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1. 发明申请

US20070085033A1 Electron beam column for writing shaped electron beams 有权
标题翻译：用于写入成形电子束的电子束柱
公开(公告)号：US20070085033A1
公开(公告)日：2007-04-19
申请号：US11243363
申请日：2005-10-03
申请人： Benyamin Buller , William DeVore , Juergen Frosien , Xinrong Jiang , Richard Lozes , Henry Pearce-Percy , Dieter Winkler , Steven Coyle , Helmut Banzhof
发明人： Benyamin Buller , William DeVore , Juergen Frosien , Xinrong Jiang , Richard Lozes , Henry Pearce-Percy , Dieter Winkler , Steven Coyle , Helmut Banzhof
IPC分类号： G21G5/00
CPC分类号： H01J37/3174 , B82Y10/00 , B82Y40/00 , H01J2237/31754
摘要： An electron beam column comprises a thermal field emission electron source to generate an electron beam, an electron beam blanker, a beam shaping module, and electron beam optics comprising a plurality of electron beam lenses. In one version, the optical parameters of the electron beam blanker, beam shaping module, and electron beam optics are set to achieve an acceptance semi-angle β of from about ¼ to about 3 mrads, where the acceptance semi-angle β is the half the angle subtended by the electron beam at the writing plane. The beam-shaping module can also operate as a single lens using upper and lower projection lenses. A multifunction module for an electron beam column is also described.
摘要翻译：电子束柱包括产生电子束的热场发射电子源，电子束消除器，光束整形模块和包括多个电子束透镜的电子束光学器件。在一个版本中，电子束消隐器，光束整形模块和电子束光学器件的光学参数被设置为实现约¼至约3mrads的接受半角β，其中接受半角β是半在写平面处电子束对着的角度。光束成形模块也可以使用上下投影透镜作为单个透镜进行操作。还描述了用于电子束柱的多功能模块。

2. 发明申请

US20070057617A1 Electron beam source for use in electron gun 有权
标题翻译：用于电子枪的电子束源
公开(公告)号：US20070057617A1
公开(公告)日：2007-03-15
申请号：US11286802
申请日：2005-11-22
申请人： Steven Coyle , Michael Scheinfein , William Devore
发明人： Steven Coyle , Michael Scheinfein , William Devore
IPC分类号： H01J29/46 , H01J29/50
CPC分类号： H01J37/065 , H01J37/143 , H01J2237/06316 , H01J2237/06341
摘要： An electron beam source for use in an electron gun. The electron beam source includes an emitter terminating in a tip. The emitter is configured to generate an electron beam. The electron beam source further includes a suppressor electrode laterally surrounding the emitter such that the tip of the emitter protrudes through the suppressor electrode and an extractor electrode disposed adjacent the tip of the emitter. The extractor electrode comprises a magnetic disk whose magnetic field is aligned with an axis of the electron beam.
摘要翻译：一种用于电子枪的电子束源。电子束源包括终端在尖端中的发射器。发射极被配置为产生电子束。电子束源还包括横向围绕发射器的抑制电极，使得发射极的尖端突出通过抑制电极和与发射极的顶端相邻设置的提取电极。提取器电极包括其磁场与电子束的轴线对齐的磁盘。

3. 发明授权

US06399934B1 Optical coupling to gated photocathodes 失效
标题翻译：光耦合到门控光电阴极
公开(公告)号：US06399934B1
公开(公告)日：2002-06-04
申请号：US09642525
申请日：2000-08-18
申请人： Jeffrey S. Sullivan , Steven Coyle , Andres Fernandez , Marian Mankos
发明人： Jeffrey S. Sullivan , Steven Coyle , Andres Fernandez , Marian Mankos
IPC分类号： H01J4014
CPC分类号： H01J3/024 , H01J37/073
摘要： An electron source is disclosed in which control signals having transition times less than about 10 nanoseconds and electrically isolated from a gated photocathode control an electron beam supplied by the gated photocathode. In one embodiment, the electron source includes a transmissive substrate, a photoemitter on the substrate, a gate insulator on the photoemitter, a gate electrode on the gate insulator, a housing enclosing the photoemitter and the gate electrode, a light source located outside the housing, and a detector located in the housing to receive light from the light source. The detector is electrically coupled to control a voltage applied to one of the gate electrode or the photoemitter.
摘要翻译：公开了一种电子源，其中具有小于约10纳秒的转换时间和与门控光电阴极电隔离的控制信号控制由门控光电阴极提供的电子束。在一个实施例中，电子源包括透射衬底，衬底上的光发射器，光发射器上的栅极绝缘体，栅极绝缘体上的栅极电极，封装光电发生器和栅电极的壳体，位于壳体外部的光源以及位于壳体中的用于接收来自光源的光的检测器。检测器电耦合以控制施加到栅极电极或光电发射器之一的电压。

4. 发明申请

US20060055321A1 Hetero-junction electron emitter with group III nitride and activated alkali halide 失效
标题翻译：具有III族氮化物和活性碱卤化物的异质结电子发射体
公开(公告)号：US20060055321A1
公开(公告)日：2006-03-16
申请号：US11090094
申请日：2005-03-25
申请人： Juan Maldonado , Francisco Machuca , Steven Coyle
发明人： Juan Maldonado , Francisco Machuca , Steven Coyle
IPC分类号： H01J31/50
CPC分类号： H01J1/34 , B82Y10/00 , B82Y40/00 , H01J3/021 , H01J9/12 , H01J37/073 , H01J37/3177 , H01J2237/06333 , H01J2237/31762 , H01J2237/31774 , H01J2237/31779
摘要： A photocathode is capable of generating an electron beam from incident light. The photocathode comprises a light permeable support having a light receiving surface and an opposing surface. A Group III nitride layer is provided on the opposing surface of the support. The Group III nitride layer comprises at least one Group III element and nitrogen. An alkali halide layer is provided on the Group III nitride layer. The alkali halide can be a cesium halide, such as cesium bromide or iodide.
摘要翻译：光电阴极能够从入射光产生电子束。光电阴极包括具有光接收表面和相对表面的透光性支撑体。在载体的相对表面上设置III族氮化物层。 III族氮化物层包含至少一种III族元素和氮。在III族氮化物层上设置碱金属卤化物层。碱金属卤化物可以是卤化铯，如溴化铯或碘化物。

5. 发明申请

US20050264148A1 Multiple electron beam systems 失效
标题翻译：多电子束系统
公开(公告)号：US20050264148A1
公开(公告)日：2005-12-01
申请号：US10856111
申请日：2004-05-28
申请人： Juan Maldonado , Steven Coyle
发明人： Juan Maldonado , Steven Coyle
IPC分类号： H01J37/073 , H01J43/00 , H01J43/04
CPC分类号： H01J37/073 , H01J2237/06333 , H01J2237/31774
摘要： A multiple electron beam source comprises a photon source to generate a photon beam, a lens to focus the photon beam, a photocathode having a photon receiving surface and an electron emitting surface, and an array of electron transmission gates spaced apart from the electron emitting surface of the photocathode by a distance dg. Each electron transmission gate comprises a membrane; an anode on a first surface of the membrane; an insulator on a second surface of the membrane; an aperture through the anode, insulator and membrane; and a gate electrode on the insulator. The gate electrode is positioned about the aperture and capable of receiving a gate control voltage that controls the transmission of electrons through that electron transmission gate. In one version, the multiple electron beam source comprises a photocathode stage assembly to move the photocathode relative to the array of electron transmission gates. In one version, the multiple electron beam source also comprises a plasmon-generating photon transmission plate comprising an array of photon transmission apertures and exterior surfaces capable of supporting plasmons.
摘要翻译：多电子束源包括产生光子束的光子源，聚焦光子束的透镜，具有光子接收表面和电子发射表面的光电阴极以及与电子发射表面间隔开的阵列的电子传输门的光电阴极延伸一段距离d 。每个电子传输门包括膜; 在膜的第一表面上的阳极; 在膜的第二表面上的绝缘体; 通过阳极，绝缘体和膜的孔; 和绝缘体上的栅电极。栅电极围绕孔定位并且能够接收控制通过该电子传输门的电子传输的栅极控制电压。在一个版本中，多电子束源包括相对于电子传输门阵列移动光电阴极的光电阴极级组件。在一个版本中，多电子束源还包括等离子体发生光子传输板，其包括光子传输孔阵列和能够支撑等离子体激元的外表面。

6. 发明授权

US06847164B2 Current-stabilizing illumination of photocathode electron beam source 失效
标题翻译：光电阴极电子束源的电流稳定照明
公开(公告)号：US06847164B2
公开(公告)日：2005-01-25
申请号：US10316970
申请日：2002-12-10
申请人： Gordon Janaway , Steven Coyle
发明人： Gordon Janaway , Steven Coyle
IPC分类号： H01J37/073 , H01J40/06
CPC分类号： H01J37/073 , H01J2237/2817
摘要： An electron beam source has a photocathode with a photoemitter material having a work function, and with a beam receiving portion and an electron emitting portion. A first light source directs a first light beam onto the beam receiving portion of the photocathode to generate an electron beam from the electron emitting portion. The first light beam has a wavelength λ1 such that hc/λ1 is at least about the work function of the photoemitter material, where ‘h’ is Planck's constant and ‘c’ is the speed of light. A second light source directs a second light beam onto the beam receiving portion of the photocathode, such as onto the beam receiving portion, to stabilize the electron beam. The second light beam having a wavelength λ2 such that hc/λ2 is less than about the work function of the photoemitter material.
摘要翻译：电子束源具有具有功函数的光发射体材料的光电阴极和具有光束接收部分和电子发射部分的光电阴极。第一光源将第一光束引导到光电阴极的光束接收部分上，以从电子发射部分产生电子束。第一光束具有波长λ1，使得hc /λ1至少约为光电探测器材料的功函数，其中“h”为普朗克常数，“c”为光速。第二光源将第二光束引导到光电阴极的光束接收部分，例如到光束接收部分上，以稳定电子束。第二光束具有波长λ2，使得hc /λ2小于光发射器材料的功函数。

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