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1. 发明申请

US20120241650A1 TARGET SUPPLY UNIT AND EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS 有权
标题翻译：目标供应单位和极端超紫外线发光装置
公开(公告)号：US20120241650A1
公开(公告)日：2012-09-27
申请号：US13419148
申请日：2012-03-13
申请人： Takayuki YABU , Hiroshi Umeda , Hakaru Mizoguchi
发明人： Takayuki YABU , Hiroshi Umeda , Hakaru Mizoguchi
IPC分类号： G21K5/00 , G03G15/02
CPC分类号： H05G2/008 , H05G2/003 , H05G2/006
摘要： A target supply unit may include: a target storage unit for storing a target material thereinside; a target output unit having a through-hole formed therein, through which the target material stored inside the target storage unit is outputted; an electrode having a through-hole formed therein arranged to face the target output unit, the electrode being coated with an electrically conductive material at least on a part of a surface facing the target output unit; and a voltage generator for applying a voltage between the target material and the electrode.
摘要翻译：目标供应单元可以包括：目标存储单元，用于存储其内部的目标材料; 目标输出单元，其中形成有通孔，通过该目标输出单元输出存储在目标存储单元内的目标材料; 具有形成在其中的通孔的电极，其布置成面对所述目标输出单元，所述电极至少在面向所述目标输出单元的表面的一部分上涂覆有导电材料; 以及用于在目标材料和电极之间施加电压的电压发生器。

2. 发明授权

US08809819B2 Target supply unit and extreme ultraviolet light generation apparatus 有权
标题翻译：目标供应单元和极紫外光发生装置
公开(公告)号：US08809819B2
公开(公告)日：2014-08-19
申请号：US13419148
申请日：2012-03-13
申请人： Takayuki Yabu , Hiroshi Umeda , Hakaru Mizoguchi
发明人： Takayuki Yabu , Hiroshi Umeda , Hakaru Mizoguchi
IPC分类号： G21K5/00 , G03G15/02
CPC分类号： H05G2/008 , H05G2/003 , H05G2/006
摘要： A target supply unit may include: a target storage unit for storing a target material thereinside; a target output unit having a through-hole formed therein, through which the target material stored inside the target storage unit is outputted; an electrode having a through-hole formed therein arranged to face the target output unit, the electrode being coated with an electrically conductive material at least on a part of a surface facing the target output unit; and a voltage generator for applying a voltage between the target material and the electrode.
摘要翻译：目标供应单元可以包括：目标存储单元，用于存储其内部的目标材料; 目标输出单元，其中形成有通孔，通过该目标输出单元输出存储在目标存储单元内的目标材料; 具有形成在其中的通孔的电极，其布置成面对所述目标输出单元，所述电极至少在面向所述目标输出单元的表面的一部分上涂覆有导电材料; 以及用于在目标材料和电极之间施加电压的电压发生器。

3. 发明授权

US08779401B2 Target supply unit 有权
标题翻译：目标供应单位
公开(公告)号：US08779401B2
公开(公告)日：2014-07-15
申请号：US13533464
申请日：2012-06-26
申请人： Hakaru Mizoguchi , Takayuki Yabu , Toshihiro Nishisaka
发明人： Hakaru Mizoguchi , Takayuki Yabu , Toshihiro Nishisaka
IPC分类号： G21K5/00
CPC分类号： H05G2/005 , H05G2/006 , H05G2/008
摘要： A target supply unit includes a nozzle unit having a through-hole to allow a target material to be outputted therethrough. A cover is provided to cover the nozzle unit, the cover having a through-hole to allow the target material to pass therethrough. A discharge device is included to pump out gas inside a space defined by the cover.
摘要翻译：目标供给单元包括具有通孔以允许目标材料从其中输出的喷嘴单元。提供盖以覆盖喷嘴单元，盖具有通孔以允许目标材料通过。包括排出装置以在由盖限定的空间内排出气体。

4. 发明授权

US06810061B2 Discharge electrode and discharge electrode manufacturing method 有权
标题翻译：放电电极和放电电极的制造方法
公开(公告)号：US06810061B2
公开(公告)日：2004-10-26
申请号：US10225286
申请日：2002-08-22
申请人： Tsukasa Hori , Akira Sumitani , Takayuki Yabu , Teiichirou Chiba , Hakaru Mizoguchi , Osamu Wakabayashi , Junichi Fujimoto
发明人： Tsukasa Hori , Akira Sumitani , Takayuki Yabu , Teiichirou Chiba , Hakaru Mizoguchi , Osamu Wakabayashi , Junichi Fujimoto
IPC分类号： H01S3097
CPC分类号： H01S3/038 , H01S3/0388 , H01S3/225
摘要： A film is formed on the discharge parts of the main discharge electrodes. In order to prevent erosion of the discharge parts by the halogen gas contained in the laser gas, a substance that tends not to react with the halogen gas, i.e., a halogen-resistant substance, is used for this film. Furthermore, in order to prevent deformation of the discharge parts by the bombardment and heat of the main discharge, a substance that has a higher hardness than the metal of the main discharge electrodes or a substance that has a higher melting point than the metal of the main discharge electrodes is used for this film. As a result, deterioration of the electrodes can be inhibited, so that a stable laser output can be obtained, and the replacement interval of the electrodes can be extended.
摘要翻译：在主放电电极的放电部分上形成膜。为了防止由激光气体中所含的卤素气体引起的排出部件的侵蚀，使用与卤素气体即不耐卤素物质倾向不反应的物质。此外，为了防止放电部件由于主放电的轰击和热而发生变形，所以具有比主放电电极的金属更高的硬度的物质或具有比金属的熔点高的物质主放电电极用于该膜。结果，可以抑制电极的劣化，从而可以获得稳定的激光输出，并且可以延长电极的替换间隔。

5. 发明授权

US09265136B2 System and method for generating extreme ultraviolet light 有权
公开(公告)号：US09265136B2
公开(公告)日：2016-02-16
申请号：US13572484
申请日：2012-08-10
申请人： Tsukasa Hori , Kouji Kakizaki , Tatsuya Yanagida , Osamu Wakabayashi , Hakaru Mizoguchi
发明人： Tsukasa Hori , Kouji Kakizaki , Tatsuya Yanagida , Osamu Wakabayashi , Hakaru Mizoguchi
IPC分类号： H05G2/00 , H01S3/102 , H01S3/104 , H01S3/16 , H01S3/223 , H01S3/23 , H01S3/00
CPC分类号： H05G2/008 , H01S3/005 , H01S3/0071 , H01S3/09 , H01S3/102 , H01S3/104 , H01S3/1106 , H01S3/1611 , H01S3/1643 , H01S3/1673 , H01S3/2232 , H01S3/2308 , H01S3/2366 , H01S3/2391 , H05G2/003 , H05G2/005
摘要： A system includes a chamber, a laser beam apparatus configured to generate a laser beam to be introduced into the chamber, a laser controller for the laser beam apparatus to control at least a beam intensity and an output timing of the laser beam, and a target supply unit configured to supply a target material into the chamber, the target material being irradiated with the laser beam for generating extreme ultraviolet light.

6. 发明授权

US08710473B2 Droplet generation and detection device, and droplet control device 有权
标题翻译：液滴生成和检测装置，以及液滴控制装置
公开(公告)号：US08710473B2
公开(公告)日：2014-04-29
申请号：US13283849
申请日：2011-10-28
申请人： Hakaru Mizoguchi , Kouji Kakizaki , Osamu Wakabayashi , Masahiro Inoue
发明人： Hakaru Mizoguchi , Kouji Kakizaki , Osamu Wakabayashi , Masahiro Inoue
IPC分类号： H05G2/00
CPC分类号： H05G2/006 , H05G2/008
摘要： A droplet generation and detection device may include: a droplet generation unit for outputting a charged droplet; at least one droplet sensor including a magnetic circuit including a coil configured of an electrically conductive material, the magnetic circuit being disposed such that the charged droplet passes around the magnetic circuit, and a current detection unit for detecting current flowing in the coil and outputting a detection signal; and a signal processing circuit for detecting the charged droplet based on the detection signal.
摘要翻译：液滴生成和检测装置可以包括：用于输出带电液滴的液滴产生单元; 至少一个液滴传感器，其包括包括由导电材料构成的线圈的磁路，所述磁路被布置成使得所述带电液滴绕过所述磁路;以及电流检测单元，用于检测在所述线圈中流动的电流并输出检测信号; 以及信号处理电路，用于根据检测信号检测带电液滴。

7. 发明申请

US20080035865A1 Extreme ultra violet light source device 审中-公开
标题翻译：极紫外光源装置
公开(公告)号：US20080035865A1
公开(公告)日：2008-02-14
申请号：US11882253
申请日：2007-07-31
申请人： Hiroshi Komori , Akira Endo , Hakaru Mizoguchi
发明人： Hiroshi Komori , Akira Endo , Hakaru Mizoguchi
IPC分类号： H05G2/00
CPC分类号： H05G2/001 , H05G2/005
摘要： An extreme ultra violet light source apparatus in which both a mechanism of supplying a droplet target to a laser application position at a high speed and a mechanism of trapping charged particles generated from plasma are managed without disturbing a track of the target. The apparatus includes: a target nozzle that injects a target material toward a plasma generation point; an electric charge supply unit that charges the injected target material; an acceleration unit that accelerates the charged target material; a laser oscillator that applies a laser beam to the target material at the plasma generation point to generate plasma; and electromagnets that form a magnetic field at the plasma generation point such that the magnetic field has substantially straight lines of magnetic flux in substantially parallel with a traveling direction of the target material in the track of the target material.
摘要翻译：一种极端的超紫外光源装置，其中既管理将液滴靶向高速激光施加位置提供的机构和捕获由等离子体产生的带电粒子的机制，也不会妨碍目标的轨迹。该装置包括：向等离子体产生点注入目标材料的目标喷嘴; 电荷供给单元，对注入的目标材料进行充电; 加速单元，加速带电目标材料; 激光振荡器，其在等离子体产生点处将激光束施加到目标材料以产生等离子体; 以及在等离子体产生点处形成磁场的电磁体，使得磁场具有与目标材料的轨道中的目标材料的行进方向基本平行的基本上直线的磁通量。

8. 发明授权

US06639929B2 Pulse oscillating gas laser device 有权
公开(公告)号：US06639929B2
公开(公告)日：2003-10-28
申请号：US09987316
申请日：2001-11-14
申请人： Hakaru Mizoguchi , Koji Kakizaki , Takashi Saito , Naoki Kataoka
发明人： Hakaru Mizoguchi , Koji Kakizaki , Takashi Saito , Naoki Kataoka
IPC分类号： H01S322
CPC分类号： H01S3/225 , H01S3/0382 , H01S3/0385 , H01S3/0388
摘要： A pulse oscillating gas laser device, which can reduce an influence of a shock wave caused by primary discharge and perform stable laser oscillation is provided. To this end, the device is a pulse oscillating gas laser device for exciting a laser gas by causing primary discharge in a pulse form between a pair of discharge electrodes (14, 15) opposing each other and oscillating laser light, in which a rib portion (42) with insulating properties for preventing creeping discharge is provided on a cathode base (36) with insulating properties, to which the discharge electrode (15) at a high voltage side is fixed, and a damping material (45) for attenuating a shock wave (41) caused by the primary discharge is inserted in an inside of a groove portion (52) between a raised portion (43) of the rib portion (42) and the high-voltage side discharge electrode (15).

9. 发明授权

US4571730A Cross flow type laser devices 失效
标题翻译：横流式激光装置
公开(公告)号：US4571730A
公开(公告)日：1986-02-18
申请号：US580801
申请日：1984-02-16
申请人： Hakaru Mizoguchi , Akira Egawa , Akira Okamoto
发明人： Hakaru Mizoguchi , Akira Egawa , Akira Okamoto
IPC分类号： H01S3/097 , H01S3/02 , H01S3/03 , H01S3/036 , H01S3/041 , H01S3/22
CPC分类号： H01S3/041 , H01S3/036
摘要： In a cross flow type laser device of the type comprising a cylindrical vacuum vessel, guide ducts for defining a laser medium circulating path, a fan for circulating the laser medium through the circulating path, discharge electrodes installed in the vacuum vessel for creating electrode discharge through circulating laser medium and a cooler for cooling the circulating laser medium, the fan is constructed as a cross-flow fan utilizing a portion of the inner wall of the vessel as a rear casing and a portion of the guide ducts as a front casing so that the fan has substantially the same axial length as that of the cylindrical vacuum vessel.
摘要翻译：在包括圆柱形真空容器的横流式激光装置中，用于限定激光介质循环路径的导向管道，用于使激光介质循环通过的风扇，安装在真空容器中的放电电极，用于产生电极放电循环的激光介质和用于冷却循环的激光介质的冷却器，所述风扇被构造为利用所述容器的内壁的一部分作为后壳体和所述导管的一部分作为前壳体的横流风扇，风扇具有与圆柱形真空容器基本相同的轴向长度。

10. 发明授权

US08507883B2 Extreme ultraviolet light source apparatus 有权
标题翻译：极紫外光源设备
公开(公告)号：US08507883B2
公开(公告)日：2013-08-13
申请号：US12559977
申请日：2009-09-15
申请人： Akira Endo , Hideo Hoshino , Kouji Kakizaki , Tamotsu Abe , Akira Sumitani , Takanobu Ishihara , Shinji Nagai , Osamu Wakabayashi , Hakaru Mizoguchi
发明人： Akira Endo , Hideo Hoshino , Kouji Kakizaki , Tamotsu Abe , Akira Sumitani , Takanobu Ishihara , Shinji Nagai , Osamu Wakabayashi , Hakaru Mizoguchi
IPC分类号： G21G4/00
CPC分类号： H05G2/003 , H05G2/008
摘要： An extreme ultraviolet light source apparatus provided with a magnetic field forming unit having sufficient capability of protection against ions radiated from plasma while using a relatively small magnetic source. The apparatus includes: a target nozzle for injecting a target material; a driver laser for applying a laser beam to the target material to generate plasma; a collector mirror for collecting extreme ultraviolet light radiated from the plasma; and a magnetic field forming unit including at least one magnetic source and at least one magnetic material having two leading end parts projecting from the at least one magnetic source to face each other with a plasma emission point in between, and forming a magnetic field between a trajectory of the target material and the collector mirror.
摘要翻译：一种极紫外光源装置，其具有磁场形成单元，该磁场形成单元在使用相对较小的磁源时具有足够的抵抗从等离子体辐射的离子的能力。该装置包括：用于注射目标材料的目标喷嘴; 用于将激光束施加到目标材料以产生等离子体的驱动激光器; 用于收集从等离子体辐射的极紫外光的收集镜; 以及磁场形成单元，其包括至少一个磁源和至少一个磁性材料，所述至少一个磁性材料具有从所述至少一个磁源突出的两个前端部分，其间具有等离子体发射点，并在其之间形成磁场目标材料和收集镜的轨迹。

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