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1. 发明授权

US09153413B2 Multi-beam scanning electron beam device and methods of using the same 有权
标题翻译：多光束扫描电子束装置及其使用方法
公开(公告)号：US09153413B2
公开(公告)日：2015-10-06
申请号：US12528307
申请日：2008-02-22
申请人： Gilad Almogy , Avishai Bartov , Juergen Frosien , Pavel Adamec , Helmut Banzhof
发明人： Gilad Almogy , Avishai Bartov , Juergen Frosien , Pavel Adamec , Helmut Banzhof
IPC分类号： G21K7/00 , H01J37/05 , H01J37/10 , H01J37/147 , H01J37/28
CPC分类号： H01J37/05 , H01J37/10 , H01J37/147 , H01J37/28 , H01J2237/0635 , H01J2237/1508 , H01J2237/2449 , H01J2237/2817
摘要： A multi-beam scanning electron beam device (100) is described. The multi-bea scanning electron beam device having a column, includes a multi-beam emitter (110) for emitting a plurality of electron beams (12,13,14), at least one common electron beam optical element (130) having a common opening for at least two of the plurality of electron beams and being adapted for commonly influencing at least two of the plurality of electron beams, at least one individual electron beam optical element (140) for individually influencing the plurality of electron beams, a common objective lens assembly (150) for focusing the plurality of electrons beams having a common excitation for focusing at least two of the plurality of electron beams, and adapted for focusing the plurality of electron beams onto a specimen (20) for generation of a plurality of signal beams (121, 131,141), and a detection assembly (170) for individually detecting each signal beam on a corresponding detection element.
摘要翻译：描述了多光束扫描电子束装置（100）。具有列的多头扫描电子束装置包括用于发射多个电子束（12,13,14）的多光束发射器（110），至少一个共同的电子束光学元件（130）用于多个电子束中的至少两个的开口，并适用于共同影响多个电子束中的至少两个，用于单独影响多个电子束的至少一个单独的电子束光学元件（140），共同的目标透镜组件（150），用于聚焦具有用于聚焦多个电子束中的至少两个的共同激发的多个电子束，并且适于将多个电子束聚焦到样本（20）上以产生多个信号光束（121,131,141）和检测组件（170），用于分别检测相应检测元件上的每个信号光束。

2. 发明申请

US20100320382A1 HIGH THROUGHPUT SEM TOOL 有权
标题翻译：高通量扫描仪刀具
公开(公告)号：US20100320382A1
公开(公告)日：2010-12-23
申请号：US12528307
申请日：2008-02-22
申请人： Gilad Almogy , Avishai Bartov , Jürgen Frosien , Pavel Adamec , Helmut Banzhof
发明人： Gilad Almogy , Avishai Bartov , Jürgen Frosien , Pavel Adamec , Helmut Banzhof
IPC分类号： G01N23/00 , H01J37/147
CPC分类号： H01J37/05 , H01J37/10 , H01J37/147 , H01J37/28 , H01J2237/0635 , H01J2237/1508 , H01J2237/2449 , H01J2237/2817
摘要： A multi-beam scanning electron beam device (100) is described. The multi-bea scanning electron beam device having a column, includes a multi-beam emitter (110) for emitting a plurality of electron beams (12,13,14), at least one common electron beam optical element (130) having a common opening for at least two of the plurality of electron beams and being adapted for commonly influencing at least two of the plurality of electron beams, at least one individual electron beam optical element (140) for individually influencing the plurality of electron beams, a common objective lens assembly (150) for focusing the plurality of electrons beams having a common excitation for focusing at least two of the plurality of electron beams, and adapted for focusing the plurality of electron beams onto a specimen (20) for generation of a plurality of signal beams (121, 131,141), and a detection assembly (170) for individually detecting each signal beam on a corresponding detection element.
摘要翻译：描述了多光束扫描电子束装置（100）。具有列的多头扫描电子束装置包括用于发射多个电子束（12,13,14）的多光束发射器（110），至少一个共同的电子束光学元件（130）用于多个电子束中的至少两个的开口，并适用于共同影响多个电子束中的至少两个，用于单独影响多个电子束的至少一个单独的电子束光学元件（140），共同的目标透镜组件（150），用于聚焦具有用于聚焦多个电子束中的至少两个的共同激发的多个电子束，并且适于将多个电子束聚焦到样本（20）上以产生多个信号光束（121,131,141）和检测组件（170），用于分别检测相应检测元件上的每个信号光束。

3. 发明申请

US20110163229A1 HIGH THROUGHPUT SEM TOOL 审中-公开
标题翻译：高通量扫描仪刀具
公开(公告)号：US20110163229A1
公开(公告)日：2011-07-07
申请号：US12528306
申请日：2008-02-22
申请人： Juergen Frosien , Helmut Banzhof , Pavel Adamec
发明人： Juergen Frosien , Helmut Banzhof , Pavel Adamec
IPC分类号： G01N23/225 , G01N23/227 , G01N23/22 , G01N23/203 , H01J1/50
CPC分类号： H01J37/05 , H01J37/10 , H01J37/147 , H01J37/28 , H01J2237/0635 , H01J2237/1508 , H01J2237/2449 , H01J2237/2817
摘要： A scanning charged particle beam device (100) is described. The scanning charged particle beam device includes a beam emitter (102) for emitting a primary electron beam, a first scan stage for scanning the beam over a specimen, an achromatic beam separator (130) adapted for separating a signal electron beam from the primary electron beam, and a detection unit (172,174,178) for detecting signal electrons.
摘要翻译：描述扫描带电粒子束装置（100）。扫描带电粒子束装置包括用于发射一次电子束的射束发射器（102），用于扫描试样上的束的第一扫描级，适于从一次电子分离信号电子束的消色束分离器（130）以及用于检测信号电子的检测单元（172,174,178）。

4. 发明申请

US20080191134A1 CHARGED PARTICLE DETECTOR ASSEMBLY, CHARGED PARTICLE BEAM APPARATUS AND METHOD FOR GENERATING AN IMAGE 有权
标题翻译：充电颗粒检测器组件，充电颗粒光束装置和用于产生图像的方法
公开(公告)号：US20080191134A1
公开(公告)日：2008-08-14
申请号：US11923421
申请日：2007-10-24
申请人： Gilad Almogy , Dror Shemesh , Pavel Adamec
发明人： Gilad Almogy , Dror Shemesh , Pavel Adamec
IPC分类号： G01N23/00 , G01T1/00
CPC分类号： H01J37/244 , H01J2237/2443 , H01J2237/24455 , H01J2237/2446 , H01J2237/24465 , H01J2237/2802 , H01J2237/2804
摘要： A charged particle detector assembly comprises a particle detector, which has at least one particle sensitive region for detecting at least a portion of the spatial distribution of charged particles and for generating a two-dimensional optical signal which correlates to the detected spatial distribution. Further, an image conduit has an input coupled to the particle sensitive region of the particle detector for transmitting the two-dimensional optical signal to at least one optical detector. Further, a selecting means is adapted for selecting at least a portion of the two-dimensional optical signal.
摘要翻译：带电粒子检测器组件包括粒子检测器，该粒子检测器具有至少一个用于检测带电粒子的空间分布的至少一部分的粒子敏感区域，并用于产生与检测到的空间分布相关的二维光信号。此外，图像导管具有耦合到粒子检测器的粒子敏感区域的输入端，用于将二维光信号传输到至少一个光学检测器。此外，选择装置适于选择二维光信号的至少一部分。

5. 发明授权

US07842930B2 Charged particle detector assembly, charged particle beam apparatus and method for generating an image 有权
标题翻译：带电粒子检测器组件，带电粒子束装置和产生图像的方法
公开(公告)号：US07842930B2
公开(公告)日：2010-11-30
申请号：US11923421
申请日：2007-10-24
申请人： Gilad Almogy , Dror Shemesh , Pavel Adamec
发明人： Gilad Almogy , Dror Shemesh , Pavel Adamec
IPC分类号： H01J37/28
CPC分类号： H01J37/244 , H01J2237/2443 , H01J2237/24455 , H01J2237/2446 , H01J2237/24465 , H01J2237/2802 , H01J2237/2804
摘要： A charged particle detector assembly comprises a particle detector, which has at least one particle sensitive region for detecting at least a portion of the spatial distribution of charged particles and for generating a two-dimensional optical signal which correlates to the detected spatial distribution. Further, an image conduit has an input coupled to the particle sensitive region of the particle detector for transmitting the two-dimensional optical signal to at least one optical detector. Further, a selecting means is adapted for selecting at least a portion of the two-dimensional optical signal.
摘要翻译：带电粒子检测器组件包括粒子检测器，该粒子检测器具有至少一个用于检测带电粒子的空间分布的至少一部分的粒子敏感区域，并用于产生与检测到的空间分布相关的二维光信号。此外，图像导管具有耦合到粒子检测器的粒子敏感区域的输入端，用于将二维光信号传输到至少一个光学检测器。此外，选择装置适于选择二维光信号的至少一部分。

6. 发明授权

US08164067B2 Arrangement and method for the contrast improvement in a charged particle beam device for inspecting a specimen 有权
标题翻译：用于检查样本的带电粒子束装置的对比度改善的布置和方法
公开(公告)号：US08164067B2
公开(公告)日：2012-04-24
申请号：US12701463
申请日：2010-02-05
申请人： Pavel Adamec , Helmut Banzhof , Ivo Liska
发明人： Pavel Adamec , Helmut Banzhof , Ivo Liska
IPC分类号： G01N23/22 , G01N23/00
CPC分类号： H01J37/244 , H01J37/28 , H01J2237/2446
摘要： It is provided a charged particle beam device for inspecting a specimen, comprising a charged particle beam source adapted to generate a primary charged particle beam; an objective lens device adapted to direct the primary charged particle beam onto the specimen; and a detector device comprising one or more charged particle detectors adapted to detect a secondary charged particle beam generated by the primary charged particle beam at the specimen and passing through the objective lens device, the secondary charged particle beam comprising a first group of secondary charged particles starting from the specimen with high starting angles and a second group of secondary charged particles starting from the specimen with low starting angles; wherein at least one of the charged particle detectors is adapted to detect depending on the starting angles one group of the first and the second groups of secondary charged particles.
摘要翻译：提供了一种用于检查样本的带电粒子束装置，包括适于产生初级带电粒子束的带电粒子束源; 适于将初级带电粒子束引导到样本上的物镜装置; 以及检测器装置，其包括一个或多个带电粒子检测器，其适于检测在所述样本处由所述初级带电粒子束产生的并通过所述物镜装置的次级带电粒子束，所述次级带电粒子束包括第一组次级带电粒子从具有较高起始角度的样品开始，第二组二次带电粒子从起始角低的样品开始; 其中所述带电粒子检测器中的至少一个适于根据起始角度检测一组第一和第二组次级带电粒子。

7. 发明授权

US07282711B2 Multiple electron beam device 有权
标题翻译：多电子束装置
公开(公告)号：US07282711B2
公开(公告)日：2007-10-16
申请号：US10491939
申请日：2002-10-04
申请人： Dieter Winkler , Pavel Adamec , Achim Göhl , Helmut Banzhof
发明人： Dieter Winkler , Pavel Adamec , Achim Göhl , Helmut Banzhof
IPC分类号： H01J37/21
CPC分类号： H01J37/28 , B82Y10/00 , B82Y40/00 , H01J37/21 , H01J37/304 , H01J37/3174 , H01J2237/216 , H01J2237/2446 , H01J2237/2826 , H01J2237/30433 , H01J2237/3045
摘要： The invention provides electron multiple beam devices (1) for probing or structuring a non-transparent specimen (20) with primary electron beams (14) with an array of electron beam sources (3) to generate multiple primary electron beams (14), an electron sensor (12) with electron sensor segments (12a) to detect electrons of the primary electron beams (14) and at least one anode (7) to direct the primary electron beams (14) towards the electron sensor (12). The electron sensor (12) serves to inspect the primary electron beams (14), calibrate the positions of the primary electron beams (14) and possibly adjust final focus length (13) and currents of the primary electron beams before or after a probing or structuring the upper surface (20a) of a non-transparent specimens (20). Further, methods to inspect primary electron beams (14), to adjust final focus lengths (13) and to calibrate the multiple electron beam device (1) are provided.
摘要翻译：本发明提供了用于用具有电子束源阵列（3）的一次电子束（14）探测或构造非透明样品（20）以产生多个一次电子束（14）的电子多光束装置（1），电子传感器（12），其具有用于检测一次电子束（14）的电子和至少一个阳极（7）的电子传感器段（12a），以将一次电子束（14）引向电子传感器（12）。电子传感器（12）用于检查一次电子束（14），校准一次电子束（14）的位置，并可能在探测之前或之后校准一次电子束的最终聚焦长度（13）和电流构造不透明样品（20）的上表面（20a）。此外，提供了检查一次电子束（14），调整最终聚焦长度（13）和校准多个电子束装置（1）的方法。

8. 发明授权

US07919749B2 Energy filter for cold field emission electron beam apparatus 有权
标题翻译：用于冷场发射电子束装置的能量滤波器
公开(公告)号：US07919749B2
公开(公告)日：2011-04-05
申请号：US12234453
申请日：2008-09-19
申请人： Fang Zhou , Juergen Frosien , Pavel Adamec
发明人： Fang Zhou , Juergen Frosien , Pavel Adamec
IPC分类号： H01J37/244
CPC分类号： H01J37/05 , H01J37/073 , H01J37/153 , H01J2237/057 , H01J2237/06341 , H01J2237/1207 , H01J2237/1534 , H01J2237/28
摘要： An electron beam apparatus and a method for providing an energy-filtered primary electron beam are described. Therein, a primary electron beam having an asymmetric first energy distribution is generated by means of an electron source. The primary electron beam is high-pass energy filtered using a retarding lens.
摘要翻译：描述了一种用于提供能量过滤的一次电子束的电子束装置和方法。其中，通过电子源产生具有不对称的第一能量分布的一次电子束。一次电子束是使用延迟透镜进行高通能量滤波。

9. 发明授权

US08878148B2 Method and apparatus of pretreatment of an electron gun chamber 有权
标题翻译：电子枪室预处理方法及装置
公开(公告)号：US08878148B2
公开(公告)日：2014-11-04
申请号：US12888978
申请日：2010-09-23
申请人： Pavel Adamec , Ivo Li{hacek over (s)}ka , Gennadij Gluchman , Milan Snabl
发明人： Pavel Adamec , Ivo Li{hacek over (s)}ka , Gennadij Gluchman , Milan Snabl
IPC分类号： G21K5/00 , H01J37/06
CPC分类号： H01J37/06 , H01J2237/022 , H01J2237/06316 , H01J2237/06341
摘要： A method of pre-treating an ultra high vacuum charged particle gun chamber by ion stimulated desorption is provided. The method includes generating a plasma for providing a plasma ion source, and applying a negative potential to at least one surface in the gun chamber, wherein the negative potential is adapted for extracting an ion flux from the plasma ion source to the at least one surface for desorbing contamination particles from the at least one surface by the ion flux impinging on the at least one surface.
摘要翻译：提供了一种通过离子刺激解吸预处理超高真空带电粒子枪室的方法。该方法包括产生用于提供等离子体离子源的等离子体，以及向枪室中的至少一个表面施加负电位，其中负电位适于将离子通量从等离子体离子源提取到至少一个表面用于通过撞击在至少一个表面上的离子通量从至少一个表面解吸污染颗粒。

10. 发明授权

US07872239B2 Electrostatic lens assembly 有权
标题翻译：静电透镜组件
公开(公告)号：US07872239B2
公开(公告)日：2011-01-18
申请号：US12181171
申请日：2008-07-28
申请人： Pavel Adamec , Carlo Salvesen , Ivo Liska
发明人： Pavel Adamec , Carlo Salvesen , Ivo Liska
IPC分类号： H01J37/28 , H01J37/244 , G01R31/305
CPC分类号： H01J37/12 , H01J37/145 , H01J2237/032 , H01J2237/038 , H01J2237/121 , H01J2237/1405 , H01J2237/28
摘要： A lens assembly having an electrostatic lens component for a charged particle beam system is provided. The assembly includes: a first electrode having a conically shaped portion, a second electrode having a conically shaped portion, and a first insulator having a conically shaped portion, wherein the first insulator comprises two extending portions towards each of its ends, and wherein the two extending portions are formed to generate a gap between the insulator and each of the adjacent electrodes.
摘要翻译：提供一种具有用于带电粒子束系统的静电透镜部件的透镜组件。组件包括：具有锥形部分的第一电极，具有锥形部分的第二电极和具有锥形部分的第一绝缘体，其中第一绝缘体包括朝向其每个端部的两个延伸部分，并且其中两个形成延伸部分以在绝缘体和每个相邻电极之间产生间隙。

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