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1. 发明授权

US5561342A Electron beam exit window 失效
标题翻译：电子束出射窗
公开(公告)号：US5561342A
公开(公告)日：1996-10-01
申请号：US351401
申请日：1995-02-17
申请人： Olaf Roeder , Ulf Seyfert , Siegfried Panzer
发明人： Olaf Roeder , Ulf Seyfert , Siegfried Panzer
IPC分类号： H01J5/18 , H01J33/04 , H01J33/00
CPC分类号： H01J33/04 , H01J5/18
摘要： An electron beam exit window, known as Lenard window, has a beam exit opening which is closed in a vacuum-tight manner by a metal foil. Resting on the metal foil on the vacuum side is a supporting grid of heat-proof fiber bundles. The supporting grid is fixed in a frame. The electron beam exit window is particularly suitable for relatively low electron energies with a high power density of the electron beam. This provides an easily manufactured window with low absorption.
摘要翻译： PCT No.PCT / DE93 / 00402 Sec。 371日期：1995年2月17日 102（e）日期1995年2月17日PCT提交1993年5月3日PCT公布。出版物WO93 / 26032 日期：1993年12月23日电子束出射窗，称为Lenard窗，具有一个出口开口，以金属箔的真空密封方式封闭。在真空面上的金属箔上是隔热纤维束的支撑网。支撑网格固定在一个框架中。电子束出射窗特别适用于电子束的高功率密度的较低电子能量。这提供了一个容易制造的窗口，吸收率低。

2. 发明授权

US5955829A Cathode for electron gun with band-shaped beams 失效
标题翻译：具有带状光束的电子枪阴极
公开(公告)号：US5955829A
公开(公告)日：1999-09-21
申请号：US934678
申请日：1997-09-22
申请人： Ulf Seyfert , Olaf Roder , Siegfried Schiller , Siegfried Panzer , Robert Mohs
发明人： Ulf Seyfert , Olaf Roder , Siegfried Schiller , Siegfried Panzer , Robert Mohs
IPC分类号： H01J33/02 , H01J37/065 , H01J1/46
CPC分类号： H01J33/02 , H01J37/065
摘要： Electron gun with band-shaped beams that includes a vacuum chamber extend in a longitudinal direction, a beam window running in the longitudinal direction along the vacuum chamber, and a cathode control-electrode system positioned within the vacuum chamber in the longitudinal direction. The cathode control-electrode system includes at least one substantially straight cathode positioned substantially parallel to a longitudinal axis of the cathode control-electrode system and the at least one substantially straight cathode has bulges formed at defined distances. The bulges are shaped to produce a substantially homogeneous current density distribution along the at least one substantially straight cathode and support units are located in the cathode control-electrode system to correspond with the bulges. The bulges are removably couplable to the support units.
摘要翻译：具有带状梁的电子枪，其包括在纵向方向上延伸的真空室，沿着该真空室在纵向方向上延伸的梁窗，以及沿纵向方向定位在真空室内的阴极控制电极系统。阴极控制电极系统包括基本上平行于阴极控制电极系统的纵轴定向的至少一个基本上直的阴极，并且至少一个基本上直的阴极具有以限定的距离形成的凸起。凸起成形为沿着至少一个基本上直的阴极产生基本均匀的电流密度分布，并且支撑单元位于阴极控制电极系统中以对应于凸起。凸起可拆卸地联接到支撑单元。

3. 发明申请

US20070240636A1 Thermal Vacuum Deposition Method and Device 审中-公开
标题翻译：热真空沉积方法和装置
公开(公告)号：US20070240636A1
公开(公告)日：2007-10-18
申请号：US11568332
申请日：2005-04-16
申请人： Lutz Gottsman , Ulf Seyfert , Bernd-Dieter Wenzel , Reinhard Jaeger
发明人： Lutz Gottsman , Ulf Seyfert , Bernd-Dieter Wenzel , Reinhard Jaeger
IPC分类号： C23C14/00
CPC分类号： C23C14/24 , C23C14/562
摘要： A thermal vacuum deposition device and method in which a band-shaped substrate is continuously conveyed in a vaporization channel that is charged with a vaporous coating material is characterized in that the vaporization channel is sealed by inserting at least one positionally adjustable hollow element into an outer space of the vaporization channel and an inner space of the vaporization channel when a minimum conveying speed is not attained or when the substrate is at a standstill such that the substrate is located in the inner space.
摘要翻译：一种热真空沉积装置和方法，其中带状基底在装有气相涂层材料的蒸发通道中连续输送，其特征在于，通过将至少一个位置调节的中空元件插入到外部空气元件中来密封蒸发通道当没有达到最小输送速度时或当基板处于停止状态使得基板位于内部空间中时，蒸发通道的空间和蒸发通道的内部空间。

4. 发明申请

US20120299247A1 SEALING DEVICE FOR ROTARY FEEDTHROUGH 有权
标题翻译：密封设备旋转送料
公开(公告)号：US20120299247A1
公开(公告)日：2012-11-29
申请号：US13561875
申请日：2012-07-30
申请人： Hans-Juergen Heinrich , Ulf Seyfert , Peter Botzler
发明人： Hans-Juergen Heinrich , Ulf Seyfert , Peter Botzler
IPC分类号： F16J15/32
CPC分类号： F16J15/004 , F16J15/002 , F16J15/006 , F16J15/3208 , F16J15/3228 , F16J15/46
摘要： A sealing device for a rotary feedthrough for receiving a rotating machine element whose outer side can be applied to another machine element, includes at least two sealing elements disposed in tandem in the axial direction of the machine element. Inner sides of the sealing elements are configured for forming an active sealing connection with the rotating machine element. At least one of the sealing elements can be pressurized with an additional force acting in the radial direction so that the force of compression acting on the rotating machine element for the at least one of the sealing elements can be adjusted relative to the force of compression acting on the rotating machine element due to at least one other sealing element.
摘要翻译：一种用于接收旋转机械元件的旋转馈通用密封装置，其外侧可以施加到另一个机器元件上，包括沿机器元件的轴向串联布置的至少两个密封元件。密封元件的内侧被构造成用于与旋转的机器元件形成主动的密封连接。至少一个密封元件可以以在径向方向上作用的附加力加压，使得作用在用于至少一个密封元件的旋转机械元件上的压缩力可以相对于压缩作用力调节由于至少一个其它密封元件在旋转的机器元件上。

5. 发明申请

US20080193636A1 Vaporizing Device and Method for Vaporizing Coating Material 审中-公开
标题翻译：蒸发装置和蒸发涂料的方法
公开(公告)号：US20080193636A1
公开(公告)日：2008-08-14
申请号：US11568329
申请日：2005-04-16
申请人： Lutz Gottsman , Ulf Seyfert , Bernd-Dieter Wenzel , Reinhard Jaeger
发明人： Lutz Gottsman , Ulf Seyfert , Bernd-Dieter Wenzel , Reinhard Jaeger
IPC分类号： C23C16/448 , C23C16/44 , C23C16/455 , C23C16/54
CPC分类号： C23C14/246
摘要： A device for vaporizing coating material is disposed in a vacuum chamber as part of a deposition apparatus; the coating material being arranged in a crucible for vaporization purposes. The vaporizing device has an evaporation chamber that is connected, via a vacuum valve, to a loading chamber which can be evacuated while an evaporator is connected to the evaporation chamber at a vapor discharge end, i.e., the end facing the vacuum chamber, via a first vapor stop valve.
摘要翻译：作为蒸镀装置的一部分，在真空室内设置蒸镀涂料的装置，该涂料被布置在用于蒸发的目的的坩埚中。蒸发装置具有蒸发室，该蒸发室经由真空阀连接到装载室，该装载室可在蒸发器通过蒸气排出端（即，面向真空室的一端）经蒸发器连接到蒸发室第一蒸汽截止阀。

6. 发明授权

US08337681B2 Endblock for a magnetron device with a rotatable target 失效
标题翻译：具有可旋转靶的磁控管装置的端块
公开(公告)号：US08337681B2
公开(公告)日：2012-12-25
申请号：US12621144
申请日：2009-11-18
申请人： Hans-Juergen Heinrich , Ulf Seyfert , Goetz Teschner
发明人： Hans-Juergen Heinrich , Ulf Seyfert , Goetz Teschner
IPC分类号： C23C14/34
CPC分类号： H01J37/3405 , H01J37/3435 , H01J37/3444
摘要： To achieve an improved end block, in which heating by induction eddy currents, which may occur during AC sputtering, for example, is significantly reduced relative to known end blocks, an end block for a magnetron configuration having a rotating target comprises an end block housing having an attachment surface for attaching the end block on a support apparatus, a pivot bearing for rotatable mounting of the rotating target, and at least one current conduction apparatus which conducts current through the end block housing in operation of the end block. The end block housing is implemented so that each current path in the end block housing which encloses the current conduction apparatus has an interruption at least one point.
摘要翻译：为了实现改进的端块，其中例如在AC溅射期间可能发生的通过感应涡流的加热相对于已知的端块显着降低，具有旋转靶的磁控管构造的端块包括端块壳体具有用于将端块安装在支撑装置上的附接表面，用于旋转靶的可旋转安装的枢转轴承，以及至少一个导流装置，其在端块的操作中通过端块壳体传导电流。端块壳体被实现为使得包封电流传导装置的端块壳体中的每个电流路径具有至少一个点的中断。

7. 发明授权

US08827275B2 Sealing device for rotary feedthrough 有权
标题翻译：旋转馈通用密封装置
公开(公告)号：US08827275B2
公开(公告)日：2014-09-09
申请号：US13561875
申请日：2012-07-30
申请人： Hans-Juergen Heinrich , Ulf Seyfert , Peter Botzler
发明人： Hans-Juergen Heinrich , Ulf Seyfert , Peter Botzler
IPC分类号： F16J15/02 , F16J15/46 , F16J15/00 , F16J15/32
CPC分类号： F16J15/004 , F16J15/002 , F16J15/006 , F16J15/3208 , F16J15/3228 , F16J15/46
摘要： A sealing device for a rotary feedthrough for receiving a rotating machine element whose outer side can be applied to another machine element, includes at least two sealing elements disposed in tandem in the axial direction of the machine element. Inner sides of the sealing elements are configured for forming an active sealing connection with the rotating machine element. At least one of the sealing elements can be pressurized with an additional force acting in the radial direction so that the force of compression acting on the rotating machine element for the at least one of the sealing elements can be adjusted relative to the force of compression acting on the rotating machine element due to at least one other sealing element.
摘要翻译：一种用于接收旋转机械元件的旋转馈通用密封装置，其外侧可以施加到另一个机器元件上，包括沿机器元件的轴向串联布置的至少两个密封元件。密封元件的内侧被构造成用于与旋转的机器元件形成主动的密封连接。密封元件中的至少一个可以以在径向方向上作用的附加力加压，使得作用在用于至少一个密封元件的旋转机械元件上的压缩力可相对于压缩作用力由于至少一个其它密封元件在旋转的机器元件上。

8. 发明授权

US08192598B2 End-block for a magnetron device with a rotatable target, and vacuum coating apparatus 有权
标题翻译：具有可旋转靶的磁控管装置的端块和真空镀膜装置
公开(公告)号：US08192598B2
公开(公告)日：2012-06-05
申请号：US12504700
申请日：2009-07-17
申请人： Hans-Juergen Heinrich , Goetz Grosser , Sven Haehne , Ulf Seyfert
发明人： Hans-Juergen Heinrich , Goetz Grosser , Sven Haehne , Ulf Seyfert
IPC分类号： C23C14/35
CPC分类号： H01J37/3405 , H01J37/3435
摘要： An end block for a magnetron device having a rotatable target comprises an end block housing having a pivot bearing. The end block housing is adapted on its outer side for attachment on a support unit, and the pivot bearing is adapted on an end that is accessible from outside the end block housing, for connection to the rotatable target. The end block housing is movably attached on the support unit. A vacuum coating apparatus has a vacuum chamber, a magnetron device situated in the vacuum chamber, and a rotatable target rotatably mounted on at least one such end block.
摘要翻译：用于具有可旋转靶的磁控管装置的端块包括具有枢转轴承的端块壳体。端块壳体在其外侧适于附接在支撑单元上，并且枢转轴承适于在端部壳体外部可接近的端部上，用于连接到可旋转靶。端块壳体可移动地附接在支撑单元上。真空镀膜装置具有真空室，位于真空室中的磁控管装置，以及可旋转地安装在至少一个这样的端块上的可旋转靶。

9. 发明申请

US20090078572A1 MAGNETRON END-BLOCK WITH SHIELDED TARGET MOUNTING ASSEMBLY 审中-公开
标题翻译： MAGNETRON端框与屏蔽目标安装组件
公开(公告)号：US20090078572A1
公开(公告)日：2009-03-26
申请号：US12236816
申请日：2008-09-24
申请人： Hans-Juergen HEINRICH , Goetz Grosser , Thorsten Sander , Ulf Seyfert
发明人： Hans-Juergen HEINRICH , Goetz Grosser , Thorsten Sander , Ulf Seyfert
IPC分类号： C23C14/35
CPC分类号： H01J37/3435 , H01J25/50 , H01J37/3405 , H01J37/3441
摘要： A magnetron arrangement includes an end block, which has a target fastening device for rotatable coupling of a tubular target, a holding device for a magnet system arranged in the interior of the tubular target and a shield, which covers the end of a tubular target mounted in the target fastening device. An area of the shield covering the end of the tubular target is configured, so that an annular gap remaining between the target support tube and the shield, viewed from the outside, has at least one radially outward-leading section.
摘要翻译：磁控管装置包括端块，其具有用于管状靶的可旋转联接的目标紧固装置，布置在管状靶的内部的磁体系统的保持装置和覆盖安装的管状靶的端部的护罩在目标紧固装置中。覆盖管状目标端部的屏蔽区域被构造成使得从外部观察，残留在目标支撑管与屏蔽体之间的环状间隙具有至少一个径向向外的前端部。

10. 发明申请

US20070218201A1 Continuous Thermal Vacuum Deposition Device and Method 审中-公开
标题翻译：连续热真空沉积装置及方法
公开(公告)号：US20070218201A1
公开(公告)日：2007-09-20
申请号：US11568335
申请日：2005-04-16
申请人： Lutz Gottsman , Ulf Seyfert , Bernd-Dieter Wenzel
发明人： Lutz Gottsman , Ulf Seyfert , Bernd-Dieter Wenzel
IPC分类号： C23C14/56
CPC分类号： C23C14/56 , C23C14/246
摘要： A coating method is provided for thermally vacuum-depositing a continuously conveyed substrate that moves within a deposition channel by vaporizing solid or liquid coating materials and vapor-depositing the vaporized coating material onto the substrate in a deposition device. In order to create a coating conveyed substrate, in which accessibility to the vaporization device is improved while the processes taking place in the deposition chamber and the vaporization device can be controlled independently of each other, at least one evaporation device is located outside the deposition chamber and delivery of steam between the evaporator and the deposition channel is regulated.
摘要翻译：提供了一种涂覆方法，用于通过汽化固体或液体涂料并将蒸发的涂料气相沉积到沉积装置中的基底上，使在沉积通道内移动的连续输送的基材进行真空沉积。为了形成涂料输送基材，其中可以使蒸发装置的可接近程度得到改善，同时可以独立地控制在沉积室和蒸发装置中发生的工艺，至少一个蒸发装置位于沉积室外部并且调节蒸发器和沉积通道之间的蒸汽输送。

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