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1. 发明申请

US20070117234A1 Sputtered Spring Films With Low Stress Anisotropy 审中-公开
标题翻译：具有低应力各向异性的溅射弹簧膜
公开(公告)号：US20070117234A1
公开(公告)日：2007-05-24
申请号：US11611823
申请日：2006-12-15
申请人： David Fork , Scott Solberg , Karl Littau
发明人： David Fork , Scott Solberg , Karl Littau
IPC分类号： H01L21/00
CPC分类号： G01R1/06733 , C23C14/14 , C23C14/3492 , C23C14/35 , G01R1/06727 , G01R1/06744 , G01R3/00 , H01L21/67167 , H01L21/67207 , H05K3/4092 , Y10T428/24
摘要： Methods are disclosed for fabricating spring structures that minimize helical twisting by reducing or eliminating stress anisotropy in the thin films from which the springs are formed through manipulation of the fabrication process parameters and/or spring material compositions. In one embodiment, isotropic internal stress is achieved by manipulating the fabrication parameters (i.e., temperature, pressure, and electrical bias) during spring material film formation to generate the tensile or compressive stress at the saturation point of the spring material. Methods are also disclosed for tuning the saturation point through the use of high temperature or the incorporation of softening metals. In other embodiments, isotropic internal stress is generated through randomized deposition (e.g., pressure homogenization) or directed deposition techniques (e.g., biased sputtering, pulse sputtering, or long throw sputtering). Cluster tools are used to separate the deposition of release and spring materials.
摘要翻译：公开了用于制造弹簧结构的方法，其通过减少或消除通过操纵制造工艺参数和/或弹簧材料组成形成弹簧的薄膜中的应力各向异性来最小化螺旋扭转。在一个实施例中，通过在弹簧材料膜形成期间操纵制造参数（即，温度，压力和电偏压）来实现各向同性内部应力，以在弹簧材料的饱和点处产生拉伸或压缩应力。还公开了通过使用高温或软化金属的引入来调节饱和点的方法。在其他实施例中，通过随机沉积（例如，压力均化）或定向沉积技术（例如，偏置溅射，脉冲溅射或长投射溅射）产生各向同性的内部应力。集群工具用于分离释放和弹簧材料的沉积。

2. 发明申请

US20050159002A1 Sputtered spring films with low stress anisotropy 有权
标题翻译：具有低应力各向异性的溅射弹簧膜
公开(公告)号：US20050159002A1
公开(公告)日：2005-07-21
申请号：US11029618
申请日：2005-01-05
申请人： David Fork , Scott Solberg , Karl Littau
发明人： David Fork , Scott Solberg , Karl Littau
IPC分类号： B81B3/00 , B81C1/00 , G01R1/067 , G01R3/00 , H05K3/40 , H04R17/00 , H01L21/302 , H01L21/461
CPC分类号： G01R1/06733 , C23C14/14 , C23C14/3492 , C23C14/35 , G01R1/06727 , G01R1/06744 , G01R3/00 , H01L21/67167 , H01L21/67207 , H05K3/4092 , Y10T428/24
摘要： Methods are disclosed for fabricating spring structures that minimize helical twisting by reducing or eliminating stress anisotropy in the thin films from which the springs are formed through manipulation of the fabrication process parameters and/or spring material compositions. In one embodiment, isotropic internal stress is achieved by manipulating the fabrication parameters (i.e., temperature, pressure, and electrical bias) during spring material film formation to generate the tensile or compressive stress at the saturation point of the spring material. Methods are also disclosed for tuning the saturation point through the use of high temperature or the incorporation of softening metals. In other embodiments, isotropic internal stress is generated through randomized deposition (e.g., pressure homogenization) or directed deposition techniques (e.g., biased sputtering, pulse sputtering, or long throw sputtering). Cluster tools are used to separate the deposition of release and spring materials.
摘要翻译：公开了用于制造弹簧结构的方法，其通过减少或消除通过操纵制造工艺参数和/或弹簧材料组成形成弹簧的薄膜中的应力各向异性来最小化螺旋扭转。在一个实施例中，通过在弹簧材料膜形成期间操纵制造参数（即，温度，压力和电偏压）来实现各向同性内部应力，以在弹簧材料的饱和点处产生拉伸或压缩应力。还公开了通过使用高温或软化金属的引入来调节饱和点的方法。在其他实施例中，通过随机沉积（例如，压力均化）或定向沉积技术（例如，偏置溅射，脉冲溅射或长投射溅射）产生各向同性的内部应力。集群工具用于分离释放和弹簧材料的沉积。

3. 发明申请

US20060211217A1 METHODS FOR MAKING LARGE DIMENSION, FLEXIBLE PIEZOELECTRIC CERAMIC TAPES 有权
标题翻译：制造大尺寸，柔性压电陶瓷带的方法
公开(公告)号：US20060211217A1
公开(公告)日：2006-09-21
申请号：US11017470
申请日：2004-12-20
申请人： Baomin Xu , Steven Buhler , William Wong , Michael Weisberg , Scott Solberg , Karl Littau , Scott Elrod
发明人： Baomin Xu , Steven Buhler , William Wong , Michael Weisberg , Scott Solberg , Karl Littau , Scott Elrod
IPC分类号： H01L21/30
CPC分类号： G01N29/245 , B06B1/0622 , G01L1/16 , G01N29/2475 , G01N2291/02827 , G01N2291/2694 , H01L27/20 , H01L41/313 , H01L41/314 , H01L41/47
摘要： A method for producing a detection/test tape includes depositing a material onto a surface of at least one first substrate to form a plurality of element structures. Electrodes are deposited on a surface of each of the plurality of element structures, and the element structures are bonded to a second substrate, where the second substrate is conductive or has a conductive layer, and the second substrate is carried on a carrier plate. The at least one first substrate is removed from the element structures and second side electrodes are deposited on a second surface of each of the plurality of element structures. An insulative material is inserted around the element structures to electrically isolate the two substrates used to bond the element structures. A second side of the element structures is then bonded to another substrate, where the other substrate is conductive or has a conductive layer. Thereafter, the carrier plate carrying the second substrate is removed.
摘要翻译：一种用于制造检测/测试带的方法包括将材料沉积在至少一个第一基底的表面上以形成多个元件结构。电极沉积在多个元件结构中的每一个的表面上，并且元件结构被结合到第二衬底，其中第二衬底是导电的或具有导电层，并且第二衬底承载在载体板上。从元件结构中去除至少一个第一衬底，并且将第二侧电极沉积在多个元件结构中的每一个的第二表面上。绝缘材料插入在元件结构周围以电隔离用于结合元件结构的两个基板。然后将元件结构的第二面接合到另一个衬底，其中另一个衬底是导电的或具有导电层。此后，移除携带第二基板的承载板。

4. 发明申请

US20050104479A1 Piezoelectric ceramic thick film element, array of elements, and devices 有权
标题翻译：压电陶瓷厚膜元件，元件阵列和器件
公开(公告)号：US20050104479A1
公开(公告)日：2005-05-19
申请号：US11017494
申请日：2004-12-20
申请人： Baomin Xu , Steven Buhler , Michael Welsberg , William Wong , Scott Solberg , Karl Littau , John Fitch , Scott Elrod
发明人： Baomin Xu , Steven Buhler , Michael Welsberg , William Wong , Scott Solberg , Karl Littau , John Fitch , Scott Elrod
IPC分类号： B41J2/16 , H01L41/24 , H01L41/08
CPC分类号： B41J2/161 , B41J2/1623 , B41J2/1632 , B41J2/1634 , B41J2/1637 , B41J2/1646 , H01L41/313 , H01L41/314 , H01L41/331 , H01L2221/68368 , Y10T29/42 , Y10T29/435 , Y10T29/49128 , Y10T29/4913 , Y10T29/49133 , Y10T29/49155 , Y10T29/4981
摘要： A piezoelectric thick film element array includes at least one piezoelectric element structure having a thickness between 10 μm to 100 μm formed by a deposition process. The at least one piezoelectric element is patterned during the deposition process, and includes a first electrode deposited on a first surface of the piezoelectric elements structure, and a second electrode deposited on a second surface of the piezoelectric element structure. In a further embodiment, several devices are provided using a piezoelectric element or an array having a piezoelectric element structure with a thickness of between 10 μm to 100 μm formed by a deposition process. These devices include microfluidic ejectors, transducer arrays and catheters.
摘要翻译：压电厚膜元件阵列包括通过沉积工艺形成的至少一个压电元件结构，其厚度在10um至100μm之间。所述至少一个压电元件在所述沉积工艺期间被图案化，并且包括沉积在所述压电元件结构的第一表面上的第一电极和沉积在所述压电元件结构的第二表面上的第二电极。在另一实施例中，使用压电元件或具有通过沉积工艺形成的厚度在10um至100μm之间的压电元件结构的阵列来提供若干器件。这些装置包括微流体喷射器，换能器阵列和导管。

5. 发明申请

US20060103695A1 Thin film and thick film heater and control architecture for a liquid drop ejector 有权
标题翻译：薄膜和厚膜加热器和液滴喷射器的控制架构
公开(公告)号：US20060103695A1
公开(公告)日：2006-05-18
申请号：US10990110
申请日：2004-11-15
申请人： Michael Young , Steven Buhler , Scott Limb , Karl Littau , Beverly Russo , Scott Solberg , Michael Weisberg , Cathie Burke , Richard Schmachtenberg , Peter Nystrom , Sharon Berger , Timothy Trang , Thomas Long
发明人： Michael Young , Steven Buhler , Scott Limb , Karl Littau , Beverly Russo , Scott Solberg , Michael Weisberg , Cathie Burke , Richard Schmachtenberg , Peter Nystrom , Sharon Berger , Timothy Trang , Thomas Long
IPC分类号： B41J2/05
CPC分类号： B41J2/1626 , B41J2/14072 , B41J2/14129 , B41J2/14153 , B41J2/1603 , B41J2/1631
摘要： A liquid drop ejector comprising a jet stack, thin film or thick film heaters formed on the surface of the jet stack, and at least one thin film or thick film temperature sensor operative to provide feedback temperature control for the thin film or thick film heater elements is provided. In one form, the liquid drop ejector also has the thin film or thick film heater elements grouped in segments that are operative to be individually controlled. In addition, in another form, the signal lines provided to the liquid drop ejector are patterned to allow for more uniform resistance over the span of the liquid drop ejector.
摘要翻译：一种液滴喷射器，包括形成在射流堆叠表面上的喷射叠层，薄膜或厚膜加热器，以及至少一个薄膜或厚膜温度传感器，用于为薄膜或厚膜加热器元件提供反馈温度控制被提供。在一种形式中，液滴喷射器还具有分组的薄膜或厚膜加热器元件，其可操作以单独控制。此外，在另一种形式中，提供给液滴喷射器的信号线被图案化以允许在液滴喷射器的跨度上具有更均匀的电阻。

6. 发明申请

US20050162045A1 Methods to make thick film single elements and arrays 有权
标题翻译：制作厚膜单元件和阵列的方法
公开(公告)号：US20050162045A1
公开(公告)日：2005-07-28
申请号：US11084579
申请日：2005-03-18
申请人： Baomin Xu , Steven Buhler , Michael Welsberg , William Wong , Scott Solberg , Karl Littau , John Fitch , Scott Elrod
发明人： Baomin Xu , Steven Buhler , Michael Welsberg , William Wong , Scott Solberg , Karl Littau , John Fitch , Scott Elrod
IPC分类号： B41J2/16 , H01L41/24 , H01L41/08
CPC分类号： B41J2/161 , B41J2/1623 , B41J2/1632 , B41J2/1634 , B41J2/1637 , B41J2/1646 , H01L41/313 , H01L41/314 , H01L41/331 , H01L2221/68368 , Y10T29/42 , Y10T29/435 , Y10T29/49128 , Y10T29/4913 , Y10T29/49133 , Y10T29/49155 , Y10T29/4981
摘要： A material for a thick film element is deposited onto a surface of a first substrate to form a thick film element structure having a thickness of between greater than 10 μm to 100 μm. The at least one thick film element structure is bonded to a second substrate. Thereafter, the first substrate is removed from the at least one thick film element structure using a liftoff process which includes emitting, from a radiation source (such as a laser or other appropriate device), a beam through the first substrate to an attachment interface formed between the first substrate and the at least one thick film element structure at the surface of the first substrate. The first substrate is substantially transparent at the wavelength of the beam, and the beam generates sufficient energy at the interface to break the attachment.
摘要翻译：将用于厚膜元件的材料沉积到第一基板的表面上以形成厚度大于10um至100μm的厚膜元件结构。所述至少一个厚膜元件结构被结合到第二基板。此后，使用包括从辐射源（例如激光或其它合适的装置）发射通过第一基板的光束到形成的附接接口的剥离过程，从至少一个厚膜元件结构中去除第一基板，在第一基板和第一基板的表面处的至少一个厚膜元件结构之间。第一衬底在光束的波长处基本上是透明的，并且光束在界面处产生足够的能量以破坏附件。

7. 发明授权

US06866255B2 Sputtered spring films with low stress anisotropy 有权
标题翻译：具有低应力各向异性的溅射弹簧膜
公开(公告)号：US06866255B2
公开(公告)日：2005-03-15
申请号：US10121644
申请日：2002-04-12
申请人： David K. Fork , Scott Solberg , Karl Littau
发明人： David K. Fork , Scott Solberg , Karl Littau
IPC分类号： B81B3/00 , B81C1/00 , G01R1/067 , G01R3/00 , H05K3/40 , B60G11/02 , F16F1/24
CPC分类号： G01R1/06733 , C23C14/14 , C23C14/3492 , C23C14/35 , G01R1/06727 , G01R1/06744 , G01R3/00 , H01L21/67167 , H01L21/67207 , H05K3/4092 , Y10T428/24
摘要： Methods are disclosed for fabricating spring structures that minimize helical twisting by reducing or eliminating stress anisotropy in the thin films from which the springs are formed through manipulation of the fabrication process parameters and/or spring material compositions. In one embodiment, isotropic internal stress is achieved by manipulating the fabrication parameters (i.e., temperature, pressure, and electrical bias) during spring material film information to generate the tensile or compressive stress at the saturation point of the spring material. Methods are also disclosed for tuning the saturation point through the use of high temperature or the incorporation of softening metals. In other embodiments, isotropic internal stress is generated through randomized deposition (e.g., pressure homogenization) or directed deposition techniques (e.g., biased sputtering, pulse sputtering, or long throw sputtering). Cluster tools are used to separate the deposition of release and spring materials.
摘要翻译：公开了用于制造弹簧结构的方法，其通过减少或消除通过操纵制造工艺参数和/或弹簧材料组成形成弹簧的薄膜中的应力各向异性来最小化螺旋扭转。在一个实施例中，通过在弹簧材料膜信息期间操纵制造参数（即，温度，压力和电偏压）来实现各向同性内部应力，以在弹簧材料的饱和点处产生拉伸或压缩应力。还公开了通过使用高温或软化金属的引入来调节饱和点的方法。在其他实施例中，通过随机沉积（例如，压力均化）或定向沉积技术（例如，偏置溅射，脉冲溅射或长投射溅射）产生各向同性的内部应力。集群工具用于分离释放和弹簧材料的沉积。

8. 发明授权

US09586181B2 Electrodialytic separation of CO2 gas from seawater 有权
标题翻译：二氧化碳气体从海水中电渗析分离
公开(公告)号：US09586181B2
公开(公告)日：2017-03-07
申请号：US13177421
申请日：2011-07-06
申请人： Matthew D. Eisaman , Karl Littau
发明人： Matthew D. Eisaman , Karl Littau
IPC分类号： B01D61/44 , C02F1/469 , C02F103/08
CPC分类号： B01D61/445 , B01D2311/18 , B01D2311/2626 , B01D2311/2653 , C02F1/4693 , C02F2103/08 , C02F2201/4618 , Y02A20/134 , Y02C10/04 , Y02C10/06
摘要： A method comprises flowing process solution and electrode solution into a BPMED apparatus, applying a voltage such that the process solution is acidified and basified and dissolved CO2 is generated, flowing the process solution out of the apparatus, and desorbing CO2 out of the process solution. A method for desorbing CO2 from an ocean comprises flowing seawater and electrode solution into a BPMED apparatus, applying a voltage such that dissolved CO2 is generated, flowing the seawater out of the apparatus, and desorbing CO2 out of the seawater. A method for producing a desalted solution and CO2 gas comprises flowing process solution and electrode solution into a BPMED apparatus that includes one or more three-compartment cells, applying a voltage such that the process solution is acidified, basified, and desalted, flowing the process solution out of the apparatus, and desorbing CO2 out of the process solution.
摘要翻译：一种方法包括将工艺溶液和电极溶液流入BPMED装置，施加电压使得工艺溶液酸化和碱化并产生溶解的CO 2，使工艺溶液流出设备，并将CO 2从工艺溶液中解吸出来。从海洋中解吸CO 2的方法包括将海水和电极溶液流入BPMED装置，施加电压使得溶解的CO 2产生，将海水从设备中流出，并将CO 2从海水中解吸。一种生产脱盐溶液和二氧化碳气体的方法包括将工艺溶液和电极溶液流入包括一个或多个三室电池的BPMED装置中，施加电压使得该工艺溶液被酸化，碱化和脱盐，从设备中解出来，并将二氧化碳从工艺解决方案中解脱出来。

9. 发明申请

US20130008792A1 ELECTRODIALYTIC SEPARATION OF CO2 GAS FROM SEAWATER 有权
标题翻译：二氧化碳从海水中的电化学分离
公开(公告)号：US20130008792A1
公开(公告)日：2013-01-10
申请号：US13177421
申请日：2011-07-06
申请人： Matthew D. Eisaman , Karl Littau
发明人： Matthew D. Eisaman , Karl Littau
IPC分类号： C02F1/469 , B01D61/44 , C02F103/08
CPC分类号： B01D61/445 , B01D2311/18 , B01D2311/2626 , B01D2311/2653 , C02F1/4693 , C02F2103/08 , C02F2201/4618 , Y02A20/134 , Y02C10/04 , Y02C10/06
摘要： A method comprises flowing process solution and electrode solution into a BPMED apparatus, applying a voltage such that the process solution is acidified and basified and dissolved CO2 is generated, flowing the process solution out of the apparatus, and desorbing CO2 out of the process solution. A method for desorbing CO2 from an ocean comprises flowing seawater and electrode solution into a BPMED apparatus, applying a voltage such that dissolved CO2 is generated, flowing the seawater out of the apparatus, and desorbing CO2 out of the seawater. A method for producing a desalted solution and CO2 gas comprises flowing process solution and electrode solution into a BPMED apparatus that includes one or more three-compartment cells, applying a voltage such that the process solution is acidified, basified, and desalted, flowing the process solution out of the apparatus, and desorbing CO2 out of the process solution.
摘要翻译：一种方法包括将工艺溶液和电极溶液流入BPMED装置，施加电压使得工艺溶液酸化和碱化并产生溶解的CO 2，使工艺溶液流出设备，并将CO 2从工艺溶液中解吸出来。从海洋中解吸CO 2的方法包括将海水和电极溶液流入BPMED装置，施加电压使得溶解的CO 2产生，将海水从设备中流出，并将CO 2从海水中解吸。一种生产脱盐溶液和二氧化碳气体的方法包括将工艺溶液和电极溶液流入包括一个或多个三室电池的BPMED装置中，施加电压使得该工艺溶液被酸化，碱化和脱盐，从设备中解出来，并将二氧化碳从工艺解决方案中解脱出来。

10. 发明申请

US20060112985A1 Heterojunction photovoltaic cell 失效
标题翻译：异质结光伏电池
公开(公告)号：US20060112985A1
公开(公告)日：2006-06-01
申请号：US11001330
申请日：2004-12-01
申请人： Thomas Hantschel , Karl Littau , Scott Elrod
发明人： Thomas Hantschel , Karl Littau , Scott Elrod
IPC分类号： H01L31/00
CPC分类号： H01L31/1828 , H01L31/03529 , H01L31/073 , Y02E10/543 , Y02P70/521
摘要： In accordance with one aspect of the present disclosure, a solar photovoltaic device is disclosed. The semiconductor material of the solar photovoltaic device is a heterostructure of two different binary compounds of the same metal. One or both of the two different binary compounds of the same metal are doped so that they have a conduction band edge offset of greater than about 0.4 eV. The binary compound acting as the optical absorbing material of the solar photovoltaic device has a bandgap of about 1.0 eV to about 1.8 eV.
摘要翻译：根据本公开的一个方面，公开了一种太阳能光伏器件。太阳能光伏器件的半导体材料是相同金属的两种不同二元化合物的异质结构。掺杂相同金属的两种不同二元化合物中的一种或两种，使得它们具有大于约0.4eV的导带边缘偏移。用作太阳能光伏器件的光吸收材料的二元化合物具有约1.0eV至约1.8eV的带隙。

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