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1. 发明申请

US20070240636A1 Thermal Vacuum Deposition Method and Device 审中-公开
标题翻译：热真空沉积方法和装置
公开(公告)号：US20070240636A1
公开(公告)日：2007-10-18
申请号：US11568332
申请日：2005-04-16
申请人： Lutz Gottsman , Ulf Seyfert , Bernd-Dieter Wenzel , Reinhard Jaeger
发明人： Lutz Gottsman , Ulf Seyfert , Bernd-Dieter Wenzel , Reinhard Jaeger
IPC分类号： C23C14/00
CPC分类号： C23C14/24 , C23C14/562
摘要： A thermal vacuum deposition device and method in which a band-shaped substrate is continuously conveyed in a vaporization channel that is charged with a vaporous coating material is characterized in that the vaporization channel is sealed by inserting at least one positionally adjustable hollow element into an outer space of the vaporization channel and an inner space of the vaporization channel when a minimum conveying speed is not attained or when the substrate is at a standstill such that the substrate is located in the inner space.
摘要翻译：一种热真空沉积装置和方法，其中带状基底在装有气相涂层材料的蒸发通道中连续输送，其特征在于，通过将至少一个位置调节的中空元件插入到外部空气元件中来密封蒸发通道当没有达到最小输送速度时或当基板处于停止状态使得基板位于内部空间中时，蒸发通道的空间和蒸发通道的内部空间。

2. 发明申请

US20080193636A1 Vaporizing Device and Method for Vaporizing Coating Material 审中-公开
标题翻译：蒸发装置和蒸发涂料的方法
公开(公告)号：US20080193636A1
公开(公告)日：2008-08-14
申请号：US11568329
申请日：2005-04-16
申请人： Lutz Gottsman , Ulf Seyfert , Bernd-Dieter Wenzel , Reinhard Jaeger
发明人： Lutz Gottsman , Ulf Seyfert , Bernd-Dieter Wenzel , Reinhard Jaeger
IPC分类号： C23C16/448 , C23C16/44 , C23C16/455 , C23C16/54
CPC分类号： C23C14/246
摘要： A device for vaporizing coating material is disposed in a vacuum chamber as part of a deposition apparatus; the coating material being arranged in a crucible for vaporization purposes. The vaporizing device has an evaporation chamber that is connected, via a vacuum valve, to a loading chamber which can be evacuated while an evaporator is connected to the evaporation chamber at a vapor discharge end, i.e., the end facing the vacuum chamber, via a first vapor stop valve.
摘要翻译：作为蒸镀装置的一部分，在真空室内设置蒸镀涂料的装置，该涂料被布置在用于蒸发的目的的坩埚中。蒸发装置具有蒸发室，该蒸发室经由真空阀连接到装载室，该装载室可在蒸发器通过蒸气排出端（即，面向真空室的一端）经蒸发器连接到蒸发室第一蒸汽截止阀。

3. 发明申请

US20070218201A1 Continuous Thermal Vacuum Deposition Device and Method 审中-公开
标题翻译：连续热真空沉积装置及方法
公开(公告)号：US20070218201A1
公开(公告)日：2007-09-20
申请号：US11568335
申请日：2005-04-16
申请人： Lutz Gottsman , Ulf Seyfert , Bernd-Dieter Wenzel
发明人： Lutz Gottsman , Ulf Seyfert , Bernd-Dieter Wenzel
IPC分类号： C23C14/56
CPC分类号： C23C14/56 , C23C14/246
摘要： A coating method is provided for thermally vacuum-depositing a continuously conveyed substrate that moves within a deposition channel by vaporizing solid or liquid coating materials and vapor-depositing the vaporized coating material onto the substrate in a deposition device. In order to create a coating conveyed substrate, in which accessibility to the vaporization device is improved while the processes taking place in the deposition chamber and the vaporization device can be controlled independently of each other, at least one evaporation device is located outside the deposition chamber and delivery of steam between the evaporator and the deposition channel is regulated.
摘要翻译：提供了一种涂覆方法，用于通过汽化固体或液体涂料并将蒸发的涂料气相沉积到沉积装置中的基底上，使在沉积通道内移动的连续输送的基材进行真空沉积。为了形成涂料输送基材，其中可以使蒸发装置的可接近程度得到改善，同时可以独立地控制在沉积室和蒸发装置中发生的工艺，至少一个蒸发装置位于沉积室外部并且调节蒸发器和沉积通道之间的蒸汽输送。

4. 发明授权

US5623148A Device for the generation of electron beams 失效
标题翻译：用于产生电子束的装置
公开(公告)号：US5623148A
公开(公告)日：1997-04-22
申请号：US570185
申请日：1995-12-11
申请人： Bernd-Dieter Wenzel , Wolfgang Erbkamm , Olaf Gawer
发明人： Bernd-Dieter Wenzel , Wolfgang Erbkamm , Olaf Gawer
IPC分类号： H01J37/067 , H01J37/075 , H01J37/065
CPC分类号： H01J37/067 , H01J37/075
摘要： The invention which relates to a device for the generating of electron beams with a vacuum chamber, in which a massive cathode (10) is arranged with a wire cathode (14) arranged above and a aperture anode (17) below the massive cathode (10) and whom below the aperture anode (17) focusing and/or deflecting magnet arrangements are provided which direct an electron beam (23) emitted by the massive cathode (10) and accelerated by the aperture anode (17) to a processing location (22), has the basic task to make the power of such devices variable over a large range using simple mechanical means. According to the invention the task is solved by arranging the aperture anode (17) rigidly and the massive cathode (10) and the wire cathode (14) axially movable within the vacuum chamber (1). For the movements of the massive cathode (10) and the wire cathode (14) contact means are provided which follow their movements and lead to the outside of the vacuum chamber (1). In addition for the axial movement of the massive cathode (10) a motion means is provided connected with the cathode (Figure).
摘要翻译：本发明涉及一种用于产生具有真空室的电子束的装置，其中大块阴极（10）布置有布置在其上的线阴极（14）和在大量阴极（10）下方的孔径阳极（17）），并且在孔径阳极（17）下面聚焦和/或偏转磁体布置被提供，其引导由大量阴极（10）发射的电子束（23）并且被孔径阳极（17）加速到处理位置（22））的基本任务是使用简单的机械手段使这种装置的功率在大范围内变化。根据本发明，通过刚性布置孔径阳极17和大量阴极10以及线阴极14在真空室1内可轴向移动来解决该任务。对于大规模阴极（10）和线阴极（14）的移动，提供接触装置，其接触其运动并导致真空室（1）的外部。另外，为了大量阴极（10）的轴向运动，还提供了一个与阴极连接的运动装置（图）。

5. 发明授权

US5882415A Electron-beam continuous process vaporization installation for thermally high stressed substrata 失效
标题翻译：用于热高应力基质的电子束连续工艺蒸发安装
公开(公告)号：US5882415A
公开(公告)日：1999-03-16
申请号：US725814
申请日：1996-10-07
申请人： Karl Heinz Helling , Bernd-Dieter Wenzel
发明人： Karl Heinz Helling , Bernd-Dieter Wenzel
IPC分类号： C23C14/54 , C23C14/56 , C23C16/00 , C23C14/00
CPC分类号： C23C14/568 , C23C14/541
摘要： The invention is an electron-beam vaporization installation for coating structural components made of extreme-heat-resistant alloys (super alloys), especially turbine blades, with so-called thermal barrier coatings. The invention divides the continuous process principle for this coating task with extreme thermal stress for the substrata. The invention divides the thermally high stressed chambers by a partition with a slot. As a result of this the heating chamber and the coating chamber are thermally decoupled from the room for the transport system of the substrata carriage. A further characteristic of the invention is that the carriage for the transport of the substrata through the installation is cooled. For this purpose at the specific work positions the cooling system of the carriage is coupled with the exterior cooling circuits by a leakproof coupling system. The movement of the substrata is done hydraulically and is coupled with the exterior hydraulic circuits in a similar manner as the cooling system. The hydraulic medium is used also for cooling of the drive system. Diffusion pump oil is used as medium in all circuits to further reduce the possibility of affecting the residual gas.
摘要翻译：本发明是用于涂覆由具有所谓的热障涂层的极耐热合金（超级合金）特别是涡轮叶片制成的结构部件的电子束蒸发装置。本发明将该涂层任务的连续工艺原理划分为基体的极端热应力。本发明通过具有槽的隔板来分隔热应力室。因此，加热室和涂覆室与用于基体托架的输送系统的房间热分离。本发明的另一个特征是用于运输基体通过安装的滑架被冷却。为此，在特定的工作位置，滑架的冷却系统通过防漏耦合系统与外部冷却回路耦合。基体的运动是以液压方式完成的，并以与冷却系统相似的方式与外部液压回路连接。液压介质也用于驱动系统的冷却。在所有电路中使用扩散泵油作为介质，以进一步降低影响残留气体的可能性。

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