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    • 4. 发明授权
    • Endblock for a magnetron device with a rotatable target
    • 具有可旋转靶的磁控管装置的端块
    • US08337681B2
    • 2012-12-25
    • US12621144
    • 2009-11-18
    • Hans-Juergen HeinrichUlf SeyfertGoetz Teschner
    • Hans-Juergen HeinrichUlf SeyfertGoetz Teschner
    • C23C14/34
    • H01J37/3405H01J37/3435H01J37/3444
    • To achieve an improved end block, in which heating by induction eddy currents, which may occur during AC sputtering, for example, is significantly reduced relative to known end blocks, an end block for a magnetron configuration having a rotating target comprises an end block housing having an attachment surface for attaching the end block on a support apparatus, a pivot bearing for rotatable mounting of the rotating target, and at least one current conduction apparatus which conducts current through the end block housing in operation of the end block. The end block housing is implemented so that each current path in the end block housing which encloses the current conduction apparatus has an interruption at least one point.
    • 为了实现改进的端块,其中例如在AC溅射期间可能发生的通过感应涡流的加热相对于已知的端块显着降低,具有旋转靶的磁控管构造的端块包括端块壳体 具有用于将端块安装在支撑装置上的附接表面,用于旋转靶的可旋转安装的枢转轴承,以及至少一个导流装置,其在端块的操作中通过端块壳体传导电流。 端块壳体被实现为使得包封电流传导装置的端块壳体中的每个电流路径具有至少一个点的中断。