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1. 发明专利

JP2010182698A Extreme ultraviolet light source 审中-公开
标题翻译：极光紫外线光源
公开(公告)号：JP2010182698A
公开(公告)日：2010-08-19
申请号：JP2010110262
申请日：2010-05-12
申请人： Cymer Inc , サイマーインコーポレイテッド
发明人： MELNYCHUK STEPHAN T , PARTLO WILLIAM N , FOMENKOV IGOR V , OLIVER I ROGER , NESS RICHARD M , BOWERING NORBERT , KHODYKIN OLEH , RETTIG CURTIS L , BLUMENSTOCK GERRY M , DYER TIMOTHY S , SIMMONS RODNEY D , HOFFMAN JERZY R , JOHNSON R MARK
IPC分类号： H05G2/00 , H01L21/027
摘要： PROBLEM TO BE SOLVED: To provide a reliable, high-repetition rate, production line compatible high energy photon source. SOLUTION: Very hot plasma containing an active material is produced in a vacuum chamber. The active material is an atomic element having an emission line within a desired extreme ultraviolet (EUV) range. A pulse power source comprising a charging capacitor and a magnetic compression circuit having a pulse transformer, provides electrical pulses having sufficient energy and an electrical potential sufficient to produce the EUV light at an intermediate focus at rates in excess of 5 Watts. In preferred embodiments designed by the applicants, in-band EUV light energy at the intermediate focus is 45 Watts, extendable to 105.8 Watts. COPYRIGHT: (C)2010,JPO&INPIT
摘要翻译：要解决的问题：提供可靠，高重复率，生产线兼容的高能光子源。
解决方案：在真空室中产生含有活性物质的非常热的等离子体。活性物质是具有期望的极紫外（EUV）范围内的发射线的原子元素。包括充电电容器和具有脉冲变压器的磁压缩电路的脉冲电源提供具有足够的能量和电势的电脉冲，以足以以超过5瓦的速率以中间焦点产生EUV光。在由申请人设计的优选实施例中，中间焦点的带内EUV光能量为45瓦，可扩展到105.8瓦。版权所有（C）2010，JPO＆INPIT

2. 发明专利

JP2007311824A Halogen gas discharge laser electrode 审中-公开
标题翻译：卤化物放电激光电极
公开(公告)号：JP2007311824A
公开(公告)日：2007-11-29
申请号：JP2007195677
申请日：2007-07-27
申请人： Cymer Inc , サイマーインコーポレイテッド
发明人： STEIGER THOMAS D , UJAZDOWSKI RICHARD C , DYER TIMOTHY S , DUFFEY THOMAS P , GILLESPIE WALTER D , MOOSMAN BRYAN G , MORTON RICHARD G , STRATE BRIAN D
IPC分类号： H01S3/038 , H01S20060101 , H01S3/097 , H01S3/0971 , H01S3/22 , H01S3/225
CPC分类号： H01S3/225 , H01S3/0381 , H01S3/0385 , H01S3/0388 , H01S3/0971 , H01S3/09713
摘要： PROBLEM TO BE SOLVED: To provide a gas discharge laser light source electrode having a high repetition rate and high power. SOLUTION: A gas discharge laser light source electrode can include a laser chamber and an electrode element forming a cathode and an anode. Each of cathode and anode has a discharge acceptance region. The discharge acceptance region forms two longitudinal edges. The anode includes a first long and slender anode portion, which is entirely located in the discharge acceptance region of the anode and includes first anode material specifying an erosion rate of the first anode material, a pair of second long and slender anode portions, which are located at each side and at least a part of the first anode portion in the discharge acceptance region, respectively, and includes a second anode material specifying the erosion rate of the second anode material, and a long and slender electrode center base portion integrated with the first long and slender anode portion. Each pair of the second long and slender anode portions is mechanically joined to the center base portion. COPYRIGHT: (C)2008,JPO&INPIT
摘要翻译：要解决的问题：提供具有高重复率和高功率的气体放电激光光源电极。解决方案：气体放电激光光源电极可以包括激光室和形成阴极和阳极的电极元件。阴极和阳极都具有放电接受区域。放电接收区域形成两个纵向边缘。阳极包括第一长且细长的阳极部分，其完全位于阳极的放电接收区域中，并且包括指定第一阳极材料的侵蚀速率的第一阳极材料，一对第二长而细长的阳极部分分别位于放电接受区域中的第一阳极部分的每一侧和至少一部分，并且包括指定第二阳极材料的侵蚀速率的第二阳极材料和与该第二阳极材料整体形成的长而细长的电极中心基部第一长而细长的阳极部分。每对第二长而细长的阳极部分机械地连接到中心基部。版权所有（C）2008，JPO＆INPIT

3. 发明专利

JP2013179073A Extreme ultraviolet light source 审中-公开
标题翻译：极光紫外线光源
公开(公告)号：JP2013179073A
公开(公告)日：2013-09-09
申请号：JP2013097975
申请日：2013-05-07
申请人： Cymer Inc , サイマーインコーポレイテッド
发明人： MELNYCHUK STEPHAN T , PARTLO WILLIAM N , FOMENKOV IGOR V , OLIVER I ROGER , NESS RICHARD M , BOWERING NORBERT , KHODYKIN OLEH , RETTIG CURTIS L , BLUMENSTOCK GERRY M , DYER TIMOTHY S , SIMMONS RODNEY D , HOFFMAN JERZY R , JOHNSON R MARK
IPC分类号： G21K5/00 , H05G2/00 , G01J1/00 , G03F7/20 , G21K5/02 , H01L21/027 , H01S3/00 , H05H1/06 , H05H1/24
CPC分类号： H05G2/003 , B82Y10/00 , G03F7/70033 , G03F7/70166 , G03F7/70175 , G03F7/70916 , H01S3/005 , H05G2/005 , H05G2/008 , H05H1/06
摘要： PROBLEM TO BE SOLVED: To provide a high energy photon source having reliability, high in repetition rate, and good in compatibility with production lines.SOLUTION: Very hot plasma containing an active material is produced in a vacuum chamber. The active material is an atom having an emission line within a desired extreme ultraviolet (EUV) range. A pulse power source that includes a charging capacitor and a magnetic compression circuit having a pulse converter, provides electrical pulses having energy and an electrical potential sufficient to produce the EUV light at an intermediate focus at rates exceeding 5 Watts. In a preferred embodiment designed by the applicants, in-band EUV light energy at the intermediate focus is 45 Watts, further extendable to 105.8 Watts.
摘要翻译：要解决的问题：提供具有可靠性，高重复率和与生产线相容性好的高能光子源。解决方案：在真空室中产生含有活性材料的非常热的等离子体。活性物质是具有期望的极紫外（EUV）范围内的发射线的原子。包括充电电容器和具有脉冲转换器的磁压缩电路的脉冲电源提供电脉冲，其具有足以以超过5瓦的速率在中间焦点处产生EUV光的能量和电势。在由申请人设计的优选实施例中，中间焦点的带内EUV光能量为45瓦，进一步可扩展至105.8瓦。

4. 发明专利

AU2003230870A1 EXTREME ULTRAVIOLET LIGHT SOURCE 未知
公开(公告)号：AU2003230870A1
公开(公告)日：2003-10-27
申请号：AU2003230870
申请日：2003-04-09
申请人： CYMER INC
发明人： RETTIG CURTIS L , BLUMENSTOCK GERRY M , DYER TIMOTHY S , SIMMONS RODNEY D , HOFFMAN JERZY R , JOHNSON R MARK , MELNYCHUK STEPHEN T , PARTLO WILLIAM N , FOMENKOV IGOR V , OLIVER I ROGER , NESS RICHARD M , BOWERING NORBERT , KHODYKIN OLEH
IPC分类号： G21K5/00 , G01J1/00 , G03F7/20 , G21K5/02 , H01L21/027 , H01S3/00 , H05G2/00 , H05H1/06 , H05H1/24
摘要： An apparatus for generating EUV radiation is disclosed which may include a target material, a system generating a laser beam for interaction with the target material and a pair of electrodes. A pulse power electrical circuit may be provided for generating a discharge between said electrodes to produce EUV radiation from said target material.

5. 发明专利

DE602005024387D1 VERBESSERUNGEN VON GASENTLADUNGSLASER-KAMMERN 未知
公开(公告)号：DE602005024387D1
公开(公告)日：2010-12-09
申请号：DE602005024387
申请日：2005-03-03
申请人： CYMER INC
发明人： PARTLO WILLIAM N , AMADA YOSHIHO , CARMICHAEL JAMES A , DYER TIMOTHY S , GILLESPIE WALTER D , MOOSMAN BRYAN G , RETTIG CURTIS L , STRATE BRIAN D , STEIGER THOMAS D , TRINTCHOUK FEDOR B , UJAZDOWSKI RICHARD C
IPC分类号： H01S3/22 , H01S3/03 , H01S3/036 , H01S3/038 , H01S3/041 , H01S3/097 , H01S3/0971 , H01S3/225

6. 发明专利

AU2003230870A8 Extreme ultraviolet light source 未知
公开(公告)号：AU2003230870A8
公开(公告)日：2003-10-27
申请号：AU2003230870
申请日：2003-04-09
申请人： CYMER INC
发明人： SIMMONS RODNEY D , FOMENKOV IGOR V , HOFFMAN JERZY R , KHODYKIN OLEH , BOWERING NORBERT , PARTLO WILLIAM N , MELNYCHUK STEPHEN T , JOHNSON R MARK , RETTIG CURTIS L , NESS RICHARD M , BLUMENSTOCK GERRY M , OLIVER I ROGER , DYER TIMOTHY S
IPC分类号： G21K5/00 , G01J1/00 , G03F7/20 , G21K5/02 , H01L21/027 , H01S3/00 , H05G2/00 , H05H1/06 , H05H1/24 , H05H1/34 , H05H1/04
摘要： An apparatus for generating EUV radiation is disclosed which may include a target material, a system generating a laser beam for interaction with the target material and a pair of electrodes. A pulse power electrical circuit may be provided for generating a discharge between said electrodes to produce EUV radiation from said target material.

7. 发明专利

AU2002324905A1 High rep-rate laser with improved electrodes 未知
公开(公告)号：AU2002324905A1
公开(公告)日：2003-03-24
申请号：AU2002324905
申请日：2002-09-06
申请人： CYMER INC
发明人： IVASCHENKO ALEX P , GILLESPIE WALTER D , RETTIG CURTIS L , UJAZDOWSKI RICHARD C , MOOSMAN BRYAN , STEIGER THOMAS D , MORTON RICHARD G , WATSON TOM A , DYER TIMOTHY S
IPC分类号： H01S3/22 , H01S3/223

8. 发明申请

WO2005013441A3 CATHODES FOR FLUORINE GAS DISCHARGE LASERS 审中-公开
标题翻译：氟气排放激光灯
公开(公告)号：WO2005013441A3
公开(公告)日：2005-10-20
申请号：PCT/US2004023663
申请日：2004-07-21
申请人： CYMER INC , STEIGER THOMAS D , BROWN JOSHUA C , DUFFEY THOMAS P , GILLESPIE WALTER D , MORTON RICHARD G , DYER TIMOTHY S
发明人： STEIGER THOMAS D , BROWN JOSHUA C , DUFFEY THOMAS P , GILLESPIE WALTER D , MORTON RICHARD G , DYER TIMOTHY S
IPC分类号： H01R43/00 , H01S20060101 , H01S3/00 , H01S3/036 , H01S3/038 , H01S3/097 , H01S3/0971 , H01S3/225
CPC分类号： H01S3/038 , H01S3/036 , H01S3/0381 , H01S3/0382 , H01S3/0385 , H01S3/0388 , H01S3/097 , H01S3/09702 , H01S3/0971 , H01S3/225 , H01S3/2251 , H01S3/2256 , H01S3/2258
摘要： A fluorine gas discharge laser electrode (70) for a gas discharge laser having a laser gas containing fluorine is disclosed which may comprise a copper and copper alloy cathode body having an upper curved region containing the discharge footprint (74) for the cathode comprising copper and a lower portion comprising a copper alloy.
摘要翻译：公开了一种用于具有含氟激光气体的气体放电激光器的氟气放电激光电极（70），该氟气气体放电激光电极（70）包括铜和铜合金阴极体，该铜和铜合金阴极体具有上部弯曲区域，该上部弯曲区域包含用于阴极的放电足迹（74）包括铜合金的下部。

9. 发明申请

WO2005091887A3 EUV LIGHT SOURCE OPTICAL ELEMENTS 审中-公开
标题翻译： EUV光源光学元件
公开(公告)号：WO2005091887A3
公开(公告)日：2005-12-29
申请号：PCT/US2005006199
申请日：2005-02-24
申请人： CYMER INC , BOWERING NORBERT R , ERSHOV ALEXANDER I , DYER TIMOTHY S , GRINOLDS HUGH R
发明人： BOWERING NORBERT R , ERSHOV ALEXANDER I , DYER TIMOTHY S , GRINOLDS HUGH R
IPC分类号： G03F7/20 , G03F9/00 , G21K1/06
CPC分类号： G21K1/062 , B82Y10/00 , G03F7/70175 , G03F7/70916
摘要： A plasma generated EUV light source reflecting element includes a multilayer stack (20) having at least one binary layer (30) comprising a first material (32) doped with a second material (34) and capping layers (22) including single and binary capping layers (24).
摘要翻译：等离子体产生的EUV光源反射元件包括具有至少一个二元层（30）的多层堆叠（20），所述二元层包含掺杂有第二材料（34）的第一材料（32）和包覆单层和二元封盖层（24）。

10. 发明申请

WO2005013391A2 ANODES FOR FLUORINE GAS DISCHARGE LASERS 审中-公开
标题翻译：氟化物放射性激光阳极
公开(公告)号：WO2005013391A2
公开(公告)日：2005-02-10
申请号：PCT/US2004023012
申请日：2004-07-16
申请人： CYMER INC , DYER TIMOTHY S , MORTON RICHARD , GILLESPIE WALTER D , STEIGER THOMAS D
发明人： DYER TIMOTHY S , MORTON RICHARD , GILLESPIE WALTER D , STEIGER THOMAS D
IPC分类号： H01M20060101 , H01S3/036 , H01S3/038 , H01S3/097 , H01S3/0971 , H01S3/22 , H01S3/223 , H01S3/225 , H01M
CPC分类号： H01S3/038 , H01S3/036 , H01S3/0381 , H01S3/0382 , H01S3/0385 , H01S3/0388 , H01S3/097 , H01S3/09702 , H01S3/09713 , H01S3/225 , H01S3/2251 , H01S3/2256
摘要： Electrodes for a fluorine gas discharge laser are disclosed which may comprise a crown straddling the centerline axis between the pair of side walls and the pair of end walls, comprising a first material, forming at least a portion of the discharge region of the electrode; the crown in traverse cross section having the shape of the upper half of a canted ellipse rotated in the preionizer direction, such that a tangent to the short centerline axis of the ellipse forms an angle with the horizontal. Another embodiment may comprise an anode blade having a top portion and a first and second sidewall portion each intersecting the top portion; the anode blade being formed with the shape in cross section of the top portion being curvilinear and intersecting the generally straight portions of each of first and second sidewall portions along a radius of curvature and with the top portion beveled away from an asymmetric discharge side of the anode. Another embodiment may comprise an anode and an up-stream fairing each composed of electrically conductive material, at least the discharge receiving portion of which is coated with a thin dielectric layer, e.g. is anodized. Another embodiment may comprise at least a portion of the discharge region of a gas discharge electrode is covered with a preformed reef having generally uniform pore size and distribution. A method is disclosed for reef making which may comprise forming the reef of a vacuum infiltrated porous anodized material. Another disclosed method may comprise forming a first anodization layer on the surface of the electrode at least in the discharge region; removing the anodization layer; forming a second anodization layer on the surface of the electrode at least in the discharge region; which may be followed by widening the pores in the second anodization layer, thinning the second anodization layer; and filling the pores with a conductive material. A further method may comprise forming a reef template on at least the discharge region of the elongated gas discharge region; selectively growing a porous layer of insulating material as dictated by the reef template, and may further comprise a positive template or a negative template.
摘要翻译：公开了一种用于氟气体放电激光器的电极，其可以包括横跨所述一对侧壁和所述一对端壁之间的中心线轴线的冠，包括形成电极的放电区域的至少一部分的第一材料; 横截面中的冠部具有以预旋转方向旋转的倾斜椭圆的上半部的形状，使得与椭圆形的短中心线轴的切线与水平方向成一角度。另一个实施例可以包括具有顶部部分和分别与顶部部分相交的第一和第二侧壁部分的阳极刀片; 阳极叶片形成为顶部部分的横截面形状为曲线，并且沿着曲率半径与第一和第二侧壁部分的每一个的大体直线部分相交，并且顶部部分从远离第一和第二侧壁部分的不对称排放侧倾斜阳极。另一个实施例可以包括每个由导电材料构成的阳极和上游整流罩，至少其放电接收部分涂覆有薄介电层，例如电介质层。被阳极氧化。另一个实施例可以包括气体放电电极的放电区域的至少一部分被具有大致均匀的孔径和分布的预成型的礁石覆盖。公开了一种用于珊瑚制造的方法，其可以包括形成真空渗透的多孔阳极氧化材料的珊瑚礁。另一公开的方法可以包括至少在放电区域中在电极的表面上形成第一阳极氧化层; 去除阳极氧化层; 至少在所述放电区域中在所述电极的表面上形成第二阳极氧化层; 其可以随后扩大第二阳极氧化层中的孔，使第二阳极氧化层变薄; 并用导电材料填充孔。另外的方法可以包括在细长气体放电区域的至少放电区域上形成珊瑚礁模板; 根据珊瑚礁模板选择性地生长绝缘材料的多孔层，并且还可以包括正模板或负模板。

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