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1. 发明申请

US20060211217A1 METHODS FOR MAKING LARGE DIMENSION, FLEXIBLE PIEZOELECTRIC CERAMIC TAPES 有权
标题翻译：制造大尺寸，柔性压电陶瓷带的方法
公开(公告)号：US20060211217A1
公开(公告)日：2006-09-21
申请号：US11017470
申请日：2004-12-20
申请人： Baomin Xu , Steven Buhler , William Wong , Michael Weisberg , Scott Solberg , Karl Littau , Scott Elrod
发明人： Baomin Xu , Steven Buhler , William Wong , Michael Weisberg , Scott Solberg , Karl Littau , Scott Elrod
IPC分类号： H01L21/30
CPC分类号： G01N29/245 , B06B1/0622 , G01L1/16 , G01N29/2475 , G01N2291/02827 , G01N2291/2694 , H01L27/20 , H01L41/313 , H01L41/314 , H01L41/47
摘要： A method for producing a detection/test tape includes depositing a material onto a surface of at least one first substrate to form a plurality of element structures. Electrodes are deposited on a surface of each of the plurality of element structures, and the element structures are bonded to a second substrate, where the second substrate is conductive or has a conductive layer, and the second substrate is carried on a carrier plate. The at least one first substrate is removed from the element structures and second side electrodes are deposited on a second surface of each of the plurality of element structures. An insulative material is inserted around the element structures to electrically isolate the two substrates used to bond the element structures. A second side of the element structures is then bonded to another substrate, where the other substrate is conductive or has a conductive layer. Thereafter, the carrier plate carrying the second substrate is removed.
摘要翻译：一种用于制造检测/测试带的方法包括将材料沉积在至少一个第一基底的表面上以形成多个元件结构。电极沉积在多个元件结构中的每一个的表面上，并且元件结构被结合到第二衬底，其中第二衬底是导电的或具有导电层，并且第二衬底承载在载体板上。从元件结构中去除至少一个第一衬底，并且将第二侧电极沉积在多个元件结构中的每一个的第二表面上。绝缘材料插入在元件结构周围以电隔离用于结合元件结构的两个基板。然后将元件结构的第二面接合到另一个衬底，其中另一个衬底是导电的或具有导电层。此后，移除携带第二基板的承载板。

2. 发明申请

US20050104479A1 Piezoelectric ceramic thick film element, array of elements, and devices 有权
标题翻译：压电陶瓷厚膜元件，元件阵列和器件
公开(公告)号：US20050104479A1
公开(公告)日：2005-05-19
申请号：US11017494
申请日：2004-12-20
申请人： Baomin Xu , Steven Buhler , Michael Welsberg , William Wong , Scott Solberg , Karl Littau , John Fitch , Scott Elrod
发明人： Baomin Xu , Steven Buhler , Michael Welsberg , William Wong , Scott Solberg , Karl Littau , John Fitch , Scott Elrod
IPC分类号： B41J2/16 , H01L41/24 , H01L41/08
CPC分类号： B41J2/161 , B41J2/1623 , B41J2/1632 , B41J2/1634 , B41J2/1637 , B41J2/1646 , H01L41/313 , H01L41/314 , H01L41/331 , H01L2221/68368 , Y10T29/42 , Y10T29/435 , Y10T29/49128 , Y10T29/4913 , Y10T29/49133 , Y10T29/49155 , Y10T29/4981
摘要： A piezoelectric thick film element array includes at least one piezoelectric element structure having a thickness between 10 μm to 100 μm formed by a deposition process. The at least one piezoelectric element is patterned during the deposition process, and includes a first electrode deposited on a first surface of the piezoelectric elements structure, and a second electrode deposited on a second surface of the piezoelectric element structure. In a further embodiment, several devices are provided using a piezoelectric element or an array having a piezoelectric element structure with a thickness of between 10 μm to 100 μm formed by a deposition process. These devices include microfluidic ejectors, transducer arrays and catheters.
摘要翻译：压电厚膜元件阵列包括通过沉积工艺形成的至少一个压电元件结构，其厚度在10um至100μm之间。所述至少一个压电元件在所述沉积工艺期间被图案化，并且包括沉积在所述压电元件结构的第一表面上的第一电极和沉积在所述压电元件结构的第二表面上的第二电极。在另一实施例中，使用压电元件或具有通过沉积工艺形成的厚度在10um至100μm之间的压电元件结构的阵列来提供若干器件。这些装置包括微流体喷射器，换能器阵列和导管。

3. 发明申请

US20050162045A1 Methods to make thick film single elements and arrays 有权
标题翻译：制作厚膜单元件和阵列的方法
公开(公告)号：US20050162045A1
公开(公告)日：2005-07-28
申请号：US11084579
申请日：2005-03-18
申请人： Baomin Xu , Steven Buhler , Michael Welsberg , William Wong , Scott Solberg , Karl Littau , John Fitch , Scott Elrod
发明人： Baomin Xu , Steven Buhler , Michael Welsberg , William Wong , Scott Solberg , Karl Littau , John Fitch , Scott Elrod
IPC分类号： B41J2/16 , H01L41/24 , H01L41/08
CPC分类号： B41J2/161 , B41J2/1623 , B41J2/1632 , B41J2/1634 , B41J2/1637 , B41J2/1646 , H01L41/313 , H01L41/314 , H01L41/331 , H01L2221/68368 , Y10T29/42 , Y10T29/435 , Y10T29/49128 , Y10T29/4913 , Y10T29/49133 , Y10T29/49155 , Y10T29/4981
摘要： A material for a thick film element is deposited onto a surface of a first substrate to form a thick film element structure having a thickness of between greater than 10 μm to 100 μm. The at least one thick film element structure is bonded to a second substrate. Thereafter, the first substrate is removed from the at least one thick film element structure using a liftoff process which includes emitting, from a radiation source (such as a laser or other appropriate device), a beam through the first substrate to an attachment interface formed between the first substrate and the at least one thick film element structure at the surface of the first substrate. The first substrate is substantially transparent at the wavelength of the beam, and the beam generates sufficient energy at the interface to break the attachment.
摘要翻译：将用于厚膜元件的材料沉积到第一基板的表面上以形成厚度大于10um至100μm的厚膜元件结构。所述至少一个厚膜元件结构被结合到第二基板。此后，使用包括从辐射源（例如激光或其它合适的装置）发射通过第一基板的光束到形成的附接接口的剥离过程，从至少一个厚膜元件结构中去除第一基板，在第一基板和第一基板的表面处的至少一个厚膜元件结构之间。第一衬底在光束的波长处基本上是透明的，并且光束在界面处产生足够的能量以破坏附件。

4. 发明申请

US20060103695A1 Thin film and thick film heater and control architecture for a liquid drop ejector 有权
标题翻译：薄膜和厚膜加热器和液滴喷射器的控制架构
公开(公告)号：US20060103695A1
公开(公告)日：2006-05-18
申请号：US10990110
申请日：2004-11-15
申请人： Michael Young , Steven Buhler , Scott Limb , Karl Littau , Beverly Russo , Scott Solberg , Michael Weisberg , Cathie Burke , Richard Schmachtenberg , Peter Nystrom , Sharon Berger , Timothy Trang , Thomas Long
发明人： Michael Young , Steven Buhler , Scott Limb , Karl Littau , Beverly Russo , Scott Solberg , Michael Weisberg , Cathie Burke , Richard Schmachtenberg , Peter Nystrom , Sharon Berger , Timothy Trang , Thomas Long
IPC分类号： B41J2/05
CPC分类号： B41J2/1626 , B41J2/14072 , B41J2/14129 , B41J2/14153 , B41J2/1603 , B41J2/1631
摘要： A liquid drop ejector comprising a jet stack, thin film or thick film heaters formed on the surface of the jet stack, and at least one thin film or thick film temperature sensor operative to provide feedback temperature control for the thin film or thick film heater elements is provided. In one form, the liquid drop ejector also has the thin film or thick film heater elements grouped in segments that are operative to be individually controlled. In addition, in another form, the signal lines provided to the liquid drop ejector are patterned to allow for more uniform resistance over the span of the liquid drop ejector.
摘要翻译：一种液滴喷射器，包括形成在射流堆叠表面上的喷射叠层，薄膜或厚膜加热器，以及至少一个薄膜或厚膜温度传感器，用于为薄膜或厚膜加热器元件提供反馈温度控制被提供。在一种形式中，液滴喷射器还具有分组的薄膜或厚膜加热器元件，其可操作以单独控制。此外，在另一种形式中，提供给液滴喷射器的信号线被图案化以允许在液滴喷射器的跨度上具有更均匀的电阻。

5. 发明申请

US20060132531A1 Fluidic structures 有权
公开(公告)号：US20060132531A1
公开(公告)日：2006-06-22
申请号：US11014356
申请日：2004-12-16
申请人： John Fitch , Scott Elrod , Jurgen Daniel , James Stasiak , Steven Buhler , Babur Hadimioglu , Joy Roy , Michael Weisberg , James Zesch
发明人： John Fitch , Scott Elrod , Jurgen Daniel , James Stasiak , Steven Buhler , Babur Hadimioglu , Joy Roy , Michael Weisberg , James Zesch
IPC分类号： B01L3/00
CPC分类号： B01L3/0268 , B01L2200/12 , B01L2300/0819 , B01L2400/0433 , B01L2400/0605 , B01L2400/084
摘要： Various fluidic techniques can employ ducting structures, such as microstructures, that extend between other components, such as plate-like structures. A ducting structure can, for example, include an inlet opening toward or near one plate-like structure, an outlet opening toward or near another plate-like structure, and a duct in which fluid flows after being received through the inlet opening and before being provided through the outlet opening. In some implementations, a ducting structure is photo-defined, such as by exposing a photoimageable structure and then removing either exposed or unexposed regions. In some implementations, a ducting structure is a freestanding polymer microstructure. In some implementations, ducting structures are microstructures that extend approximately the same length between first and second plate-like structures, and have a ratio of length to maximum cavity diameter of approximately two or more. A printhead implementation includes an array of such microstructures supported between drive side and drop side assemblies.

6. 发明申请

US20070139481A1 Micromachined fluid ejectors using piezoelectric actuation 有权
标题翻译：使用压电驱动的微加工液体喷射器
公开(公告)号：US20070139481A1
公开(公告)日：2007-06-21
申请号：US11312305
申请日：2005-12-20
申请人： Baomin Xu , Steven Buhler , Stephen White , Scott Limb
发明人： Baomin Xu , Steven Buhler , Stephen White , Scott Limb
IPC分类号： B41J2/05
CPC分类号： B41J2/14233 , B41J2/161 , B41J2/1623 , B41J2/1628 , B41J2/1629 , B41J2/1634 , B41J2/1639 , B41J2/1642 , B41J2/1643 , B41J2/1646 , B41J2002/14475 , Y10T29/42 , Y10T29/49401
摘要： A micromachined fluid ejector includes an ejector body having a fluid cavity for holding fluid to be ejected and a piezoelectric actuator for ejecting the fluid. A nozzle plate is placed in operable association with the ejector body. The configuration of the nozzle plate is selected to adjust a volume of the fluid cavity to obtain a desired mechanical impedance matching between the fluid and the actuator.
摘要翻译：微机械流体喷射器包括具有用于保持要喷射的流体的流体腔的喷射器主体和用于喷射流体的压电致动器。喷嘴板被放置成与喷射器主体可操作地相关联。选择喷嘴板的构造以调节流体腔的体积以获得流体和致动器之间的期望的机械阻抗匹配。

7. 发明申请

US20060130302A1 Method for forming ceramic thick film element arrays with fine feature size, high-precision definition, and/or high aspect ratios 有权
标题翻译：用于形成具有精细特征尺寸，高精度定义和/或高纵横比的陶瓷厚膜元件阵列的方法
公开(公告)号：US20060130302A1
公开(公告)日：2006-06-22
申请号：US11017569
申请日：2004-12-20
申请人： Baomin Xu , Stephen White , Steven Buhler
发明人： Baomin Xu , Stephen White , Steven Buhler
IPC分类号： H04R17/00 , B28B3/06 , H05K3/10
CPC分类号： H01L27/20 , H01L41/1876 , H01L41/313 , H01L41/331 , Y10T29/42 , Y10T29/435 , Y10T29/49155 , Y10T29/49163
摘要： A method is provided that includes providing a mold on a temporary substrate, e.g., a sapphire substrate. Next, a material such as PZT paste is deposited into the mold. Then, the mold is removed to obtain elements formed by the mold. The formed elements will then be sintered. After sintering, electrode deposition is optionally performed. The sintered elements are then bonded to a final target substrate and released from the temporary substrate through laser liftoff. Further, electrodes may also be optionally deposited at this point.
摘要翻译：提供了一种方法，其包括在临时衬底（例如，蓝宝石衬底）上提供模具。接下来，将诸如PZT糊料的材料沉积到模具中。然后，去除模具以获得由模具形成的元件。然后将所形成的元件烧结。烧结后，任选地进行电极沉积。然后将烧结元件结合到最终目标衬底，并通过激光剥离从临时衬底释放。此外，电极也可以任选地沉积在这一点上。

8. 发明申请

US20050134153A1 Piezoelectric diaphragm structure with outer edge electrode 失效
标题翻译：压电膜片结构，外缘电极
公开(公告)号：US20050134153A1
公开(公告)日：2005-06-23
申请号：US10739478
申请日：2003-12-18
申请人： John Bachellerie , Steven Buhler , John Fitch , Meng Lean , Karl Littau
发明人： John Bachellerie , Steven Buhler , John Fitch , Meng Lean , Karl Littau
IPC分类号： H01L41/047 , H01L41/09
CPC分类号： H01L41/0973 , H01L41/047
摘要： A multi-electrode piezoelectric diaphragm structure includes a diaphragm, piezoelectric material located on the diaphragm, which is defined as having a first area, and a second area. The first area of the piezoelectric is poled in a first direction, and the second area of the piezoelectric is poled in a second direction. The poled first direction is in a Z-axis of the piezoelectric and the poled second direction is in a Radial axis of the piezoelectric. A first electrode is positioned in the first area, on the first surface, of the piezoelectric. A second electrode is positioned in the second area, on the first surface, of the piezoelectric. A third electrode is located on a second surface of the piezoelectric. The application of voltages to the first, second and third electrodes generates electric fields in the piezoelectric material resulting in actuation of the piezoelectric material, or the application of pressure or strain to the diaphragm generates electric potentials at the first, second and third electrodes.
摘要翻译：多电极压电膜结构包括隔膜，位于膜片上的压电材料，其被定义为具有第一区域，第二区域。压电体的第一区域沿第一方向极化，并且压电体的第二区域在第二方向上极化。极化的第一方向在压电体的Z轴上，并且极化的第二方向处于压电体的径向轴线。第一电极位于压电体的第一表面的第一区域中。第二电极位于压电体的第一表面的第二区域中。第三电极位于压电体的第二表面上。施加电压到第一，第二和第三电极在压电材料中产生电场，导致压电材料的致动，或施加压力或应变到隔膜在第一，第二和第三电极处产生电位。

9. 发明申请

US20050200236A1 Method of fabricating an array of multi-electroded piezoelectric transducers for piezoelectric diaphragm structures 失效
标题翻译：制造用于压电隔膜结构的多电极压电换能器阵列的方法
公开(公告)号：US20050200236A1
公开(公告)日：2005-09-15
申请号：US11104887
申请日：2005-04-13
申请人： Steven Buhler , John Fitch , Meng Lean , Karl Littau
发明人： Steven Buhler , John Fitch , Meng Lean , Karl Littau
IPC分类号： B41J2/14 , B41J2/16 , H01L41/09 , H01L41/24
CPC分类号： B41J2/14233 , B41J2/14282 , B41J2/161 , B41J2/1614 , B41J2/1632 , H01L41/0973 , H01L41/257 , H01L41/313 , H01L41/314 , H01L41/331 , Y10T29/42 , Y10T29/49128 , Y10T29/4913 , Y10T29/49155 , Y10T29/49156 , Y10T29/4921 , Y10T29/49401
摘要： A circuit provides energy to a plurality of piezoelectric diaphragm structures formed in a two-dimensional array. Each piezoelectric diaphragm structure includes a piezoelectric element in operational contact with at least a first side electrode and a second side electrode. A switching system includes a first connection for a first power source, for application of power to the first side electrode and a second connection for a second power source, for application of power to the second side electrode. In a first state, power appropriate for performing a poling operation of the piezoelectric material is available for application to the first electrode, and the second electrode, and in a second state, power appropriate to activate the piezoelectric material to cause operational movement of the poled piezoelectric diaphragm structure is available for application to the first electrode and the second electrode.
摘要翻译：电路向以二维阵列形成的多个压电振膜结构提供能量。每个压电膜结构包括与至少第一侧电极和第二侧电极操作接触的压电元件。交换系统包括用于第一电源的第一连接，用于向第一侧电极施加电力和用于第二电源的第二连接，用于向第二侧电极施加电力。在第一状态下，适于执行压电材料的极化操作的电力可用于施加到第一电极和第二电极，并且在第二状态下，适于激活压电材料的动力引起极化的操作运动压电膜结构可应用于第一电极和第二电极。

10. 发明申请

US20050134152A1 Radially poled piezoelectric diaphragm structures 有权
标题翻译：径向极化压电隔膜结构
公开(公告)号：US20050134152A1
公开(公告)日：2005-06-23
申请号：US10740292
申请日：2003-12-18
申请人： Meng Lean , Steven Buhler , John Fitch , Karl Littau
发明人： Meng Lean , Steven Buhler , John Fitch , Karl Littau
IPC分类号： H01L41/047 , H01L41/09
CPC分类号： H01L41/0973 , H01L41/047
摘要： In accordance with one embodiment of the present application, a piezoelectric diaphragm structure includes a diaphragm, with a piezoelectric material located on the diaphragm. The piezoelectric material is being poled in a radial direction to the piezoelectric material, wherein the poling direction is in-plane with the piezoelectric material. An inter-digitated electrode grid is positioned on a first surface of the piezoelectric material, the inter-digitated electrode grid including a plurality of electrodes configured to selectively receive positive and negative voltage. The application of the positive and negative voltages generate electric fields in the piezoelectric material, at least a portion of which are in-plane with the piezoelectric material, resulting in an actuation of the piezoelectric material, causing a length change of the piezoelectric material in the Radial direction. In accordance with another embodiment of the present application, provided is a method of actuating a piezoelectric diaphragm structure, including poling a piezoelectric material in a radial direction of the piezoelectric material, wherein the poling direction is in-plane with the piezoelectric material. The piezoelectric material is located in operative contact with the diaphragm, and an electrode arrangement located on a surface of the piezoelectric material is selectively supplied with voltages generating electric fields. The generated electric fields are at least partially in the same plane as the poling direction, resulting in a d33 mode of actuation of the piezoelectric material, causing a length change of the piezoelectric material in the Radial direction.
摘要翻译：根据本申请的一个实施例，压电振膜结构包括隔膜，压电材料位于隔膜上。压电材料在压电材料的径向方向上被极化，其中极化方向与压电材料成平面。数字化电极栅格位于压电材料的第一表面上，数字化电极栅格包括多个电极，其被配置为选择性地接收正电压和负电压。正压和负电压的施加在压电材料中产生电场，其压电材料的至少一部分与压电材料成平面，导致压电材料的致动，导致压电材料的长度变化径向。根据本申请的另一实施例，提供了一种致动压电膜结构的方法，包括在压电材料的径向方向上极化压电材料，其中极化方向与压电材料成平面。压电材料位于与隔膜有效接触的位置，并且位于压电材料表面上的电极装置被选择性地供给产生电场的电压。产生的电场至少部分地在与极化方向相同的平面中，导致压电材料的致动模式，导致压电材料在径向方向上的长度变化。

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