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1. 发明专利

JP2004119417A Rotary silicon wafer cleaning equipment 有权
公开(公告)号：JP2004119417A
公开(公告)日：2004-04-15
申请号：JP2002276818
申请日：2002-09-24
申请人： Fujikin Inc , Tadahiro Omi , Pre-Tech Co Ltd , 大見忠弘 , 株式会社フジキン , 株式会社プレテック
发明人： OMI TADAHIRO , SHIRAI YASUYUKI , FUJITA TAKUMI , MINAMI YUKIO , IKEDA SHINICHI , MORIMOTO AKIHIRO , KAWADA KOJI
IPC分类号： H01L21/304 , F26B17/24 , F26B17/30 , H01L20060101 , H01L21/00 , H01L21/02 , H01L21/30 , H01L21/302
CPC分类号： H01L21/67034 , H01L21/02052
摘要： PROBLEM TO BE SOLVED: To enhance stability of a silicon wafer furthermore by performing more complete hydrogen termination of the silicon wafer cleaned with chemical or pure water.
SOLUTION: The rotary silicon wafer cleaning equipment comprising a unit 3 for supporting/rotary driving a silicon wafer encased in a case body 2 and cleaning a silicon wafer with pure water following to chemical is further provided with a silicon wafer dryer comprising a panel 5 for supplying mixture gas of hydrogen gas and inert gas, a mixed gas supply pipe A having one end coupled with the gas mixer of the gas supply panel, a unit B for heating the mixture gas, and a unit for forming hydrogen radical at a part touching the heated high temperature mixture gas. Outer surface of the silicon wafer is dried and subjected to hydrogen termination by jetting mixture gas containing hydrogen radicals formed by the hydrogen radical forming unit onto the cleaned silicon wafer under rotation. High-degree hydrogen termination is thereby ensured and the outer surface of the Si wafer is sustained in a stable state over a long term.
COPYRIGHT: (C)2004,JPO

2. 发明专利

JP2004136163A Method of forming platinum coating catalyst layer of reaction furnace for producing moisture 有权
公开(公告)号：JP2004136163A
公开(公告)日：2004-05-13
申请号：JP2002301423
申请日：2002-10-16
申请人： Fujikin Inc , Tadahiro Omi , 大見忠弘 , 株式会社フジキン
发明人： OMI TADAHIRO , IKEDA SHINICHI , MORIMOTO AKIHIRO , KITANO MASASHI , MINAMI YUKIO , KAWADA KOJI
IPC分类号： B01J21/04 , B01J23/42 , B01J32/00 , B01J37/02 , B01J37/08 , B01J37/10 , C01B5/00
CPC分类号： B01J12/007 , B01J21/04 , B01J23/42 , B01J37/0225 , B01J37/0226 , B01J37/08 , C01B5/00
摘要： PROBLEM TO BE SOLVED: To make inexpensively and simply formable a barrier film, which is uniform in thickness, enhanced in the fixing force to a matrix and high in the protecting function of a platinum film, to the inner wall surface of the reaction space of a reaction furnace for producing moisture.
SOLUTION: In the reaction furnace for producing moisture by reacting hydrogen and oxygen without causing high temperature combustion, the reaction furnace for producing moisture is formed using an aluminum-containing alloy and the selective oxidation of aluminum is applied to the inner wall surface of the reaction furnace for producing moisture to form the barrier film based on aluminum oxide (Al
2 O
3 ). Thereafter, the platinum film is laminated and fixed to the surface of the barrier film to form a platinum coating catalyst layer.
COPYRIGHT: (C)2004,JPO

3. 发明专利

JP2005207483A Vacuum heat insulation valve 有权
标题翻译：真空热绝缘阀
公开(公告)号：JP2005207483A
公开(公告)日：2005-08-04
申请号：JP2004014032
申请日：2004-01-22
申请人： Fujikin Inc , Tadahiro Omi , 忠弘大見 , 株式会社フジキン
发明人： OMI TADAHIRO , MINAMI YUKIO , TSUBOTA KENJI , SHINOHARA TSUTOMU , YAMAJI MICHIO , IKEDA SHINICHI , MORIMOTO AKIHIRO , KAWADA KOJI , NARAI TOSHIRO
IPC分类号： F16L59/06 , F16K27/00 , F16K51/00 , F16K51/02
CPC分类号： F16K51/02 , Y10T137/6606 , Y10T137/7043 , Y10T137/7062
摘要： PROBLEM TO BE SOLVED: To provide a vacuum heat insulation valve serviceable in a high-temperature condition in a gas supply system and an exhaust system and capable of being embodied in a small size and a compact construction to a great extent owing to an excellent heat insulating performance. SOLUTION: The vacuum heat insulation valve is formed from a valve furnished with a valve body and an actuator and a vacuum heat insulation box to accommodate the valve, wherein the vacuum heat insulation box S is formed from a lower vacuum jacket S 5 in an angular shape with the box S positioned at the side and furnished with a vacuum heat insulation pipe socket J in a cylindrical shape while the over-part is left open and an upper vacuum jacket S 4 in an angular shape to be fitted to the lower vacuum jacket S 5 from above air-tightly while the under-part is left open. COPYRIGHT: (C)2005,JPO&NCIPI
摘要翻译：要解决的问题：提供一种在气体供应系统和排气系统中可在高温条件下使用的真空隔热阀，并且能够在很大程度上体现在小尺寸和紧凑的结构中，这是由于绝热性能极佳。
解决方案：真空隔热阀由配有阀体和致动器的阀形成，以及用于容纳阀的真空隔热箱，其中真空隔热箱S由下部真空套S形成， SB> 5 ，其中盒S位于侧面并且配有真空绝热管插座J为圆柱形，而外部部件保持打开，上真空套S 4 成角度的形状，从而从空气密闭地安装到下部真空套筒S 5 ，同时底部部件打开。版权所有（C）2005，JPO＆NCIPI

4. 发明专利

JP2006027974A Reaction furnace for generating water and water generating and supplying equipment using it 有权
标题翻译：用于生成水和水的产生和供应设备的反应炉
公开(公告)号：JP2006027974A
公开(公告)日：2006-02-02
申请号：JP2004211129
申请日：2004-07-20
申请人： Fujikin Inc , 株式会社フジキン
发明人： NARAI TOSHIRO , KAWADA KOJI , HIRAO YOSHIYUKI , MINAMI YUKIO , MORIMOTO AKIHIRO , IKEDA SHINICHI
IPC分类号： C01B5/00
CPC分类号： B01J12/007 , B01J2219/00078 , B01J2219/00087 , B01J2219/00096 , B01J2219/00135 , C01B5/00 , F28D2021/0029 , F28F3/02 , H01L21/67017
摘要： PROBLEM TO BE SOLVED: To double the amount of the generated water safely with a reaction furnace for generating water having a limited volume capacity by enhancing the heat dissipation characteristics of the reaction furnace body in a reaction furnace for generating water. SOLUTION: The reaction furnace for generating water is comprised of causing the reaction of hydrogen and oxygen under a non-combustion condition by activating the reactivities of hydrogen and oxygen which are supplied into the reaction furnace body by contacting them with a platinum-coated catalyst layer, wherein the cooler is formed by an exit side cooler constructed of a base plate which is fixed on the outer surface of the exit side furnace body material and has an insertion hole drilled in the center thereof for a heater, and of a plurality of heat dissipation members which are erected vertically and in parallel on the part other than the insertion hole for the heater of the base plate, and a part of the heater is inserted through the insertion hole for the heater of the exit side cooler and fixed to the outer surface of the exit side furnace body material. COPYRIGHT: (C)2006,JPO&NCIPI
摘要翻译：要解决的问题：通过在用于产生水的反应炉中提高反应炉体的散热特性，通过用于产生具有有限体积容量的水的反应炉来安全地使产生的水量增加一倍。解决方案：用于产生水的反应炉包括在非燃烧条件下使氢和氧的反应通过活化与反应炉体中的氢和氧的反应性，使其与铂 - 涂布催化剂层，其中，所述冷却器由出口侧冷却器形成，所述出口侧冷却器由基板固定，所述基板固定在所述出口侧炉体材料的外表面上，并且在其中心钻有用于加热器的插入孔，在基板的加热器的插入孔以外的部分上垂直设置的多个散热构件，并且一部分加热器插入通过用于出口侧冷却器的加热器的插入孔并固定到出口侧炉体材料的外表面。版权所有（C）2006，JPO＆NCIPI

5. 发明专利

JP2006297611A Method and apparatus for mutually welding tubular members made of synthetic resin 有权
标题翻译：用于合成树脂的复合焊接管件的方法和装置
公开(公告)号：JP2006297611A
公开(公告)日：2006-11-02
申请号：JP2005118124
申请日：2005-04-15
申请人： Fujikin Inc , 株式会社フジキン
发明人： KAWADA KOJI , MORIMOTO AKIHIRO , UEJI YUTAKA , YASUMOTO TADASHI , HONIDEN AKIO , IKEDA SHINICHI , HATANO MASAYUKI , SAKUYAMA TERUMITSU , NAGANO KAZUHIRO , IWANAGA SHINICHI
IPC分类号： B29C65/78 , B29C65/14
摘要： PROBLEM TO BE SOLVED: To prevent the butt end faces of a tube and a joint from being staggered when the tube made of a synthetic resin and the joint made of a synthetic resin different in characteristics are welded.
SOLUTION: A pair of clamp members 1 and 2 at a welding position are positioned symmetrically about the position of an end face heater 3 present at a heating position. Individual bushings 6 and 7 are attached to the corresponding clamp members 1 and 2 so that the distances X1 and X2 from the end face positions thereof to the end face positions of the clamp members 1 and 2 are different. The distance X2 from the support position of the joint made of the synthetic resin relatively larger in melt flow rate to the butt end face position is made less than the distance X1 from the support position of the tube 7 made of the synthetic resin relatively small in melt flow rate to the butt end face.
COPYRIGHT: (C)2007,JPO&INPIT
摘要翻译：要解决的问题：当由合成树脂制成的管和由特征不同的合成树脂制成的接头被焊接时，防止管和接头的对接端面交错。解决方案：焊接位置处的一对夹紧构件1和2围绕存在于加热位置的端面加热器3的位置对称地定位。单独的衬套6和7附接到相应的夹紧构件1和2，使得从其端面位置到夹紧构件1和2的端面位置的距离X1和X2是不同的。使由合成树脂制成的接头的支撑位置的距离X2相对于对接端面位置的熔体流动相对较大，使其小于距合成树脂制的管7的支撑位置相对较小的距离X1 熔体流向对接端面。版权所有（C）2007，JPO＆INPIT

6. 发明专利

JP2004284048A Method and apparatus for mutually fusion-bonding tubular members made of synthetic resin 有权
公开(公告)号：JP2004284048A
公开(公告)日：2004-10-14
申请号：JP2003075639
申请日：2003-03-19
申请人： Access:Kk , Fujikin Inc , Gns:Kk , 有限会社アクセス , 有限会社ジー・エヌ・エス , 株式会社フジキン
发明人： TAKUBO MICHITAKA , URAKAWA TAKAYUKI , IKEDA SHINICHI , YAMAJI MICHIO , MORIMOTO AKIHIRO , YASUMOTO TADASHI , IDETA EIJI , MOTOIDEN AKIO , KAWADA KOJI
IPC分类号： B29C65/78 , B29L23/00
CPC分类号： B29C65/20 , B29C66/02241 , B29C66/1142 , B29C66/1162 , B29C66/1222 , B29C66/1226 , B29C66/5221 , B29C66/9241 , B29C66/929 , B29C66/944
摘要： PROBLEM TO BE SOLVED: To provide a method for mutually fusion-bonding tubular members made of a synthetic resin, capable of obtaining piping not obstructing the flow of a fluid by reducing the protrusion quantity of the inner surface of a bead part to the utmost noticing the bead part necessarily present in the mutual bonding of tubes made of a synthetic resin, and an apparatus therefor.
SOLUTION: When the end surfaces of first and second tubular members T1 and T2 made of the synthetic resin are mutually butted and fusion-bonded after the end parts of the tubular members T1 and T2 are heated and melted, internal pressure is applied to both tubular member T1 and T2 at the time of butting. Before heating, the inner diameter parts of the butted end parts of both tubular members T1 and T2 are chamfered.
COPYRIGHT: (C)2005,JPO&NCIPI

7. 发明专利

JP2007232666A Method and device for inspecting leakage in pipe line 有权
标题翻译：检测管道泄漏的方法和装置
公开(公告)号：JP2007232666A
公开(公告)日：2007-09-13
申请号：JP2006057327
申请日：2006-03-03
申请人： Fujikin Inc , Ses Co Ltd , エス・イー・エス株式会社 , 株式会社フジキン
发明人： KONO YOSHISUKE , MOTOIDEN AKIO , MORIMOTO AKIHIRO , YASUMOTO TADASHI , KAWADA KOJI , UEJI YUTAKA , IKEDA SHINICHI , HATANO MASAYUKI , KURAMOCHI MICHIO , KINDAI YOSHIYUKI , NAGANO KAZUHIRO , WADA TOSHIAKI
IPC分类号： G01M3/26
CPC分类号： G01M3/2815
摘要： PROBLEM TO BE SOLVED: To easily and quickly detect an inner volume of a pipe line and a leakage amount by a compact inspection device, and to accurately judge quality of an inspection result.
SOLUTION: A fixed flow rate of inspecting gas is supplied from one end side opening of the inspected pipe line brought into a sealed condition, the flow rate and pressure are detected, and a temperature of the inspecting gas supplied into the pipe line is also detected therein, a pressure detection value. A flow rate detection value, and a temperature detection value are inputted into an arithmetic processing unit, a content volume V
L of the pipe line is computed as V
L =supply flow rate Q×pressurized time Δt/pressure increase value ΔP
2 , based on the pressurized time Δt until the pressure increase value ΔP
2 in the pipe line comes to a set value, and the supply flow rate Q in the period, and then the leakage amount Q
L from the pipe line is computed as Q
L =pressure decrease value ΔP
2' ×pipe line content volume V
L /pressure decrease time Δt', based on the pressure decrease value ΔP
2' after the prescribed pressure decrease time Δt' lapses after an inside of the pipe line is pressurized to the set pressure, and the pipe line content volume V
L computed hereinbefore.
COPYRIGHT: (C)2007,JPO&INPIT
摘要翻译：要解决的问题：通过紧凑的检查装置容易且快速地检测管道的内部容积和泄漏量，并且准确地判断检查结果的质量。
解决方案：检查气体的固定流量从被检查管线的一端侧开口处被供给到密封状态，检测流量和压力，并且检测气体的供给管线的温度也检测其中的压力检测值。流量检测值和温度检测值被输入到运算处理单元中，管线的内容体积V L 被计算为V SB =供给流量基于管线中压力增加值ΔP 2 之前的加压时间Δt达到设定值的速率Q×加压时间Δt/压力增加值ΔP 2 并且在该期间内的供给流量Q，然后从管路中泄漏量Q L 计算为Q L =压力降低值ΔP 2' ×管线内容量V L /减压时间Δt'，基于规定的压力下降时间Δt'过去后的压力降低值ΔP 2' 在管线内部被加压到设定压力之后，以及上文计算的管道内容物体积V L 。版权所有（C）2007，JPO＆INPIT

8. 发明专利

JP2012036027A Reaction furnace for moisture generation 有权
标题翻译：水分生成反应炉
公开(公告)号：JP2012036027A
公开(公告)日：2012-02-23
申请号：JP2010175790
申请日：2010-08-04
申请人： Fujikin Inc , Tohoku Univ , 国立大学法人東北大学 , 株式会社フジキン
发明人： OMI TADAHIRO , KAWADA KOJI , IKEDA SHINICHI , MORIMOTO AKIHIRO , MINAMI YUKIO , HIRAO KEISHI , SAKAMOTO SHINJI , KITANO MASASHI
IPC分类号： C01B5/00 , B01J23/63
摘要： PROBLEM TO BE SOLVED: To provide a reaction furnace for moisture generation, which generates moisture with a high purity at a catalyst reaction temperature lower than ignition temperatures of a hydrogen gas and an oxygen gas without burning by supplying and catalytically reacting the hydrogen gas and the oxygen gas into a reaction furnace having a platinum catalyst layer, and which maintains the catalytic performance of the platinum catalyst layer for a long period of time and maintains the adherence to a barrier layer installed in between the platinum catalyst layer and a reaction-furnace base material.SOLUTION: The reaction furnace for moisture generation includes a reaction furnace body having a gas entrance and a moisture exit formed thereon, a barrier layer formed on the internal surface of the reaction furnace body, and a platinum catalyst layer formed on the barrier layer. The barrier layer contains YOwith a content of 90-99.5 wt.% and a metal oxide with a content of 0.5-10 wt.%, the metal oxide being other than YOand having -200 kJ/mol or lower of standard enthalpy change of formation per 1 mol of single bond between a metal atom and an oxygen atom.
摘要翻译：要解决的问题：提供一种用于产生水分的反应炉，其在低于氢气和氧气的点火温度的催化剂反应温度下产生高纯度的水分，而不会通过供应氢气和催化氢反应而燃烧气体和氧气进入具有铂催化剂层的反应炉中，并且长时间保持铂催化剂层的催化性能并保持与安装在铂催化剂层和反应之间的阻挡层的粘附 - 基础材料。解决方案：用于产生水分的反应炉包括：反应炉体，其具有形成在其上的气体入口和湿气出口;形成在反应炉主体的内表面上的阻挡层，以及形成在该阻挡层上的铂催化剂层层。阻挡层含有含量为90-99.5重量％的Y 2 O 3 0.5-10重量％，金属氧化物不同于Y 3 ，并且具有-200kJ / mol以下每1mol金属原子和氧原子之间的单键形成的标准焓变。版权所有（C）2012，JPO＆INPIT

9. 发明专利

JP2010254525A Reaction furnace for moisture generation 有权
标题翻译：水分生成反应炉
公开(公告)号：JP2010254525A
公开(公告)日：2010-11-11
申请号：JP2009107139
申请日：2009-04-24
申请人： Fujikin Inc , Tohoku Univ , 国立大学法人東北大学 , 株式会社フジキン
发明人： OMI TADAHIRO , KAWADA KOJI , IKEDA SHINICHI , MORIMOTO AKIHIRO , MINAMI YUKIO , HIRAO KEISHI , SAKAMOTO SHINJI , KITANO MASASHI
IPC分类号： C01B5/00 , B01J23/42
CPC分类号： B01J23/63 , B01J12/007 , B01J23/42 , B01J35/023 , B01J37/0225 , B01J37/0244 , C01B5/00
摘要： PROBLEM TO BE SOLVED: To provide a reaction furnace which is one for generating high-purity moisture by feeding a hydrogen gas and an oxygen gas into a reaction furnace having a platinum catalyst layer and catalytically reacting them with each other without combustion at a catalytic reaction temperature lower than the point of ignition of the hydrogen gas/oxygen gas mixture, wherein a barrier layer interposed between a base material and the platinum catalyst can keep a high force of adhesion to the platinum catalyst layer for a long time. SOLUTION: The reaction furnace includes a reaction furnace body provided with a gas inlet and a moisture outlet, a Y 2 O 3 barrier layer formed as a film on at least part of the inner wall of the reaction furnace body, and a platinum catalyst layer formed as a film on at least part of the Y 2 O 3 barrier layer. The film thickness of the Y 2 O 3 barrier layer is desirably 50 nm to 5 μm. COPYRIGHT: (C)2011,JPO&INPIT
摘要翻译：要解决的问题：提供一种用于通过将氢气和氧气供给到具有铂催化剂层的反应炉中并且在没有燃烧的情况下彼此催化反应的情况下产生高纯度水分的反应炉催化反应温度低于氢气/氧气混合物的点火点，其中介于基材和铂催化剂之间的阻挡层可以长时间保持对铂催化剂层的高粘附力。解决方案：反应炉包括反应炉体，该反应炉主体设置有气体入口和水分出口，在其上形成为薄膜的Y 2 3 3 阻挡层反应炉体的内壁的至少一部分，以及在至少部分Y 2 SB 3 O 3 SB 3阻挡层上形成为薄膜的铂催化剂层。 Y 2 阻挡层的膜厚度优选为50nm〜5μm。版权所有（C）2011，JPO＆INPIT

10. 发明专利

JP2015007624A 弁の負荷検出装置およびこれを備えた弁装置有权
标题翻译：阀门负载检测装置和阀门包括它
公开(公告)号：JP2015007624A
公开(公告)日：2015-01-15
申请号：JP2014113674
申请日：2014-06-02
申请人：株式会社フジキン , Fujikin Inc
发明人： KAWADA KOJI , DOI RYOSUKE , YASUMOTO TADASHI , NISHINO KOJI , IKEDA NOBUKAZU
IPC分类号： G01L3/14 , F16K37/00 , G01L5/24
摘要：【課題】回転部材の回転方向を含めたトルク検出が可能であり、したがって、回転部材の過剰締付けの検出を確実に行うことができる弁の負荷検出装置およびこれを備えた弁装置を提供する。【解決手段】弁の負荷検出装置1は、弁棒12を回転させるハンドル13を有する手動弁と、ハンドル13の過剰締付けを検出する過剰締付け検出機構とを備えている。手動弁は、弁棒12の軸方向に対して直交する方向に延びる角柱状で長さ方向の中央部が弁棒12に固定された梁部材14を有している。ハンドル13は、梁部材14との間に回転方向の遊びを有しかつ回転させられることで遊びがゼロとなって梁部材14と一体で回転するようになされている。過剰締付け検出機構は、梁部材14の長さ方向の片側の半部の両側面にそれぞれ貼り付けられた歪みゲージ41,42と、歪みゲージ41,42の出力を処理する処理手段とを有している。【選択図】図7
摘要翻译：要解决的问题：提供一种阀检测装置，其能够检测包括旋转构件的旋转方向的扭矩并且可靠地检测到旋转构件的过度紧固以及包括该旋转构件的阀齿轮。解决方案：阀负载检测装置1包括具有用于旋转阀杆12的手柄13的手动阀和用于检测手柄13的过度紧固的过度的紧固检测机构。手动阀包括梁构件14，梁构件14具有沿方向与阀杆12的轴向正交，其长度方向的中心部分固定在阀杆12上。把手13相对于梁构件14沿旋转方向游动，并与梁一体地旋转通过旋转来消除玩家的成员14。过度的紧固检测机构包括粘附在梁构件14的长度方向的一侧的半部的两侧面的应变计41和42，以及处理应变计41和42的输出的处理单元。

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