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    • 1. 发明授权
    • Method of and system for analyzing cells of a memory device
    • 用于分析存储器件单元的方法和系统
    • US07003432B2
    • 2006-02-21
    • US10749460
    • 2003-12-30
    • Joerg WohlfahrtThomas HladschikJens HolzhaeuserDieter Rathei
    • Joerg WohlfahrtThomas HladschikJens HolzhaeuserDieter Rathei
    • G01R31/00G06F19/00
    • G11C29/56G11C29/56008G11C2029/5604
    • A method of analyzing cells of a memory device is disclosed. Generally, a plurality of fail signatures is generated, wherein each fail signature is associated with a type of failure. Voltages according to a plurality of test patterns are applied to nodes of a cell of the memory device. Fail data of the cell for the plurality of patterns is then analyzed, and a fail signature of the cell is determined. A type of failure of the cell based upon the plurality of fail signatures is then determined. A system for analyzing cells of a memory device is also disclosed. The system generally includes a plurality of probes applying different voltages to a cell of the memory device. A control circuit varies the voltages applied to the cell, and compares the failures of the cell as the test voltage applied to the cell is varied to an artificial bit map. Finally, an output device generates an output indicating a type of failure of the cell.
    • 公开了一种分析存储器件的单元的方法。 通常,生成多个故障签名,其中每个故障签名与一种故障相关联。 根据多个测试图案的电压被施加到存储器件的单元的节点。 然后分析多个模式的单元的失败数据,并且确定单元的失败签名。 然后确定基于多个失败签名的小区的一种故障。 还公开了一种用于分析存储器件单元的系统。 该系统通常包括向存储器件的单元施加不同电压的多个探针。 控制电路改变施加到单元的电压,并且当施加到单元的测试电压变化到人造位图时,比较单元的故障。 最后,输出设备生成指示单元故障类型的输出。
    • 6. 发明授权
    • Uniform recess depth of recessed resist layers in trench structure
    • 沟槽结构中凹陷抗蚀剂层的均匀凹陷深度
    • US06482716B1
    • 2002-11-19
    • US09481769
    • 2000-01-11
    • Joerg Wohlfahrt
    • Joerg Wohlfahrt
    • H01L2176
    • H01L27/10861H01L21/76229H01L21/763
    • A method for forming uniform-depth recesses across areas of different trench density, in accordance with the present invention, includes providing a substrate having trenches formed therein. The substrate includes regions of different trench density. The trenches are filled with a first filler material, and the first filler material is removed from a surface of the substrate. A second filler material is formed over the surface of the substrate such that the depth of the second filler material is substantially uniform across the regions of different trench density. Recesses are formed in the trenches such that the recess depth below the surface of the substrate is substantially uniform across the regions
    • 根据本发明,用于在不同沟槽密度的区域上形成均匀深度凹槽的方法包括提供其中形成有沟槽的衬底。 衬底包括不同沟槽密度的区域。 沟槽填充有第一填充材料,并且从衬底的表面去除第一填充材料。 在衬底的表面上形成第二填充材料,使得第二填充材料的深度在不同沟槽密度的区域上基本均匀。 凹槽形成在沟槽中,使得衬底表面下方的凹陷深度在该区域上基本均匀
    • 7. 发明授权
    • Memory cell signal window testing apparatus
    • 存储单元信号窗口测试仪
    • US06999887B2
    • 2006-02-14
    • US10636369
    • 2003-08-06
    • Norbert RehmHans-Oliver JoachimMichael JacobJoerg Wohlfahrt
    • Norbert RehmHans-Oliver JoachimMichael JacobJoerg Wohlfahrt
    • G06F3/06
    • G11C29/50G11C11/22G11C2029/5004
    • A memory cell signal window testing apparatus 101 and method for testing the signal window of a memory are disclosed. First data is written to a memory cell during a write cycle. A low cell signal is read from the memory cell during a first read cycle. A comparison is made between the low signal and a low reference signal. The result of the comparison is stored in a first storage register. Second data is then written to the memory cell during a write cycle. A high cell signal is read from the memory cell during a second read cycle. A comparison is made between the high cell signal and a high reference signal. The result of the comparison is stored in a second storage register. The results in the first and second storage registers are compared and an output is provided indicating that the memory cell has failed the test if the comparison shows that both the low cell signal is higher than the low reference signal and the high cell signal is lower than the high reference signal.
    • 公开了一种用于测试存储器的信号窗口的存储单元信号窗口测试装置101和方法。 在写入周期期间,首先将数据写入存储单元。 在第一读取周期期间从存储器单元读取低电平信号。 比较低信号和低参考信号。 比较结果存储在第一存储寄存器中。 在写入周期期间,第二个数据被写入存储单元。 在第二读取周期期间,从存储器单元读取高电平信号。 在高电平信号和高参考信号之间进行比较。 比较结果存储在第二存储寄存器中。 比较第一和第二存储寄存器中的结果,并且提供指示如果比较显示低电平信号低于低参考信号并且高电平信号低于的信号,则存储器单元未通过测试的输出 高参考信号。
    • 8. 发明授权
    • 2T2C signal margin test mode using a defined charge and discharge of BL and /BL
    • 2T2C信号余量测试模式使用BL和/ BL定义充放电
    • US06826099B2
    • 2004-11-30
    • US10301529
    • 2002-11-20
    • Hans-Oliver JoachimThomas RoehrJoerg Wohlfahrt
    • Hans-Oliver JoachimThomas RoehrJoerg Wohlfahrt
    • G11C700
    • G11C29/50G11C11/22
    • A semiconductor memory test mode configuration includes a first capacitor for storing digital data. The first capacitor connects a cell plate line to a first bit line through a first select transistor which is activated through a connection to a word line. A second capacitor for storing digital data connects the cell plate line to a second bit line through a second select transistor which is also activated through a connection to the word line. A sense amplifier is connected to the first and second bit lines for measuring a differential read signal on the first and second bit lines. A constant current mover, for example a constant current sink or source, is connected to the first bit line through a third transistor for changing the amount of charge on the first bit line when the third transistor is turned on to reduce the differential read signal.
    • 半导体存储器测试模式配置包括用于存储数字数据的第一电容器。 第一电容器通过第一选择晶体管将单元板线连接到第一位线,该第一选择晶体管通过与字线的连接被激活。 用于存储数字数据的第二电容器通过第二选择晶体管将单元板线连接到第二位线,第二选择晶体管也通过与字线的连接而被激活。 感测放大器连接到第一和第二位线,用于测量第一和第二位线上的差分读取信号。 恒定电流移动器,例如恒定电流吸收器或源极,通过第三晶体管连接到第一位线,用于当第三晶体管导通时改变第一位线上的电荷量,以减小差分读取信号。
    • 9. 发明授权
    • 2T2C signal margin test mode using resistive element
    • 2T2C信号余量测试模式使用电阻元件
    • US06731554B1
    • 2004-05-04
    • US10301546
    • 2002-11-20
    • Michael JacobJoerg WohlfahrtThomas RoehrNobert Rehm
    • Michael JacobJoerg WohlfahrtThomas RoehrNobert Rehm
    • G11C2900
    • G11C29/50G11C11/22
    • The present invention provides a test mode section for facilitating a worst case product test sequence for signal margin to ensure full product functionality over the entire component lifetime taking all aging effects into account. A semiconductor memory test mode configuration includes a first capacitor for storing digital data connecting a cell plate line to a first bit line through a first select transistor. The first select transistor is activated through a connection to a word line. A second capacitor stores digital data and connects the cell plate line to a second bit line through a second select transistor. The second select transistor is activated through a connection to the word line. A sense amplifier is connected to the first and second bit lines for measuring a differential read signal on the first and second bit lines A resistor is connected to one or both of the bit lines through transistors for adding or reducing the amount of charge on the first bit line when the third transistor is turned on to reduce the differential read signal.
    • 本发明提供了一种测试模式部分,用于促进针对信号余量的最坏情况产品测试序列,以确保在整个组件寿命期间的全部产品功能,同时考虑所有的老化效应。 半导体存储器测试模式配置包括:第一电容器,用于存储通过第一选择晶体管将单元板线连接到第一位线的数字数据。 第一个选择晶体管通过与字线的连接来激活。 第二电容器存储数字数据,并通过第二选择晶体管将单元板线连接到第二位线。 通过与字线的连接激活第二选择晶体管。 读出放大器连接到第一和第二位线,用于测量第一和第二位线上的差分读取信号。电阻器通过晶体管连接到一个或两个位线,用于增加或减少第一和第二位线上的电荷量 当第三晶体管导通时减小差分读取信号的位线。