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1. 发明授权

US08445877B2 Extreme ultraviolet light source apparatus and target supply device 有权
标题翻译：极紫外光源设备和目标供应装置
公开(公告)号：US08445877B2
公开(公告)日：2013-05-21
申请号：US13081148
申请日：2011-04-06
申请人： Hiroshi Someya , Tamotsu Abe , Hideo Hoshino
发明人： Hiroshi Someya , Tamotsu Abe , Hideo Hoshino
IPC分类号： A61N5/06 , G01J3/10 , H05G2/00
CPC分类号： H05G2/003 , H05G2/006
摘要： A nozzle protection device capable of protecting a target nozzle from heat of plasma without disturbing formation of a stable flow of a target material in an LPP type EUV light source apparatus. This nozzle protection device includes a cooling unit which is formed with an opening for passing the target material therethrough, and which is formed with a flow path for circulating a cooling medium inside, and an actuator which changes a position or a shape of the cooling unit between a first state of evacuating the cooling unit from a trajectory of the target material and a second state of blocking heat radiation from the plasma to the nozzle by the cooling unit while securing a path of the target material in the cooling unit.
摘要翻译：一种喷嘴保护装置，其能够保护目标喷嘴免受等离子体的热量的干扰，而不会在LPP型EUV光源装置中形成稳定的目标材料流。该喷嘴保护装置包括冷却单元，该冷却单元形成有用于使目标材料通过的开口，并且其形成有用于使冷却介质在内部循环的流路;以及致动器，其改变冷却单元的位置或形状在从所述目标材料的轨迹排出所述冷却单元的第一状态和通过所述冷却单元阻止从所述等离子体到所述喷嘴的热辐射的第二状态之间，同时确保所述目标材料在所述冷却单元中的路径。

2. 发明申请

US20130032735A1 LASER APPARATUS AND EXTREME ULTRAVIOLET LIGHT GENERATION SYSTEM INCLUDING THE LASER APPARATUS 有权
标题翻译：激光装置和超大型紫外线发光系统，包括激光装置
公开(公告)号：US20130032735A1
公开(公告)日：2013-02-07
申请号：US13642408
申请日：2011-12-15
申请人： Krzysztof Nowak , Osamu Wakabayashi , Hideo Hoshino
发明人： Krzysztof Nowak , Osamu Wakabayashi , Hideo Hoshino
IPC分类号： G02F1/01 , G21K5/04 , G02F1/11 , G02F1/03 , G02F1/09
CPC分类号： H01S3/0085 , H01S3/0064 , H01S3/2316 , H01S3/235 , H01S3/2366 , H01S3/2375 , H01S2301/02 , H05G2/008
摘要： A laser apparatus may include: a master oscillator configured to output a pulsed laser beam at a repetition rate; at least one amplifier disposed on a beam path of the pulsed laser beam; at least one optical shutter disposed on the beam path of the pulsed laser beam; and a controller configured to switch the at least one optical shutter.
摘要翻译：激光装置可以包括：主振荡器，被配置为以重复频率输出脉冲激光束; 设置在所述脉冲激光束的光束路径上的至少一个放大器; 设置在脉冲激光束的光束路径上的至少一个光学快门; 以及控制器，被配置为切换所述至少一个光学快门。

3. 发明申请

US20120267343A1 TEMPERATURE CONTROLLER FOR GAS LASER 有权
标题翻译：气体激光温度控制器
公开(公告)号：US20120267343A1
公开(公告)日：2012-10-25
申请号：US13543510
申请日：2012-07-06
申请人： Yukio WATANABE , Hideyuki Hayashi , Kouji Kakizaki , Michio Shinozaki , Hideo Hoshino
发明人： Yukio WATANABE , Hideyuki Hayashi , Kouji Kakizaki , Michio Shinozaki , Hideo Hoshino
IPC分类号： G05D23/00 , B23K26/42
CPC分类号： H01S3/0407 , F25B2400/06 , F25D17/02 , H01S3/03 , H01S3/041 , H01S3/22
摘要： A temperature controller for a gas laser which controls temperatures of a plurality of temperature-controlled apparatuses including a first temperature-controlled portion requiring a high-precision temperature-control and a second temperature-controlled portion requiring a low-precision temperature-control as compared with the first temperature-controlled portion and allowing a temperature-control with a low or high temperature as compared with the first temperature-controlled portion, comprises a first temperature control portion generating a cooling agent or a heating agent for adjusting a temperature of each first temperature-controlled portion, a second temperature control portion generating a cooling agent or a heating agent for adjusting a temperature of each second temperature-controlled portion, a first piping system connecting the first temperature control portion and each first temperature-controlled portion in parallel, and a second piping system connecting the second temperature control portion and each second temperature-controlled portion in parallel.
摘要翻译：一种用于气体激光器的温度控制器，其控制多个温度控制装置的温度，包括需要高精度温度控制的第一温度控制部分和需要低精度温度控制的第二温度控制部分与第一温度控制部分相比，第一温度控制部分与低温或高温的温度控制相比，包括产生冷却剂的第一温度控制部分或用于调节每个第一温度控制部分的温度的加热剂温度控制部分，产生冷却剂的第二温度控制部分或用于调节每个第二温度控制部分的温度的加热剂，将第一温度控制部分和第一温度控制部分并联连接的第一管道系统，以及连接第二回火的第二管道系统所述控制部分和每个第二温度控制部分并联。

4. 发明申请

US20120228527A1 EXTREME ULTRA VIOLET LIGHT SOURCE APPARATUS 审中-公开
标题翻译：极光紫外线光源设备
公开(公告)号：US20120228527A1
公开(公告)日：2012-09-13
申请号：US13477940
申请日：2012-05-22
申请人： Tamotsu ABE , Toshihiro Nishisaka , Hiroshi Someya , Masato Moriya , Takeshi Asayama , Hideo Hoshino , Hakaru Mizoguchi
发明人： Tamotsu ABE , Toshihiro Nishisaka , Hiroshi Someya , Masato Moriya , Takeshi Asayama , Hideo Hoshino , Hakaru Mizoguchi
IPC分类号： G21K5/02
CPC分类号： H05G2/001 , G03F7/70033 , G03F7/70916
摘要： An extreme ultra violet light source apparatus prevents debris staying and accumulating within a chamber from contaminating the chamber and deteriorating the performance of an important optical component. The extreme ultra violet light source apparatus includes: a chamber in which extreme ultra violet light is generated; a driver laser for applying a laser beam to a target supplied to a predetermined position within the chamber to generate plasma; a collector mirror provided within the chamber, for collecting and outputting the extreme ultra violet light radiated from the plasma; an exhaust path communicating with the chamber and connected to an exhausting device, for maintaining an interior of the chamber at a certain pressure; a catching chamber provided in the exhaust path, for catching debris generated from the plasma; and a collecting unit for collecting the caught debris out of the chamber.
摘要翻译：极紫外光源装置可防止残留物积聚在室内，免受室内污染，降低重要光学元件的性能。极紫外光源装置包括：产生极紫外光的室; 用于将激光束施加到提供到所述室内的预定位置的目标以产生等离子体的驱动器激光器; 设置在室内的收集器反射镜，用于收集和输出从等离子体辐射的极紫外光; 与所述室连通并连接到排气装置的排气路径，用于将所述室的内部保持在一定压力; 设置在排气路径中的捕获室，用于捕获从等离子体产生的碎屑; 以及收集单元，用于将捕获的碎屑收集在室外。

5. 发明授权

US08212228B2 Extreme ultra violet light source apparatus 有权
标题翻译：极紫外光源装置
公开(公告)号：US08212228B2
公开(公告)日：2012-07-03
申请号：US12382108
申请日：2009-03-09
申请人： Tamotsu Abe , Toshihiro Nishisaka , Hiroshi Someya , Masato Moriya , Takeshi Asayama , Hideo Hoshino , Hakaru Mizoguchi
发明人： Tamotsu Abe , Toshihiro Nishisaka , Hiroshi Someya , Masato Moriya , Takeshi Asayama , Hideo Hoshino , Hakaru Mizoguchi
IPC分类号： H05G2/00
CPC分类号： H05G2/001 , G03F7/70033 , G03F7/70916
摘要： An extreme ultra violet light source apparatus prevents debris staying and accumulating within a chamber from contaminating the chamber and deteriorating the performance of an important optical component. The extreme ultra violet light source apparatus includes: a chamber in which extreme ultra violet light is generated; a driver laser for applying a laser beam to a target supplied to a predetermined position within the chamber to generate plasma; a collector mirror provided within the chamber, for collecting and outputting the extreme ultra violet light radiated from the plasma; an exhaust path communicating with the chamber and connected to an exhausting device, for maintaining an interior of the chamber at a certain pressure; a catching chamber provided in the exhaust path, for catching debris generated from the plasma; and a collecting unit for collecting the caught debris out of the chamber.
摘要翻译：极紫外光源装置可防止残留物积聚在室内，免受室内污染，降低重要光学元件的性能。极紫外光源装置包括：产生极紫外光的室; 用于将激光束施加到提供到所述室内的预定位置的目标以产生等离子体的驱动器激光器; 设置在室内的收集器反射镜，用于收集和输出从等离子体辐射的极紫外光; 与所述室连通并连接到排气装置的排气路径，用于将所述室的内部保持在一定压力; 设置在排气路径中的捕获室，用于捕获从等离子体产生的碎屑; 以及收集单元，用于将捕获的碎屑收集在室外。

6. 发明申请

US20120068091A1 EXTREME ULTRAVIOLET LIGHT SOURCE DEVICE, LASER LIGHT SOURCE DEVICE FOR EXTREME ULTRAVIOLET LIGHT SOURCE DEVICE, AND METHOD FOR CONTROLLING SATURABLE ABSORBER USED IN EXTREME ULTRAVIOLET LIGHT SOURCE DEVICE 有权
标题翻译：超大型紫外线光源装置，用于超紫外线光源装置的激光光源装置，以及用于控制在极光紫外光源装置中使用的可饱和吸收体的方法
公开(公告)号：US20120068091A1
公开(公告)日：2012-03-22
申请号：US13306358
申请日：2011-11-29
申请人： Akira ENDO , Krzysztof NOWAK , Hideo HOSHINO , Tatsuya ARIGA , Masato MORIYA , Osamu WAKABAYASHI
发明人： Akira ENDO , Krzysztof NOWAK , Hideo HOSHINO , Tatsuya ARIGA , Masato MORIYA , Osamu WAKABAYASHI
IPC分类号： G21K5/00 , H01S3/04
CPC分类号： H05G2/003 , H01S3/005 , H01S3/0064 , H01S3/2316 , H05G2/008
摘要： An EUV light source of the present invention is capable of using a saturable absorber stably and continuously in a high heat load state. A saturable absorber (SA) device is disposed on a laser beam line to absorb feeble light, such as self-excited oscillation light, parasitic oscillation light or return light. SA gas from an SA gas cylinder and buffer gas from a buffer gas cylinder are mixed to be a mixed gas. The mixed gas is supplied to an SA gas cell via a supply pipeline, and absorbs the feeble light included in the laser beam. The mixed gas is exhausted via an exhaust pipeline, and is sent to a heat exchanger. The mixed gas, cooled down by a heat exchanger, is sent back to the SA gas cell by a circulation pump.
摘要翻译：本发明的EUV光源能够在高热负荷状态下稳定且连续地使用饱和吸收体。可饱和吸收体（SA）装置设置在激光束线上以吸收诸如自激振荡光，寄生振荡光或返回光的微弱光。来自SA气瓶的SA气体和来自缓冲气瓶的缓冲气体混合成混合气体。混合气体经由供给管路供给到SA气室，吸收激光束中包含的微弱光。混合气体通过排气管道排出，并被送到热交换器。由热交换器冷却的混合气体通过循环泵送回到SA气室。

7. 发明申请

US20110211601A1 DRIVER LASER FOR EXTREME ULTRA VIOLET LIGHT SOURCE DEVICE 审中-公开
标题翻译：极光紫外线光源设备的驱动激光器
公开(公告)号：US20110211601A1
公开(公告)日：2011-09-01
申请号：US13049374
申请日：2011-03-16
申请人： Tatsuya ARIGA , Hideo HOSHINO , Taisuke MIURA , Akira ENDO
发明人： Tatsuya ARIGA , Hideo HOSHINO , Taisuke MIURA , Akira ENDO
IPC分类号： H01S3/10
CPC分类号： H01S3/2308 , H01S3/005 , H01S3/2232 , H01S3/2366 , H01S2301/02
摘要： A driver laser for an extreme ultra violet light source device capable of suppressing self-oscillation light, amplifying a laser beam efficiently, and reducing a device size. The driver laser has an oscillator for generating a laser beam to output the generated laser beam, and at least one amplifier for amplifying the laser beam output from the oscillator to output the amplified laser beam. The amplifier includes a discharge unit which amplifies the laser beam by using energy of a laser medium excited by discharge, a feedback mirror which leads the laser beam output from the discharge unit to the discharge unit, a polarizer which leads the laser beam output from the oscillator into the discharge unit and also reflects the laser beam output from the discharge unit to a predetermined direction, and a self-oscillation light filter which attenuates self-oscillation light output from the discharge unit.
摘要翻译：一种能够抑制自振荡的极紫外光源装置的驱动器激光器，有效地放大激光束并减小器件尺寸。驱动激光器具有用于产生激光束以输出所产生的激光束的振荡器，以及用于放大从振荡器输出的激光束以输出放大的激光束的至少一个放大器。放大器包括：放电单元，其通过使用通过放电激发的激光介质的能量放大激光束;反射镜，其将从放电单元输出的激光束导引到放电单元;偏振器，其将激光束从振荡器进入放电单元并且还将从放电单元输出的激光束反射到预定方向，以及自激振荡滤光器，其衰减从放电单元输出的自振荡光。

8. 发明授权

US08000361B2 Laser system 有权
标题翻译：激光系统
公开(公告)号：US08000361B2
公开(公告)日：2011-08-16
申请号：US12382109
申请日：2009-03-09
申请人： Tamotsu Abe , Hideo Hoshino , Akira Endo , Osamu Wakabayashi , Kouji Kakizaki
发明人： Tamotsu Abe , Hideo Hoshino , Akira Endo , Osamu Wakabayashi , Kouji Kakizaki
IPC分类号： H01S3/00 , H01S3/22
CPC分类号： H01S3/2316 , H01S3/076 , H01S3/10007 , H01S3/2232
摘要： The higher efficiency and lower power consumption are realized in a laser system for generating a high-power short-pulse laser beam. The laser system includes a laser oscillator for generating a pulse laser beam by laser oscillation, plural amplifiers for sequentially inputting the pulse laser beam generated by the laser oscillator and amplifying the pulse laser beam, and a control unit for controlling the laser oscillator to perform burst oscillation and halting an amplification operation of at least one of the plural amplifiers in a burst halt period between burst oscillation periods.
摘要翻译：在用于产生大功率短脉冲激光束的激光系统中实现更高的效率和更低的功率消耗。激光系统包括用于通过激光振荡产生脉冲激光束的激光振荡器，用于顺序地输入由激光振荡器产生的脉冲激光束并放大脉冲激光束的多个放大器，以及用于控制激光振荡器进行突发的控制单元在突发振荡周期之间的突发停止时段中振荡并停止多个放大器中的至少一个的放大操作。

9. 发明申请

US20100217444A1 TEMPERATURE CONTROLLER FOR GAS LASER 有权
标题翻译：气体激光温度控制器
公开(公告)号：US20100217444A1
公开(公告)日：2010-08-26
申请号：US12710722
申请日：2010-02-23
申请人： Yukio Watanabe , Hideyuki Hayashi , Kouji Kakizaki , Michio Shinozaki , Hideo Hoshino
发明人： Yukio Watanabe , Hideyuki Hayashi , Kouji Kakizaki , Michio Shinozaki , Hideo Hoshino
IPC分类号： G05D23/19 , G05D7/06
CPC分类号： H01S3/0407 , F25B2400/06 , F25D17/02 , H01S3/03 , H01S3/041 , H01S3/22
摘要： A temperature controller for a gas laser which controls temperatures of a plurality of temperature-controlled apparatuses including a first temperature-controlled portion requiring a high-precision temperature-control and a second temperature-controlled portion requiring a low-precision temperature-control as compared with the first temperature-controlled portion and allowing a temperature-control with a low or high temperature as compared with the first temperature-controlled portion, comprises a first temperature control portion generating a cooling agent or a heating agent for adjusting a temperature of each first temperature-controlled portion, a second temperature control portion generating a cooling agent or a heating agent for adjusting a temperature of each second temperature-controlled portion, a first piping system connecting the first temperature control portion and each first temperature-controlled portion in parallel, and a second piping system connecting the second temperature control portion and each second temperature-controlled portion in parallel.
摘要翻译：一种用于气体激光器的温度控制器，其控制多个温度控制装置的温度，包括需要高精度温度控制的第一温度控制部分和需要低精度温度控制的第二温度控制部分与第一温度控制部分相比，第一温度控制部分与低温或高温的温度控制相比，包括产生冷却剂的第一温度控制部分或用于调节每个第一温度控制部分的温度的加热剂温度控制部分，产生冷却剂的第二温度控制部分或用于调节每个第二温度控制部分的温度的加热剂，将第一温度控制部分和第一温度控制部分并联连接的第一管道系统，以及连接第二回火的第二管道系统所述控制部分和每个第二温度控制部分并联。

10. 发明申请

US20090103575A1 LASER DEVICE 有权
标题翻译：激光装置
公开(公告)号：US20090103575A1
公开(公告)日：2009-04-23
申请号：US12252704
申请日：2008-10-16
申请人： Tamotsu ABE , Hideo Hoshino
发明人： Tamotsu ABE , Hideo Hoshino
IPC分类号： H01S3/30
CPC分类号： H01S3/03 , G03F7/70033 , G03F7/70975 , H01S3/0346 , H01S3/041 , H01S3/2232 , H01S3/2308
摘要： A laser device, which includes an oscillator unit having a rectangular-solid-shaped housing containing a laser oscillator for generating and outputting a laser light; an amplifier unit having a rectangular-solid-shaped housing containing an amplifier that receives and amplifies the laser light to output; and, a group of optical elements including optical elements provided on a laser light path, wherein the laser device includes one or more amplifier units, and the oscillator and the amplifier units are arranged such that surfaces having a wide area other than a surface having a smallest area of a housing of the oscillator unit and a housing of at least one amplifier unit are next to and face each other, or such that surfaces having a wide area other than a surface having a smallest area of a housing of at least two amplifier units are next to and face each other.
摘要翻译：一种激光装置，其包括具有矩形固体壳体的振荡器单元，所述壳体包含用于产生和输出激光的激光振荡器; 具有矩形固体壳体的放大器单元，其包含放大器，所述放大器接收并放大所述激光以输出; 以及包括设置在激光路径上的光学元件的一组光学元件，其中所述激光装置包括一个或多个放大器单元，并且所述振荡器和所述放大器单元布置成使得具有除了具有所述振荡器单元的壳体的最小面积和至少一个放大器单元的壳体彼此相邻并面对，或者使得具有除表面之外的广泛区域的表面具有至少两个放大器的壳体的最小面积的表面单位相邻并面对面。

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