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    • 2. 发明授权
    • Safety switch for a safety circuit
    • 安全开关用于安全电路
    • US07656629B2
    • 2010-02-02
    • US11581039
    • 2006-10-13
    • Jürgen PullmannRoland Rupp
    • Jürgen PullmannRoland Rupp
    • H02H7/00
    • H01H47/002H01H47/004H03K17/965
    • A safety switch for safety circuit arrangement has a control part for processing an input signal and at least one switching element with at least one active and one inactive switching state. The control part controls the switching element in order to generate an output signal dependent on the input signal at an output. In addition, the safety switch has a diagnostic function for identifying a functional fault. The control part is configured to transfer the switching element into the inactive state when a functional fault is identified. According to one aspect of the invention, the control part is also configured to generate a data message at the output, which data message is dependent on the functional fault.
    • 用于安全电路装置的安全开关具有用于处理输入信号的控制部分和具有至少一个有效和无效切换状态的至少一个开关元件。 控制部分控制开关元件,以便根据输出端的输入信号产生输出信号。 另外,安全开关具有识别功能故障的诊断功能。 控制部分被配置为当识别功能故障时将开关元件传送到非活动状态。 根据本发明的一个方面,控制部分还被配置为在输出端生成数据消息,该数据消息取决于功能故障。
    • 10. 发明授权
    • Device for mounting a substrate and method for producing an insert for a susceptor
    • 用于安装基板的装置和用于制造用于基座的插入件的方法
    • US06740167B1
    • 2004-05-25
    • US09630154
    • 2000-07-31
    • Roland RuppArno Wiedenhofer
    • Roland RuppArno Wiedenhofer
    • H01L2100
    • H01L21/68757C30B25/02C30B25/12C30B29/36H01L21/6835H01L21/68771
    • A device for mounting a substrate includes a susceptor as a support for the substrate to be coated. The susceptor includes an insert whose surface is at least partly formed by a metal carbide layer of a predetermined thickness. The device for mounting the substrate eliminates a contamination of the substrate during processing, such as during production of an epitaxial layer on a wafer. A method for producing the insert includes the steps of producing a metallic preform, embedding the metallic preform in a carbon-containing powder, heating the metallic preform and the carbon-containing powder to an elevated temperature, hard processing the heat-treated preform and disposing the hard-processed preform on the susceptor as an insert.
    • 用于安装基板的装置包括作为待涂覆的基板的支撑体的基座。 基座包括一个插入件,其表面至少部分地由预定厚度的金属碳化物层形成。 用于安装衬底的装置消除了在处理期间衬底的污染,例如在晶片上制造外延层期间的污染。 一种用于制造刀片的方法包括以下步骤:制备金属预成型件,将金属预成型件嵌入含碳粉末中,将金属预成型件和含碳粉末加热至高温,对热处理预制件进行硬化处理 在基座上的硬处理预制件作为插入物。