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1. 发明授权

US08961688B2 Method and device for plasma treating workpieces 有权
标题翻译：等离子体处理工件的方法和装置
公开(公告)号：US08961688B2
公开(公告)日：2015-02-24
申请号：US10515610
申请日：2003-05-09
申请人： Michael Lizenberg , Frank Lewin , Hartwig Müller , Klaus Vogel , Gregor Arnold , Stephan Behle , Andreas Lüttringhaus-Henkel , Matthias Bicker , Jürgen Klein , Marten Walther
发明人： Michael Lizenberg , Frank Lewin , Hartwig Müller , Klaus Vogel , Gregor Arnold , Stephan Behle , Andreas Lüttringhaus-Henkel , Matthias Bicker , Jürgen Klein , Marten Walther
IPC分类号： C23C16/452 , C23C16/511 , C23C16/52 , C23C16/44 , B08B7/00 , B08B9/42 , B29C49/42 , B65D23/02 , B65G29/00 , C08J9/00 , C23C14/04 , C23C14/50 , C23C14/56 , C23C16/04 , C23C16/40 , C23C16/455 , C23C16/458 , C23C16/50 , C23C16/54 , H01J37/32 , B05D1/00 , B29C49/02 , B29K77/00
CPC分类号： C23C16/4409 , B05D1/62 , B08B7/00 , B08B9/426 , B29C49/421 , B29C2049/026 , B29C2049/027 , B29C2049/4221 , B29C2791/001 , B29K2077/00 , B29K2995/0067 , B65D23/02 , B65G29/00 , B65G2201/0244 , C08J9/0004 , C08J2300/14 , C23C14/046 , C23C14/505 , C23C14/56 , C23C16/045 , C23C16/401 , C23C16/455 , C23C16/458 , C23C16/50 , C23C16/511 , C23C16/54 , H01J37/32733
摘要： Disclosed are a method and a device for plasma treating workpieces (5). Said workpiece is inserted into a chamber (7) of a treatment station (3), which can be at least partly evacuated, and is positioned within the treatment station by means of a holding element. In order to simultaneously supply at least two chambers with at least one operating means, a flow of the operating means is branched at least once so as to form at least two partial flows (55).
摘要翻译：公开了一种等离子体处理工件（5）的方法和装置。所述工件被插入处理台（3）的腔室（7）中，其可被至少部分抽真空，并通过保持元件定位在处理站内。为了同时供给具有至少一个操作装置的至少两个室，操作装置的流动至少分支一次以形成至少两个部分流（55）。

2. 发明授权

US07699933B2 Method and device for the plasma treatment of workpieces 有权
标题翻译：用于等离子体处理工件的方法和装置
公开(公告)号：US07699933B2
公开(公告)日：2010-04-20
申请号：US10515609
申请日：2003-05-09
申请人： Michael Lizenberg , Frank Lewis , Hartwig Müller , Klaus Vogel , Gregor Arnold , Stephan Behle , Andreas Lüttringhaus-Henkel , Matthias Bicker , Jürgen Klein
发明人： Michael Lizenberg , Frank Lewis , Hartwig Müller , Klaus Vogel , Gregor Arnold , Stephan Behle , Andreas Lüttringhaus-Henkel , Matthias Bicker , Jürgen Klein
IPC分类号： C23C16/00 , B05D7/22
CPC分类号： C23C16/54 , B05D1/62 , B08B7/00 , B08B9/426 , B29C49/421 , B29C2049/4221 , B29C2791/001 , B65D23/02 , B65G29/00 , B65G2201/0244 , C23C14/046 , C23C14/505 , C23C16/045 , C23C16/401 , C23C16/458 , C23C16/511 , H01J37/32733
摘要： The invention relates to a method and a device which are used for the plasma treatment of work pieces. Said work piece is inserted into an at least partially evacuatable chamber of a treatment station (3) and the work piece is positioned inside the treatment station of retaining elements. At least one operating agent is at least partially impinged upon by a transporting device (44) which is displaced together with the treatment station on a closed and rotating transport path.
摘要翻译：本发明涉及一种用于等离子体处理工件的方法和装置。所述工件被插入到处理站（3）的至少部分可抽空的室中，并且工件位于保持元件的处理站内。至少一个操作剂至少部分地被传送装置（44）撞击，传送装置（44）与处理站一起在封闭和旋转的传送路径上移动。

3. 发明授权

US07074275B2 Apparatus for treating workpieces 有权
标题翻译：用于处理工件的装置
公开(公告)号：US07074275B2
公开(公告)日：2006-07-11
申请号：US10892530
申请日：2004-07-15
申请人： Gregor Arnold , Andreas Lüttringhaus-Henkel , Jürgen Klein , Stephan Behle
发明人： Gregor Arnold , Andreas Lüttringhaus-Henkel , Jürgen Klein , Stephan Behle
IPC分类号： B05B13/06
CPC分类号： F16L39/04 , C23C16/045 , C23C16/54
摘要： The invention relates to an apparatus for coating hollow bodies, e.g. plastic drinks bottles. It is an object of the invention to provide an apparatus for treating workpieces which operates reliably and with low maintenance, can be flexibly adapted to the user's requirements or to the requirements of the desired process sequence, and which allows efficient evacuation. The apparatus according to the invention comprises at least one treatment device (101) for receiving at least one workpiece, a rotor on which the treatment device is arranged, a fluid rotary leadthrough for feeding at least one fluid onto the rotor and/or for discharging at least one fluid from the rotor, the fluid rotary leadthrough having a journal and a sleeve, which at least in sections are sealed off from one another, and the journal being arranged rotatably in the sleeve. The proposed radial arrangement is particularly unsusceptible to faults and entails little maintenance.
摘要翻译：本发明涉及一种用于涂覆中空体的设备，例如，塑料饮料瓶。本发明的一个目的是提供一种用于处理可靠且维护性低的工件的装置，可以灵活地适应用户的要求或符合所需工艺顺序的要求，并且允许有效的撤离。根据本发明的装置包括至少一个用于接收至少一个工件的处理装置（101），设置有处理装置的转子，用于将至少一种流体供给到转子和/或用于排出的流体旋转引导件至少一个来自所述转子的流体，所述流体旋转引导件具有轴颈和套筒，所述轴颈至少部分彼此密封，并且所述轴颈可旋转地布置在所述套筒中。所提出的径向布置对于故障特别不能察觉，并且不需要维护。

4. 发明授权

US06958097B2 Device for holding and vacuum-sealing a container having an opening 失效
标题翻译：用于保持和真空密封具有开口的容器的装置
公开(公告)号：US06958097B2
公开(公告)日：2005-10-25
申请号：US10439090
申请日：2003-05-14
申请人： Andreas Lüttringhaus-Henkel , Matthias Bicker , Stephan Behle , Gregor Arnold
发明人： Andreas Lüttringhaus-Henkel , Matthias Bicker , Stephan Behle , Gregor Arnold
IPC分类号： B65D1/00 , B65B7/28 , B65D23/02 , B65D23/08 , C23C16/04 , C23C16/44 , C23C16/458 , C23C16/50 , C23C16/00
CPC分类号： C23C16/458 , B65B7/2835 , C23C16/045
摘要： A device for holding and vacuum-sealing a container as used in particular in the internal and/or external coating of containers. The device holds and vacuum-seals at least one container and has a sealing device for sealing the pouring opening in a defined end state also to comprise a holder with an introduction region, into which the wall region, which adjoins the pouring opening, together with the pouring opening, can be at least partially introduced, and a cage, which interacts with the holder and holds at least one clamping element in such a manner that, when force is applied to the cage in the direction in which the container is introduced into the defined end state, the clamping element can be guided out of a position in which it substantially releases the introduction region into a position in which it projects into the introduction region.
摘要翻译：用于容纳和真空密封容器的装置，特别是在容器的内部和/或外部涂层中使用的装置。该装置保持并真空密封至少一个容器，并且具有用于在限定的端部状态下密封倾倒开口的密封装置，还包括具有引入区域的保持器，邻近倾倒开口的壁区域与可以至少部分地引入倾倒开口，以及保持架，其与保持器相互作用并保持至少一个夹紧元件，使得当沿着容器被引入的方向上施加到保持架上时在限定的端部状态下，夹紧元件可以被引导到基本上将引入区域释放到其伸入引入区域的位置。

5. 发明授权

US07399500B2 Rapid process for the production of multilayer barrier layers 有权
标题翻译：用于生产多层阻挡层的快速制备方法
公开(公告)号：US07399500B2
公开(公告)日：2008-07-15
申请号：US10637779
申请日：2003-08-07
申请人： Matthias Bicker , Stephan Behle , Lutz Klippe , Andreas Lüttringhaus-Henkel , Gregor Arnold
发明人： Matthias Bicker , Stephan Behle , Lutz Klippe , Andreas Lüttringhaus-Henkel , Gregor Arnold
IPC分类号： C23C16/511 , H05H1/24
CPC分类号： B05D7/50 , B05D1/60 , B05D1/62 , B05D7/02 , C23C16/0272 , C23C16/045 , C23C16/30 , C23C16/401 , C23C16/515 , Y10T428/31504 , Y10T428/31681
摘要： A process for applying alternating layers by chemical vapor deposition comprises the process steps of depositing an adhesion-promoter layer on a substrate and applying a barrier layer. Alternating layers comprising organic and inorganic materials are deposited alternately, and in this process the coating time for application of the adhesion-promoter layer is between 0.05 s and 4.0 s and the coating time for application of the inorganic barrier layer is between 0.1 s and 6.0 s. A composite material is also produced using the process.
摘要翻译：通过化学气相沉积施加交替层的方法包括在衬底上沉积粘合促进剂层并施加阻挡层的工艺步骤。包含有机和无机材料的交替层交替沉积，并且在该过程中，涂覆粘合促进剂层的涂布时间为0.05s至4.0s，并且施加无机阻挡层的涂布时间为0.1s至6.0 s。还使用该方法生产复合材料。

6. 发明申请

US20060086320A1 Method and device for plasma treating workpieces 审中-公开
标题翻译：等离子体处理工件的方法和装置
公开(公告)号：US20060086320A1
公开(公告)日：2006-04-27
申请号：US10515606
申请日：2003-05-09
申请人： Michael Lizenberg , Frank Lewin , Hartwig Muller , Klaus Vogel , Gregor Arnold , Stephan Behle , Andreas Luttringhaus-Henkel , Matthias Bicker , Jurgen Klein
发明人： Michael Lizenberg , Frank Lewin , Hartwig Muller , Klaus Vogel , Gregor Arnold , Stephan Behle , Andreas Luttringhaus-Henkel , Matthias Bicker , Jurgen Klein
IPC分类号： C23C16/00 , B05D7/22
CPC分类号： C23C16/4409 , B05D1/62 , B08B7/00 , B08B9/426 , B29C49/421 , B29C2049/4221 , B29C2791/001 , B65D23/02 , B65G29/00 , B65G2201/0244 , C08J9/0004 , C08J2300/14 , C23C14/046 , C23C14/505 , C23C14/56 , C23C16/045 , C23C16/401 , C23C16/455 , C23C16/458 , C23C16/50 , C23C16/511 , C23C16/54 , H01J37/32733
摘要： Disclosed are a method and a device for plasma treating workpieces (5). Said workpiece is inserted into a chamber (4) of a treatment station (17), which can be at least partly evacuated, and at least one part (18) of the treatment station is moved relative to another part (27, 35) thereof in order to help manipulate the workpieces. The movement is carried out in such a way that a shell-shaped chamber wall (18) is positioned relative to a floor (35) of the chamber and relative to a chamber lid (27).
摘要翻译：公开了一种等离子体处理工件（5）的方法和装置。所述工件插入处理台（17）的腔室（4）中，所述腔室可以被至少部分抽真空，并且处理站的至少一个部分（18）相对于其另一部分（27,35）移动以帮助操纵工件。该运动以这样的方式进行，使得壳形室壁（18）相对于室的底板（35）相对于室盖（27）定位。

7. 发明申请

US20070148368A1 Apparatus for plasma treatment of dielectric bodies 审中-公开
标题翻译：电介质体等离子体处理装置
公开(公告)号：US20070148368A1
公开(公告)日：2007-06-28
申请号：US11527110
申请日：2006-09-25
申请人： Gregor Arnold , Stephan Behle , Matthias Bicker , Andreas Luttringhaus-Henkel
发明人： Gregor Arnold , Stephan Behle , Matthias Bicker , Andreas Luttringhaus-Henkel
IPC分类号： C23C16/00 , H05H1/24
CPC分类号： H01L21/67745 , C23C16/045 , C23C16/509 , C23C16/54 , H01J37/32733
摘要： In order to allow a continuous production process for the plasma treatment of workpieces, an apparatus for plasma treatment of workpieces is provided which comprises a transport device and a plasma generating device which injects electromagnetic energy into an area of the apparatus during operation, in which the transport device carries the workpieces through the area continuously.
摘要翻译：为了允许用于工件的等离子体处理的连续制造工艺，提供了一种用于工件的等离子体处理的装置，其包括输送装置和等离子体产生装置，其在操作期间将电磁能注入到装置的区域中，其中运输装置通过该区域连续运送工件。

8. 发明授权

US07811384B2 Method and apparatus for treating substrates in a rotary installation 有权
标题翻译：用于在旋转装置中处理基板的方法和装置
公开(公告)号：US07811384B2
公开(公告)日：2010-10-12
申请号：US11148740
申请日：2005-06-09
申请人： Matthias Bicker , Stephan Behle , Andreas Lüettringhaus-Henkel , Gregor Arnold , Juergen Klein
发明人： Matthias Bicker , Stephan Behle , Andreas Lüettringhaus-Henkel , Gregor Arnold , Juergen Klein
IPC分类号： C23C16/00 , B05D7/22
CPC分类号： C23C16/045 , C23C16/0272 , C23C16/401 , C23C16/54
摘要： The invention relates to a method and an apparatus for the treatment of substrates, in particular for the coating of plastic containers on a rotary installation. A plurality of treatment devices are arranged on the rotor and pass through a plurality of process phases as a function of their angle position on the rotor. For at least one process phase, the angle position can be set variably as a function of the current rotational speed of the rotor.
摘要翻译：本发明涉及用于处理基材的方法和装置，特别是用于在旋转装置上涂覆塑料容器。多个处理装置设置在转子上并且作为它们在转子上的角度位置的函数通过多个处理阶段。对于至少一个处理阶段，角位置可以根据转子的当前转速可变地设定。

9. 发明申请

US20090071399A2 APPARATUS FOR TREATING WORKPIECES 审中-公开
标题翻译：用于处理工作的装置
公开(公告)号：US20090071399A2
公开(公告)日：2009-03-19
申请号：US11417967
申请日：2006-05-04
申请人： Gregor Arnold , Andreas Luettringhaus-Henkel , Juergen Klein , Stephan Behle
发明人： Gregor Arnold , Andreas Luettringhaus-Henkel , Juergen Klein , Stephan Behle
IPC分类号： B05B13/06
CPC分类号： F16L39/04 , C23C16/045 , C23C16/54
摘要： The invention relates to a fluid rotary leadthrough having a journal and a sleeve. The sleeve and the journal are sealed off with respect to one another. The journal and the sleeve each have a line connection. The line connections, at least from time to time, are connected to one another via a fluid passage so that a flow of fluid through the fluid rotary leadthrough is made possible. The journal is arranged rotatably in the sleeve.
摘要翻译：本发明涉及具有轴颈和套筒的流体旋转引导件。袖子和杂志相对于彼此密封。日志和袖子各有一条线路连接。至少有时线路连接通过流体通道相互连接，使流体通过流体旋转引线的流动成为可能。轴颈可旋转地布置在套筒中。

10. 发明申请

US20060150909A1 Multi-place coating apparatus and process for plasma coating 有权
标题翻译：多层涂装设备及等离子涂层工艺
公开(公告)号：US20060150909A1
公开(公告)日：2006-07-13
申请号：US10515084
申请日：2003-05-26
申请人： Stephan Behle , Andreas Luttringhaushenkel , Gregor Arnold , Mathias Bicker , Marten Walther
发明人： Stephan Behle , Andreas Luttringhaushenkel , Gregor Arnold , Mathias Bicker , Marten Walther
IPC分类号： C23C16/00
CPC分类号： C23C16/4409 , B05D1/62 , B08B7/00 , B08B9/426 , B29C49/421 , B29C2049/4221 , B29C2791/001 , B65D23/02 , B65G29/00 , B65G2201/0244 , C03C17/005 , C08J9/0004 , C08J2300/14 , C23C14/046 , C23C14/505 , C23C14/56 , C23C16/045 , C23C16/401 , C23C16/4412 , C23C16/455 , C23C16/458 , C23C16/50 , C23C16/511 , C23C16/54 , H01J37/32733
摘要： A coating apparatus is provided for simplifying the introduction and removal of workpieces into and from a reactor for plasma coating and to increase the throughput. The coating apparatus has a reactor with a moveable sleeve part and a base element, at least one sealed coating chamber being defined between sleeve part and base element when the latter two parts are fitted onto one another. The coating apparatus also has a device for introducing electromagnetic energy into the at least one coating chamber. The reactor has at least two coating places.
摘要翻译：提供了一种涂布装置，用于简化进入和离开用于等离子体涂覆的反应器的工件的引入和移除并提高生产量。涂覆装置具有具有可移动套筒部分和基部元件的反应器，当后两个部件彼此装配时，至少一个密封涂覆室限定在套筒部分和基部元件之间。该涂覆装置还具有用于将电磁能引入到至少一个涂覆室中的装置。反应器至少有两个涂层位置。

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