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1. 发明授权

US5430548A Method and apparatus for pattern detection 失效
标题翻译：模式检测方法和装置
公开(公告)号：US5430548A
公开(公告)日：1995-07-04
申请号：US12468
申请日：1993-02-02
申请人： Takashi Hiroi , Hitoshi Kubota , Shunji Maeda , Hiroshi Makihira , Mitsunobu Isobe
发明人： Takashi Hiroi , Hitoshi Kubota , Shunji Maeda , Hiroshi Makihira , Mitsunobu Isobe
IPC分类号： G01B11/24 , G01B11/245 , G01N21/88 , G01N21/956 , G03F1/84 , G06K9/64 , G06T1/00 , H01L21/027 , H01L21/30 , G01N21/01 , G01N21/15
CPC分类号： G01N21/95607
摘要： The inventive pattern detection method and apparatus produce, from an optical image of a pattern in attention and an optical image of a pattern which should be identical to the pattern in attention, an optical image by merging the images, with a relative phase shift being imposed, and pattern information is detected or observed in the merged optical image or a signal produced from the optical image through the conversion with an opto-electric transducer means.
摘要翻译：本发明的图案检测方法和装置从注意图案的光学图像和应注意的图案的图案的光学图像产生通过合并图像的光学图像，并施加相对相移，并且通过使用光电换能器装置的转换，在合并的光学图像中检测或观察图案信息或从光学图像产生的信号。

2. 发明申请

US20070131877A9 Pattern inspection method and system therefor 审中-公开
标题翻译：图案检验方法及系统
公开(公告)号：US20070131877A9
公开(公告)日：2007-06-14
申请号：US10062666
申请日：2002-02-05
申请人： Takashi Hiroi , Masahiro Watanabe , Asahiro Kuni , Maki Tanaka , Munenori Fukunishi , Hiroshi Miyai , Yasuhiko Nara , Mitsunobu Isobe
发明人： Takashi Hiroi , Masahiro Watanabe , Asahiro Kuni , Maki Tanaka , Munenori Fukunishi , Hiroshi Miyai , Yasuhiko Nara , Mitsunobu Isobe
IPC分类号： G01N23/00
CPC分类号： G06K9/6211 , G01N23/22 , G06K9/033 , G06K2209/19 , G06T7/001 , G06T2207/30148
摘要： Conventionally, defect data outputted by an inspection system comprised only characteristic quantitative data, such as coordinate data, area, and projected length, and only the coordinate data for moving to a defect location could be utilized effectively. By contrast, the present invention, by using image data in addition to characteristic quantitative data as the defect data for an inspection system, enables the retrieval of image data via an outside results confirmation system. Further, in the case of defect data of a plurality of substrates, it is enabled to display a defect image during inspection by the fact that similar defects are retrieved via images and retrieval results are displayed as trends makes it possible to display a defect image during inspection by searching similar defects on images and displaying them as a trend, designating a substrate on the trend, thereby displaying the defect map thereof and designating a defect on the defect map.
摘要翻译：通常，由检查系统输出的缺陷数据仅包括诸如坐标数据，面积和投影长度的特征定量数据，并且仅有用于移动到缺陷位置的坐标数据可以被有效地利用。相比之下，本发明通过使用除了特征定量数据之外的图像数据作为检查系统的缺陷数据，能够经由外部结果确认系统检索图像数据。此外，在多个基板的缺陷数据的情况下，能够通过图像检索相似缺陷的事实在检查期间显示缺陷图像，并且检索结果被显示为趋势，使得可以在显示缺陷图像期间显示缺陷图像通过搜索图像上的类似缺陷并将其显示为趋势，指定趋势上的基板，从而显示其缺陷图并指定缺陷图上的缺陷来进行检查。

3. 发明授权

US07049587B2 Apparatus for inspecting a specimen 有权
标题翻译：用于检查样本的装置
公开(公告)号：US07049587B2
公开(公告)日：2006-05-23
申请号：US10079428
申请日：2002-02-22
申请人： Takashi Hiroi , Masahiro Watanabe , Asahiro Kuni , Maki Tanaka , Munenori Fukunishi , Hiroshi Miyai , Yasuhiko Nara , Mitsunobu Isobe
发明人： Takashi Hiroi , Masahiro Watanabe , Asahiro Kuni , Maki Tanaka , Munenori Fukunishi , Hiroshi Miyai , Yasuhiko Nara , Mitsunobu Isobe
IPC分类号： G01N23/00 , G21K7/00
CPC分类号： G06K9/6211 , G01N23/22 , G06K9/033 , G06K2209/19 , G06T7/001 , G06T2207/30148
摘要： Conventionally, defect data outputted by an inspection system comprised only characteristic quantitative data, such as coordinate data, area, and projected length, and only the coordinate data for moving to a defect location could be utilized effectively. By contrast, by using image data in addition to characteristic quantitative data as the defect data for an inspection system, the retrieval of image data via an outside results confirmation system is made possible. Further, for defect data of a plurality of substrates, it is possible to display a defect image during inspection by the fact that similar defects are retrieved via images and retrieval results are displayed as trends, which makes it possible to display a defect image during inspection by searching similar defects on images and displaying them as a trend, and designating a substrate on the trend, thereby displaying the defect map thereof and designating a defect on the defect map.
摘要翻译：通常，由检查系统输出的缺陷数据仅包括诸如坐标数据，面积和投影长度的特征定量数据，并且仅有用于移动到缺陷位置的坐标数据可以被有效地利用。相反，通过使用特征定量数据以外的图像数据作为检查系统的缺陷数据，可以经由外部结果确认系统检索图像数据。此外，对于多个基板的缺陷数据，可以通过图像检索类似缺陷的事实在检查期间显示缺陷图像，并且检索结果被显示为趋势，这使得可以在检查期间显示缺陷图像通过搜索图像上的类似缺陷并将其显示为趋势，并在趋势上指定基底，从而显示其缺陷图并指定缺陷图上的缺陷。

4. 发明授权

US06566671B1 Microscopic defect inspection apparatus and method thereof, as well as positional shift calculation circuit therefor 有权
标题翻译：显微缺陷检查装置及其方法以及位置偏移计算电路
公开(公告)号：US06566671B1
公开(公告)日：2003-05-20
申请号：US09593955
申请日：2000-06-15
申请人： Atsushi Yoshida , Shunji Maeda , Takafumi Okabe , Hisashi Mizumoto , Mitsunobu Isobe
发明人： Atsushi Yoshida , Shunji Maeda , Takafumi Okabe , Hisashi Mizumoto , Mitsunobu Isobe
IPC分类号： G01V800
CPC分类号： G01N21/95607
摘要： An apparatus and/or a method for inspecting fine defects on a substrate having minute patterns formed thereon as a target of inspection by detecting an image thereof with fine pixel size, wherein high speed processing is needed for position alignment over a wide region which is expanded equivalently therewith while obtaining a video processing circuit having a small size, wherein a video signal equal to or less than 0.2 &mgr;m in pixel size is obtained by using an optical system of DUV (far-ultraviolet) light or a video detection system of an electron beam. For instance, a search region for detecting position gaps is set at ±4 pixels, while on one substrate are mounted a plurality of video processing circuits, each being constructed with an LSI which can perform processing of k channels, thereby realizing a high-speed video processing portion having a small size.
摘要翻译：一种用于通过以精细像素尺寸检测其图像来检查其上形成有微小图案的基板上的细小缺陷的装置和/或方法，其中检测其精细像素尺寸的图像，其中在扩展的广泛区域上需要高速处理以进行位置对准同时获得具有小尺寸的视频处理电路，其中通过使用DUV（远紫外）光的光学系统或电子的视频检测系统获得像素尺寸等于或小于0.2μm的视频信号光束。例如，用于检测位置间隙的搜索区域被设置为±4像素，而在一个基板上安装有多个视频处理电路，每个视频处理电路由能够执行k个通道的处理的LSI构成，从而实现高速视频处理部分具有小尺寸。

5. 发明申请

US20080002876A1 METHOD AND ITS APPARATUS FOR INSPECTING A PATTERN 审中-公开
标题翻译：用于检查图案的方法及其装置
公开(公告)号：US20080002876A1
公开(公告)日：2008-01-03
申请号：US11853500
申请日：2007-09-11
申请人： Takashi Hiroi , Masahiro Watanabe , Maki Tanaka , Asahiro Kuni , Chie Shishido , Hiroshi Miyai , Yasuhiko Nara , Mitsunobu Isobe
发明人： Takashi Hiroi , Masahiro Watanabe , Maki Tanaka , Asahiro Kuni , Chie Shishido , Hiroshi Miyai , Yasuhiko Nara , Mitsunobu Isobe
IPC分类号： G06K9/00
CPC分类号： G06T7/001 , G06T2207/30148
摘要： In a pattern inspecting apparatus, images of places which can be expected to be the same pattern are compared with one another. However, a comparison of images obtained by different stage scans and the occurrence of a place capable of being inspected only once lead to a deterioration in the performance of detecting various error defects and an area incapable of being inspected, respectively. For solving this problem, defects detected in a high sensitivity condition are regarded as defect candidates and a critical threshold value, used as a boundary to detect a smaller value as a defect, of a defect candidate portion is obtained by an image processing circuit or an image of the defect candidate portion is obtained by processing with software. Further, the critical threshold value thus obtained is compared with plural threshold values, thereby permitting plural inspection results to be obtained in a single inspection.
摘要翻译：在图案检查装置中，将可以预期相同图案的位置的图像彼此进行比较。然而，通过不同阶段扫描获得的图像和仅能够被检查的位置的发生的比较分别导致检测各种错误缺陷的性能和不能被检查的区域的劣化。为了解决这个问题，在高灵敏度条件下检测到的缺陷被认为是缺陷候选，并且通过图像处理电路或图像处理电路获得用作检测缺陷候选部分的较小值作为缺陷的边界的临界阈值通过软件处理获得缺陷候选部分的图像。此外，将如此获得的临界阈值与多个阈值进行比较，从而允许在单次检查中获得多个检查结果。

6. 发明授权

US07269280B2 Method and its apparatus for inspecting a pattern 有权
标题翻译：检查图案的方法及其装置
公开(公告)号：US07269280B2
公开(公告)日：2007-09-11
申请号：US10062632
申请日：2002-02-05
申请人： Takashi Hiroi , Masahiro Watanabe , Maki Tanaka , Asahiro Kuni , Chie Shishido , Hiroshi Miyai , Yasuhiko Nara , Mitsunobu Isobe
发明人： Takashi Hiroi , Masahiro Watanabe , Maki Tanaka , Asahiro Kuni , Chie Shishido , Hiroshi Miyai , Yasuhiko Nara , Mitsunobu Isobe
IPC分类号： G06K9/00
CPC分类号： G06T7/001 , G06T2207/30148
摘要： In a pattern inspecting apparatus, images of places which can be expected to be the same pattern are compared with one another. However, a comparison of images obtained by different stage scans and the occurrence of a place capable of being inspected only once lead to a deterioration in the performance of detecting various error defects and an area incapable of being inspected, respectively. For solving this problem, defects detected in a high sensitivity condition are regarded as defect candidates and a critical threshold value, used as a boundary to detect a smaller value as a defect, of a defect candidate portion is obtained by an image processing circuit or an image of the defect candidate portion is obtained by processing with software. Further, the critical threshold value thus obtained is compared with plural threshold values, thereby permitting plural inspection results to be obtained in a single inspection.
摘要翻译：在图案检查装置中，将可以预期相同图案的位置的图像彼此进行比较。然而，通过不同阶段扫描获得的图像和仅能够被检查的位置的发生的比较分别导致检测各种错误缺陷的性能和不能被检查的区域的劣化。为了解决这个问题，在高灵敏度条件下检测到的缺陷被认为是缺陷候选，并且通过图像处理电路或图像处理电路获得用作检测缺陷候选部分的较小值作为缺陷的边界的临界阈值通过软件处理获得缺陷候选部分的图像。此外，将如此获得的临界阈值与多个阈值进行比较，从而允许在单次检查中获得多个检查结果。

7. 发明授权

US5125044A Image processing apparatus and method in which a plurality of access circuits can simultaneously perform access operations 失效
标题翻译：多路访问电路的图像处理装置和方法可以同时执行访问操作
公开(公告)号：US5125044A
公开(公告)日：1992-06-23
申请号：US647755
申请日：1991-01-30
申请人： Kouzou Nemoto , Minoru Makita , Mitsunobu Isobe , Kenzo Takeichi
发明人： Kouzou Nemoto , Minoru Makita , Mitsunobu Isobe , Kenzo Takeichi
IPC分类号： G06F13/18 , G06F12/00 , G06T1/60 , H04N5/222 , H04N5/262 , H04N5/268
CPC分类号： H04N5/268 , H04N5/222
摘要： An image processing apparatus which allows a plurality of access circuits to perform access operations simultaneously including a first access circuit for writing a video signal in digital form, obtained by A/D conversion, into an image memory, a plurality of process memories for storing necessary data, taken out from the video signals stored in the image memory, a plurality of second access circuits for accessing the image memory and the process memories, and performing specified data processing to obtain necessary data from the image memory, and a third access circuit having the same functions as the second access circuits and a function to control the operation of the first and second access circuits. Access switchover circuits are provided for each of the image memory and process memories, for switching over access to the memories to either the first, second or third access circuits.
摘要翻译：一种图像处理装置，其允许多个存取电路同时进行包括通过A / D转换获得的用于将通过A / D转换获得的数字形式的视频信号写入的第一存取电路的存取操作，用于存储必要的多个处理存储器从存储在图像存储器中的视频信号中取出的数据，用于访问图像存储器和处理存储器的多个第二存取电路，以及执行指定的数据处理以从图像存储器获取必要的数据;以及第三存取电路，与第二存取电路相同的功能以及控制第一和第二存取电路的操作的功能。为每个图像存储器和处理存储器提供存取切换电路，用于将对存储器的访问切换到第一，第二或第三存取电路。

8. 发明授权

US06831998B1 Inspection system for circuit patterns and a method thereof 失效
标题翻译：电路图案检查系统及其方法
公开(公告)号：US06831998B1
公开(公告)日：2004-12-14
申请号：US09598652
申请日：2000-06-22
申请人： Hiroya Koshishiba , Hideaki Doi , Mitsunobu Isobe , Kazushi Yoshimura , Haruomi Kobayashi , Chie Shishido
发明人： Hiroya Koshishiba , Hideaki Doi , Mitsunobu Isobe , Kazushi Yoshimura , Haruomi Kobayashi , Chie Shishido
IPC分类号： G06K900
CPC分类号： G06T7/0004 , G06K9/00973 , G06T2207/30141
摘要： In order to provide a high-speed, inexpensive inspection system that has a short development period, that is flexible, and that allow algorithms to be easily changed, a PC equipped with an image input feature is used to capture an image detected by a line image sensor, this detected image is transferred to a plurality of PCs connected by a LAN, and defects are detected using software processing on the plurality of PCs.
摘要翻译：为了提供具有较短开发周期，灵活性并且允许算法容易改变的高速，廉价的检查系统，配备有图像输入特征的PC用于捕获由线检测到的图像图像传感器将该检测图像传送到由LAN连接的多个PC，并且使用多个PC上的软件处理来检测缺陷。

9. 发明授权

US5018219A Object recognize apparatus 失效
标题翻译：物体识别装置
公开(公告)号：US5018219A
公开(公告)日：1991-05-21
申请号：US306397
申请日：1989-02-06
申请人： Kichie Matsuzaki , Mitsunobu Isobe , Kenzo Takeichi , Ryouichi Hisatomi , Masasi Kudou
发明人： Kichie Matsuzaki , Mitsunobu Isobe , Kenzo Takeichi , Ryouichi Hisatomi , Masasi Kudou
IPC分类号： G06T1/00 , G06K9/46 , G06K9/68 , G06T7/00
CPC分类号： G06K9/6253 , G06K9/46
摘要： An object recognize apparatus suitable for recognition of a complex object constituted with a plurality of elements. When specifying a recognition object, a plurality of elements constituting the finally required recognition object are respectively designated as recognition objects, and when specifying an upper-level recognition object, lower-level recognition objects thereof are designated. Furthermore, for each lower-level recognition object, geometric features necessary for the recognition are specified. In an analysis of image data, the lower-level recognition objects are first detected by use of the geometric features so as to next attain the upper-level recognition object based on results of the detection. As a result, a complex object existing at an arbitrary position can be judged and the position thereof is obtained.
摘要翻译：一种适于识别由多个元件构成的复杂物体的物体识别装置。当指定识别对象时，构成最终所需识别对象的多个元素分别被指定为识别对象，并且当指定上级识别对象时，指定其下级识别对象。此外，对于每个下级识别对象，指定用于识别所需的几何特征。在对图像数据的分析中，首先通过使用几何特征来检测下级识别对象，以便根据检测结果接下来获得上级识别对象。结果，可以判断存在于任意位置的复杂对象并获得其位置。

10. 发明授权

US5144683A Character recognition equipment 失效
标题翻译：字符识别设备
公开(公告)号：US5144683A
公开(公告)日：1992-09-01
申请号：US514608
申请日：1990-04-26
申请人： Hideaki Suzuki , Kichie Matsuzaki , Kazuo Kato , Mitsuo Oono , Kenzo Takeichi , Ryoichi Hisatomi , Mitsunobu Isobe , Shigeru Fujimori , Kouzou Nemoto
发明人： Hideaki Suzuki , Kichie Matsuzaki , Kazuo Kato , Mitsuo Oono , Kenzo Takeichi , Ryoichi Hisatomi , Mitsunobu Isobe , Shigeru Fujimori , Kouzou Nemoto
IPC分类号： G06K9/28 , G06K9/46 , G06K9/66 , G06K9/68
CPC分类号： G06K9/4647 , G06K9/66 , G06K2209/01
摘要： The present invention relates to a character recognition equipment which is capable of recognizing with high accuracy those characters that have poor contrast and produce variation in printing density such as characters printed on industrial products.The character recognition equipment according to the present invention is composed of an input unit group which processes in image in a plurality of window regions that are set on a character image, a feature unit group which performs calculation on values obtained by adding thresholds to the output values therefrom, and an output unit group which performs calculation on values obtained by multiplying output values from the feature unit group and adding the thresholds to the sum total thereof. Here, the thresholds and the weights can be adjusted automatically with an actual object image.

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