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1. 发明申请

US20090078572A1 MAGNETRON END-BLOCK WITH SHIELDED TARGET MOUNTING ASSEMBLY 审中-公开
标题翻译： MAGNETRON端框与屏蔽目标安装组件
公开(公告)号：US20090078572A1
公开(公告)日：2009-03-26
申请号：US12236816
申请日：2008-09-24
申请人： Hans-Juergen HEINRICH , Goetz Grosser , Thorsten Sander , Ulf Seyfert
发明人： Hans-Juergen HEINRICH , Goetz Grosser , Thorsten Sander , Ulf Seyfert
IPC分类号： C23C14/35
CPC分类号： H01J37/3435 , H01J25/50 , H01J37/3405 , H01J37/3441
摘要： A magnetron arrangement includes an end block, which has a target fastening device for rotatable coupling of a tubular target, a holding device for a magnet system arranged in the interior of the tubular target and a shield, which covers the end of a tubular target mounted in the target fastening device. An area of the shield covering the end of the tubular target is configured, so that an annular gap remaining between the target support tube and the shield, viewed from the outside, has at least one radially outward-leading section.
摘要翻译：磁控管装置包括端块，其具有用于管状靶的可旋转联接的目标紧固装置，布置在管状靶的内部的磁体系统的保持装置和覆盖安装的管状靶的端部的护罩在目标紧固装置中。覆盖管状目标端部的屏蔽区域被构造成使得从外部观察，残留在目标支撑管与屏蔽体之间的环状间隙具有至少一个径向向外的前端部。

2. 发明申请

US20100012489A1 END-BLOCK FOR A MAGNETRON DEVICE WITH A ROTATABLE TARGET, AND VACUUM COATING APPARATUS 有权
标题翻译：具有可旋转目标的磁铁装置的末端块和真空涂装置
公开(公告)号：US20100012489A1
公开(公告)日：2010-01-21
申请号：US12504700
申请日：2009-07-17
申请人： Hans-Juergen HEINRICH , Goetz GROSSER , Sven HAEHNE , Ulf SEYFERT
发明人： Hans-Juergen HEINRICH , Goetz GROSSER , Sven HAEHNE , Ulf SEYFERT
IPC分类号： C23C14/34
CPC分类号： H01J37/3405 , H01J37/3435
摘要： An end block for a magnetron device having a rotatable target comprises an end block housing having a pivot bearing. The end block housing is adapted on its outer side for attachment on a support unit, and the pivot bearing is adapted on an end that is accessible from outside the end block housing, for connection to the rotatable target. The end block housing is movably attached on the support unit. A vacuum coating apparatus has a vacuum chamber, a magnetron device situated in the vacuum chamber, and a rotatable target rotatably mounted on at least one such end block.
摘要翻译：用于具有可旋转靶的磁控管装置的端块包括具有枢转轴承的端块壳体。端块壳体在其外侧适于附接在支撑单元上，并且枢转轴承适于在端部壳体外部可接近的端部上，用于连接到可旋转靶。端块壳体可移动地附接在支撑单元上。真空镀膜装置具有真空室，位于真空室中的磁控管装置，以及可旋转地安装在至少一个这样的端块上的可旋转靶。

3. 发明申请

US20090258739A1 DRIVE END-BLOCK FOR A ROTATABLE MAGNETRON 有权
标题翻译：用于可旋转磁铁的驱动端块
公开(公告)号：US20090258739A1
公开(公告)日：2009-10-15
申请号：US12421810
申请日：2009-04-10
申请人： Hans-Juergen HEINRICH , Goetz GROSSER , Thorsten SANDER
发明人： Hans-Juergen HEINRICH , Goetz GROSSER , Thorsten SANDER
IPC分类号： F16H7/02
CPC分类号： H01J37/3405 , H01J37/3435
摘要： A drive end block for a rotatable magnetron comprises a housing, which has a vacuum-tight rotary feedthrough extending through a wall of the housing, and a drive apparatus for generating a torque. An output end of the rotary feedthrough lies outside the housing for connection to the rotatable magnetron and a drive end of the rotary feedthrough lies inside the housing for introducing a torque. The drive apparatus is situated outside the housing of the drive end block and is connected using a torque transmission apparatus to the drive end of the rotary feedthrough so that the drive apparatus is electrically insulated from the housing and the rotary feedthrough of the drive end block.
摘要翻译：用于可旋转磁控管的驱动端块包括壳体，其具有延伸穿过壳体的壁的真空密封的旋转馈通，以及用于产生转矩的驱动装置。旋转馈通的输出端位于壳体的外部，用于连接到可旋转的磁控管，并且旋转馈通的驱动端位于壳体内部以引入转矩。驱动装置位于驱动端块的壳体的外部，并且使用扭矩传递装置连接到旋转馈通的驱动端，使得驱动装置与驱动端块的壳体和旋转馈通电绝缘。

4. 发明申请

US20100156050A1 SEALING DEVICE FOR ROTARY FEEDTHROUGH 审中-公开
标题翻译：密封设备旋转送料
公开(公告)号：US20100156050A1
公开(公告)日：2010-06-24
申请号：US12643457
申请日：2009-12-21
申请人： Hans-Juergen HEINRICH , Ulf SEYFERT , Peter BOTZLER
发明人： Hans-Juergen HEINRICH , Ulf SEYFERT , Peter BOTZLER
IPC分类号： F16J15/34 , F16J15/54 , F16J15/16
CPC分类号： F16J15/004 , F16J15/002 , F16J15/006 , F16J15/3208 , F16J15/3228 , F16J15/46
摘要： A sealing device for a rotary feedthrough for receiving a rotating machine element whose outer side can be applied to another machine element includes at least two sealing elements disposed in tandem in the axial direction of the machine element. Inner sides of the sealing elements are configured for forming an active sealing connection with the rotating machine element. At least one of the sealing elements can be pressurized with an additional force acting in the radial direction so that the force of compression acting on the rotating machine element for the at least one of the sealing elements can be adjusted relative to the force of compression acting on the rotating machine element due to at least one other sealing element.
摘要翻译：一种用于接收旋转机械元件的旋转馈通用密封装置，其外侧可以施加到另一个机器元件，包括沿机器元件的轴向串联设置的至少两个密封元件。密封元件的内侧被构造成用于与旋转的机器元件形成主动的密封连接。至少一个密封元件可以以在径向方向上作用的附加力加压，使得作用在用于至少一个密封元件的旋转机械元件上的压缩力可以相对于压缩作用力调节由于至少一个其它密封元件在旋转的机器元件上。

5. 发明申请

US20100126855A1 ENDBLOCK FOR A MAGNETRON DEVICE WITH A ROTATABLE TARGET 失效
标题翻译：用于具有可旋转目标的MAGNETRON设备的终止
公开(公告)号：US20100126855A1
公开(公告)日：2010-05-27
申请号：US12621144
申请日：2009-11-18
申请人： Hans-Juergen HEINRICH , Ulf SEYFERT , Goetz TESCHNER
发明人： Hans-Juergen HEINRICH , Ulf SEYFERT , Goetz TESCHNER
IPC分类号： C23C14/35
CPC分类号： H01J37/3405 , H01J37/3435 , H01J37/3444
摘要： To achieve an improved end block, in which heating by induction eddy currents, which may occur during AC sputtering, for example, is significantly reduced relative to known end blocks, an end block for a magnetron configuration having a rotating target comprises an end block housing having an attachment surface for attaching the end block on a support apparatus, a pivot bearing for rotatable mounting of the rotating target, and at least one current conduction apparatus which conducts current through the end block housing in operation of the end block. The end block housing is implemented so that each current path in the end block housing which encloses the current conduction apparatus has an interruption at at least one point.
摘要翻译：为了实现改进的端块，其中例如在AC溅射期间可能发生的通过感应涡流的加热相对于已知的端块显着降低，具有旋转靶的磁控管构造的端块包括端块壳体具有用于将端块安装在支撑装置上的附接表面，用于旋转靶的可旋转安装的枢转轴承，以及至少一个导流装置，其在端块的操作中通过端块壳体传导电流。端块壳体被实现为使得封闭导电装置的端块壳体中的每个电流路径在至少一个点处具有中断。

6. 发明申请

US20110148048A1 SEALING ARRANGEMENT 审中-公开
标题翻译：密封安排
公开(公告)号：US20110148048A1
公开(公告)日：2011-06-23
申请号：US12971001
申请日：2010-12-17
申请人： Goetz GROSSER , Hans-Juergen HEINRICH , Harald GRUNE
发明人： Goetz GROSSER , Hans-Juergen HEINRICH , Harald GRUNE
IPC分类号： F16J15/02
CPC分类号： F16J15/004 , F16J15/002
摘要： A sealing arrangement for a feedthrough is located between a first machine element and a second machine element and comprises a first sealing element, and a second sealing element disposed in the axial direction of the first machine element at a distance from the first sealing element. The inner sides of the sealing elements form a sealing operative connection with the first machine element. An intermediate space between the first sealing element and the second sealing element is divided into a first chamber and a second chamber connected to each other by an annular gap between the first machine element and the sealing arrangement. The first chamber includes an inlet for a rinsing medium and the second chamber includes a first outlet for drainage or suction of the rinsing medium and possible leakages.
摘要翻译：用于馈通的密封装置位于第一机器元件和第二机器元件之间，并且包括第一密封元件和在第一密封元件距离第一机器元件的轴向方向上设置的第二密封元件。密封元件的内侧形成与第一机器元件的密封操作连接。第一密封元件和第二密封元件之间的中间空间被分成通过第一机器元件和密封装置之间的环形间隙彼此连接的第一室和第二室。第一室包括用于冲洗介质的入口，并且第二室包括用于排出或抽吸冲洗介质的第一出口和可能的泄漏。

7. 发明申请

US20090277787A1 ROTATABLE SPUTTER TARGET COMPRISING AN END-BLOCK WITH A LIQUID COOLANT SUPPLY SYSTEM 有权
标题翻译：具有液体冷却剂供应系统的包含端盖的可旋转溅射器目标
公开(公告)号：US20090277787A1
公开(公告)日：2009-11-12
申请号：US12436399
申请日：2009-05-06
申请人： Thorsten SANDER , Cornell WEIDELT , Hans-Juergen HEINRICH
发明人： Thorsten SANDER , Cornell WEIDELT , Hans-Juergen HEINRICH
IPC分类号： C23C14/34
CPC分类号： H01J37/3435 , C23C14/3407 , H01J37/3405 , H01J37/342 , H01J37/3497
摘要： A tube target with an end block for supplying coolant to the tube target is provided. The end block comprises a rotatably mounted carrier shaft for holding and rotating the tube target; a connecting sleeve arranged in the carrier shaft; a sealing element for the tube target on its end facing the end block; a coolant inlet port in the interior of the tube target; and a coolant outlet port. The coolant outlet port is formed by at least one aperture in the sealing element. The aperture is located in the vicinity of the wall of the tube target, and eccentrically to the rotational axis of the tube target.
摘要翻译：提供具有用于向管目标供应冷却剂的端块的管目标。端块包括用于保持和旋转管目标的可旋转地安装的行星架轴; 布置在所述托架轴上的连接套筒; 一个用于管目标的密封元件，其端部面向端块; 管目标内部的冷却剂入口; 和冷却剂出口。冷却剂出口由密封元件中的至少一个孔形成。孔位于管靶的壁附近，并且偏心于管靶的旋转轴线。

8. 发明申请

US20120152738A1 MAGNETRON ARRANGEMENT WITH A HOLLOW TARGET 审中-公开
标题翻译： MAGNETRON安排与中空目标
公开(公告)号：US20120152738A1
公开(公告)日：2012-06-21
申请号：US13332601
申请日：2011-12-21
申请人： Hans-Juergen HEINRICH , Harald GRUNE , Rolf RANK
发明人： Hans-Juergen HEINRICH , Harald GRUNE , Rolf RANK
IPC分类号： C23C14/35
CPC分类号： H01J37/3405 , H01J37/342 , H01J37/345 , H01J37/3455 , H01J37/3497
摘要： A magnetron arrangement includes a hollow target and a magnet system arranged in the hollow target with a magnet carrier and a magnet arrangement fitted on the magnet carrier. The magnet carrier includes at least two magnet carrier elements, which each have at least one cavity and each have at least one contact face on an outer side. The at least two magnet carrier elements are in touching contact with their contact faces and are fixedly connected to one another, and the cavities of the magnet carrier elements have no connection between them.
摘要翻译：磁控管装置包括中空靶和设置在中空靶中的磁体系，磁体载体和安装在磁体载体上的磁体装置。磁体载体包括至少两个磁体载体元件，每个磁体载体元件具有至少一个空腔，并且每个在外侧具有至少一个接触面。至少两个磁体载体元件与其接触面接触接触并且彼此固定地连接，并且磁体载体元件的空腔在它们之间没有连接。

9. 发明申请

US20060251933A1 ARRANGEMENT AND METHOD FOR THE GENERATION OF WATER ON BOARD AN AIRCRAFT 有权
标题翻译：用于生成飞机上的水的布置和方法
公开(公告)号：US20060251933A1
公开(公告)日：2006-11-09
申请号：US11458490
申请日：2006-07-19
申请人： Claus HOFFJANN , Hansgeorg SCHULDZIG , Hans-Juergen HEINRICH
发明人： Claus HOFFJANN , Hansgeorg SCHULDZIG , Hans-Juergen HEINRICH
IPC分类号： H01M8/04 , H01M8/06
CPC分类号： H01M8/04067 , B64D11/02 , B64D2041/005 , H01M8/04007 , H01M8/04089 , H01M8/04164 , H01M8/04708 , H01M8/04731 , H01M8/04753 , H01M8/0612 , H01M2250/00 , H01M2250/20 , Y02T90/32 , Y02T90/36
摘要： An arrangement and a method are proposed for the generation of water on board an aircraft with the use of one or more fuel cells, whereby low-temperature fuel cells are provided as fuel cells. It is proposed that several single-cell or few-cell fuel cells may form a fuel-cell panel or cell array and several cell panels or cell arrays may be arranged close to the inside of the aircraft fuselage and the cathode side of the at least one fuel cell has a chamber pointing to the exterior of the aircraft for the condensation of the water contained in the air and the anode side has a chamber carrying a combustion gas, for example hydrogen. With the proposed solution, a reduction in the storage capacity for drinking water and its quality-assured provision may be enabled and moreover, with the use of fuel cells as a virtual power station, the energy demand on engine generators, auxiliary power unit (APU) or ram air turbine (RAT) may be reduced.
摘要翻译：提出了一种使用一个或多个燃料电池在飞机上生成水的装置和方法，由此提供低温燃料电池作为燃料电池。提出几个单电池或少电池燃料电池可以形成燃料电池板或电池阵列，并且可以将几个电池板或电池阵列布置成靠近飞机机身的内部并且至少至少一个燃料电池具有指向飞行器外部的室，用于冷凝包含在空气中的水，并且阳极侧具有承载燃烧气体（例如氢气）的室。通过提出的解决方案，可以降低饮用水的储存能力及其质量保证的供应，而且，通过使用燃料电池作为虚拟发电站，发动机发电机，辅助动力装置（APU）的能源需求）或冲压空气涡轮机（RAT）。

10. 发明申请

US20110146040A1 DEVICE AND METHOD FOR PRODUCING A UD LAYER 有权
标题翻译：用于生产UD层的装置和方法
公开(公告)号：US20110146040A1
公开(公告)日：2011-06-23
申请号：US12951623
申请日：2010-11-22
申请人： Hans-Juergen HEINRICH , Frank VETTERMANN , Astrid KIRCHBERG , Alexander WEGNER , Dietmar REUCHSEL
发明人： Hans-Juergen HEINRICH , Frank VETTERMANN , Astrid KIRCHBERG , Alexander WEGNER , Dietmar REUCHSEL
IPC分类号： D01D11/02
CPC分类号： D04H3/04 , D02J1/18 , D04H3/002
摘要： Method and device for producing a unidirectional (UD) layer with a predetermined layer width from a predetermined number of filament strands. The method includes spreading the filament strands out transversely to a longitudinal direction of the UD layer to form bands that are arranged next to one another. A first width of the bands is greater than a dividing width, which corresponds to the predetermined layer width divided by the predetermined number of filament strands.
摘要翻译：用于生产具有预定数量的丝束的预定层宽度的单向（UD）层的方法和装置。该方法包括将纤维股横向延伸到UD层的纵向方向，以形成彼此相邻布置的带。带的第一宽度大于对应于预定层宽度除以预定数量的细丝线的分割宽度。

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