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    • 4. 发明授权
    • Ionic modification of organic resins and photoresists to produce
photoactive etch resistant compositions
    • 有机树脂和光致抗蚀剂的离子改性以产生光敏抗蚀组合物
    • US5393642A
    • 1995-02-28
    • US999208
    • 1992-12-31
    • Thomas D. DuBoisFarid M. TranjanStephen M. Bobbio
    • Thomas D. DuBoisFarid M. TranjanStephen M. Bobbio
    • G03F7/016G03F7/09
    • G03F7/0163Y10S430/115Y10S430/126
    • A photoresist composition is disclosed that comprises an organic resin that is thermoset by acid catalysis and a photoactive, etch-resistant ionic modifier formed of an anion and a cation. The modifier is present in the organic resin in an amount effective to produce substantial photoreactivity and etch resistance in a mixture of the resin and the modifier. The cation will, upon exposure to electromagnetic radiation, produce a species that is weakly basic or neutral, and the anion will, upon exposure to electromagnetic radiation, produce an acid precursor that will form a relatively strong acid in an acid-base solvent system. As a result, the relatively strong acid will catalyze the organic resin upon exposure to an appropriate frequency of electromagnetic radiation and the relatively weak base or neutral species formed by the cation will not substantially neutralize the acid or interfere with the acid catalyzed reaction of the organic resin.
    • 公开了一种光致抗蚀剂组合物,其包含通过酸催化热固性的有机树脂和由阴离子和阳离子形成的光敏抗蚀刻离子改性剂。 改性剂以有效产生在树脂和改性剂的混合物中的显着的光反应性和耐蚀刻性的量存在于有机树脂中。 阳离子在暴露于电磁辐射时会产生弱碱性或中性的物质,阴离子在暴露于电磁辐射时会产生在酸碱溶剂体系中形成较强酸的酸前体。 结果,相对较强的酸将在暴露于适当频率的电磁辐射时催化有机树脂,并且由阳离子形成的相对弱的碱或中性物质基本上不会中和酸或干扰有机酸的酸催化反应 树脂。
    • 6. 发明授权
    • Field emitter flat panel display device and method for operating same
    • 场致发射体平板显示装置及其操作方法
    • US5698942A
    • 1997-12-16
    • US681227
    • 1996-07-22
    • Richard F. GreeneStephen M. BobbioFarid M. TranjanKasra DaneshvarThomas D. DuBois
    • Richard F. GreeneStephen M. BobbioFarid M. TranjanKasra DaneshvarThomas D. DuBois
    • G09G3/22H01J3/02H01J1/30
    • G09G3/22H01J3/022G09G2300/08H01J2329/00
    • A field emitter flat panel display and associated method of operation provides an electron emission path along which a beam of electrons emitted by a microelectronic field emitter travels such that the electrons impinge upon a light emitting element without passing through a mirror. The light emitting element is spaced apart from the microelectronic field emitter and includes a mirror and a luminescence layer on the mirror. The flat panel display can also include a deflector, such as a deflector electrode, which is spaced apart from both the microelectronic field emitter and the associated light emitting element and which controllably deflects the beam of electrons emitted by the microelectronic field emitter toward the luminescent layer of the associated light emitting element and along a curved electron emission path which is independent of the underlying mirror. Since the energy of the electrons is not dissipated by passing through a mirror prior to impinging upon the luminescent layer, the field emitter flat panel display and, more particularly, the microelectronic field emitter can be efficiently driven at relatively low voltage levels while still producing a relatively bright display.
    • 场发射器平板显示器和相关联的操作方法提供电子发射路径,微电子场发射器发射的电子束沿着该发射路径行进,使得电子撞击在发光​​元件上而不通过反射镜。 发光元件与微电子场发射器间隔开,并且在反射镜上包括反射镜和发光层。 平板显示器还可以包括偏转器电极,偏转器电极与微电子场发射器和相关联的发光元件两者间隔开,并且可控地将微电子场发射器发射的电子束偏转到发光层 并且沿着独立于下面的反射镜的弯曲电子发射路径。 由于在撞击发光层之前电子的能量不会通过反射镜而消散,所以可以在相当低的电压电平下有效地驱动场致发射体平板显示器,更具体地说,微电子场发射器驱动,同时仍然产生 比较明亮的显示。
    • 10. 发明授权
    • Scanner apparatus having electromagnetic radiation devices coupled to MEMS actuators
    • 具有耦合到MEMS致动器的电磁辐射装置的扫描仪装置
    • US07706039B2
    • 2010-04-27
    • US12170828
    • 2008-07-10
    • Stephen W. SmithKenneth L. GentryJason ZaraStephen M. Bobbio
    • Stephen W. SmithKenneth L. GentryJason ZaraStephen M. Bobbio
    • G02B26/08
    • B81C99/002A61B2018/20351B25J7/00G02B26/0841
    • A disclosed scanner apparatus includes a member having spaced apart proximal and distal portions. An electromagnetic radiation device is configured to direct electromagnetic radiation therefrom and is movably coupled to the distal portion of the member. The electromagnetic radiation device is configured to move in a first plane of movement to a first position to direct the electromagnetic radiation along a first path and configured to move in the plane of movement to a second position to direct the electromagnetic radiation along a second path. A MicroElectroMechanical Systems (MEMS) actuator is coupled to the electromagnetic radiation device, wherein the MEMS actuator is configured to move in a first direction to move the electromagnetic radiation device to the first position and configured to move in a second direction to move the electromagnetic radiation device to the second position. Other scanning and robotic structure devices are disclosed.
    • 所公开的扫描仪装置包括具有间隔开的近端部分和远端部分的部件。 电磁辐射装置被配置为从其引导电磁辐射并且可移动地联接到构件的远端部分。 电磁辐射装置被配置为在第一移动平面中移动到第一位置以引导电磁辐射沿着第一路径并被配置成在运动平面内移动到第二位置以沿着第二路径引导电磁辐射。 微电子机械系统(MEMS)致动器耦合到电磁辐射装置,其中MEMS致动器被配置为在第一方向上移动以将电磁辐射装置移动到第一位置并且被配置成沿第二方向移动以移动电磁辐射 设备到第二个位置。 公开了其他扫描和机器人结构设备。