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    • 3. 发明授权
    • Apparatus for treating workpieces
    • 用于处理工件的装置
    • US07074275B2
    • 2006-07-11
    • US10892530
    • 2004-07-15
    • Gregor ArnoldAndreas Lüttringhaus-HenkelJürgen KleinStephan Behle
    • Gregor ArnoldAndreas Lüttringhaus-HenkelJürgen KleinStephan Behle
    • B05B13/06
    • F16L39/04C23C16/045C23C16/54
    • The invention relates to an apparatus for coating hollow bodies, e.g. plastic drinks bottles. It is an object of the invention to provide an apparatus for treating workpieces which operates reliably and with low maintenance, can be flexibly adapted to the user's requirements or to the requirements of the desired process sequence, and which allows efficient evacuation. The apparatus according to the invention comprises at least one treatment device (101) for receiving at least one workpiece, a rotor on which the treatment device is arranged, a fluid rotary leadthrough for feeding at least one fluid onto the rotor and/or for discharging at least one fluid from the rotor, the fluid rotary leadthrough having a journal and a sleeve, which at least in sections are sealed off from one another, and the journal being arranged rotatably in the sleeve. The proposed radial arrangement is particularly unsusceptible to faults and entails little maintenance.
    • 本发明涉及一种用于涂覆中空体的设备,例如, 塑料饮料瓶。 本发明的一个目的是提供一种用于处理可靠且维护性低的工件的装置,可以灵活地适应用户的要求或符合所需工艺顺序的要求,并且允许有效的撤离。 根据本发明的装置包括至少一个用于接收至少一个工件的处理装置(101),设置有处理装置的转子,用于将至少一种流体供给到转子和/或用于排出的流体旋转引导件 至少一个来自所述转子的流体,所述流体旋转引导件具有轴颈和套筒,所述轴颈至少部分彼此密封,并且所述轴颈可旋转地布置在所述套筒中。 所提出的径向布置对于故障特别不能察觉,并且不需要维护。
    • 6. 发明授权
    • Method and device for producing extreme ultraviolet radiation and soft x-ray radiation
    • 用于产生极紫外辐射和软X射线辐射的方法和装置
    • US07126143B2
    • 2006-10-24
    • US10474121
    • 2002-03-23
    • Jürgen KleinWilli NeffStefan SeiwartKlaus BergmannJoseph PankertMichael Löken
    • Jürgen KleinWilli NeffStefan SeiwartKlaus BergmannJoseph PankertMichael Löken
    • G21K5/02
    • H05G2/003G03F7/70033
    • A method for generating extreme ultraviolet radiation and soft x-ray radiation with a gas discharge operated on the left branch of the Paschen curve, in particular, for EUV lithography,wherein a discharge chamber (10) of a predetermined gas pressure and two electrodes (11, 12) are used, wherein the electrodes have an opening (14, 15), respectively, positioned on the same symmetry axis (13) and, in the course of a voltage increase (16) upon reaching a predetermined ignition voltage (Uz), generate a plasma (17) located in the area between their openings (14, 15), which plasma is a source of the radiation (17′) to be generated, wherein an ignition of the plasma (17) is realized by affecting the gas pressure and/or by triggering, and wherein, with the ignition of the plasma (17), an energy storage device supplies by means of the electrodes (11, 12) stored energy into the plasma (17), characterized in that the ignition of the plasma (17) is realized by using a predetermined ignition delay (18).
    • 一种用于在帕邢斯曲线的左分支上操作的气体放电产生极紫外辐射和软X射线辐射的方法,特别是用于EUV光刻,其中具有预定气体压力的放电室(10)和两个电极 11,12),其中电极分别具有位于同一对称轴线(13)上的开口(14,15),并且在达到预定点火电压(U)时在电压增加(16)的过程中 产生位于其开口(14,15)之间的区域中的等离子体(17),该等离子体是要产生的辐射源(17'),其中点火 通过影响气体压力和/或通过触发实现等离子体(17),并且其中,通过等离子体(17)的点火,能量存储装置通过电极(11,12)将储存的能量供应到等离子体 (17),其特征在于,通过以下方式实现等离子体(17)的点火 使用预定的点火延迟(18)。