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    • 3. 发明申请
    • SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF
    • 半导体器件及其制造方法
    • US20090230431A1
    • 2009-09-17
    • US12400376
    • 2009-03-09
    • Keiichi MURAYAMAAkiyoshi TAMURAHirotaka MIYAMOTOKenichi MIYAJIMA
    • Keiichi MURAYAMAAkiyoshi TAMURAHirotaka MIYAMOTOKenichi MIYAJIMA
    • H01L27/06H01L21/331
    • H01L27/0623H01L21/8248H01L27/0605H01L29/7371H01L29/802
    • The present invention has as an objective to provide: a semiconductor device to satisfy both of the trade-off characteristic advantages of the HBT; and the HFET and a manufacturing method thereof. The semiconductor device in the present invention is an HBT and HFET integrated circuit. The HBT includes a sub-collector layer, a GaAs collector layer, a GaAs base layer, and an InGaP emitter layer which are sequentially stacked. The sub-collector layer includes a GaAs external sub-collector region, and a GaAs internal sub-collector region disposed on the GaAs external sub-collector region. A mesa-shaped collector part and a collector electrode are separately formed on the GaAs external sub-collector region. The HFET includes a GaAs cap layer, a source electrode, and a drain electrode, the GaAs cap layer including portion of the GaAs external sub-collector region, and the source electrode and the drain electrode being formed on the GaAs cap layer.
    • 本发明的目的是提供一种半导体装置,以满足HBT的两个折衷特征优点; 和HFET及其制造方法。 本发明的半导体器件是HBT和HFET集成电路。 HBT包括依次层叠的副集电极层,GaAs集电极层,GaAs基极层和InGaP发射极层。 子集电极层包括GaAs外部副集电极区域和设置在GaAs外部子集电极区域上的GaAs内部子集电极区域。 在GaAs外部副集电极区域上分别形成台状集电体部和集电极。 HFET包括GaAs覆盖层,源电极和漏电极,GaAs覆盖层包括GaAs外部副集电极区域的一部分,源电极和漏电极形成在GaAs覆盖层上。
    • 4. 发明授权
    • Semiconductor element and method for fabricating the same
    • 半导体元件及其制造方法
    • US07176098B2
    • 2007-02-13
    • US11062851
    • 2005-02-23
    • Keisuke KojimaToshiharu TanboKeiichi Murayama
    • Keisuke KojimaToshiharu TanboKeiichi Murayama
    • H01L21/331H01L21/8222
    • H01L29/7371H01L29/0817H01L29/66318
    • A heterojunction bipolar transistor comprises a collector layer, a base layer formed on the collector layer and an emitter layer formed on the base layer. The emitter layer includes a first semiconductor layer covering the entire top surface of the base layer and a second semiconductor layer formed on a predetermined part of the first semiconductor layer. An inactivated region is formed, by ion implantation, in a region of the collector layer located below the base layer except for a part thereof corresponding to the second semiconductor layer. The edge of the inactivated region is located away from the edge of the second semiconductor layer, and a region of the first semiconductor layer between the edge of the inactivated region and the edge of the second semiconductor layer is depleted.
    • 异质结双极晶体管包括集电极层,形成在集电极层上的基极层和形成在基极层上的发射极层。 发射极层包括覆盖基底层的整个顶表面的第一半导体层和形成在第一半导体层的预定部分上的第二半导体层。 通过离子注入在位于基底层下方的除了与第二半导体层相对应的部分之外的集电极层的区域中形成钝化区域。 钝化区域的边缘位于远离第二半导体层的边缘的位置,并且在非活化区域的边缘和第二半导体层的边缘之间的第一半导体层的区域被耗尽。
    • 6. 发明申请
    • Semiconductor device
    • 半导体器件
    • US20050145884A1
    • 2005-07-07
    • US10902120
    • 2004-07-30
    • Masanobu NogomeAkiyoshi TamuraKeiichi Murayama
    • Masanobu NogomeAkiyoshi TamuraKeiichi Murayama
    • H01L21/331H01L29/737H01L29/739
    • H01L29/7371H01L29/0821
    • It is the object of the present invention to provide a semiconductor device having an improved breakdown voltage on high power output, the semiconductor device comprising a n-type GaAs subcollector layer 101, a n-type GaAs intermediate collector layer 102 formed between a collector layer 103 and the subcollector layer 101, the n-type GaAs collector layer 103, a p-type GaAs base layer 104, a n-type InGaP second emitter layer 105, a n-type GaAs first emitter layer 106, and a n-type InGaAs emitter contact layer 107, and a concentration of impurities in the intermediate collector layer 102 is higher than a concentration of impurities in the collector layer 103 and is lower than a concentration of impurities in the subcollector layer 101.
    • 本发明的目的是提供一种在高功率输出上具有改进的击穿电压的半导体器件,该半导体器件包括n型GaAs子集电极层101,n型GaAs中间集电极层102,其形成在集电极层 103和子集电极层101,n型GaAs集电极层103,p型GaAs基极层104,n型InGaP第二发射极层105,n型GaAs第一发射极层106和n型 InGaAs发射极接触层107,并且中间集电极层102中的杂质浓度高于集电极层103中的杂质浓度,并且低于子集电极层101中的杂质浓度。
    • 8. 发明授权
    • Semiconductor device having a hetero-junction bipolar transistor and manufacturing method thereof
    • 具有异质结双极晶体管的半导体器件及其制造方法
    • US07989845B2
    • 2011-08-02
    • US12126395
    • 2008-05-23
    • Keiichi MurayamaAkiyoshi TamuraHirotaka MiyamotoKenichi Miyajima
    • Keiichi MurayamaAkiyoshi TamuraHirotaka MiyamotoKenichi Miyajima
    • H01L31/0328
    • H01L27/0605H01L21/8249H01L21/8252H01L27/0623
    • The object of the present invention is to provide a semiconductor device and the manufacturing method thereof which are capable of preventing decrease in the collector breakdown voltage and reducing the collector resistance. The semiconductor device according to the present invention includes: a HBT formed on a first region of a semiconductor substrate; and an HFET formed on a second region of the semiconductor substrate, wherein the HBT includes: an emitter layer of a first conductivity; a base layer of a second conductivity that has a band gap smaller than that of the emitter layer; a collector layer of the first conductivity or a non-doped collector layer; and a sub-collector layer of the first conductivity which are formed sequentially on the first region, and the HFET includes an electron donor layer including a part of the emitter layer, and a channel layer formed under the electron donor layer.
    • 本发明的目的是提供一种能够防止集电极击穿电压降低并且集电极电阻降低的半导体器件及其制造方法。 根据本发明的半导体器件包括:形成在半导体衬底的第一区域上的HBT; 以及形成在所述半导体衬底的第二区域上的HFET,其中所述HBT包括:具有第一导电性的发射极层; 具有比发射极层的带隙小的带隙的第二导电性的基底层; 第一电导率的集电极层或非掺杂集电极层; 以及在第一区域上依次形成的第一导电性的副集电极层,并且HFET包括包含发射极层的一部分的电子供体层和形成在电子供体层下面的沟道层。