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    • 2. 发明申请
    • PIXEL SENSOR CELL FOR COLLECTING ELECTRONS AND HOLES
    • 用于收集电子和孔的像素传感器单元
    • US20070029581A1
    • 2007-02-08
    • US11161535
    • 2005-08-08
    • James AdkissonAndres BryantJohn Ellis-MonaghanMark JaffeJeffrey JohnsonAlain Loiseau
    • James AdkissonAndres BryantJohn Ellis-MonaghanMark JaffeJeffrey JohnsonAlain Loiseau
    • H01L27/148
    • H01L27/14603H01L27/14609H01L27/14689H01L31/035281
    • The present invention is a pixel sensor cell and method of making the same. The pixel sensor cell approximately doubles the available signal for a given quanta of light. The device of the present invention utilizes the holes produced by impinging photons in a pixel sensor cell circuit. A pixel sensor cell having reduced complexity includes an n-type collection well region formed beneath a surface of a substrate for collecting electrons generated by electromagnetic radiation impinging on the pixel sensor cell and a p-type collection well region formed beneath the surface of the substrate for collecting holes generated by the impinging photons. A circuit structure having a first input is coupled to the n-type collection well region and a second input is coupled to the p-type collection well region, wherein an output signal of the pixel sensor cell is the magnitude of the difference of a signal of the first input and a signal of the second input.
    • 本发明是像素传感器单元及其制造方法。 像素传感器单元对于给定的光量大约使可用信号加倍。 本发明的器件利用通过在像素传感器单元电路中照射光子而产生的空穴。 具有降低的复杂度的像素传感器单元包括形成在基板的表面下面的n型收集阱区域,用于收集由电子辐射照射在像素传感器单元上​​产生的电子以及形成在基板表面下方的p型收集阱区域 用于收集由撞击光子产生的孔。 具有第一输入的电路结构耦合到n型收集阱区域,而第二输入端耦合到p型收集阱区域,其中像素传感器单元的输出信号是信号的差值的大小 的第一输入和第二输入的信号。
    • 7. 发明申请
    • A CMOS IMAGER PHOTODIODE WITH ENHANCED CAPACITANCE
    • 具有增强电容的CMOS成像器光电二极管
    • US20070187734A1
    • 2007-08-16
    • US11276085
    • 2006-02-14
    • James AdkissonJohn Ellis-MonaghanMark JaffeDale PearsonDennis Rogers
    • James AdkissonJohn Ellis-MonaghanMark JaffeDale PearsonDennis Rogers
    • H01L31/062
    • H01L27/14643H01L27/1463H01L27/14689H01L31/035281
    • A pixel sensor cell having a semiconductor substrate having a surface; a photosensitive element formed in a substrate having a non-laterally disposed charge collection region entirely isolated from a physical boundary including the substrate surface. The photosensitive element comprises a trench having sidewalls formed in the substrate of a first conductivity type material; a first doped layer of a second conductivity type material formed adjacent to at least one of the sidewalls; and a second doped layer of the first conductivity type material formed between the first doped layer and the at least one trench sidewall and formed at a surface of the substrate, the second doped layer isolating the first doped layer from the at least one trench sidewall and the substrate surface. In a further embodiment, an additional photosensitive element is provided that includes a laterally disposed charge collection region that contacts the non-laterally disposed charge collection region of the photosensitive element and underlies the doped layer formed at the substrate surface.
    • 一种像素传感器单元,具有具有表面的半导体衬底; 形成在具有与包括基板表面的物理边界完全隔离的非横向布置的电荷收集区域的基板中的感光元件。 感光元件包括具有形成在第一导电类型材料的衬底中的侧壁的沟槽; 与所述侧壁中的至少一个相邻形成的第二导电类型材料的第一掺杂层; 以及形成在所述第一掺杂层和所述至少一个沟槽侧壁之间且形成在所述衬底的表面处的所述第一导电类型材料的第二掺杂层,所述第二掺杂层将所述第一掺杂层与所述至少一个沟槽侧壁隔离, 基材表面。 在另一个实施例中,提供附加的光敏元件,其包括横向设置的电荷收集区域,其接触感光元件的非横向设置的电荷收集区域,并且位于形成在基底表面处的掺杂层的下方。
    • 9. 发明申请
    • RECESSED GATE FOR A CMOS IMAGE SENSOR
    • CMOS图像传感器的接收门
    • US20070184614A1
    • 2007-08-09
    • US11735223
    • 2007-04-13
    • James AdkissonJohn Ellis-MonaghanMark JaffeJerome Lasky
    • James AdkissonJohn Ellis-MonaghanMark JaffeJerome Lasky
    • H01L21/336
    • H01L27/14603H01L27/14601H01L27/14689H01L29/66621
    • A novel CMOS image sensor cell structure and method of manufacture. The imaging sensor comprises a substrate having an upper surface, a gate comprising a dielectric layer formed on the substrate and a gate conductor formed on the gate dielectric layer, a collection well layer of a first conductivity type formed below a surface of the substrate adjacent a first side of the gate conductor, a pinning layer of a second conductivity type formed atop the collection well at the substrate surface, and a diffusion region of a first conductivity type formed adjacent a second side of the gate conductor, the gate conductor forming a channel region between the collection well layer and the diffusion region. A portion of the bottom of the gate conductor is recessed below the surface of the substrate. Preferably, a portion of the gate conductor is recessed at or below a bottom surface of the pinning layer to a depth such that the collection well intersects the channel region thereby eliminating any potential barrier interference caused by the pinning layer.
    • 一种新颖的CMOS图像传感器单元结构及其制造方法。 成像传感器包括具有上表面的基板,包括形成在基板上的电介质层的栅极和形成在栅极电介质层上的栅极导体,形成在基板表面附近的第一导电类型的集合阱层 栅极导体的第一侧,形成在基板表面上的集电阱顶部的第二导电类型的钉扎层,以及邻近栅极导体的第二侧形成的第一导电类型的扩散区域,栅极导体形成沟道 收集阱层和扩散区域之间的区域。 栅极导体的底部的一部分在衬底的表面下方凹进。 优选地,栅极导体的一部分在钉扎层的底表面处或下方凹陷到深度,使得收集阱与沟道区相交,从而消除由钉扎层引起的任何潜在的屏障干扰。
    • 10. 发明申请
    • RECESSED GATE FOR AN IMAGE SENSOR
    • 图像传感器的门
    • US20060124976A1
    • 2006-06-15
    • US10905097
    • 2004-12-15
    • James AdkissonJohn Ellis-MonaghanMark JaffeJerome Lasky
    • James AdkissonJohn Ellis-MonaghanMark JaffeJerome Lasky
    • H01L31/113H01L29/76H01L29/94
    • H01L27/14603H01L27/14601H01L27/14689H01L29/66621
    • A novel image sensor cell structure and method of manufacture. The imaging sensor comprises a substrate, a gate comprising a dielectric layer and gate conductor formed on the dielectric layer, a collection well layer of a first conductivity type formed below a surface of the substrate adjacent a first side of the gate conductor, a pinning layer of a second conductivity type formed atop the collection well at the substrate surface, and a diffusion region of a first conductivity type formed adjacent a second side of the gate conductor, the gate conductor forming a channel region between the collection well layer and the diffusion region. Part of the gate conductor bottom is recessed below the surface of the substrate. Preferably, a portion of the gate conductor is recessed at or below a bottom surface of the pinning layer to a depth such that the collection well intersects the channel region.
    • 一种新颖的图像传感器单元结构及其制造方法。 成像传感器包括基板,包括电介质层和形成在电介质层上的栅极导体的栅极,形成在与栅极导体的第一侧相邻的基板的表面下面的第一导电类型的收集阱层,钉扎层 在基板表面上形成在集合阱顶部的第二导电类型的第一导电类型的扩散区和在栅极导体的第二侧附近形成的第一导电类型的扩散区,栅极导体在集电阱层和扩散区之间形成沟道区 。 栅极导体底部的一部分凹陷在基板的表面下方。 优选地,栅极导体的一部分在钉扎层的底表面处或下方凹陷到使得收集阱与沟道区相交的深度。