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    • 1. 发明专利
    • Method for discontinuous type fluid flow rate switch control using pressure type flow rate control device
    • 使用压力类型流量控制装置的不连续流体流量开关控制方法
    • JP2013229052A
    • 2013-11-07
    • JP2013144428
    • 2013-07-10
    • Tohoku Univ国立大学法人東北大学Tokyo Electron Ltd東京エレクトロン株式会社Fujikin Inc株式会社フジキン
    • OMI TADAHIRONISHINO KOJIDOI RYOSUKENAGASE MASAAKISUGITA KATSUYUKIHIRATA KAORUHIROSE TAKASHISHINOHARA TSUTOMUIKEDA SHINICHIYOSHIDA TOSHIHIDETANAKA HISASHI
    • G05D7/00
    • G05D7/0635G01F1/42G01F7/005Y10T137/0379
    • PROBLEM TO BE SOLVED: To maintain accuracy in flow rate control without increasing the number of switching steps in a pressure type flow rate control device such that switching flow rate ranges controls fluid flow rates.SOLUTION: The pressure type flow rate control device has fluid passages as two or more parallel fluid passages, which have orifices different in fluid flow rate property interposed therein, respectively. To control fluid flow rates in a first flow rate range, fluid in the first flow rate range is passed to an orifice in a fluid passage. To control fluid flow rates in the other plural flow rate ranges, fluid in the other respective flow rate ranges is passed to the orifice in the fluid passage to pass fluid in the first flow rate range through and orifices in fluid passages to pass fluid in the other respective flow rate ranges through. The flow rate ranges are set so that: the maximum flow rate of the first flow rate range is lower than the minimum flow rate of any other flow rate range; and the other respective flow rate ranges have different minimum flow rates and different maximum flow rates, respectively. Flow rate ranges included in neither the first flow rate range nor the other flow rate ranges are excluded from objects of flow rate control.
    • 要解决的问题:为了保持流量控制的精度,而不增加压力式流量控制装置中的切换步骤数,使得切换流量范围控制流体流量。解决方案:压力型流量控制装置具有流体通道 作为两个或更多个平行的流体通道,其分别具有插入其中的流体流速特性的孔。 为了在第一流量范围内控制流体流速,第一流量范围内的流体被传递到流体通道中的孔口。 为了控制另外多个流量范围内的流体流量,在另一个流量范围内的流体被传递到流体通道中的孔口,以使第一流量范围内的流体通过流体通道中的孔并使流体在 其他各个流量范围通过。 流量范围设定为:第一流量范围的最大流量比任何其它流量范围的最小流量低; 其他各自的流量范围分别具有不同的最小流量和不同的最大流量。 不包括第一流量范围和其他流量范围内的流量范围都不包括流量控制对象。
    • 2. 发明专利
    • Variable orifice pressure-controlled flow rate controller
    • 可变压力控制流量控制器
    • JP2013228950A
    • 2013-11-07
    • JP2012101662
    • 2012-04-26
    • Fujikin Inc株式会社フジキン
    • DOI RYOSUKENISHINO KOJISAWADA YOHEIIKEDA SHINICHI
    • G05D7/06F16K7/16F16K31/04F16K31/524
    • G05D7/0647F16K7/16F16K31/04F16K31/52491Y10T137/87917
    • PROBLEM TO BE SOLVED: To provide a variable orifice pressure-controlled flow rate controller capable of instantly switching flow rate control ranges by changing orifice aperture of a variable orifice and significantly reducing time required for a controlled flow rate to be established in a low flow rate region.SOLUTION: A variable orifice pressure-controlled flow rate controller includes a pressure control unit 1a and a variable orifice unit 1b, and a flow rate of fluid flowing through an orifice of the variable orifice unit is computed as Q=KP, where Prepresents pressure on the upstream of the orifice and K represents a constant. The orifice comprises a ring-shaped gap between a valve seat and a diaphragm of a direct touch type metal diaphragm valve. A flow rate control range is switched to another range and the flow rate is controlled within a selected flow rate control range by changing a flow rate setting signal Qs to a flow rate arithmetic control section 4a of the pressure control unit and an orifice aperture setting signal Qz to an orifice aperture arithmetic control section 4b of the variable orifice unit.
    • 要解决的问题:提供一种可变孔口压力控制流量控制器,其能够通过改变可变孔口的孔口而立即切换流量控制范围,并显着减少在低流量下建立受控流速所需的时间 区域。解决方案:可变节流孔压力控制流量控制器包括压力控制单元1a和可变孔单元1b,并且计算流过可变孔单元的孔口的流体的流量为Q = KP,其中, 孔口上游的压力和K代表常数。 孔口包括在阀座和直接触摸式金属隔膜阀的隔膜之间的环形间隙。 将流量控制范围切换到另一范围,并且通过将流量设定信号Qs改变为压力控制单元的流量运算控制部4a和孔口设定信号,将流量控制在所选流量控制范围内 Qz到可变孔单元的孔口运算控制部分4b。
    • 3. 发明专利
    • Flow rate measuring device of flow controller for gas supply device and method for measuring flow rate
    • 用于气体供应装置的流量控制器的流量测量装置和用于测量流量的方法
    • JP2012141254A
    • 2012-07-26
    • JP2011000904
    • 2011-01-06
    • Fujikin Inc株式会社フジキン
    • SAWADA YOHEINAGASE MASAAKIIKEDA SHINICHINISHINO KOJIDOI RYOSUKE
    • G01F1/00
    • G01F5/00G01F1/34G01F1/86G01F15/046
    • PROBLEM TO BE SOLVED: To quickly and highly accurately measure the flow rate of a flow controller for gas supply device, and to simplify and miniaturize the structure of the flow rate measuring device for use in a measurement.SOLUTION: The flow rate measuring device includes: a branch line Lb for branchedly and dissociatively connecting an inlet-side end to an upstream part of a shutoff valve Vprovided at an outlet end of a gas supply line L, and connecting the outlet-side end to a gas outflow side; a shutoff valve V provided at the outlet side of the branch line Lb; a pressure detector Pd and a temperature detector Td for detecting a gas pressure and a gas temperature in the upstream side of the shutoff valve V; an arithmetic control device CP in which detecting signals from the pressure detector Pd and the temperature detector Td are input and which calculates the gas flow rate passing through the branch line Lb. The flow rate measuring device is branchedly and dissociatively connected to the upstream part of the shutoff valve Vthat is provided at the outlet end of the gas supply line L of the gas supply device GF.
    • 要解决的问题:为了快速且高精度地测量用于气体供应装置的流量控制器的流量,并且简化和小型化用于测量的流量测量装置的结构。 解决方案:流量测量装置包括:分支管线Lb,用于分支和离解地连接截止阀V 0 的入口侧端部与上游部分 气体供应管线L的出口端,并将出口侧端部连接到气体流出侧; 设置在分支管线Lb的出口侧的截止阀V; 用于检测截流阀V的上游侧的气体压力和气体温度的压力检测器Pd和温度检测器Td; 输入来自压力检测器Pd和温度检测器Td的信号的运算控制装置CP,其计算通过分支管路Lb的气体流量。 流量测量装置分支和离解地连接到设置在气体供应装置的气体供应管线L的出口端处的截止阀V 0 的上游部分 GF。 版权所有(C)2012,JPO&INPIT
    • 4. 发明专利
    • Cam type control valve
    • CAM型控制阀
    • JP2011117473A
    • 2011-06-16
    • JP2009272752
    • 2009-11-30
    • Fujikin Inc株式会社フジキン
    • SAWADA YOHEIDOI RYOSUKENISHINO KOJIIKEDA SHINICHI
    • F16K31/524F16K7/16F16K31/04
    • F16K7/16F16K31/047F16K31/52408
    • PROBLEM TO BE SOLVED: To provide a cam type control valve wherein a regulating screw is easily accessed when regulating the height in the vertical direction of a motor to which the cam is attached. SOLUTION: The cam type control valve consists of a valve casing 4 which contains a fluid duct 2 and valve seat 3, a valve body 5 which comes into contact with and separates from the valve seat 3 and opens/closes the fluid duct 2, a valve rod 6 which presses down the valve body 5 and abuts on the valve seat 3, a cam 7 which acts on and pushes down the valve rod 6, a motor which rotationally drives the cam 7, a motor holder 9 which holds a motor, a support frame 10 which is fixed to the valve casing 4 and vertically movably supports the motor holder 9, an elastic member 11 which biases the motor holder 9 from an upper side part of the support frame 10 and a height-regulating screw 12 which supports the motor holder 9 on the support frame 10 in a suspended manner to adjust the height with respect to the support frame 10 of the motor holder 9 and is screwed in the motor holder 9 while being slidably inserted into the upper side part of the support frame 10. COPYRIGHT: (C)2011,JPO&INPIT
    • 要解决的问题:提供一种凸轮型控制阀,其中当调节安装有凸轮的马达的垂直方向的高度时,调节螺钉容易接近。

      解决方案:凸轮式控制阀由包含流体管道2和阀座3的阀壳体4构成,阀体5与阀座3接触并与阀座3分离并打开/关闭流体管道 如图2所示,将阀体5压下并抵接在阀座3上的阀杆6,作用于阀杆6并推下阀杆6的凸轮7,旋转驱动凸轮7的马达,保持 电动机,支撑框架10,其固定到阀壳体4并且可上下移动地支撑电动机保持器9;弹性部件11,其将电动机保持器9从支撑框架10的上侧部分偏压;高度调节螺钉 12,其以悬挂的方式支撑在支撑框架10上的电动机支架9,以相对于电动机保持器9的支撑框架10调节高度,并且在可滑动地插入到电动机支架9的上侧部分的同时旋入电动机支架9 支持框架10.版权所有(C)2011,JPO&INP 它

    • 5. 发明专利
    • Fluid controller
    • 流体控制器
    • JP2010133436A
    • 2010-06-17
    • JP2008307298
    • 2008-12-02
    • Fujikin Inc株式会社フジキン
    • SAWADA YOHEIIKEDA SHINICHINISHINO KOJIDOI RYOSUKE
    • F16K31/524F16K7/16F16K31/04
    • PROBLEM TO BE SOLVED: To provide a fluid controller which employs a motor and prevents the motor from projecting to a body.
      SOLUTION: A transmission means 10 for converting the rotation of a motor 9 into linear motion to be transmitted to a stem 8 includes a ball bearing 21 fixed to the stem 8 and an eccentric shaft 22 fixed to an output shaft 9a in the motor 9 and formed so as to come into contact with the ball bearing 21 from above. When a radial distance R from an axial core of the output shaft 9a to a contact position of a large ball 25 and an outer peripheral edge of the undersurface 22a of an eccentric shaft 22 is short, the whole of the ball bearing 21 is situated relatively at an upper side. When a radial distance R from the axial core of the output shaft 9a to the outer peripheral edge of the undersurface 22a of the eccentric shaft 22 becomes long, the whole of the ball bearing 21 is moved downward by a distance D as shown by an arrow.
      COPYRIGHT: (C)2010,JPO&INPIT
    • 要解决的问题:提供一种采用马达并防止马达向身体突出的流体控制器。 解决方案:用于将马达9的旋转转换为直线运动以传递到杆8的传动装置10包括固定到杆8的球轴承21和固定到杆8上的输出轴9a的偏心轴22 电动机9并且形成为从上方与滚珠轴承21接触。 当从输出轴9a的轴芯到偏心轴22的大球25的接触位置和下表面22a的外周边缘的径向距离R较短时,整个球轴承21位于相对位置 在上边。 当从输出轴9a的轴芯到偏心轴22的下表面22a的外周边缘的径向距离R变长时,整个滚珠轴承21向下移动距离D,如箭头所示 。 版权所有(C)2010,JPO&INPIT
    • 6. 发明专利
    • Rehabilitation support device
    • 康复支援设备
    • JP2010017349A
    • 2010-01-28
    • JP2008180638
    • 2008-07-10
    • Fujikin Inc株式会社フジキン
    • NISHIBORI MINEOMANOHAR LAL SHRESTHAMORIMOTO AKIHIROYASUMOTO TADASHIIKEDA SHINICHI
    • A61H1/02
    • PROBLEM TO BE SOLVED: To provide a rehabilitation support device having a simple configuration which gives excellent rehabilitation effect by moving each finger independently in accordance with an intention of a trainer. SOLUTION: The rehabilitation support device is used to make a trainer carry out a rehabilitation exercise of the fingers. The rehabilitation support device includes a voice input means for inputting the voice of the trainer, a finger exercising means for making the fingers of the trainer to perform a rehabilitation exercise, and a control means for controlling the rehabilitation exercise. The finger exercising means has a finger fixing section for independently fixing at least two of the five fingers and a motor for independently moving the finger fixing members backward and forward in the longitudinal direction of the fingers. The control means controls the motor on the basis of the voice input in the voice input means and makes the finger fixing sections move independently of each other. COPYRIGHT: (C)2010,JPO&INPIT
    • 要解决的问题:提供一种具有简单构造的康复支援装置,其通过根据训练者的意图独立地移动每个手指而提供优异的康复效果。 解决方案:康复辅助装置用于使训练者进行手指的康复练习。 康复辅助装置包括用于输入训练器的声音的语音输入装置,用于使训练者的手指进行康复锻炼的手指锻炼装置,以及用于控制康复训练的控制装置。 手指锻炼装置具有用于独立地固定五个手指中的至少两个的手指固定部分和用于在手指的纵向方向上向后并独立地移动手指固定部件的马达。 控制装置根据语音输入装置中的语音输入来控制电动机,并使手指固定部分彼此独立地移动。 版权所有(C)2010,JPO&INPIT
    • 8. 发明专利
    • Pressure type flow control device
    • 压力式流量控制装置
    • JP2009116904A
    • 2009-05-28
    • JP2009025342
    • 2009-02-05
    • Fujikin IncTadahiro OmiTokyo Electron Ltd忠弘 大見東京エレクトロン株式会社株式会社フジキン
    • OMI TADAHIRONISHINO KOJIMATSUMOTO ATSUSHIDOI RYOSUKEIKEDA SHINICHISUGIYAMA KAZUHIKO
    • G05D7/06G01F1/00G01F1/50G05D16/20
    • PROBLEM TO BE SOLVED: To provide a pressure type flow control device capable of controlling the amount of flow that passes through an orifice with a high degree of precision, by simultaneously measuring fluid pressure and fluid temperature at the same point in a fluid under noncritical expansion conditions.
      SOLUTION: The pressure type flow control device includes: an orifice 4 for controlling the amount of flow; a control valve 22 disposed at the pipework on the upstream side of the orifice 4; an upstream-side pressure sensor 10 disposed between the orifice 4 and the control valve 22 for detecting an upstream side pressure P
      1; and a downstream-side pressure sensor 12 disposed at the pipework on the downstream side of the orifice 4 for detecting a downstream-side pressure P
      2 . The amount of flow that passes through the orifice is controlled by the opening and closing of the control valve, while the amount of flow that passes through the orifice is calculated from the upstream-side pressure P
      1 and the downstream-side pressure P
      2 by the flow expression Qc=KP
      2
      m (P
      1 -P
      2 )
      n . The upstream-side pressure sensor 10 or the downstream-side pressure sensor 12 is constituted of a resistance element of which electrical resistance changes, when pressure is applied; and this resistance element as a pressure sensor is used simultaneously as a temperature sensor.
      COPYRIGHT: (C)2009,JPO&INPIT
    • 要解决的问题:提供一种压力式流量控制装置,其能够通过同时测量流体中的相同点处的流体压力和流体温度来以高精度控制流过孔的流量 在非临界膨胀条件下。 解决方案:压力式流量控制装置包括:用于控制流量的孔口4; 设置在孔口4的上游侧的管路处的控制阀22; 设置在孔4和控制阀22之间的上游侧压力传感器10,用于检测设置在下游侧的管道上的上游侧压力P 1; 和下游侧压力传感器12 用于检测下游侧压力P 2 的孔口4。 通过控制阀的打开和关闭来控制通过孔口的流量,而从上游侧压力P 1 计算通过孔口的流量, 下游侧压力P 2 通过流动表达式Qc = KP 2 P 2 n 。 上游侧压力传感器10或下游侧压力传感器12由施加压力时电阻变化的电阻元件构成; 并且作为压力传感器的该电阻元件同时用作温度传感器。 版权所有(C)2009,JPO&INPIT
    • 9. 发明专利
    • Flow ratio variable type fluid supply device
    • 流量比可变型流体供应装置
    • JP2008009554A
    • 2008-01-17
    • JP2006177156
    • 2006-06-27
    • Fujikin Inc株式会社フジキン
    • HIRATA KAORUSAWADA YOHEIDOI RYOSUKENISHINO KOJIIKEDA SHINICHI
    • G05D7/06
    • G05D7/0664Y10T137/85938Y10T137/87314Y10T137/87539
    • PROBLEM TO BE SOLVED: To achieve the miniaturization and cost reduction of a flow ratio variable type gas diversion supply device, and to easily and quickly achieve the adjustment of the flow ratio. SOLUTION: Gas with a flow rate Q supplied from a flow rate controller 6 is diverted to a first diversion duct 1 and a second diversion duct 2 with a predetermined flow rate Q, and a first orifice 3 is interposed in the first diversion duct 1 so that the gas with the flow rate Q can be supplied from the both diversion ducts 1 and 2, and orifices 4a to 4n are interposed in the second diversion duct 2 as ducts where a plurality of branch ducts 2a to 2n are directly connected in parallel, and open/close valves Vb to Vn are interposed at the whole part or one part of the branch circuits, and the total open area S2o of the distributable orifices of the second diversion duct 2 is adjusted according to the opening or closing of the open/close valves Vb to Vn so that the gas flow with the flow rate Q can be diverted to the diversion ducts 1 and 2 with a flow ratio equal to the rate of the open area of the first orifice 3 of a first diversion circuit 1 to the total open areas of the distributable orifices of the second diversion channel 2. COPYRIGHT: (C)2008,JPO&INPIT
    • 要解决的问题:为了实现流量比可变型导气装置的小型化和降低成本,并且容易且快速地实现流量比的调节。 解决方案:从流量控制器6提供的具有流量Q的气体被转移到具有预定流量Q的第一转向管道1和第二转向管道2,并且第一开口3插入在第一转向 管道1,从而能够从两个分流管道1和2供给具有流量Q的气体,并且孔口4a至4n插入第二转向管道2中,作为多个分支管道2a至2n直接连接的管道 并联,并且开/关阀Vb至Vn插入在分支回路的整个部分或一部分处,并且根据打开或关闭第二转向管2的可分配孔的总开口面积S2o被调整 打开/关闭阀Vb至Vn,使得具有流量Q的气流可以转移到转向管道1和2,流量比等于第一转向回路的第一孔3的开口面积的速率 1到总开放面积的分配 第二个转移渠道的能力孔。2.版权所有(C)2008,JPO&INPIT