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1. 发明授权

US06928333B1 Scheduling method for automated work-cell transfer system 失效
标题翻译：自动化工作单元传输系统的调度方法
公开(公告)号：US06928333B1
公开(公告)日：2005-08-09
申请号：US09387174
申请日：1999-08-31
申请人： Michael R. Conboy , Patrick J. Ryan , Elfido Coss, Jr.
发明人： Michael R. Conboy , Patrick J. Ryan , Elfido Coss, Jr.
IPC分类号： G06F19/00 , G06Q10/00
CPC分类号： G06Q10/06 , Y02P90/86
摘要： According to an example embodiment, the present invention is directed to a new and efficient method for bringing at least two items together from independent locations via separate paths in a computer controlled manufacturing environment. Using the computer, the probabilities for pickup and delivery of each of the two items are generated and used to determine an efficient manner in which to bring the items together via the separate paths.
摘要翻译：根据示例性实施例，本发明涉及一种用于在计算机控制的制造环境中通过独立路径将独立位置带入至少两个项目的新的和有效的方法。使用计算机，产生并且使用两个项目中的每一个的拾取和递送的概率来确定通过分开的路径将项目合在一起的有效方式。

2. 发明授权

US6035245A Automated material handling system method and arrangement 失效
公开(公告)号：US6035245A
公开(公告)日：2000-03-07
申请号：US46854
申请日：1998-03-24
申请人： Michael R. Conboy , Patrick J. Ryan , Elfido Coss, Jr.
发明人： Michael R. Conboy , Patrick J. Ryan , Elfido Coss, Jr.
IPC分类号： G06Q10/08 , G06F17/00
CPC分类号： G06Q10/08 , Y10S414/14
摘要： A computer controlled manufacturing arrangement and method for selecting between multiple paths for transporting cassettes between processing locations. The manufacturing arrangement includes a plurality of stockers interconnected with tracks on which cassettes are carried on vehicles. A first and second stocker are interconnected by at least a first path and a second path formed by the tracks, and a cassette can be transported from the first to the second stocker via either of the two paths. A plurality of robotic arrangements are configured to transfer cassettes between the stockers and the vehicles. A data processing system is coupled to the robotic arrangements and configured and arranged to maintain an historical record of codes indicative of periods of time expended in transporting cassettes from the first stocker to the second stocker via the first path and second path, respectively. When a cassette is to be transported from the first stocker to the second stocker, the data processing system determines, as a function of the historical record of codes associated with the paths, which of the first or second paths is more likely to result in a lesser period of time in transporting the cassette, and selects one of the first or second paths according to which path is more likely to result in a lesser period of time in transporting the cassette. The robotic arrangement is then instructed to load the cassette on the vehicle of the selected path.

3. 发明授权

US06449522B1 Managing a semiconductor fabrication facility using wafer lot and cassette attributes 有权
标题翻译：使用晶圆批次和磁带属性管理半导体制造设备
公开(公告)号：US06449522B1
公开(公告)日：2002-09-10
申请号：US09193349
申请日：1998-11-17
申请人： Michael R. Conboy , Patrick J. Ryan , Elfido Coss, Jr.
发明人： Michael R. Conboy , Patrick J. Ryan , Elfido Coss, Jr.
IPC分类号： G06F1900
CPC分类号： H01L21/67294 , H01L21/67276 , Y10S414/135 , Y10S414/137 , Y10S414/14
摘要： Systems and methods for managing automated material handling systems, such as semiconductor fabrication facilities, using material item (e.g., wafer lot) attributes and cassette attributes are provided. A semiconductor fabrication facility typically includes multiple wafer lots and multiple cassettes for storing the wafer lots. A system and method, in one embodiment of the invention, includes setting one or more lot attributes for each wafer lot, setting one or more cassette attributes for each cassette, and selecting a particular cassette for holding a particular wafer lot based on the one or more wafer lot attributes of the particular wafer lot and the one or more cassette attributes of the particular cassette. The wafer lot and cassette attributes may, for example, include an attribute identifying a position in a fabrication sequence and one or more attributes indicative of one or more contaminants. By selecting cassettes in this manner, wafer lots and cassettes may, for example, be classified or logically zoned.
摘要翻译：提供了用于管理自动化材料处理系统的系统和方法，例如半导体制造设施，使用材料项目（例如，晶片块）属性和盒子属性。半导体制造设备通常包括多个晶片批次和用于存储晶片批次的多个盒。在本发明的一个实施例中的系统和方法包括设置每个晶片批次的一个或多个批次属性，为每个盒设置一个或多个盒属性，并且基于该一个或多个盒子选择用于保持特定晶片批次的特定盒特定晶片批次的更多晶片批次属性和特定盒的一个或多个盒属性。晶片块和盒属性可以例如包括识别制造序列中的位置的属性和指示一种或多种污染物的一个或多个属性。通过以这种方式选择盒式磁带，可以对晶片批次和磁带盒进行分类或逻辑划分。

4. 发明授权

US06411859B1 Flow control in a semiconductor fabrication facility 有权
标题翻译：半导体制造设备中的流量控制
公开(公告)号：US06411859B1
公开(公告)日：2002-06-25
申请号：US09143322
申请日：1998-08-28
申请人： Michael R. Conboy , Patrick J. Ryan , Elfido Coss, Jr.
发明人： Michael R. Conboy , Patrick J. Ryan , Elfido Coss, Jr.
IPC分类号： G06F1900
CPC分类号： H01L21/67276 , G05B19/41865 , G05B2219/32265 , G05B2219/32316 , Y02P90/20
摘要： Techniques for controlling the flow of wafer lots in a semiconductor fabrication facility having multiple storage locations and a fabrication facility employing such techniques are provided. A process and system for controlling the flow of wafer lots within a semiconductor fabrication facility, in accordance with one embodiment of the invention, includes determining a first storage location for a wafer lot, determining, prior to moving the wafer lot, an availability condition of the first storage location based on a condition level of the first storage location and a priority of the wafer lot, and storing the wafer lot in the storage location if the location is available and storing the wafer lot in an alternate location if the storage location is unavailable. The storage location may, for example, be a stocker. In this manner, the invention may, for example, advantageously anticipate or sense bubbles or log jams of wafer lots in a fabrication facility and redirect wafer lots in order to avoid or reduce any bubble effect. This can, for example, significantly increase the throughput of wafers through the fabrication facility.
摘要翻译：提供了用于控制具有多个存储位置的半导体制造设备中的晶片批次的流动的技术以及采用这种技术的制造设备。根据本发明的一个实施例的用于控制半导体制造设备内的晶片批次的流动的工艺和系统包括确定晶片批次的第一存储位置，在移动晶片批之前确定可用状态所述第一存储位置基于所述第一存储位置的状态级别和所述晶片批次的优先级，并且如果所述位置可用则将所述晶片批次存储在所述存储位置中，并且如果所述存储位置是所述存储位置，则将所述晶片批次存储在备用位置不可用存储位置可以例如是储存器。以这种方式，本发明可以例如有利地预期或感测制造设施中的晶片批次的气泡或木材堵塞，并且重定向晶片批次以避免或减少任何气泡效应。例如，这可以显着增加通过制造设备的晶片的生产量。

5. 发明授权

US07039495B1 Management of multiple types of empty carriers in automated material handling systems 有权
标题翻译：在自动化材料处理系统中管理多种类型的空载体
公开(公告)号：US07039495B1
公开(公告)日：2006-05-02
申请号：US09207282
申请日：1998-12-08
申请人： Michael R. Conboy , Patrick J. Ryan , Elfido Coss, Jr.
发明人： Michael R. Conboy , Patrick J. Ryan , Elfido Coss, Jr.
IPC分类号： G07F17/00
CPC分类号： H01L21/67276 , G05B19/41865 , G05B19/4189 , Y02P90/20 , Y02P90/28
摘要： Management of multiple types of empty carriers in automated material handling systems. In one embodiment, an automated material handling system (AMHS) includes a plurality of material carriers including a plurality of empty carriers classified into two or more types and one or more stock areas, each including a plurality of bins for storing material carriers. Each stock area is associated with one or more thresholds for each empty carrier type. The AMHS further includes a control system coupled to a first one of the stock areas for computing an empty percentage for each empty carrier type. The empty percentage for a particular empty carrier type is the percentage of bins of the first one stock area which contain empty carriers of the particular type. The AMHS also includes a transportation system responsive to the control system for selectively moving an empty carrier of a certain carrier type between a staging area and the first stock area based on a comparison of the empty percentage for the certain carrier type to the one or more thresholds of the first stock area for the certain carrier type.
摘要翻译：在自动化材料处理系统中管理多种类型的空载体。在一个实施例中，自动材料处理系统（AMHS）包括多个材料载体，其包括分为两种或多种类型的多个空载体和一个或多个储备区域，每个储存区域包括用于储存材料载体的多个箱体。每个库存区域与每个空载体类型的一个或多个阈值相关联。 AMHS还包括耦合到第一个存储区域的控制系统，用于计算每个空载波类型的空百分比。特定空承运人类型的空百分比是包含特定类型的空承运人的第一个库存区的仓的百分比。 AMHS还包括响应于控制系统的运输系统，用于基于将特定载体类型的空百分比与一个或多个特定承运人类型的第一库存区域的阈值。

6. 发明授权

US06356804B1 Automated material handling system method and arrangement 有权
标题翻译：自动化材料处理系统的方法和布置
公开(公告)号：US06356804B1
公开(公告)日：2002-03-12
申请号：US09519836
申请日：2000-03-06
申请人： Michael R. Conboy , Patrick J. Ryan , Elfido Coss, Jr.
发明人： Michael R. Conboy , Patrick J. Ryan , Elfido Coss, Jr.
IPC分类号： G06F700
CPC分类号： G06Q10/08 , Y10S414/14
摘要： A computer controlled manufacturing arrangement and method for selecting between multiple paths for transporting cassettes between processing locations. The manufacturing arrangement includes a plurality of stockers interconnected with tracks on which cassettes are carried on vehicles. A first and second stocker are interconnected by at least a first path and a second path formed by the tracks, and a cassette can be transported from the first to the second stocker via either of the two paths. A plurality of robotic arrangements are configured to transfer cassettes between the stockers and the vehicles. A data processing system is coupled to the robotic arrangements and configured and arranged to maintain an historical record of codes indicative of periods of time expended in transporting cassettes from the first stocker to the second stocker via the first path and second path, respectively. When a cassette is to be transported from the first stocker to the second stocker, the data processing system determines, as a function of the historical record of codes associated with the paths, which of the first or second paths is more likely to result in a lesser period of time in transporting the cassette, and selects one of the first or second paths according to which path is more likely to result in a lesser period of time in transporting the cassette. The robotic arrangement is then instructed to load the cassette on the vehicle of the selected path.
摘要翻译：一种用于在多个路径之间选择用于在处理位置之间传送盒的计算机控制的制造布置和方法。制造装置包括与轨道相互连接的多个储料器，盒子上载有车辆。第一和第二储料器通过由轨道形成的至少第一路径和第二路径相互连接，并且盒可以通过两条路径中的任一条从第一储存器运送到第二储料架。多个机器人装置构造成在储料器和车辆之间传送盒带。数据处理系统耦合到机器人装置，并且被配置和布置为分别保持指示经由第一路径和第二路径将运送盒从第一储料器运送到第二储料器的时间段的代码的历史记录。当盒子要从第一储盘器运送到第二储料器时，数据处理系统根据与路径相关联的代码的历史记录确定哪个第一或第二路径更有可能导致较少的运送盒子的时间段，并且根据哪一个路径更可能导致运送盒式磁带的较短的时间段选择第一或第二路径之一。然后指示机器人布置将盒装载到所选路径的车辆上。

7. 发明授权

US06338005B1 Managing test material in an automated material handling system 失效
标题翻译：在自动化材料处理系统中管理测试材料
公开(公告)号：US06338005B1
公开(公告)日：2002-01-08
申请号：US09387613
申请日：1999-08-31
申请人： Michael R. Conboy , Patrick J. Ryan , Elfido Coss, Jr.
发明人： Michael R. Conboy , Patrick J. Ryan , Elfido Coss, Jr.
IPC分类号： G06F700
CPC分类号： G06Q10/06
摘要： Methods and systems for managing test wafers an automated material handling system are provided. Test material is classified into a plurality of classes. A time profile for each class of test material for a time period is determined and the test material is placed into cassettes based on the determined time profile for each class. When a request to pick up a particular group of a test material class is received, a cassette is identifying for picking up the particular group based on the contents of the cassette.
摘要翻译：提供了用于管理测试晶片的方法和系统，其中包括自动化材料处理系统。测试材料分为多个类别。确定一段时间内每类测试材料的时间表，并根据每个类的确定的时间概况将测试材料放入盒中。当接收到拾取特定组的测试材料类的请求时，盒式磁带正在识别以基于盒的内容拾取特定组。

8. 发明授权

US06878895B1 Reticle sorter 有权
标题翻译：标线分选机
公开(公告)号：US06878895B1
公开(公告)日：2005-04-12
申请号：US09383508
申请日：1999-08-26
申请人： Patrick J. Ryan , Michael R. Conboy , Stephen P. Hovestol
发明人： Patrick J. Ryan , Michael R. Conboy , Stephen P. Hovestol
IPC分类号： B07C5/344
CPC分类号： B07C5/344 , Y10S209/939
摘要： A reticle sorter and a semiconductor fabrication facility employing one or more reticle sorters is provided. The reticle sorter(s) generally lies between a reticle storage system and a group of one or more photolithography exposure tools (e.g., steppers) and is configured for sorting reticles in one or more cassettes. The use of the reticle sorter provides sorting functionality apart from the reticle storage system and typically closer to the group of photolithography steppers with which it is associated. This can, for example, significantly increase the throughput of semiconductor wafers through the associated photolithography exposure tools as well as in the semiconductor fabrication plant as a whole.
摘要翻译：提供了采用一个或多个掩模版分拣机的掩模版分拣机和半导体制造设备。掩模版分选机通常位于掩模版存储系统和一组一个或多个光刻曝光工具（例如步进器）之间，并且被配置用于将一个或多个盒中的掩模版分类。标线分类器的使用提供了除了掩模版存储系统之外的分类功能，并且通常更接近与其相关联的光刻步进组。例如，这可以通过相关的光刻曝光工具以及整个半导体制造工厂显着提高半导体晶片的生产量。

9. 发明授权

US5972727A Reticle sorter 失效
标题翻译：标线分选机
公开(公告)号：US5972727A
公开(公告)日：1999-10-26
申请号：US107111
申请日：1998-06-30
申请人： Patrick J. Ryan , Michael R. Conboy , Stephen P. Hovestol
发明人： Patrick J. Ryan , Michael R. Conboy , Stephen P. Hovestol
IPC分类号： G03F7/20 , H01L21/00 , H01L21/66 , G01R31/26
CPC分类号： H01L21/67271 , G03F7/70541 , G03F7/70741 , Y10T29/41
摘要： A reticle sorter and a semiconductor fabrication facility employing one or more reticle sorters is provided. The reticle sorter(s) generally lies between a reticle storage system and a group of one or more photolithography exposure tools (e.g., steppers) and is configured for sorting reticles in one or more cassettes. The use of the reticle sorter provides sorting functionality apart from the reticle storage system and typically closer to the group of photolithography steppers with which it is associated. This can, for example, significantly increase the throughput of semiconductor wafers through the associated photolithography exposure tools as well as in the semiconductor fabrication plant as a whole.
摘要翻译：提供了采用一个或多个掩模版分拣机的掩模版分拣机和半导体制造设备。掩模版分选机通常位于掩模版存储系统和一组一个或多个光刻曝光工具（例如步进器）之间，并且被配置用于将一个或多个盒中的掩模版分类。标线分类器的使用提供了除了掩模版存储系统之外的分类功能，并且通常更接近与其相关联的光刻步进组。例如，这可以通过相关的光刻曝光工具以及整个半导体制造工厂显着提高半导体晶片的生产量。

10. 发明授权

US06308107B1 Realtime decision making system for reduction of time delays in an automated material handling system 有权
标题翻译：实时决策系统，用于减少自动化物料搬运系统的时间延迟
公开(公告)号：US06308107B1
公开(公告)日：2001-10-23
申请号：US09387175
申请日：1999-08-31
申请人： Michael R. Conboy , Patrick J. Ryan , Elfido Coss
发明人： Michael R. Conboy , Patrick J. Ryan , Elfido Coss
IPC分类号： G06F1900
CPC分类号： H01L21/67276 , G05B19/41865 , G05B2219/31265 , G05B2219/32243 , G05B2219/32256 , G05B2219/32272 , G05B2219/45031 , G06Q10/08 , Y02P90/20 , Y10S414/137 , Y10S414/14
摘要： A method for pre-positioning routed material in a computer controlled manufacturing arrangement having alternate locations for predetermined ones of a plurality of manufacturing process steps and predetermined types of materials to be routed into alternate locations. The method includes establishing a distribution of events indicative of the alternate locations at which material is processed for a manufacturing process step with respect to the materials to be routed and documenting the distribution of events in a database with respect to the type of materials to be routed and the alternate locations in terms of routing times, therein establishing a historical routing time for the type of material to be routed. In addition, there is established the actual mix of materials to be routed to the alternate locations and their historical routing time and actual routing time for the type of routed material are compared. Further, one of a plurality of substates is selected that include: pre-position routed material when historical and actual times are substantially the same, hold routed material when the times are different and re-route material when time comparison is not available. Finally, one of a plurality of alternate locations is selected to which to route the material for the next manufacturing process step as a function of a one of the substates.
摘要翻译：一种用于将计算机控制的制造布置中的路线材料预定位的方法，其具有用于多个制造过程步骤中的预定类型和要路由到备用位置的预定类型的材料的替代位置。该方法包括建立指示相对于要路由的材料的制造过程步骤处理材料的替代位置的事件的分布，并记录关于要路由的材料的类型在数据库中的事件的分布以及在路由时间方面的备用位置，其中为要路由的材料类型建立历史路由时间。此外，建立了要路由到备用位置的材料的实际组合，并比较其路由材料类型的历史路由时间和实际路由时间。此外，选择多个子状态中的一个，其包括：当历史和实际时间基本相同时的预定位路由材料，当时间不同时保持路由材料，并且当时间比较不可用时重新路由材料。最后，选择多个替代位置中的一个，作为其中一个子状态的函数来路由下一制造过程步骤的材料。

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