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    • 1. 发明授权
    • Thin film semiconductor device and method for manufacture
    • 薄膜半导体器件及其制造方法
    • US4400715A
    • 1983-08-23
    • US208442
    • 1980-11-19
    • Steven G. BarbeeJames M. LeasJames R. LloydArunachala Nagarajan
    • Steven G. BarbeeJames M. LeasJames R. LloydArunachala Nagarajan
    • H01L29/73H01L21/02H01L21/20H01L21/28H01L21/3205H01L21/331H01L21/74H01L21/76H01L21/768H01L21/822H01L23/52H01L27/00H01L27/12H01L29/04
    • H01L21/743H01L21/2026H01L21/8221H01L23/481H01L29/04H01L2924/0002H01L2924/09701
    • A process for the preparation of a semiconductor device in a thin film of a monocrystalline semiconductor material supported on the surface of a substrate. In the process a thin film of a monocrystalline semiconductor material is formed on a substrate. The film of monocrystalline semiconductor material is doped at various depths with various types and concentrations of dopants. Thereafter, contacts are established at various depths of the doped thin film. In one embodiment, a thin film of a non-monocrystalline semiconductor material is deposited on a substrate. The thin film of non-monocrystalline semiconductor material is doped in situ as it is being deposited with various doping impurities to provide various types and concentrations of doping impurities at various depths. The thin film of non-monocrystalline semiconductor material has at least one tapered region terminating in a point. The thin film of non-monocrystalline semiconductor material is traversed with a particle beam. The traverse is initiated at the point causing nucleation of a crystal at the point and subsequent growth of a monocrystalline thin film of semiconductor material from the point during the traverse. Contacts are then established at various depths to provide a semiconductor device, such as a bipolar transistor.
    • 一种用于制备支撑在衬底表面上的单晶半导体材料的薄膜中的半导体器件的方法。 在此过程中,单晶半导体材料的薄膜形成在基板上。 单晶半导体材料的膜在各种深度掺杂各种类型和浓度的掺杂剂。 此后,在掺杂薄膜的各种深度处建立接触。 在一个实施例中,将非单晶半导体材料的薄膜沉积在衬底上。 非单晶半导体材料的薄膜原位掺杂,因为它被各种掺杂杂质沉积,以在各种深度提供各种类型和浓度的掺杂杂质。 非单晶半导体材料的薄膜具有至少一个尖端区域终止于一点。 非单晶半导体材料的薄膜用粒子束穿过。 横穿是在导致晶体成核的点处开始的,并且在横越过程中半导体材料的单晶薄膜随后生长。 然后在各种深度建立触点以提供诸如双极晶体管的半导体器件。
    • 9. 发明授权
    • Carrier for test, burn-in, and first level packaging
    • 用于测试,老化和一级包装的载体
    • US07132841B1
    • 2006-11-07
    • US09588617
    • 2000-06-06
    • Claude L. BertinWayne F. EllisMark W. KelloggWilliam R. TontiJerzy M. ZalesinskiJames M. LeasWayne J. Howell
    • Claude L. BertinWayne F. EllisMark W. KelloggWilliam R. TontiJerzy M. ZalesinskiJames M. LeasWayne J. Howell
    • G01R31/26G01R31/28
    • G01R31/2867G11C5/04G11C29/06G11C29/1201G11C29/48G11C29/56016G11C29/785G11C2029/2602G11C2029/5602H01L22/22H01L22/32H01L2924/0002H01L2924/00
    • A plurality of semiconductor devices are provided on a carrier for testing or burning-in. The carrier is then cut up to provide single chip-on-carrier components or multi-chip-on-carrier components. The carrier is used as a first level package for each chip. Thus, the carrier serves a dual purpose for test and burn-in and for packaging. A lead reduction mechanism, such as a built-in self-test engine, can be provided on each chip or on the carrier and is connected to contacts of the carrier for the testing and burn-in steps. The final package after cutting includes at least one known good die and may include an array of chips on the carrier, such as a SIMM or a DIMM. The final package can also be a stack of chips each mounted on a separate carrier. The carriers of the stack are connected to each other through a substrate mounted along a side face of the stack that is electrically connected to a line of pads along an edge of each carrier. The carrier is formed of a flex material. It can also be formed of printed circuit board material. A window in the flex permits invoking redundancy on each chip after burn-in is complete, significantly improving yield as compared with present schemes that do not permit repair after burn-in.
    • 在载体上提供多个半导体器件用于测试或烧录。 然后将载体切割以提供单个芯片上载波部件或多芯片载波部件。 载体用作每个芯片的第一级封装。 因此,载体用于测试和烧录和包装的双重目的。 可以在每个芯片或载体上提供诸如内置自检引擎的引线减少机构,并且连接到载体的触点用于测试和老化步骤。 切割后的最终包装包括至少一个已知的良好的模具,并且可以包括载体上的芯片阵列,例如SIMM或DIMM。 最终的包装也可以是一堆芯片,每个芯片都安装在单独的载体上。 堆叠的载体通过沿着堆叠的侧面安装的基板彼此连接,该基板沿着每个载体的边缘电连接到焊盘一排。 载体由柔性材料形成。 它也可以由印刷电路板材料形成。 柔性窗口允许在烧坏完成后在每个芯片上调用冗余度,与不允许在老化后修复的现有方案相比,显着提高产量。