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1. 发明申请

US20080035865A1 Extreme ultra violet light source device 审中-公开
标题翻译：极紫外光源装置
公开(公告)号：US20080035865A1
公开(公告)日：2008-02-14
申请号：US11882253
申请日：2007-07-31
申请人： Hiroshi Komori , Akira Endo , Hakaru Mizoguchi
发明人： Hiroshi Komori , Akira Endo , Hakaru Mizoguchi
IPC分类号： H05G2/00
CPC分类号： H05G2/001 , H05G2/005
摘要： An extreme ultra violet light source apparatus in which both a mechanism of supplying a droplet target to a laser application position at a high speed and a mechanism of trapping charged particles generated from plasma are managed without disturbing a track of the target. The apparatus includes: a target nozzle that injects a target material toward a plasma generation point; an electric charge supply unit that charges the injected target material; an acceleration unit that accelerates the charged target material; a laser oscillator that applies a laser beam to the target material at the plasma generation point to generate plasma; and electromagnets that form a magnetic field at the plasma generation point such that the magnetic field has substantially straight lines of magnetic flux in substantially parallel with a traveling direction of the target material in the track of the target material.
摘要翻译：一种极端的超紫外光源装置，其中既管理将液滴靶向高速激光施加位置提供的机构和捕获由等离子体产生的带电粒子的机制，也不会妨碍目标的轨迹。该装置包括：向等离子体产生点注入目标材料的目标喷嘴; 电荷供给单元，对注入的目标材料进行充电; 加速单元，加速带电目标材料; 激光振荡器，其在等离子体产生点处将激光束施加到目标材料以产生等离子体; 以及在等离子体产生点处形成磁场的电磁体，使得磁场具有与目标材料的轨道中的目标材料的行进方向基本平行的基本上直线的磁通量。

2. 发明授权

US5754579A Laser gas controller and charging/discharging device for discharge-excited laser 失效
标题翻译：激光气体控制器和放电激光激光器的充放电装置
公开(公告)号：US5754579A
公开(公告)日：1998-05-19
申请号：US750538
申请日：1996-12-13
申请人： Hakaru Mizoguchi , Toshihiro Nishisaka , Hiroshi Komori
发明人： Hakaru Mizoguchi , Toshihiro Nishisaka , Hiroshi Komori
IPC分类号： H01S3/036 , H01S3/134 , H01S3/22
CPC分类号： H01S3/036 , H01S3/134
摘要： A first object is to stabilize output of laser light. In order to achieve the first object, if it is detected by an output detection means (15) that the output (E) of laser light (La) has departed from a target value, whilst maintaining the voltage of a power source (17) at a fixed value or in a fixed range, the amount of laser gas supplied to a laser chamber (4) is controlled such that the output (E) of laser light becomes the target value. A second object is to reduce the wear of the pre-ionization electrodes and to prevent drop in output of laser light. The second object is achieved as follows. Specifically, the pulse current discharged from primary capacitor (C1) is stepped up in voltage by a pulse transformer and is charged onto a secondary capacitor (C2). At this point a magnetic switch (SR) that is connected to the downstream side of secondary capacitor (C2) becomes saturated and becomes conductive, allowing current to pass through pre-ionization electrodes (6) that are connected in series with the magnetic switch (SR). At the time-point where the movement of charge of secondary capacitor (C2) has finished, a discharge current in the reverse direction tries to flow in secondary capacitor (C2) but magnetic switch (SR) acts to block the reverse current, stopping the pre-ionization discharge. Concurrently with this the core of pulse transformer (20) is saturated, with the result that charge starts to move from secondary capacitor (C2) to peaking capacitor (C4). The voltage of peaking capacitor (C4) therefore rises until it reaches the discharge initiation voltage, and laser oscillation is performed.
摘要翻译： PCT No.PCT / JP95 / 01015 Sec。 371日期1996年12月13日第 102（e）日期1996年12月13日PCT提交1995年5月26日PCT公布。第WO95 / 34927号公报日期1995年12月21日第一个目标是稳定激光输出。为了实现第一目的，如果由输出检测装置（15）检测到激光（La）的输出（E）已经脱离目标值，同时保持电源（17）的电压，在固定值或固定范围内，供给激光室（4）的激光气体的量被控制成激光的输出（E）成为目标值。第二个目的是减少预电离电极的磨损并防止激光输出的下降。第二个目的是如下实现的。具体地说，从主电容器（C1）放出的脉冲电流通过脉冲变压器升压成电压并充电到次级电容器（C2）上。此时，与次级电容器（C2）的下游侧连接的磁性开关（SR）饱和并变成导通状态，使电流通过与磁性开关串联连接的预电离电极（6） SR）。在二次电容器（C2）的充电移动完成的时间点，反向放电电流试图在二次电容器（C2）中流动，但是磁性开关（SR）用于阻止反向电流，停止预电离放电。与此同时，脉冲变压器（20）的核心是饱和的，结果是充电开始从次级电容器（C2）移动到峰值电容器（C4）。峰值电容器（C4）的电压因此上升直到达到放电起始电压，并且执行激光振荡。

3. 发明授权

US6101211A Narrow-band laser apparatus 失效
标题翻译：窄带激光装置
公开(公告)号：US6101211A
公开(公告)日：2000-08-08
申请号：US945219
申请日：1997-10-01
申请人： Osamu Wakabayashi , Hiroshi Komori , Hakaru Mizoguchi
发明人： Osamu Wakabayashi , Hiroshi Komori , Hakaru Mizoguchi
IPC分类号： H01S3/1055 , H01S3/225 , H01S3/08
CPC分类号： H01S3/225 , H01S3/1055
摘要： A narrow-band laser apparatus comprising a laser generating section having laser activity and capable of generating laser beam; bandwidth narrowing section which is provided on one end side of the laser generating section on the optical axis of the laser beam generated in the laser generating section to narrow the bandwidth of the laser beam by means of at least one angel-dispersion wavelength selection element, fold back the laser beam in the narrowed band and output the folded laser beam toward the laser generating section; beam folding section which is provided on the other end of the laser generating section on the optical axis of the laser beam generated in the laser generating section to fold back the input laser beam and reflect the folded laser beam into the laser generating section; and a laser beam branching unit which is provided between the laser generating section and the bandwidth narrowing section to permit part of the laser beam input from the laser generating section to pass therethrough into the bandwidth narrowing section while deflecting the remaining part of the laser beam and drawing out the same as an output beam. The laser apparatus is constructed so that the light which has passed straight through the laser beam branching unit is input into the bandwidth narrowing section, thereby stabilizing a resonance system to eliminate multiwavelength oscillation accompanying the vibration.
摘要翻译： PCT No.PCT / JP96 / 00921 Sec。 371日期：1997年10月1日 102（e）1997年10月1日PCT PCT 1996年4月3日PCT公布。第WO96 / 31929号公报日期：1996年10月10日一种窄带激光装置，包括具有激光活动并能产生激光束的激光发生部分; 带宽窄化部，其在激光发生部生成的激光的光轴上设置在激光发生部的一端侧，通过至少一个角度分散型波长选择元件使激光束的带宽变窄，折叠在窄带中的激光束并将折叠的激光束输出到激光产生部分; 光束折叠部分，其设置在激光产生部分的另一端上，在激光产生部分中产生的激光束的光轴上折回输入的激光束并将折叠的激光束反射到激光产生部分中; 以及激光束分支单元，其设置在激光产生部分和带宽窄化部分之间，以允许从激光产生部分输入的激光束的一部分通过其进入带宽窄化部分，同时偏转激光束的剩余部分，绘出与输出光束相同的图像。激光装置被构造成使直接穿过激光束分支单元的光被输入到带宽窄化部分中，从而稳定谐振系统以消除伴随振动的多波长振荡。

4. 发明授权

US08507883B2 Extreme ultraviolet light source apparatus 有权
标题翻译：极紫外光源设备
公开(公告)号：US08507883B2
公开(公告)日：2013-08-13
申请号：US12559977
申请日：2009-09-15
申请人： Akira Endo , Hideo Hoshino , Kouji Kakizaki , Tamotsu Abe , Akira Sumitani , Takanobu Ishihara , Shinji Nagai , Osamu Wakabayashi , Hakaru Mizoguchi
发明人： Akira Endo , Hideo Hoshino , Kouji Kakizaki , Tamotsu Abe , Akira Sumitani , Takanobu Ishihara , Shinji Nagai , Osamu Wakabayashi , Hakaru Mizoguchi
IPC分类号： G21G4/00
CPC分类号： H05G2/003 , H05G2/008
摘要： An extreme ultraviolet light source apparatus provided with a magnetic field forming unit having sufficient capability of protection against ions radiated from plasma while using a relatively small magnetic source. The apparatus includes: a target nozzle for injecting a target material; a driver laser for applying a laser beam to the target material to generate plasma; a collector mirror for collecting extreme ultraviolet light radiated from the plasma; and a magnetic field forming unit including at least one magnetic source and at least one magnetic material having two leading end parts projecting from the at least one magnetic source to face each other with a plasma emission point in between, and forming a magnetic field between a trajectory of the target material and the collector mirror.
摘要翻译：一种极紫外光源装置，其具有磁场形成单元，该磁场形成单元在使用相对较小的磁源时具有足够的抵抗从等离子体辐射的离子的能力。该装置包括：用于注射目标材料的目标喷嘴; 用于将激光束施加到目标材料以产生等离子体的驱动激光器; 用于收集从等离子体辐射的极紫外光的收集镜; 以及磁场形成单元，其包括至少一个磁源和至少一个磁性材料，所述至少一个磁性材料具有从所述至少一个磁源突出的两个前端部分，其间具有等离子体发射点，并在其之间形成磁场目标材料和收集镜的轨迹。

5. 发明授权

US07067832B2 Extreme ultraviolet light source 有权
标题翻译：极紫外光源
公开(公告)号：US07067832B2
公开(公告)日：2006-06-27
申请号：US10489431
申请日：2003-04-04
申请人： Hakaru Mizoguchi , Akira Endo , Hirokazu Tanaka
发明人： Hakaru Mizoguchi , Akira Endo , Hirokazu Tanaka
IPC分类号： G01J1/00
CPC分类号： H05G2/003 , B82Y10/00 , G03F7/70033 , H05G2/005 , H05G2/008
摘要： An extreme ultraviolet light source device which makes it possible to increase a working distance and obtain extreme ultraviolet light with a high output. The extreme ultraviolet light source device generates a plasma by irradiating a target (22) with laser light from a driving laser device (25), and generates extreme ultraviolet (EUV) light with a wavelength of several nanometers to several tens of nanometers. The extreme ultraviolet light source device comprises a target supply device which has a charge applying unit (23) that applies a charge to the target (22), and an acceleration unit (24) which accelerates the charged target (22) using an electromagnetic field. The target supply device supplies the target (22) comprised of a rare gas element such as xenon (Xe) or the like, or a metal such as lithium (Li), tin (Sn), tin oxide (SnO2) or the like, as ionized molecules, atoms or masses comprising a plurality of atoms, or as ionized clusters.
摘要翻译：一种极紫外光源装置，其可以增加工作距离并获得高输出的极紫外光。极紫外光源装置通过用来自驱动激光装置（25）的激光照射靶（22）来产生等离子体，并产生波长为几纳米至几十纳米的极紫外（EUV）光。所述极紫外光源装置具备目标供给装置，所述目标供给装置具有向所述目标物（22）施加电荷的电荷施加部（23）;以及使用电磁场来加速所述充电对象（22）的加速部（24）。目标供给装置供给由氙（Xe）等稀有气体元素或锂（Li），锡（Sn），氧化锡（SnO 2）等金属构成的靶（22） / SUB>）等，作为电离分子，包含多个原子的原子或质量，或作为电离团簇。

6. 发明申请

US20100090132A1 EXTREME ULTRAVIOLET LIGHT SOURCE APPARATUS 有权
标题翻译：极光超光源光源装置
公开(公告)号：US20100090132A1
公开(公告)日：2010-04-15
申请号：US12559977
申请日：2009-09-15
申请人： Akira ENDO , Hideo Hoshino , Kouji Kakizaki , Tamotsu Abe , Akira Sumitani , Takanobu Ishihara , Shinji Nagai , Osamu Wakabayashi , Hakaru Mizoguchi
发明人： Akira ENDO , Hideo Hoshino , Kouji Kakizaki , Tamotsu Abe , Akira Sumitani , Takanobu Ishihara , Shinji Nagai , Osamu Wakabayashi , Hakaru Mizoguchi
IPC分类号： G21K5/00
CPC分类号： H05G2/003 , H05G2/008
摘要： An extreme ultraviolet light source apparatus provided with a magnetic field forming unit having sufficient capability of protection against ions radiated from plasma while using a relatively small magnetic source. The apparatus includes: a target nozzle for injecting a target material; a driver laser for applying a laser beam to the target material to generate plasma; a collector mirror for collecting extreme ultraviolet light radiated from the plasma; and a magnetic field forming unit including at least one magnetic source and at least one magnetic material having two leading end parts projecting from the at least one magnetic source to face each other with a plasma emission point in between, and forming a magnetic field between a trajectory of the target material and the collector mirror.
摘要翻译：一种极紫外光源装置，其具有磁场形成单元，该磁场形成单元在使用相对较小的磁源时具有足够的抵抗从等离子体辐射的离子的能力。该装置包括：用于注射目标材料的目标喷嘴; 用于将激光束施加到目标材料以产生等离子体的驱动器激光器; 用于收集从等离子体辐射的极紫外光的收集镜; 以及磁场形成单元，其包括至少一个磁源和至少一个磁性材料，所述至少一个磁性材料具有从所述至少一个磁源突出的两个前端部分，其间具有等离子体发射点，并在其之间形成磁场目标材料和收集镜的轨迹。

7. 发明授权

US09265136B2 System and method for generating extreme ultraviolet light 有权
公开(公告)号：US09265136B2
公开(公告)日：2016-02-16
申请号：US13572484
申请日：2012-08-10
申请人： Tsukasa Hori , Kouji Kakizaki , Tatsuya Yanagida , Osamu Wakabayashi , Hakaru Mizoguchi
发明人： Tsukasa Hori , Kouji Kakizaki , Tatsuya Yanagida , Osamu Wakabayashi , Hakaru Mizoguchi
IPC分类号： H05G2/00 , H01S3/102 , H01S3/104 , H01S3/16 , H01S3/223 , H01S3/23 , H01S3/00
CPC分类号： H05G2/008 , H01S3/005 , H01S3/0071 , H01S3/09 , H01S3/102 , H01S3/104 , H01S3/1106 , H01S3/1611 , H01S3/1643 , H01S3/1673 , H01S3/2232 , H01S3/2308 , H01S3/2366 , H01S3/2391 , H05G2/003 , H05G2/005
摘要： A system includes a chamber, a laser beam apparatus configured to generate a laser beam to be introduced into the chamber, a laser controller for the laser beam apparatus to control at least a beam intensity and an output timing of the laser beam, and a target supply unit configured to supply a target material into the chamber, the target material being irradiated with the laser beam for generating extreme ultraviolet light.

8. 发明授权

US08710473B2 Droplet generation and detection device, and droplet control device 有权
标题翻译：液滴生成和检测装置，以及液滴控制装置
公开(公告)号：US08710473B2
公开(公告)日：2014-04-29
申请号：US13283849
申请日：2011-10-28
申请人： Hakaru Mizoguchi , Kouji Kakizaki , Osamu Wakabayashi , Masahiro Inoue
发明人： Hakaru Mizoguchi , Kouji Kakizaki , Osamu Wakabayashi , Masahiro Inoue
IPC分类号： H05G2/00
CPC分类号： H05G2/006 , H05G2/008
摘要： A droplet generation and detection device may include: a droplet generation unit for outputting a charged droplet; at least one droplet sensor including a magnetic circuit including a coil configured of an electrically conductive material, the magnetic circuit being disposed such that the charged droplet passes around the magnetic circuit, and a current detection unit for detecting current flowing in the coil and outputting a detection signal; and a signal processing circuit for detecting the charged droplet based on the detection signal.
摘要翻译：液滴生成和检测装置可以包括：用于输出带电液滴的液滴产生单元; 至少一个液滴传感器，其包括包括由导电材料构成的线圈的磁路，所述磁路被布置成使得所述带电液滴绕过所述磁路;以及电流检测单元，用于检测在所述线圈中流动的电流并输出检测信号; 以及信号处理电路，用于根据检测信号检测带电液滴。

9. 发明申请

US20120241650A1 TARGET SUPPLY UNIT AND EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS 有权
标题翻译：目标供应单位和极端超紫外线发光装置
公开(公告)号：US20120241650A1
公开(公告)日：2012-09-27
申请号：US13419148
申请日：2012-03-13
申请人： Takayuki YABU , Hiroshi Umeda , Hakaru Mizoguchi
发明人： Takayuki YABU , Hiroshi Umeda , Hakaru Mizoguchi
IPC分类号： G21K5/00 , G03G15/02
CPC分类号： H05G2/008 , H05G2/003 , H05G2/006
摘要： A target supply unit may include: a target storage unit for storing a target material thereinside; a target output unit having a through-hole formed therein, through which the target material stored inside the target storage unit is outputted; an electrode having a through-hole formed therein arranged to face the target output unit, the electrode being coated with an electrically conductive material at least on a part of a surface facing the target output unit; and a voltage generator for applying a voltage between the target material and the electrode.
摘要翻译：目标供应单元可以包括：目标存储单元，用于存储其内部的目标材料; 目标输出单元，其中形成有通孔，通过该目标输出单元输出存储在目标存储单元内的目标材料; 具有形成在其中的通孔的电极，其布置成面对所述目标输出单元，所述电极至少在面向所述目标输出单元的表面的一部分上涂覆有导电材料; 以及用于在目标材料和电极之间施加电压的电压发生器。

10. 发明授权

US06639929B2 Pulse oscillating gas laser device 有权
公开(公告)号：US06639929B2
公开(公告)日：2003-10-28
申请号：US09987316
申请日：2001-11-14
申请人： Hakaru Mizoguchi , Koji Kakizaki , Takashi Saito , Naoki Kataoka
发明人： Hakaru Mizoguchi , Koji Kakizaki , Takashi Saito , Naoki Kataoka
IPC分类号： H01S322
CPC分类号： H01S3/225 , H01S3/0382 , H01S3/0385 , H01S3/0388
摘要： A pulse oscillating gas laser device, which can reduce an influence of a shock wave caused by primary discharge and perform stable laser oscillation is provided. To this end, the device is a pulse oscillating gas laser device for exciting a laser gas by causing primary discharge in a pulse form between a pair of discharge electrodes (14, 15) opposing each other and oscillating laser light, in which a rib portion (42) with insulating properties for preventing creeping discharge is provided on a cathode base (36) with insulating properties, to which the discharge electrode (15) at a high voltage side is fixed, and a damping material (45) for attenuating a shock wave (41) caused by the primary discharge is inserted in an inside of a groove portion (52) between a raised portion (43) of the rib portion (42) and the high-voltage side discharge electrode (15).

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