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    • 6. 发明授权
    • Endblock for a magnetron device with a rotatable target
    • 具有可旋转靶的磁控管装置的端块
    • US08337681B2
    • 2012-12-25
    • US12621144
    • 2009-11-18
    • Hans-Juergen HeinrichUlf SeyfertGoetz Teschner
    • Hans-Juergen HeinrichUlf SeyfertGoetz Teschner
    • C23C14/34
    • H01J37/3405H01J37/3435H01J37/3444
    • To achieve an improved end block, in which heating by induction eddy currents, which may occur during AC sputtering, for example, is significantly reduced relative to known end blocks, an end block for a magnetron configuration having a rotating target comprises an end block housing having an attachment surface for attaching the end block on a support apparatus, a pivot bearing for rotatable mounting of the rotating target, and at least one current conduction apparatus which conducts current through the end block housing in operation of the end block. The end block housing is implemented so that each current path in the end block housing which encloses the current conduction apparatus has an interruption at least one point.
    • 为了实现改进的端块,其中例如在AC溅射期间可能发生的通过感应涡流的加热相对于已知的端块显着降低,具有旋转靶的磁控管构造的端块包括端块壳体 具有用于将端块安装在支撑装置上的附接表面,用于旋转靶的可旋转安装的枢转轴承,以及至少一个导流装置,其在端块的操作中通过端块壳体传导电流。 端块壳体被实现为使得包封电流传导装置的端块壳体中的每个电流路径具有至少一个点的中断。
    • 7. 发明授权
    • Cathode for electron gun with band-shaped beams
    • 具有带状光束的电子枪阴极
    • US5955829A
    • 1999-09-21
    • US934678
    • 1997-09-22
    • Ulf SeyfertOlaf RoderSiegfried SchillerSiegfried PanzerRobert Mohs
    • Ulf SeyfertOlaf RoderSiegfried SchillerSiegfried PanzerRobert Mohs
    • H01J33/02H01J37/065H01J1/46
    • H01J33/02H01J37/065
    • Electron gun with band-shaped beams that includes a vacuum chamber extend in a longitudinal direction, a beam window running in the longitudinal direction along the vacuum chamber, and a cathode control-electrode system positioned within the vacuum chamber in the longitudinal direction. The cathode control-electrode system includes at least one substantially straight cathode positioned substantially parallel to a longitudinal axis of the cathode control-electrode system and the at least one substantially straight cathode has bulges formed at defined distances. The bulges are shaped to produce a substantially homogeneous current density distribution along the at least one substantially straight cathode and support units are located in the cathode control-electrode system to correspond with the bulges. The bulges are removably couplable to the support units.
    • 具有带状梁的电子枪,其包括在纵向方向上延伸的真空室,沿着该真空室在纵向方向上延伸的梁窗,以及沿纵向方向定位在真空室内的阴极控制电极系统。 阴极控制电极系统包括基本上平行于阴极控制电极系统的纵轴定向的至少一个基本上直的阴极,并且至少一个基本上直的阴极具有以限定的距离形成的凸起。 凸起成形为沿着至少一个基本上直的阴极产生基本均匀的电流密度分布,并且支撑单元位于阴极控制电极系统中以对应于凸起。 凸起可拆卸地联接到支撑单元。