for preparing a single layered resist or an upper resist of a two-layered system.
摘要翻译：公开了具有对远紫外线敏感的线性-Si-O-Si键和-Si-Si-Si键或大于丙硅烷键的聚硅烷键的聚合物。聚合物是通过在惰性溶剂中在钠的存在下单独或与至少一种二氯硅烷聚合二氯硅烷来制备的。聚合物用氧等离子体进行氧化以形成耐氧干蚀刻的SiO 2，仅在远紫外线下显示吸收峰，并且适用于制备双层系统的单层抗蚀剂或上抗蚀剂。

2. 发明授权

US5126419A Light-sensitive polymer, method for preparing the same andmethod for forming patterns 失效
标题翻译：光敏聚合物，其制备方法和形成图案的方法
公开(公告)号：US5126419A
公开(公告)日：1992-06-30
申请号：US622152
申请日：1990-12-03
申请人： Yoshiyuki Tani , Masayuki Endou , Kazufumi Ogawa , Yasuhisa Tanaka , Toshinobu Ishihara , Tohru Kubota
发明人： Yoshiyuki Tani , Masayuki Endou , Kazufumi Ogawa , Yasuhisa Tanaka , Toshinobu Ishihara , Tohru Kubota
IPC分类号： C08G77/48 , C08G77/60 , G03F7/075
CPC分类号： G03F7/0754 , C08G77/48 , C08G77/60 , G03F7/0757
摘要： A polymer having linear --Si--O--Si-- bonds and --Si--Si--Si-- bonds, or polysilane bonds more than trisilane bonds, sensitive to far ultraviolet rays. The light-sensitive polymer can be prepared by copolymerizing a dichlorodisiloxane and a dichlorosilane in an inert solvent in the presence of sodium. The polymer undergoes oxidation with oxygen plasma to form SiO.sub.2 resistant to oxygen dry etching, exhibits absorption peaks only in far ultraviolet and is suitable for preparing a single layered resist or an upper resist of a two layered resist system.
摘要翻译：具有线性-Si-O-Si-键和-Si-Si-Si-键的聚合物，或聚硅烷键多于丙硅烷键，对远紫外线敏感。感光性聚合物可以通过在惰性溶剂中在钠的存在下使二氯二硅氧烷和二氯硅烷共聚来制备。聚合物用氧等离子体进行氧化以形成耐氧干蚀刻的SiO 2，仅在远紫外线下表现出吸收峰，并且适用于制备双层抗蚀剂体系的单层抗蚀剂或上抗蚀剂。

3. 发明授权

US5202452A Terminal perfluoroalkylsilane compound and a process for preparing the same 失效
标题翻译：末端全氟烷基硅烷化合物及其制备方法
公开(公告)号：US5202452A
公开(公告)日：1993-04-13
申请号：US753522
申请日：1991-09-03
申请人： Kazufumi Ogawa , Norihisa Mino , Toshinobu Ishihara , Mikio Endo , Tohru Kubota , Yasuhisa Tanaka
发明人： Kazufumi Ogawa , Norihisa Mino , Toshinobu Ishihara , Mikio Endo , Tohru Kubota , Yasuhisa Tanaka
IPC分类号： B05D1/18 , C07F7/12 , C07F7/18
CPC分类号： B82Y30/00 , B05D1/185 , B82Y40/00 , C07F7/12 , C07F7/182
摘要： A silane compound represented by the following general Formula (I) is described: ##STR1## wherein R.sup.1 is an alkyl group with 1 to 4 carbon atoms;A is oxygen atom (--O--), carboxyl group ##STR2## or an alkylsilylene group ##STR3## wherein each R.sup.2 and R.sup.3 is an alkyl group with 1 to 4 carbon atoms;x is a halogen atom, or an alkoxyl group;m is an integer from 1 to 8;n is an integer from 0 to 2;p is an integer from 5 to 25; andq is an integer from 0 to 2.The silane compound is useful as a coating agent for various base materials, to provide lubricity, in addition to stain-proofing property.
摘要翻译：描述由以下通式（I）表示的硅烷化合物：其中R 1是具有1至4个碳原子的烷基; A是氧原子（-O-），羧基基团或烷基亚甲硅基基团，其中每个R 2和R 3是具有1至4个碳原子的烷基; x是卤素原子或烷氧基; m是1至8的整数; n为0〜2的整数; p是5至25的整数; q为0〜2的整数。作为各种基材的涂布剂，除了防污性以外，还可以提供润滑性。

4. 发明授权

US5425988A Recording and reproducing device which includes a protective film and a monomolecular fluoro organo silicon film 失效
标题翻译：包括保护膜和单分子氟有机硅膜的记录和再现装置
公开(公告)号：US5425988A
公开(公告)日：1995-06-20
申请号：US127288
申请日：1993-09-27
申请人： Kazufumi Ogawa , Norihisa Mino , Toshinobu Ishihara , Mikio Endo , Tohru Kubota , Yasuhisa Tanaka
发明人： Kazufumi Ogawa , Norihisa Mino , Toshinobu Ishihara , Mikio Endo , Tohru Kubota , Yasuhisa Tanaka
IPC分类号： B05D1/18 , C10M105/76 , C10M107/50 , C10N40/18 , G11B5/187 , G11B5/255 , G11B5/64 , G11B5/72 , G11B5/725 , G11B5/00
CPC分类号： B82Y30/00 , B05D1/185 , B82Y10/00 , B82Y40/00 , G11B5/255 , G11B5/72 , G11B5/725 , Y10S428/90 , Y10T428/261 , Y10T428/268 , Y10T428/3154 , Y10T428/31544 , Y10T428/31663
摘要： A recording and reproducing device is provided. The device comprises a recording medium, a head giving and receiving recording signals to or from the recording medium, and a mechanism section and a circuit section giving and receiving the recording signals, wherein at least one protective film, and at least one fluorine-containing monomolecular film are formed in this order on the recording layer of the recording medium or on the surface of the head which comes into contact with said recording layer, wherein said protective film is a metal film, oxidized metal film, semi-conductor film, oxidized semi-conductor film, or organic monomolecular film, and wherein said fluorine-containing monomolecular film is formed by the chemical adsorption of a specific-type of silane compound that contains a perfluoroalkyl group at the molecular end on the surface of the protective film.
摘要翻译：提供了一种记录和再现装置。该装置包括记录介质，向记录介质提供和接收记录信号的磁头，以及提供和接收记录信号的机构部分和电路部分，其中至少一个保护膜和至少一个含氟单分子膜依次形成在记录介质的记录层上或与记录层接触的头的表面上，其中所述保护膜是金属膜，氧化金属膜，半导体膜，氧化物半导体膜或有机单分子膜，并且其中所述含氟单分子膜通过在保护膜的表面上的分子末端的含有全氟烷基的特定类型的硅烷化合物的化学吸附而形成。

5. 发明授权

US5461166A Chemically adsorbed ultrathin film and its material, and method of manufacturing the same 失效
标题翻译：化学吸附超薄膜及其材料及其制造方法
公开(公告)号：US5461166A
公开(公告)日：1995-10-24
申请号：US384594
申请日：1995-02-03
申请人： Norihisa Mino , Kazufumi Ogawa , Toshinobu Ishihara , Mikio Endo , Tohru Kubota , Kazuyuki Asakura
发明人： Norihisa Mino , Kazufumi Ogawa , Toshinobu Ishihara , Mikio Endo , Tohru Kubota , Kazuyuki Asakura
IPC分类号： C07B61/00 , B01J23/42 , B05D1/18 , C07F7/08 , C07F7/12 , C07F7/18 , C09K3/00 , G03F7/075 , C07D333/02 , C08G77/08 , C08F28/06
CPC分类号： B82Y30/00 , B05D1/185 , B82Y10/00 , B82Y40/00 , C07F7/12 , C07F7/182 , C07F7/1836 , C07F7/1868
摘要： Disclosed are a conductive thienyl derivative monomolecular film covalently bonded to a substrate surface and method of manufacturing the same, and a silicon compound comprising 3-thienyl groups (thiophene derivative) used for forming the conductive monomolecular film and a method of manufacturing the same. A monomolecular ultrathin film comprising 3-thienyl groups and silicon groups is formed in the invention. The silicon compound used for forming the film is provided by reacting .omega.-(3-thienyl)-1-alkene compound to a monosilane derivative compound, in which three out of four hydrogen atoms of monosilane are replaced with halogen or alkoxy groups, in the presence of a transition metal catalyst. A substrate is dipped and held in a nonaqueous solution of the above-noted compound, thus chemically bonding the monomolecular film to the substrate surface. Furthermore, a thienyl derivative ultrathin film is formed by the electrolytic or catalytic polymerization of the monomolecular film.
摘要翻译：公开了共价结合到基板表面的导电噻吩基衍生物单分子膜及其制造方法，以及包含用于形成导电性单分子膜的3-噻吩基（噻吩衍生物）的硅化合物及其制造方法。在本发明中形成包含3-噻吩基和硅基团的单分子超薄膜。用于形成膜的硅化合物是通过使ω-（3-噻吩基）-1-烯烃化合物与甲硅烷衍生物化合物反应而得到的，其中甲硅烷中四分之三的氢原子被卤素或烷氧基取代，过渡金属催化剂的存在。将基材浸渍并保持在上述化合物的非水溶液中，从而将单分子膜化学键合到基材表面。此外，通过单分子膜的电解或催化聚合形成噻吩衍生物超薄膜。

6. 发明授权

US5455360A 1-pyrrolyl silicon compounds, chemically adsorbed ultrathin film formed therefrom and method of manufacturing the same 失效
标题翻译： 1-吡咯基硅化合物，由其形成的化学吸附的超薄膜及其制造方法
公开(公告)号：US5455360A
公开(公告)日：1995-10-03
申请号：US107886
申请日：1993-08-18
申请人： Norihisa Mino , Kazufumi Ogawa , Toshinobu Ishihara , Mikio Endo , Tohru Kubota , Katsuya Takemura
发明人： Norihisa Mino , Kazufumi Ogawa , Toshinobu Ishihara , Mikio Endo , Tohru Kubota , Katsuya Takemura
IPC分类号： C08G77/26 , B05D1/18 , C07F7/12 , C07F7/18 , C08G77/28 , C08J5/18 , C09K3/16 , H01B1/12 , C07F7/10 , C07D207/323
CPC分类号： B82Y30/00 , B05D1/185 , B82Y10/00 , B82Y40/00 , C07F7/12 , C07F7/182 , C07F7/1836 , C07F7/1868
摘要： Disclosed are a conductive pyrrole derivative monomolecular film covalently bonded to a substrate surface and method of manufacturing the same, and a monomer used for forming the conductive pyrrole derivative monomolecular film and method of manufacturing the same. The invention relates to a monomolecular ultrathin film comprising 1-pyrrolyl groups and silicon groups. The monomer used for forming the film is provided by reacting .omega.-(1-pyrrolyl)-1-alkene compound to a monosilane derivative compound, in which three out of four hydrogen atoms of monosilane are replaced with halogen or alkoxy groups, in the presence of a transition metal catalyst. A substrate is dipped and held in a nonaqueous solution of the above-noted monomer, thus chemically bonding a monomolecular film to a substrate surface. Furthermore, a polypyrrole derivative ultrathin film is formed by the electrolytic or catalytic polymerization of the monomolecular film.
摘要翻译：公开了共价键合到基材表面的导电吡咯衍生物单分子膜及其制备方法，以及用于形成导电吡咯衍生物单分子膜的单体及其制造方法。本发明涉及包含1-吡咯基和硅基团的单分子超薄膜。用于形成膜的单体是通过使ω-（1-吡咯基）-1-烯烃化合物与甲硅烷衍生物化合物反应而得到的，其中甲硅烷的四个氢原子中的三个被卤素或烷氧基取代，的过渡金属催化剂。将基材浸渍并保持在上述单体的非水溶液中，从而将单分子膜化学键合到基材表面。此外，通过单分子膜的电解或催化聚合形成聚吡咯衍生物超薄膜。

7. 发明授权

US5011963A Terminal perfluoroalkylsilane compounds 失效
标题翻译：末端全氟烷基硅烷化合物
公开(公告)号：US5011963A
公开(公告)日：1991-04-30
申请号：US307968
申请日：1989-02-09
申请人： Kazufumi Ogawa , Hideharu Tamura , Toshinobu Ishihara , Yasuhisa Tanaka , Mikio Endou
发明人： Kazufumi Ogawa , Hideharu Tamura , Toshinobu Ishihara , Yasuhisa Tanaka , Mikio Endou
IPC分类号： C07F7/12 , C07F7/18
CPC分类号： C07F7/12 , C07F7/1832
摘要： A terminal perfluoroalkylsilane compound F(CF.sub.2).sub.m (CH.sub.2).sub.n Si(CH.sub.3).sub.p X.sub.3-p (m+n=10 to 32 carbon atoms in fluoroalkyl group) is prepared by a hydrosilylation reaction of a terminal perfluoroalkene compounds F(CF.sub.2).sub.m (CH.sub.2).sub.1+q CH.dbd.CH.sub.2 (1+q+2=n) with the hydrodiensilane HSi(CH.sub.3).sub.p X.sup.3.sub.3-p. The F(CF.sub.2).sub.m (CH.sub.2).sub.1+q CH.dbd.CH.sub.2 are synthesized by a Grignard's reaction of a Grignard's reagent X.sup.2 Mg(CH.sub.2).sub.q CH.dbd.CH.sub.2 obtained from a terminal alkenyl halogen compound X.sup.2 (CH.sub.2).sub.q CH.dbd.CH.sub.2 with a terminal fluoroalkyl halogen compound F(CF.sub.2).sub.m (CH.sub.2).sub.1 X.sup.1.The terminal perfluoroalkylsilane compound has a sufficient lubricating effect and is useful for a coating agent with long and continuous lubricity.
摘要翻译：末端全氟烷基硅烷化合物F（CF2）m（CH2）nSi（CH3）pX3-p（m + n =氟代烷基中的10至32个碳原子）通过末端全氟链烯烃化合物F（CF 2）m CH2）1 + qCH = CH2（1 + q + 2 = n）与氢二硅烷HSi（CH3）pX33-p。 F（CF 2）m（CH 2）1 + q CH = CH 2通过Grignard's反应合成，格利雅反应由末端链烯基卤素化合物X2（CH2）qCH = CH2获得的格氏试剂X2Mg（CH2）qCH = CH2与末端氟烷基卤素化合物F（CF 2）m（CH 2）1 X 1。末端全氟烷基硅烷化合物具有足够的润滑效果，并且可用于具有长且连续润滑性的涂布剂。

8. 发明授权

US5272036A Pattern forming contrast enhanced material utilizing water soluble photosensitive diazo compound and pattern forming method 失效
标题翻译：图案形成对比增强材料利用水溶性光敏重氮化合物和图案形成方法
公开(公告)号：US5272036A
公开(公告)日：1993-12-21
申请号：US860209
申请日：1992-03-27
申请人： Yoshiyuki Tani , Masayuki Endo , Kazufumi Ogawa , Fumiyoshi Urano , Masaaki Nakahata
发明人： Yoshiyuki Tani , Masayuki Endo , Kazufumi Ogawa , Fumiyoshi Urano , Masaaki Nakahata
IPC分类号： C07C245/14 , C07C245/18 , C07D213/50 , G03F7/09 , G03F7/023 , G03F7/30
CPC分类号： G03F7/091 , C07C245/14 , C07C245/18 , C07D213/50 , Y10S430/146
摘要： Disclosed is a pattern forming contrast enhanced material comprising (a) a water soluble photosensitive compound selected from the group consisting of a water soluble aliphatic photosensitive compound (excluding ring compounds) having one or more of the group expressed by the formula (I), an aliphatic photosensitive quaternary ammonium salt having one or more of the group expressed by the formula (I), an aromatic photosensitive quaternary ammonium salt having one or more of the group expressed by the formula (I), and a photosensitive pyridinium salt having one or more of the group expressed by the formula (I), (b) a water soluble resin and (c) water and a pattern forming method using the same. ##STR1## According to the present invention, this material is used as a contrast enhanced layer in the exposure effected by deep ultraviolet ray such as an excimer laser beam to form a good fine pattern of a submicron order.
摘要翻译：公开了形成对比度增强材料的图案，其包含（a）选自具有一个或多个由式（I）表示的基团的水溶性脂族光敏化合物（不包括环化合物）的水溶性感光性化合物，具有由式（I）表示的基团中的一个或多个的芳香族光敏季铵盐，具有式（I）表示的基团中的一个或多个的芳族光敏季铵盐和具有一个或多个由式（I）表示的基团，（b）水溶性树脂和（c）水和使用其的图案形成方法。（I）根据本发明，在通过诸如准分子激光束的深紫外线进行的曝光中，将该材料用作对比度增强层，以形成亚微米级的良好精细图案。

9. 发明授权

US08597460B2 Adhesion method, and biochemical chip and optical component made by the same 有权
公开(公告)号：US08597460B2
公开(公告)日：2013-12-03
申请号：US13767094
申请日：2013-02-14
申请人： Kazufumi Ogawa
发明人： Kazufumi Ogawa
IPC分类号： B29C65/00 , B32B37/00 , B32B38/04 , C09J163/00 , G01N15/06 , G01N33/00 , G01N33/48 , B32B17/06
CPC分类号： B32B27/38 , B01L3/00 , C09J5/04 , C09J2463/00 , Y10T428/31515 , Y10T428/31536
摘要： An adhesion method capable of strongly adhering two members without using an adhesive and without impairing a fine structure or optical properties of a joining surface, and a biochemical chip and optical component made by the same are provided. The adhesion method includes step A of forming a coating film 13 of a first film compound having a first functional group on a first joining surface 11 of a first member 21, step B of forming a coating film 14 of a second film compound having a second functional group on a second joining surface 12 of a second member 22, and step C of bringing the first joining surface 11 into contact by pressure with the second joining surface 12 while bringing a coupling agent having at least one coupling reactive group that forms a bond by a coupling reaction with the first functional group and the second functional group into contact with the first and second functional groups to form bonds by the coupling reaction.

10. 发明申请

US20130157059A1 ADHESION METHOD, AND BIOCHEMICAL CHIP AND OPTICAL COMPONENT MADE BY THE SAME 有权
标题翻译：粘合方法，生物化学芯片和光学部件制成
公开(公告)号：US20130157059A1
公开(公告)日：2013-06-20
申请号：US13767094
申请日：2013-02-14
申请人： Kazufumi Ogawa
发明人： Kazufumi Ogawa
IPC分类号： B32B27/38 , B01L3/00
CPC分类号： B32B27/38 , B01L3/00 , C09J5/04 , C09J2463/00 , Y10T428/31515 , Y10T428/31536
摘要： An adhesion method capable of strongly adhering two members without using an adhesive and without impairing a fine structure or optical properties of a joining surface, and a biochemical chip and optical component made by the same are provided.The adhesion method includes step A of forming a coating film 13 of a first film compound having a first functional group on a first joining surface 11 of a first member 21, step B of forming a coating film 14 of a second film compound having a second functional group on a second joining surface 12 of a second member 22, and step C of bringing the first joining surface 11 into contact by pressure with the second joining surface 12 while bringing a coupling agent having at least one coupling reactive group that forms a bond by a coupling reaction with the first functional group and the second functional group into contact with the first and second functional groups to form bonds by the coupling reaction.
摘要翻译：提供一种能够不使用粘合剂而不损害接合面的微细结构或光学性能的两个部件强力粘合的粘合方法，以及由其制成的生物化学芯片和光学部件。粘合方法包括在第一构件21的第一接合面11上形成具有第一官能团的第一膜状化合物的涂膜13的工序A，形成第二膜化合物的涂膜14的工序B，第二构件22的第二接合表面12上的官能团，以及使第一接合表面11与第二接合表面12通过压力接触的步骤C，同时使具有至少一个形成键的偶联反应性基团的偶联剂通过与第一官能团和第二官能团的偶联反应与第一和第二官能团接触以通过偶联反应形成键。

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