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    • 3. 发明授权
    • Achromatic mass separator
    • 消色差分离器
    • US08049180B2
    • 2011-11-01
    • US11925598
    • 2007-10-26
    • Juergen FrosienHelmut Banzhof
    • Juergen FrosienHelmut Banzhof
    • B01D59/44
    • H01J49/288H01J37/05H01J37/08H01J37/28H01J2237/057H01J2237/0805H01J2237/3174H01J2237/31749
    • An ion beam device is described. The ion beam device includes an ion beam source for generating an ion beam, the ion beam being emitted along a first axis, an aperture unit adapted to shape the ion beam, and an achromatic deflection unit adapted to deflect ions of the ion beam having a predetermined mass by a deflecting angle. The achromatic deflection unit includes: an electric field generating component for generating an electric field, and a magnetic field generating component for generating a magnetic field substantially perpendicular to the electric field. The device further includes a mass separation aperture adapted for blocking ions with a mass different from the predetermined mass and for allowing ions having the predetermined mass to trespass the mass separator, and an objective lens having a second optical axis, wherein the second optical axis is inclined with regard to the first axis.
    • 描述了离子束装置。 离子束装置包括用于产生离子束的离子束源,沿着第一轴发射的离子束,适于使离子束成形的孔单元,以及适于使离子束的离子偏转的消色差偏转单元, 预定质量的偏转角。 无彩色偏转单元包括:用于产生电场的电场产生部件和用于产生基本上垂直于电场的磁场的磁场产生部件。 该装置还包括质量分离孔,其适于阻挡具有不同于预定质量的质量的离子,并允许具有预定质量的离子侵入质量分离器,以及具有第二光轴的物镜,其中第二光轴为 相对于第一轴倾斜。