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    • 1. 发明申请
    • Designing Scan Chains With Specific Parameter Sensitivities to Identify Process Defects
    • 设计具有特定参数敏感度的扫描链来识别过程缺陷
    • US20060026472A1
    • 2006-02-02
    • US10710642
    • 2004-07-27
    • James AdkissonGreg BazanJohn CohnMatthew GradyLeendert HuismanMark JaffePhillip NighLeah PastelThomas SopchakDavid SweenorDavid Vallett
    • James AdkissonGreg BazanJohn CohnMatthew GradyLeendert HuismanMark JaffePhillip NighLeah PastelThomas SopchakDavid SweenorDavid Vallett
    • G06F17/50G01R31/28
    • G06F17/5045G01R31/31855G01R31/318586H01L22/34H01L2924/0002H01L2924/00
    • A method is disclosed for designing scan chains in an integrated circuit chip with specific parameter sensitivities to identify fabrication process defects causing test fails and chip yield loss. The composition of scan paths in the integrated circuit chip is biased to allow them to also function as on-product process monitors. The method adds grouping constraints that bias scan chains to have common latch cell usage where possible, and also biases cell routing to constrain scan chain routing to given restricted metal layers for interconnects. The method assembles a list of latch design parameters which are sensitive to process variation or integrity, and formulates a plan for scan chain design which determines the number and the length of scan chains. A model is formulated of scan chain design based upon current state of yield and process integrity, wherein certain latch designs having dominant sensitivities are chosen for specific ones of the scan chains on the chip. The model is provided as input parameters to a global placement and wiring program used to lay out the scan chains. Test data on the chip is then analyzed to determine and isolate systematic yield problems denoted by attributes of a statistically significant failing population of a specific type of scan chain.
    • 公开了一种用于设计具有特定参数灵敏度的集成电路芯片中的扫描链的方法,以识别导致测试失败和芯片产量损失的制造工艺缺陷。 集成电路芯片中的扫描路径的组成被偏置以允许它们也用作产品过程监视器。 该方法增加了分组约束,使得扫描链偏置以在可能的情况下具有共同的锁存单元使用,并且还偏置小区路由以将扫描链路由限制到用于互连的给定受限金属层。 该方法组合了对过程变化或完整性敏感的锁存器设计参数列表,并且制定了扫描链设计的计划,该计划决定了扫描链的数量和长度。 基于产量和过程完整性的当前状态来制定扫描链设计的模型,其中为芯片上的特定扫描链选择具有主要灵敏度的某些锁存器设计。 该模型作为输入参数提供给用于布置扫描链的全局放置和布线程序。 然后对芯片上的测试数据进行分析,以确定和分离由特定类型的扫描链的统计学显着失败群体的属性表示的系统产量问题。
    • 10. 发明申请
    • MASKED SIDEWALL IMPLANT FOR IMAGE SENSOR
    • 用于图像传感器的嵌入式平板植入体
    • US20060128126A1
    • 2006-06-15
    • US10905043
    • 2004-12-13
    • James AdkissonMark JaffeArthur JohnsonRobert LeidyJeffrey Maling
    • James AdkissonMark JaffeArthur JohnsonRobert LeidyJeffrey Maling
    • H01L21/425
    • H01L27/14643H01L27/1463H01L27/14687H01L27/14689
    • A novel image sensor structure formed on a substrate of a first conductivity type includes a photosensitive device of a second conductivity type and a surface pinning layer of the first conductivity type. A trench isolation region is formed adjacent to the photosensitive device pinning layer. The structure includes a dopant region comprising material of the first conductivity type formed along a sidewall of the isolation region that is adapted to electrically couple the pinning layer to the substrate. The corresponding method facilitates an angled ion implantation of dopant material in the isolation region sidewall by first fabricating the photoresist layer and reducing its size by removing a corner, or a corner portion thereof, which may block the angled implant material. To facilitate the angled implant to the sidewall edge past resist block masks, two methods are proposed: 1) a spacer type etch of the imaged photoresist; or, 2) a corner sputter process of the imaged photoresist.
    • 形成在第一导电类型的衬底上的新型图像传感器结构包括第二导电类型的光敏器件和第一导电类型的表面钉扎层。 在光敏器件钉扎层附近形成沟槽隔离区域。 该结构包括掺杂区域,该掺杂剂区域包括沿着隔离区域的侧壁形成的第一导电类型的材料,其适于将钉扎层电耦合到衬底。 相应的方法通过首先制造光致抗蚀剂层并且通过去除可能阻挡成角度的植入材料的角部或其角部来减小其尺寸来促进掺杂剂材料在隔离区域侧壁中的成角度的离子注入。 为了促进通过抗蚀剂阻挡掩模的侧壁边缘的成角度注入,提出了两种方法:1)成像光致抗蚀剂的间隔物型蚀刻; 或2)成像光致抗蚀剂的角溅射工艺。